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    • 82. 发明授权
    • Analog quantity display method, analog quantity measuring method, and digital/analog display type measuring instrument
    • 模拟量显示方法,模拟量测量方法以及数字/模拟显示型测量仪
    • US06412187B1
    • 2002-07-02
    • US09480998
    • 2000-01-11
    • Koji SasakiYoshitaka KujiYuichi IchikawaMikio SuzukiNorihide TsuyukiHiroyuki Ohta
    • Koji SasakiYoshitaka KujiYuichi IchikawaMikio SuzukiNorihide TsuyukiHiroyuki Ohta
    • G01B322
    • G01B3/004G01D7/002
    • The present invention provides an analog quantity display method of counting displacement of a probe disposed in contact with an object to be measured and analog-displaying the obtained count value by an analog display section as an analog quantity. If a peak value of the count value exceeds a possible analog-display range of the analog display section, an offset provided for the analog-displayed count value is updated in such a manner that the peak value is displayed within the possible analog-display range. Further, an analog quantity measuring method is provided, which comprises counting displacement of the probe, compares the obtained count value with a peak value of the count value, holds the count value as a new peak value depending upon a result of the comparison, and executes the comparison and the holding of the peak value again if the difference between the present peak value and the present count value exceeds a predetermined value. The analog quantity display and measuring methods are applicable to a digital/analog display type measuring instrument comprising a counter for counting the displacement of the probe in contact with the measured object, a digital display section for digitally displaying the count value, and an analog display section located adjacent to the digital display section, for displaying the count value as the bar graph comprising the large number of analog bars arranged in juxtaposition in one direction.
    • 本发明提供了一种模拟量显示方法,用于计数与待测物体接触的探针的位移,并以模拟量模拟显示所获得的计数值。 如果计数值的峰值超过模拟显示部分的可能的模拟显示范围,则为模拟显示的计数值提供的偏移被更新,使得峰值显示在可能的模拟显示范围内 。 此外,提供了一种模拟量测量方法,其包括计数探头的位移,将获得的计数值与计数值的峰值进行比较,根据比较结果将计数值保持为新的峰值,以及 如果当前峰值和当前计数值之间的差值超过预定值,则再次执行比较和峰值保持。 模拟量显示和测量方法适用于数字/模拟显示型测量仪器,其包括用于计数与测量对象接触的探头的位移的计数器,用于数字显示计数值的数字显示部分和模拟显示器 位于与数字显示部分相邻的部分,用于将计数值显示为包括以一个方向并列排列的大量模拟条的条形图。
    • 88. 发明授权
    • Semiconductor device including multi-layer conductive thin film of
polycrystalline material
    • 半导体器件包括多层导电薄膜的多晶材料
    • US5444302A
    • 1995-08-22
    • US168506
    • 1993-12-22
    • Takashi NakajimaHideo MiuraHiroyuki OhtaNoriaki Okamoto
    • Takashi NakajimaHideo MiuraHiroyuki OhtaNoriaki Okamoto
    • H01L21/02H01L23/532H01L29/49H01L23/48H01L29/46
    • H01L21/28097H01L21/28035H01L21/28518H01L21/28525H01L21/32053H01L21/76838H01L21/76877H01L21/823437H01L23/485H01L23/53257H01L23/53271H01L28/40H01L29/4925H01L29/4975H01L2924/0002Y10T117/10Y10T117/1004
    • In forming an electrode 2 on a silicon 6 oxide film 5 on a semiconductor substrate 4 through a silicon oxide film 5, for example, the gate electrode 2 is structured in a laminated structure of a plurality of polycrystalline silicon layers 6. The portion of the gate electrode 2 is formed by a method of manufacturing a thin film having a process of depositing amorphous layers and a process of crystallizing (recrystallizing) this amorphous material. In this case, depositing of the amorphous layers is carried out dividedly by a plurality of times so that the thickness of an amorphous layer to be deposited at one time is not larger than a thickness to be prescribed by a critical stress value determined according to a fail event, the amorphous material is crystallized after each process of depositing each amorphous layer has been finished, and the process of depositing amorphous layers and the process of crystallizing the amorphous material are repeated, whereby a laminated structure of the polycrystalline layer 6 having a necessary film thickness is obtained. With the above-described arrangement, it is possible to prevent a deterioration of electric characteristics of a semiconductor device and an occurrence of a defect, such as a peeling off between layers, cracks in a layer, etc., and it is possible to obtain a polycrystalline layer of small grain size in a desired film thickness by a lamination of polycrystalline materials.
    • 例如,通过氧化硅膜5在半导体衬底4上的硅6氧化膜5上形成电极2时,栅电极2被构成为多个多晶硅层6的层叠结构。 通过制造具有沉积非晶层的工艺的薄膜的方法和使该非晶材料结晶(再结晶)的方法形成栅电极2。 在这种情况下,非晶层的沉积被分开多次进行,使得一次沉积的非晶层的厚度不大于根据根据下式确定的临界应力值规定的厚度 在每个非晶层的沉积过程完成之后,非晶材料结晶,重复沉积非晶层的过程和结晶非晶材料的过程,由此多晶层6的层压结构具有必要的 获得膜厚度。 利用上述结构,可以防止半导体器件的电特性的恶化和层之间的剥离等缺陷的发生,层中的裂纹等,并且可以获得 通过多晶材料的层叠,具有所需膜厚度的小晶粒尺寸的多晶层。
    • 90. 发明授权
    • Mechanical quantity measuring device
    • 机械量测量装置
    • US09581427B2
    • 2017-02-28
    • US14363138
    • 2011-12-06
    • Kisho AshidaHiroyuki Ohta
    • Kisho AshidaHiroyuki Ohta
    • G01L1/18G01B7/16
    • G01B7/16G01B7/18G01L1/18
    • A mechanical quantity measuring device (semiconductor strain sensor) has a semiconductor chip including a plurality of piezoresistive elements formed on a front surface of a semiconductor substrate, a lead wire unit electrically connected to a plurality of electrodes of the semiconductor chip, and a plate member joined to a rear surface of the semiconductor chip. Further, the plate member includes a first region facing the rear surface of the semiconductor chip and a second region provided adjacent to the first region, and a thickness of the plate member in the first region is made larger than a thickness in the second region.
    • 机械量测量装置(半导体应变传感器)具有半导体芯片,该半导体芯片包括形成在半导体衬底的前表面上的多个压阻元件,与该半导体芯片的多个电极电连接的引线单元,以及板构件 连接到半导体芯片的后表面。 此外,板构件包括面对半导体芯片的后表面的第一区域和与第一区域相邻设置的第二区域,并且使第一区域中的板构件的厚度大于第二区域中的厚度。