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61. 发明授权

US06466309B1 Method and apparatus for chemical and topographical microanalysis 失效
标题翻译：化学和地形微量分析的方法和装置
公开(公告)号：US06466309B1
公开(公告)日：2002-10-15
申请号：US09511616
申请日：2000-02-22
申请人： Dmitri A. Kossakovski , John D. Baldeschwieler , Jesse L. Beauchamp
发明人： Dmitri A. Kossakovski , John D. Baldeschwieler , Jesse L. Beauchamp
IPC分类号： G01B1124
CPC分类号： G01N21/718 , B82Y35/00 , Y10S977/868
摘要： A scanning probe microscope is combined with a laser induced breakdown spectrometer to provide spatially resolved chemical analysis of the surface correlated with the surface topography. Topographical analysis is achieved by scanning a sharp probe across the sample at constant distance from the surface. Chemical analysis is achieved by the means of laser induced breakdown spectroscopy by delivering pulsed laser radiation to the sample surface through the same sharp probe, and consequent collection and analysis of emission spectra from plasma generated on the sample by the laser radiation. The method comprises performing microtopographical analysis of the sample with a scanning probe, selecting a scanned topological site on the sample, generating a plasma plume at the selected scanned topological site, and measuring a spectrum of optical emission from the plasma at the selected scanned topological site. The apparatus comprises a scanning probe, a pulsed laser optically coupled to the probe, an optical spectrometer, and a controller coupled to the scanner, laser and spectrometer for controlling the operation of the scanner, laser and spectrometer. The probe and scanner are used for topographical profiling the sample. The probe is also used for laser radiation delivery to the sample for generating a plasma plume from the sample. Optical emission from the plasma plume is collected and delivered to the optical spectrometer so that analysis of emission spectrum by the optical spectrometer allows for identification of chemical composition of the sample at user selected sites.
摘要翻译：扫描探针显微镜与激光诱导击穿光谱仪结合，提供与表面形貌相关的表面的空间分辨化学分析。通过在与表面恒定距离的样品上扫描尖锐的探针来实现形貌分析。通过激光诱导击穿光谱法，通过将脉冲激光辐射通过相同的尖锐探针向样品表面提供化学分析，从而收集和分析通过激光辐射在样品上产生的等离子体的发射光谱。该方法包括用扫描探针对样品进行微图形分析，选择样品上的扫描的拓扑位点，在所选择的扫描的拓扑位点产生等离子体羽流，以及测量所选扫描拓扑位点处的等离子体的光发射谱。该装置包括扫描探针，与探针光学耦合的脉冲激光，光谱仪和耦合到扫描仪，激光和光谱仪的控制器，用于控制扫描仪，激光和光谱仪的操作。探头和扫描仪用于样品的形貌分析。该探针还用于激光辐射传输到样品中以从样品中产生等离子体羽流。来自等离子体羽流的光发射被收集并传送到光谱仪，使得通过光谱仪的发射光谱的分析允许在用户选择的部位识别样品的化学组成。

62. 发明申请

US20020109082A1 Light receiving and emitting probe and light receiving and emitting probe apparatus 失效
标题翻译：光接收和发射探头和光接收和发射探头设备
公开(公告)号：US20020109082A1
公开(公告)日：2002-08-15
申请号：US10074623
申请日：2002-02-13
申请人： YOSHIKAZU NAKAYAMA and DAIKEN CHEMICAL CO., LTD.
发明人： Yoshikazu Nakayama , Akio Harada
IPC分类号： H01J003/14 , H01J005/16
CPC分类号： G01Q70/12 , Y10S977/868 , Y10S977/876
摘要： A light receiving and emitting probe including a conductive nanotube probe needle with its base end fastened to a holder and its tip end protruded, a light receiving and emitting body formed on this probe needle, a lead wire fastened to the light receiving and emitting body, and a power supply that applies an electric voltage between both ends of the lead wire and the probe needle. Light is emitted and received by the light receiving and emitting body when an electric current passes through the light receiving and emitting body. A light receiving and emitting probe apparatus includes the above-described light receiving and emitting probe, a scanning mechanism that allows the light receiving and emitting probe to scan over a sample, and a control circuit that causes the light receiving and emitting body of the light receiving and emitting probe to receive and emit a light.
摘要翻译：一种光接收和发射探针，包括导电性纳米管探针，其基端固定在保持器上，其末端突出，形成在该探针上的受光发射体，固定于受光发射体的引线，以及在引线的两端和探针之间施加电压的电源。当电流通过光接收和发射体时，光被光接收和发射体发射和接收。光接收发射探针装置包括上述的光接收和发射探针，允许光接收和发射探针扫描样本的扫描机构，以及使光的受光发射体的控制电路接收和发射探头以接收和发射光。

