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1. 发明授权

US08461527B2 Scanning electron microscope and method for processing an image obtained by the scanning electron microscope 有权
标题翻译：扫描电子显微镜以及通过扫描电子显微镜获得的图像的处理方法
公开(公告)号：US08461527B2
公开(公告)日：2013-06-11
申请号：US13362536
申请日：2012-01-31
申请人： Kenji Nakahira , Toshifumi Honda , Atsushi Miyamoto
发明人： Kenji Nakahira , Toshifumi Honda , Atsushi Miyamoto
IPC分类号： G01N23/225
CPC分类号： G01N23/225 , G01N2223/401
摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.
摘要翻译：在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨率劣化因子作为劣化模式的目标来执行图像恢复，使得高可以在各种条件下获得分辨率的图像。在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类做出高精度。

2. 发明申请

US20080251719A1 SCANNING ELECTRON MICROSCOPE AND METHOD FOR PROCESSING AN IMAGE OBTAINED BY THE SCANNING ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜和扫描电子显微镜获得的图像的处理方法
公开(公告)号：US20080251719A1
公开(公告)日：2008-10-16
申请号：US12016290
申请日：2008-01-18
申请人： Kenji Nakahira , Toshifumi Honda , Atsushi Miyamoto
发明人： Kenji Nakahira , Toshifumi Honda , Atsushi Miyamoto
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , G01N2223/401
摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.
摘要翻译：在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨率劣化因子作为劣化模式的目标来执行图像恢复，使得高可以在各种条件下获得分辨率的图像。在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类做出高精度。

3. 发明授权

US08106357B2 Scanning electron microscope and method for processing an image obtained by the scanning electron microscope 有权
标题翻译：扫描电子显微镜以及通过扫描电子显微镜获得的图像的处理方法
公开(公告)号：US08106357B2
公开(公告)日：2012-01-31
申请号：US12016290
申请日：2008-01-18
申请人： Kenji Nakahira , Toshifumi Honda , Atsushi Miyamoto
发明人： Kenji Nakahira , Toshifumi Honda , Atsushi Miyamoto
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , G01N2223/401
摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.
摘要翻译：在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨力退化因子作为劣化模式的目标来执行图像恢复，使得高可以在各种条件下获得分辨率的图像。在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类做出高精度。

4. 发明申请

US20090266985A1 Scanning Type Charged Particle Beam Microscope and an Image Processing Method Using the Same 有权
标题翻译：扫描式带电粒子束显微镜及其图像处理方法
公开(公告)号：US20090266985A1
公开(公告)日：2009-10-29
申请号：US12414759
申请日：2009-03-31
申请人： Kenji Nakahira , Atsushi Miyamoto
发明人： Kenji Nakahira , Atsushi Miyamoto
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , G06T5/002 , G06T5/008 , G06T7/11 , G06T2207/10061 , H01J37/222 , H01J37/244 , H01J2237/221 , H01J2237/24495
摘要： Design data and sample characteristic information corresponding to individual areas on the design data are used to perform an image quality improvement operation to make appropriate improvements on image quality according to sample characteristic corresponding to the individual areas on the image, allowing a high speed area division on the image. Further, the use of a database that stores image information associated with the design data allows for an image quality improvement operation that automatically emphasizes portions of the image that greatly differ from past images of the similar design data.
摘要翻译：使用与设计数据上的各个区域相对应的设计数据和样本特征信息来执行图像质量改进操作，以根据对应于图像上的各个区域的样本特征对图像质量进行适当的改进，从而允许高速区域划分图片。此外，使用存储与设计数据相关联的图像信息的数据库允许自动强调与相似设计数据的过去图像大不相同的图像部分的图像质量改进操作。

5. 发明授权

US09460889B2 Charged particle microscope device and image capturing method 有权
标题翻译：带电粒子显微镜装置及摄像方法
公开(公告)号：US09460889B2
公开(公告)日：2016-10-04
申请号：US14110758
申请日：2012-04-11
申请人： Kenji Nakahira , Atsushi Miyamoto
发明人： Kenji Nakahira , Atsushi Miyamoto
IPC分类号： H01J37/00 , H01J37/26 , H01J37/244 , H01J37/28
CPC分类号： H01J37/26 , H01J37/244 , H01J37/28 , H01J2237/221 , H01J2237/24495 , H01J2237/2809
摘要： A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.
摘要翻译：使用带电粒子显微镜装置的标本图像捕获方法包括：第一图像获取步骤，其中将带电粒子显微镜中的检测器的增益设置为第一增益值，对样本进行带电粒子束扫描，获得第一个图像; 第二图像获取步骤，其中检测器的增益被设置为与第一增益值不同的第二增益值，对样本进行带电粒子束扫描，并获得第二图像; 以及其中使用第一增益值和第二增益值并且组合第一图像和第二图像的图像组合步骤。

