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61. 发明申请

US20060291132A1 Electrostatic chuck, wafer processing apparatus and plasma processing method 审中-公开
标题翻译：静电卡盘，晶片加工装置和等离子体处理方法
公开(公告)号：US20060291132A1
公开(公告)日：2006-12-28
申请号：US11370102
申请日：2006-03-08
申请人： Seiichiro Kanno , Tsunehiko Tsubone , Masakazu Isozaki , Toshio Masuda , Go Miya , Hiroho Kitada , Tooru Aramaki
发明人： Seiichiro Kanno , Tsunehiko Tsubone , Masakazu Isozaki , Toshio Masuda , Go Miya , Hiroho Kitada , Tooru Aramaki
IPC分类号： H01T23/00
CPC分类号： H01L21/67109 , H01L21/67103 , H01L21/6831
摘要： An electrostatic chuck which is built in a heater and can change, at a high speed, the temperature distribution of a wafer being processed by a plasma is provided at low cost. Also, there is provided a processing method which realizes uniform etching by suppressing CD variations in the plane of the wafer even when etching conditions change. The electrostatic chuck includes a base material in which multiple coolant grooves are formed, a high resistance layer which is formed on the base material, multiple heaters which are formed by thermally spraying conductors within the high resistance layer, multiple electrostatic chuck electrodes which are formed similarly by thermally spraying conductors within the high resistance layer, and temperature measuring means, and adjusts outputs of the heaters on the basis of temperature information of the temperature measuring means.
摘要翻译：以低成本提供内置在加热器中并能够以高速度改变由等离子体处理的晶片的温度分布的静电卡盘。此外，提供了一种通过抑制晶片的平面中的CD变化即使在蚀刻条件改变时实现均匀蚀刻的处理方法。静电卡盘包括形成有多个冷却剂槽的基材，形成在基材上的高电阻层，通过热喷涂高电阻层内的导体形成的多个加热器，形成类似的多个静电卡盘电极通过热电喷涂高电阻层内的导体和温度测量装置，并且基于温度测量装置的温度信息来调节加热器的输出。

62. 发明申请

US20060157449A1 Plasma processing apparatus and a plasma processing method 审中-公开
标题翻译：等离子体处理装置和等离子体处理方法
公开(公告)号：US20060157449A1
公开(公告)日：2006-07-20
申请号：US11348300
申请日：2006-02-07
申请人： Kazue Takahashi , Toshio Masuda , Tetsunori Kaji , Ken'etsu Yokogawa
发明人： Kazue Takahashi , Toshio Masuda , Tetsunori Kaji , Ken'etsu Yokogawa
IPC分类号： G01L21/30 , C23F1/00
CPC分类号： H01J37/32522 , H01J37/32192 , H01J37/32678 , H01L21/31116
摘要： In an oxide film etching process, a plasma having a suitable ratio of CF3, CF2, CF, and F is necessary, and there is a problem in that the etching characteristic fluctuates in accordance with a temperature fluctuation of the etching chamber. Using a UHF type ECR plasma etching apparatus having a low electron temperature, a suitable dissociation can be obtained, and by maintaining the temperature of a side wall of the etching chamber in a range from 10° C. and 120° C., a stable etching characteristic can be obtained. Since oxide film etching using a low electron temperature and a high density plasma can be obtained, an etching result having a superior characteristic can be obtained, and, also, since the side wall temperature adjustment range is low, a simplified apparatus structure and a heat resistant performance countermeasure can be obtained easily.
摘要翻译：在氧化膜蚀刻工艺中，需要具有CF 3 N，CF 2，CF和F的合适比例的等离子体，并且存在的问题是，特性根据蚀刻室的温度波动而波动。使用具有低电子温度的UHF型ECR等离子体蚀刻装置，可以获得适当的解离，并且通过将蚀刻室的侧壁的温度保持在10℃和120℃的范围内，稳定的可以获得蚀刻特性。由于可以获得使用低电子温度和高密度等离子体的氧化膜蚀刻，因此可以获得具有优异特性的蚀刻结果，并且由于侧壁温度调节范围低，因此简化的装置结构和热可以容易地获得耐性性能对策。