63. 发明授权

US06267005B1 Dual stage instrument for scanning a specimen 有权
标题翻译：用于扫描样品的双级仪器
公开(公告)号：US06267005B1
公开(公告)日：2001-07-31
申请号：US09199634
申请日：1998-11-25
申请人： Amin Samsavar , William R. Wheeler , Steven G. Eaton , Jian-Ping Zhuang
发明人： Amin Samsavar , William R. Wheeler , Steven G. Eaton , Jian-Ping Zhuang
IPC分类号： G01B528
CPC分类号： G01Q10/04 , G01B3/008 , G01B7/34 , G01Q10/02 , G01Q30/02 , G01Q70/06 , Y10S977/834 , Y10S977/849 , Y10S977/852 , Y10S977/867 , Y10S977/868 , Y10S977/872 , Y10S977/874
摘要： A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resolution of 1 nanometer or better. The sensor is used to sense the parameter when both stages cause relative motion between the sensor assembly and the sample. The sensor may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing along scan at a coarser resolution and short scans a high resolution using the same probe tip or two probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.
摘要翻译：双级扫描仪器包括用于感测样品参数的传感器和用于引起传感器和样品之间的相对运动的粗细级和细级级的传感器。粗糙度分辨率约为1微米，细微分辨率为1纳米或更好。当传感器组件和样品之间产生相对运动时，传感器用于检测参数。传感器可用于在检测到高度变化的同时检测样品表面的高度变化以及热变化，静电，磁性，光反射率或光传输参数。通过以更粗糙的分辨率执行扫描，并且在固定的相对位置使用相同的探针尖端或两个探针尖端短扫描高分辨率，可以精确地相关联从长扫描和短扫描得到的数据。

64. 发明授权

US06078055A Proximity lithography device 失效
标题翻译：接近光刻设备
公开(公告)号：US06078055A
公开(公告)日：2000-06-20
申请号：US44082
申请日：1998-03-18
申请人： Paul M. Bridger , Thomas C. McGill
发明人： Paul M. Bridger , Thomas C. McGill
IPC分类号： B82B3/00 , G03F7/20 , H01J37/30 , H01J37/304
CPC分类号： G03F7/70383 , B82Y10/00 , B82Y40/00 , H01J37/3174 , G01Q80/00 , H01J2237/31776 , Y10S977/859 , Y10S977/868
摘要： A proximity lithography device using a modified electric field. In the preferred embodiment, the modified electric field is formed by illuminating a tip of a scanning probe in close proximity of the resist surface with a laser. In an alternate embodiment, the modified electric field is formed by positioning a tip of a scanning probe within close proximity of the resist surface, where illumination from a laser is in total internal reflection within the resist. The proximity of the tip to the resist surface creates a tunneling effect and forms the modified electric field. The modified electric field alters the resist for lithographic patterning.
摘要翻译：使用改性电场的接近光刻装置。在优选实施例中，通过用激光照射紧邻抗蚀剂表面的扫描探针的尖端来形成修改的电场。在替代实施例中，通过将扫描探针的尖端定位在抗蚀剂表面的紧密附近来形成修改的电场，其中来自激光器的照射在抗蚀剂内完全内反射。尖端与抗蚀剂表面的接近产生隧道效应并形成修改的电场。改性电场改变光刻胶用于光刻图案化。