6. 发明授权

US09341584B2 Charged-particle microscope device and method for inspecting sample using same 有权
标题翻译：带电粒子显微镜装置及使用其的检查样品的方法
公开(公告)号：US09341584B2
公开(公告)日：2016-05-17
申请号：US13379663
申请日：2010-06-18
申请人： Kenji Nakahira , Atsushi Miyamoto
发明人： Kenji Nakahira , Atsushi Miyamoto
IPC分类号： G01N23/225 , H01J37/26 , H01J37/28 , G06T5/00
CPC分类号： G01N23/2251 , G01N23/2255 , G06T5/001 , G06T2207/10061 , G06T2207/20012 , G06T2207/20021 , G06T2207/30148 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2815 , H01J2237/2817
摘要： A high-performance image quality improvement process, capable of improving the image quality of low-definition areas (lower layer patterns in a multilayer, bottoms of holes in a hole pattern, etc.), is performed to a captured image. Definition enhancement intensity is calculated using height information included in design data or estimate values of sample height information calculated from the captured image, and the image quality improvement process is performed to the captured image using the definition enhancement intensity.
摘要翻译：对拍摄图像执行能够提高低分辨率区域的图像质量（多层中的下层图案，孔图案中的孔的底部等）的高性能图像质量改进处理。使用包含在设计数据中的高度信息或从拍摄图像计算的样本高度信息的估计值来计算定义增强强度，并且使用定义增强强度对拍摄图像执行图像质量改善处理。

7. 发明授权

US09245323B2 Medical diagnostic device and method of improving image quality of medical diagnostic device 有权
标题翻译：医疗诊断装置及提高医疗诊断装置图像质量的方法
公开(公告)号：US09245323B2
公开(公告)日：2016-01-26
申请号：US12936769
申请日：2009-04-02
申请人： Jie Bai , Kenji Nakahira , Atsushi Miyamoto
发明人： Jie Bai , Kenji Nakahira , Atsushi Miyamoto
IPC分类号： A61B6/00 , G06T5/00 , G06T5/30
CPC分类号： G06T5/002 , G06T5/30 , G06T2207/20036 , G06T2207/20192
摘要： A medical diagnostic device is characterized in that an image processing unit (22) includes an image noise removal part (211, 211′) which removes the noise in the generated image of a person to be examined, a signal component enhancement processing part (212, 212′) which generates an enhanced-signal component image by performing signal component enhancement processing of the image from which the noise is removed by the image noise removal part, and an image combining part (213, 213′) which generates a combined image by combining the image of the person to be examined, the image from which the noise is removed by the image noise removal part, and an enhanced-signal component image subjected to signal component enhancement processing by the signal component enhancement processing part.
摘要翻译：一种医疗诊断装置的特征在于，图像处理单元（22）包括去除被检查者的生成图像中的噪声的图像噪声去除部（211,211'），信号分量增强处理部（212 ，212'），其通过对由图像噪声去除部除去噪声的图像执行信号分量增强处理来生成增强信号分量图像;以及图像合成部（213,213'），其生成组合图像通过组合被检查者的图像，由图像噪声去除部分去除噪声的图像和经过信号分量增强处理部分进行信号分量增强处理的增强信号分量图像。

8. 发明申请

US20120098952A1 CHARGED-PARTICLE MICROSCOPE DEVICE AND METHOD FOR INSPECTING SAMPLE USING SAME 有权
标题翻译：充电颗粒显微镜装置和使用其检查样品的方法
公开(公告)号：US20120098952A1
公开(公告)日：2012-04-26
申请号：US13379663
申请日：2010-06-18
申请人： Kenji Nakahira , Atsushi Miyamoto
发明人： Kenji Nakahira , Atsushi Miyamoto
IPC分类号： H04N7/18
CPC分类号： G01N23/2251 , G01N23/2255 , G06T5/001 , G06T2207/10061 , G06T2207/20012 , G06T2207/20021 , G06T2207/30148 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/2815 , H01J2237/2817
摘要： A high-performance image quality improvement process, capable of improving the image quality of low-definition areas (lower layer patterns in a multilayer, bottoms of holes in a hole pattern, etc.), is performed to a captured image. Definition enhancement intensity is calculated using height information included in design data or estimate values of sample height information calculated from the captured image, and the image quality improvement process is performed to the captured image using the definition enhancement intensity.
摘要翻译：对拍摄图像执行能够提高低分辨率区域的图像质量（多层中的下层图案，孔图案中的孔的底部等）的高性能图像质量改进处理。使用包含在设计数据中的高度信息或从拍摄图像计算的样本高度信息的估计值来计算定义增强强度，并且使用定义增强强度对拍摄图像执行图像质量改善处理。