63. 发明申请

US20050099684A1 Telescope main body and spotting scope 失效
标题翻译：望远镜主体和探测范围
公开(公告)号：US20050099684A1
公开(公告)日：2005-05-12
申请号：US10981788
申请日：2004-11-05
申请人： Makoto Mogamiya , Toshio Masuda
发明人： Makoto Mogamiya , Toshio Masuda
IPC分类号： G02B23/06 , G02B7/08 , G02B7/28 , G02B7/36 , G02B17/04 , G02B23/00 , G02B23/12 , H04N5/225 , H04N5/232
CPC分类号： G02B7/08 , G02B17/04 , G02B23/12 , H04N5/2254 , H04N5/23212 , H04N5/23293
摘要： A telescope main body, which is provided with an objective optical system, a focusing system, an imaging device, a beam splitter, and a correcting system that performs a correcting operation for correcting a position shift between an image forming position of an object image and a receiving surface of the imaging device caused by diopter variation of a user. The correcting system includes a focus driving system which relatively moves an image forming position of the object image with respect to the receiving surface, a focus detecting system which detects a status in which the image forming position coincides with the receiving surface, and a controller controlling the focus driving system. The controller has with a learning function of storing correction data of a preceding correcting operation so that the stored correction data of the preceding correcting operation is reflected in a subsequent correction operation.
摘要翻译：设置有物镜光学系统的望远镜主体，聚焦系统，成像装置，分束器和校正系统，其执行用于校正物体图像的图像形成位置与图像形成位置之间的位置偏移的校正操作由用户的屈光度变化引起的成像装置的接收表面。校正系统包括：相对于接收表面相对地移动对象图像的图像形成位置的对焦驱动系统;检测图像形成位置与接收面重合的状态的焦点检测系统;以及控制器重点驱动系统。控制器具有存储先前校正操作的校正数据的学习功能，使得存储的校正操作的校正数据反映在随后的校正操作中。

64. 发明授权

US06815365B2 Plasma etching apparatus and plasma etching method 失效
标题翻译：等离子体蚀刻装置和等离子体蚀刻方法
公开(公告)号：US06815365B2
公开(公告)日：2004-11-09
申请号：US09983946
申请日：2001-10-26
申请人： Toshio Masuda , Kazue Takahashi , Mitsuru Suehiro , Tetsunori Kaji , Saburo Kanai
发明人： Toshio Masuda , Kazue Takahashi , Mitsuru Suehiro , Tetsunori Kaji , Saburo Kanai
IPC分类号： H01L21302
CPC分类号： H01J37/32504 , H01J37/32522 , H01J2237/022 , H01L21/3065 , H01L21/67069 , H01L21/67109 , H01L21/6831
摘要： A plasma etching method for etching a sample within an etching chamber having a sidewall, an exchangeable jacket which is held inside of the sidewall, and a heating mechanism proximate to top end of the exchangeable jacket for generating heat which radiates towards an inside of the etching chamber. The plasma etching method further including a step of evacuating the etching chamber by an evacuation system, a step of supplying an etching gas into the etching chamber, a step of generating a plasma for performing etching of the sample in the etching chamber, and a step of conducting a heating operation by the heating mechanism during an initial stage of the step of generating a plasma.
摘要翻译：一种用于蚀刻在具有侧壁的蚀刻室内的样品的等离子体蚀刻方法，保持在侧壁内侧的可更换夹套，以及靠近可更换护套顶端的加热机构，用于产生朝向蚀刻内部辐射的热量房间。等离子体蚀刻方法还包括通过抽气系统对蚀刻室进行排气的步骤，向蚀刻室供给蚀刻气体的步骤，产生用于在蚀刻室中进行蚀刻的等离子体的工序，以及工序在产生等离子体的步骤的初始阶段期间通过加热机构进行加热操作。