65. 发明授权

US06073485A Scanning microscope for image topography and surface potential 失效
标题翻译：扫描显微镜用于图像形貌和表面电位
公开(公告)号：US06073485A
公开(公告)日：2000-06-13
申请号：US113956
申请日：1998-07-10
申请人： Shinichi Kitamura
发明人： Shinichi Kitamura
IPC分类号： G01N37/00 , G01B7/34 , G01N27/00 , G01N27/22 , G01Q20/04 , G01Q30/04 , G01Q30/06 , G01Q60/24 , G01Q60/30 , G01Q60/32
CPC分类号： G01Q60/30 , B82Y35/00 , Y10S977/849 , Y10S977/852 , Y10S977/86 , Y10S977/868 , Y10S977/871 , Y10S977/873
摘要： There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a gradient of the force acting between the probe tip and a sample. The gradient is represented by the output from a frequency-to-voltage converter. The frequency of an AC voltage applied across the probe tip and the sample is so set that a z-signal fed back to the cantilever to maintain constant the shift in the resonance frequency of the cantilever can sufficiently follow the AC voltage.
摘要翻译：公开了一种扫描探针显微镜，能够以大的弹簧常数的悬臂以高分辨率产生地形图像，同时以高分辨率产生表面电位图像。该显微镜可以采用原子力显微镜的形式，其使用在探针尖端和样品之间作用的力的梯度来检测样品的表面电位。梯度由频率 - 电压转换器的输出表示。跨越探针尖端和样品施加的AC电压的频率被设定为使得反馈到悬臂的z信号保持恒定，所述悬臂的谐振频率的偏移可以充分地跟随AC电压。

66. 发明授权

US6057546A Kinematically mounted probe holder for scanning probe microscope 有权
标题翻译：用于扫描探针显微镜的运动学安装的探头支架
公开(公告)号：US6057546A
公开(公告)日：2000-05-02
申请号：US129066
申请日：1998-08-04
申请人： David Braunstein , Michael Kirk , Ouoc Ly , Thai Nguyen
发明人： David Braunstein , Michael Kirk , Ouoc Ly , Thai Nguyen
IPC分类号： G01Q30/02 , G01B7/34 , G01N21/01 , G01N27/00 , G01Q10/02 , G01Q10/04 , G01Q30/14 , G01Q30/20 , G01Q60/02 , G01Q70/02 , G02B21/18 , H01J37/20 , H01J37/26
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q30/025 , Y10S977/849 , Y10S977/86 , Y10S977/868 , Y10S977/869 , Y10S977/87 , Y10S977/872 , Y10S977/873
摘要： Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure stage for scanning in the x, y and/or z directions. In a preferred embodiment, the SPMs or SPM heads include flexure stages for scanning in the x, y and z directions. The z scanning stage is preferably positioned outside the lateral footprint of the x-y flexure stage so that a probe extending from the z scanning stage is outside the lateral footprint of the instrument. The SPMs and SPM heads are configured to provide top down and bottom up optical views of the sample and/or the probe and enable simultaneous scanning probe microscopy and optical imaging of a sample to be performed. The SPMs and SPM heads are designed to be readily combinable with existing upright and inverted optical microscopes currently available from various major manufacturers.
摘要翻译：提供扫描探针显微镜和扫描探头，具有改进的光学可视化和样品操作能力。 SPM和SPM头包括用于在x，y和/或z方向扫描的至少一个弯曲台。在优选实施例中，SPM或SPM头包括用于在x，y和z方向扫描的挠曲台。 z扫描台优选地定位在x-y弯曲台的横向覆盖区的外侧，使得从z扫描台延伸的探针位于仪器的横向覆盖区之外。 SPM和SPM头被配置为提供样品和/或探针的自顶向下和从底部的光学视图，并且能够执行样品的同时扫描探针显微镜和光学成像。 SPM和SPM头设计为可以与现有的各种主要制造商现有的直立和倒置光学显微镜组合。

67. 发明授权

US5521390A Nanodisplacement producing apparatus 失效
标题翻译：纳米置换制造装置
公开(公告)号：US5521390A
公开(公告)日：1996-05-28
申请号：US341949
申请日：1994-11-16
申请人： Toshihiko Sato , Masakazu Ichikawa , Toshikazu Shimada
发明人： Toshihiko Sato , Masakazu Ichikawa , Toshikazu Shimada
IPC分类号： G02F1/39 , G01B11/14 , G01Q90/00 , G12B1/00 , H01J37/20
CPC分类号： G01Q10/04 , B82Y35/00 , G12B1/00 , H01J37/20 , Y10S977/868
摘要： An optical nanodisplacement producing apparatus is realized by employing an optical parametric oscillator of which cavity length is varied in correspondence with a wavelength or the intensity of the output light signal to achieve a fine-displacement producing mechanism. An optical nanodisplacement producing apparatus having high resolution less than 0.1 nm and a highly stable characteristic is realized as a very fine pattern forming/monitoring apparatus.
摘要翻译：通过采用光学参数振荡器来实现光学纳米位置产生装置，其中腔长度与输出光信号的波长或强度相对应地变化，以实现精细位移产生机制。作为非常精细的图案形成/监视装置，实现了具有小于0.1nm的高分辨率和高度稳定特性的光学纳米置换产生装置。