9. 发明申请

US20100280378A1 ULTRASONOGRAPHIC DEVICE AND METHOD FOR IMPROVING ULTRASONOGRAPHIC DEVICE IMAGE QUALITY 有权
标题翻译：超声波设备和用于改进超声波设备图像质量的方法
公开(公告)号：US20100280378A1
公开(公告)日：2010-11-04
申请号：US12599056
申请日：2008-05-09
申请人： Kenji Nakahira , Atsushi Miyamoto
发明人： Kenji Nakahira , Atsushi Miyamoto
IPC分类号： A61B8/14 , G06T7/00
CPC分类号： G01S7/52046 , A61B8/00 , G01S7/52026 , G06T5/002 , G06T5/10 , G06T2207/10132 , G06T2207/20016 , G06T2207/20064 , G06T2207/30048
摘要： It is possible to improve an image quality of an ultrasonographic device and improve visibility of a tissue structure and a lesion. According to a noise amount estimated for each of at least two resolution levels and reliability of the noise amount estimation, a corrected noise amount is calculated. An intensity conversion is performed on a decomposition coefficient obtained by a multi-resolution decomposition process using the corrected noise amount. Moreover, by performing intensity conversion of the respective decomposition coefficients according to a plurality of decomposition coefficients, it is possible to generate a high-quality image. Furthermore, by switching processing parameters in accordance with the imaging condition, the image type, and the imaging object, it is possible to simultaneously realize the processing time and the image quality appropriate for the purpose.
摘要翻译：可以提高超声波装置的图像质量，并提高组织结构和病变的可见性。根据针对至少两个分辨率级别和噪声量估计的可靠性估计的噪声量，计算校正噪声量。对通过使用校正噪声量的多分辨率分解处理获得的分解系数执行强度转换。此外，通过根据多个分解系数执行各个分解系数的强度转换，可以生成高质量的图像。此外，通过根据成像条件，图像类型和成像对象切换处理参数，可以同时实现适合于该目的的处理时间和图像质量。

10. 发明授权

US09019362B2 Charged particle beam device and a method of improving image quality of the same 有权
标题翻译：带电粒子束装置及其提高图像质量的方法
公开(公告)号：US09019362B2
公开(公告)日：2015-04-28
申请号：US13513280
申请日：2010-11-08
申请人： Jie Bai , Kenji Nakahira , Atsushi Miyamoto , Chie Shishido , Hideyuki Kazumi
发明人： Jie Bai , Kenji Nakahira , Atsushi Miyamoto , Chie Shishido , Hideyuki Kazumi
IPC分类号： H04N7/18 , G01N23/00 , G21K7/00 , G06K9/00 , G06K9/46 , G06K9/66 , H01J37/28 , H01J37/244 , H01L21/66
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/24495 , H01J2237/2809 , H01J2237/2817 , H01L22/12
摘要： The invention relates to a technique of improving a contrast of a lower-layer pattern in a multi layer by synthesizing detected signals from a plurality of detectors by using an appropriate allocation ratio in accordance with pattern arrangement. In a charged particle beam device capable of improving image quality by using detected images obtained from a plurality of detectors and in a method of improving the image quality, a method of generating one or more output images from detected images corresponding to respective outputs of the detectors that are arranged at different locations is controlled by using information of a pattern direction, an edge strength, or others calculated from a design data or the detected image. In this manner, a detection area of the detected signals can be expanded by using the plurality of detectors, and the image quality such as the contrast can be improved by synthesizing the detected signals by using the pattern direction or the edge strength calculated from the design data or the detected images.
摘要翻译：本发明涉及一种通过根据图案布置使用合适的分配比例来合成来自多个检测器的检测信号来提高多层下层图案的对比度的技术。在能够通过使用从多个检测器获得的检测图像来提高图像质量的带电粒子束装置中，以及提高图像质量的方法中，提供一种从与检测器的各个输出对应的检测图像生成一个或多个输出图像的方法通过使用从设计数据或检测到的图像计算的图案方向，边缘强度或其他的信息来控制布置在不同位置处的位置。以这种方式，可以通过使用多个检测器来扩展检测信号的检测区域，并且可以通过使用从设计计算出的图案方向或边缘强度合成检测信号来提高诸如对比度的图像质量数据或检测到的图像。

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