65. 发明授权

US06171438B2 Plasma processing apparatus and plasma processing method 失效
标题翻译：等离子体处理装置和等离子体处理方法
公开(公告)号：US06171438B2
公开(公告)日：2001-01-09
申请号：US09227332
申请日：1999-01-08
申请人： Toshio Masuda , Kazue Takahashi , Mitsuru Suehiro , Tetsunori Kaji , Saburo Kanai
发明人： Toshio Masuda , Kazue Takahashi , Mitsuru Suehiro , Tetsunori Kaji , Saburo Kanai
IPC分类号： C23C1600
CPC分类号： H01J37/32504 , H01J37/32522 , H01J2237/022 , H01L21/3065 , H01L21/67069 , H01L21/67109 , H01L21/6831
摘要： A plasma etching apparatus including a vacuum processing chamber, a plasma generation device, a processing gas supply for supplying processing gas to the processing chamber, an electrode for holding a sample to be processed in the vacuum processing chamber, and an evacuation system for reducing the pressure of the vacuum processing chamber. The processing gas includes at least one kind of gas having a composition for forming a polymerized film by plasma discharge, wherein the processing gas is made plasmatic by plasma discharge in the processing chamber. At least one surface of an inner wall surface of the processing chamber in contact with plasma in the processing chamber and a surface of an internal component part is controlled to a predetermined temperature which is lower than the temperature of the sample to be processed and a strong polymerized film is formed on the inner wall surface of the processing chamber.
摘要翻译：一种等离子体蚀刻装置，包括真空处理室，等离子体产生装置，用于向处理室供应处理气体的处理气体供应源，用于保持真空处理室中待处理样品的电极和用于减少处理气体的排气系统真空处理室的压力。处理气体包括至少一种具有通过等离子体放电形成聚合膜的组成的气体，其中处理气体通过在处理室中的等离子体放电而制成。与处理室中的等离子体接触的处理室的内壁表面的至少一个表面和内部部件的表面被控制到比待处理样品的温度低的预定温度，并且强聚合膜形成在处理室的内壁表面上。

66. 发明授权

US5893978A Purifying method and purification system for lakes and marshes 失效
标题翻译：湖泊和沼泽净化方法及净化系统
公开(公告)号：US5893978A
公开(公告)日：1999-04-13
申请号：US794902
申请日：1997-02-04
申请人： Hiroaki Yoda , Shiro Nakadaira , Toshio Masuda , Takashi Mizumori , Koichi Tsuzuki
发明人： Hiroaki Yoda , Shiro Nakadaira , Toshio Masuda , Takashi Mizumori , Koichi Tsuzuki
IPC分类号： E02B3/00 , C02F3/08 , C02F7/00 , E02B15/10 , E02B15/04
CPC分类号： C02F7/00 , Y02W10/15 , Y02W10/33 , Y02W10/37
摘要： A purification system is provided for purifying the water of eutrophic lakes and marshes by partitioning the target lake/marsh to form a specified water treating area therein. For this purpose, a partitioning structure is provided for enclosing and partitioning the whole or part of an area around the mouth of each river flowing into the target eutrophic lake/marsh in the direction of depth to form a water treating water area; and a purifier for taking in water from the water treating area operates to separate and remove pollutants from the water, and then discharges treated water outside the water treating area.
摘要翻译：提供净化系统，用于通过划分目标湖/沼泽来在其中形成指定的水处理区域来净化富营养化湖泊和沼泽的水。为此，提供一种分隔结构，用于围绕并划分沿着深度方向流入目标富营养化湖/沼泽的每条河流的口部的整个或部分区域，以形成水处理水区域; 用于从水处理区吸入水的净化器用于分离和去除水中的污染物，然后将处理水排出水处理区域外。

67. 发明授权

US5533324A Method for loading liquids into containers made of resins 失效
标题翻译：将液体装入由树脂制成的容器中的方法
公开(公告)号：US5533324A
公开(公告)日：1996-07-09
申请号：US126656
申请日：1993-09-27
申请人： Masahiko Furukawa , Toshio Masuda , Toru Kenmotsu
发明人： Masahiko Furukawa , Toshio Masuda , Toru Kenmotsu
IPC分类号： B65B3/18 , B65B3/04 , B65B7/00 , B65B7/02 , B65B1/04 , B65B35/56
CPC分类号： B65B3/04
摘要： A method for loading a liquid into a container made of a resin comprises the steps of holding a portion of a bag, which is made of a resin film and which is provided with an opening, the portion surrounding the opening, and thereby suspending the bag in a case housing, which is to accommodate the bag therein. A predetermined amount of a liquid is poured through the opening into the bag, which is being suspended in the case housing, and thereafter the opening is closed. After the liquid has been poured into the bag, but before the opening is closed, the case housing is moved up, and the bag is thereby pushed up a predetermined distance, an appropriate amount of air being thus introduced into the bag having been loaded with the liquid. Worsening of the orientation or form of the bag and scratching or flawing of the bag are thus prevented from occurring due to vibrations given to the bag during its transportation, or the like.
摘要翻译：将液体装载到由树脂制成的容器中的方法包括以下步骤：保持由树脂膜制成并且设置有开口的袋的一部分，围绕开口的部分，从而悬挂袋在其中容纳袋子的壳体壳体中。将预定量的液体通过开口倒入被悬挂在壳体中的袋中，然后关闭开口。在液体已经倒入袋子之后，但是在开口关闭之前，壳体的壳体向上移动，并且袋子被推上预定的距离，因此将适量的空气引入到已经装入袋子的袋子中液体。因此，防止袋子的取向或形式的恶化以及袋子的划伤或瑕疵由于在运输过程中给予袋的振动等而被发生。