68. 发明授权

US5517280A Photolithography system 失效
标题翻译：光刻系统
公开(公告)号：US5517280A
公开(公告)日：1996-05-14
申请号：US226784
申请日：1994-04-12
申请人： Calvin F. Quate
发明人： Calvin F. Quate
IPC分类号： B81B1/00 , B81B3/00 , G01Q20/02 , G01Q80/00 , G03F7/00 , G03F7/20 , H01L21/31 , H01J3/14
CPC分类号： G01Q70/06 , B82Y35/00 , G01Q20/02 , G03F7/2049 , G03F7/70358 , G03F7/70375 , B82Y10/00 , G01Q80/00 , Y10S977/859 , Y10S977/868
摘要： A photolithography system includes a plurality of cantilevers, preferably formed in a silicon wafer. Each cantilever includes a tip located near the free end of the cantilever and a waveguide which extends along the length of the cantilever and intersects the tip. An aperture is formed at the apex of the tip so that light travelling through the waveguide may exit the tip. A light switch is included in the waveguide to control the passage of light to the tip of the cantilever.The array of cantilevers is positioned adjacent a wafer which is to be lithographed, in the manner of an atomic force microscope operating in the attractive mode. Each cantilever is a compound structure, including a thick portion and a thin portion, the latter having a preselected mechanical resonant frequency. The cantilevers are caused to vibrate at their resonant frequency and the actual frequency of vibration is detected and used to maintain a uniform spacing between the tip of the cantilever and the surface of a photoresist layer which is to be exposed. Preferably, both the vibrational motion and the control of the tip-photoresist spacing are effected by means of a capacitive plate located adjacent the cantilever.The cantilever array is scanned over a photoresist layer on the wafer, preferably in a raster pattern, and the individual light switches are operated so as to expose individual pixels on the photoresist layer.
摘要翻译：光刻系统包括多个悬臂，优选地形成在硅晶片中。每个悬臂包括位于悬臂自由端附近的尖端和沿着悬臂的长度延伸并与尖端相交的波导。在尖端的顶点处形成孔，使得穿过波导的光可以离开尖端。波导中包括光开关以控制光通向悬臂的尖端。悬臂的阵列以原子力显微镜在吸引模式下操作的方式定位在要被光刻的晶片附近。每个悬臂是复合结构，包括厚部分和薄部分，后者具有预选的机械共振频率。使悬臂以其谐振频率振动，并且检测振动的实际频率并用于保持悬臂的尖端与要暴露的光致抗蚀剂层的表面之间的均匀间隔。优选地，振动运动和尖端 - 光致抗蚀剂间隔的控制都通过位于悬臂附近的电容板来实现。将悬臂阵列扫描在晶片上的光致抗蚀剂层上，优选以光栅图案扫描，并且操作各个光开关以暴露光致抗蚀剂层上的各个像素。

69. 发明授权

US5517027A Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these 失效
标题翻译：用于检查和检查稍微不规则表面状态的方法，扫描探针显微镜及其制造方法或使用这些的半导体器件的液晶显示装置
公开(公告)号：US5517027A
公开(公告)日：1996-05-14
申请号：US254771
申请日：1994-06-06
申请人： Yoshitsugu Nakagawa , Fusami Soeda , Naohiko Fujino , Isamu Karino , Osamu Wada , Hiroshi Kurokawa , Koichiro Hori , Nobuyoshi Hattori , Masahiro Sekine , Masashi Ohmori , Kazuo Kuramoto , Junji Kobayashi
发明人： Yoshitsugu Nakagawa , Fusami Soeda , Naohiko Fujino , Isamu Karino , Osamu Wada , Hiroshi Kurokawa , Koichiro Hori , Nobuyoshi Hattori , Masahiro Sekine , Masashi Ohmori , Kazuo Kuramoto , Junji Kobayashi
IPC分类号： G01B7/34 , G01N21/88 , G01N21/94 , G01N27/00 , G01Q10/00 , G01Q20/02 , G01Q30/04 , G01Q30/06 , G01Q60/10 , G01Q60/24 , H01J37/00
CPC分类号： G01Q20/02 , B82Y35/00 , G01N21/94 , G01Q30/06 , Y10S977/868
摘要： Method for detecting and examining a slightly irregular surface state is provided which includes the steps of: illuminating a surface of a sample with light beam for detecting the slightly irregular surface state; observing a variation of the light beam occurring due to the slightly irregular surface state to specify the location of the slightly irregular surface state in an x-y plane of the sample; making the location of a probe needle of a scanning probe microscope and the location of the slightly irregular surface state on the sample coincide with each other; and measuring a three-dimensional image of the slightly irregular surface state by means of the scanning probe microscope. The scanning probe microscope for use in the aforementioned method and a method for fabricating a semiconductor device or a liquid crystal display device which utilizes the aforementioned method are also provided.
摘要翻译：提供了用于检测和检查稍微不规则的表面状态的方法，其包括以下步骤：用光束照射样品的表面以检测稍微不规则的表面状态; 观察由于略微不规则的表面状态而发生的光束的变化，以指定样品的x-y平面中略微不规则的表面状态的位置; 使扫描探针显微镜的探针的位置和样品上稍微不规则的表面状态的位置相互重合; 并通过扫描探针显微镜测量稍微不规则表面状态的三维图像。还提供了用于上述方法的扫描探针显微镜以及利用上述方法制造半导体器件或液晶显示器件的方法。

70. 发明授权

US5464977A Scanning optical detection apparatus and method, and photoelectric conversion medium applied thereto 失效
标题翻译：扫描光学检测装置和方法，以及光电转换介质
公开(公告)号：US5464977A
公开(公告)日：1995-11-07
申请号：US359473
申请日：1994-12-20
申请人： Nobuyuki Nakagiri , Hiroyuki Kondo , Yoshihiko Suzuki
发明人： Nobuyuki Nakagiri , Hiroyuki Kondo , Yoshihiko Suzuki
IPC分类号： G01Q10/00 , G01Q60/00 , G03F7/20 , H04N1/00 , H04N5/30
CPC分类号： H04N1/00827 , G03F7/70666 , H04N1/00795 , B82Y35/00 , Y10S977/868
摘要： The present invention provides an optical detection apparatus and an optical detection method for measuring at a high resolution an image in the wavelength range of from the infrared region to the gamma-ray region. The optical detection apparatus has a photoelectric conversion medium, which makes a change in electric property according to incidence of image in the wavelength range of from the infrared region to the gamma-ray region, a probe arranged in contact with the photoelectric conversion medium, and an urging mechanism for urging the probe against the photoelectric conversion medium to make the probe contact at a predetermined urging force with the medium. Further, the apparatus is so arranged that the urging mechanism keeps the probe in contact with the photoelectric conversion medium, a scanning device makes the probe relatively scan the photoelectric conversion medium in the contact state, a detector detects through the probe the change in electric property caused in the photoelectric conversion medium, and an information processor forms distribution information corresponding to the image in the wavelength range by making a correspondence between the change in electric property thus detected and the relative scan positions between the probe and the photoelectric conversion medium.
摘要翻译：本发明提供了一种用于以高分辨率测量从红外区域到伽马射线区域的波长范围内的图像的光学检测装置和光学检测方法。光学检测装置具有光电转换介质，其根据从红外区域到伽马射线区域的波长范围内的图像的入射而导致电特性的变化，与光电转换介质接触的探针，以及用于将探针推向光电转换介质以使探针以介质与预定的推动力接触的推动机构。此外，该装置被布置成使得推动机构保持探针与光电转换介质接触，扫描装置使探针在接触状态下相对地扫描光电转换介质，检测器通过探针检测电性能的变化并且信息处理器通过使所检测到的电特性的变化与探针和光电转换介质之间的相对扫描位置之间的对应关系来形成与波长范围内的图像相对应的分布信息。

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