68. 发明授权

US5482533A Method for manufacturing foam aluminum product and product 失效
标题翻译：泡沫铝产品和产品的制造方法
公开(公告)号：US5482533A
公开(公告)日：1996-01-09
申请号：US202366
申请日：1994-02-25
申请人： Toshio Masuda , Shigemi Kanbayashi
发明人： Toshio Masuda , Shigemi Kanbayashi
IPC分类号： B22D27/00
CPC分类号： B22D27/00 , Y10T29/49798 , Y10T29/49988 , Y10T29/49989 , Y10T428/12479
摘要： A method is disclosed for forming a foamed aluminum article. A foaming vessel is used including a peripheral wall and a plurality of vertical rod members to form mounting holes at given positions in the vicinity of the inside surface of the peripheral wall. The melt of aluminum or its alloy is stirred with a viscosity increaser and a foaming material. The solidified aluminum block is then sliced to a given thickness to obtain a product of foamed aluminum having mounting holes in given positions in the vicinity of the outer edge thereof. A hard portion around the holes is used as the surface site for mounting the product. The products are used for sound and heat insulation.
摘要翻译：公开了一种用于形成泡沫铝制品的方法。使用发泡容器，其包括周壁和多个垂直杆构件，以在周壁的内表面附近的给定位置处形成安装孔。铝或其合金的熔体与增粘剂和发泡材料一起搅拌。然后将固化的铝块切片至给定的厚度，以获得具有在其外边缘附近的给定位置的安装孔的发泡铝的产品。孔周围的硬质部分用作安装产品的表面部位。产品用于隔音和隔音。

69. 发明授权

US5174805A Organic neutral liquid fertilizer and process for preparing the same 失效
标题翻译：有机中性液体肥料及其制备方法
公开(公告)号：US5174805A
公开(公告)日：1992-12-29
申请号：US651661
申请日：1991-02-06
申请人： Toshio Masuda
发明人： Toshio Masuda
IPC分类号： C05B11/10 , C05F11/00 , C05F11/10 , C05G3/00 , C05G5/00
CPC分类号： C05G3/0064 , C05B11/10 , C05F11/00 , C05F11/10 , Y10S71/02
摘要： The present invention provides a neutral liquid fertilizer comprising as essential ingredients nitrogenous, phosphatic and potash fertilizers and an organic acid, and a thickener, and also provides a process for preparing the same.
摘要翻译：本发明提供一种中性液体肥料，其包含作为必需成分的含氮，磷酸盐和钾肥和有机酸，以及增稠剂，并且还提供其制备方法。

70. 发明授权

US4591440A Membranes for liquid separations 失效
标题翻译：液体分离膜
公开(公告)号：US4591440A
公开(公告)日：1986-05-27
申请号：US656607
申请日：1984-10-01
申请人： Toshinobu Higashimura , Toshio Masuda
发明人： Toshinobu Higashimura , Toshio Masuda
IPC分类号： C08F38/00 , B01D71/26 , B01D71/44 , B01D71/70 , C08F138/00 , D01F6/00 , D01F6/26 , B01D13/00
CPC分类号： B01D61/362 , B01D71/44
摘要： Provided is a membrane for liquid separation which comprises mainly poly(substituted acetylene) having a repeating unit represented by the following formula: ##STR1## wherein R.sub.1 represents a hydrogen atom or a methyl group, and R.sub.2 represents an alkyl group having from 1 to 3 carbon atoms.
摘要翻译：本发明提供一种液体分离用膜，主要由具有下述式表示的重复单元的聚（取代乙炔）组成：其中，R 1表示氢原子或甲基，R 2表示1〜3的烷基碳原子。

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