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51. 发明授权

US5830612A Method of detecting a deficiency in a charged-particle-beam exposure mask 失效
标题翻译：检测带电粒子束曝光掩模缺陷的方法
公开(公告)号：US5830612A
公开(公告)日：1998-11-03
申请号：US711935
申请日：1996-09-11
申请人： Akio Yamada , Satoru Sagou , Hitoshi Watanabe , Satoru Yamazaki , Kiichi Sakamoto , Manabu Ohno , Kenichi Kawakami , Katsuhiko Kobayashi
发明人： Akio Yamada , Satoru Sagou , Hitoshi Watanabe , Satoru Yamazaki , Kiichi Sakamoto , Manabu Ohno , Kenichi Kawakami , Katsuhiko Kobayashi
IPC分类号： G03F1/00 , G03F1/20 , H01J37/304 , H01J37/317 , G03F9/00 , G03C5/00
CPC分类号： B82Y10/00 , B82Y40/00 , G03F1/86 , H01J37/3045 , H01J37/3174 , G03F1/20 , H01J2237/2817 , H01J2237/31794
摘要： A method of detecting deficiency of an aperture used in a charged-particle-beam exposure process employing at least two exposure columns is disclosed, where each of the two exposure columns passes a charged-particle beam through the aperture formed through a mask to shape a cross section of the charged-particle beam before exposing the charged-particle beam onto an object. The method includes the steps of mounting masks having the same aperture to the at least two exposure columns; scanning, in each of the at least two exposure columns, the charged-particle beam over an area containing a mark on a surface substantially at the same height as the object after passing the charged-particle beam through the same aperture; obtaining, in each of the at least two exposure columns, a signal waveform corresponding to the scan by detecting charged particles scattered by the mark; and comparing the signal waveform between the at least two exposure columns.
摘要翻译：公开了一种检测在使用至少两个曝光柱的带电粒子束曝光工艺中使用的孔的缺陷的方法，其中两个曝光柱中的每一个通过带电粒子束穿过通过掩模形成的孔以形成在将带电粒子束暴露在物体上之前的带电粒子束的横截面。该方法包括以下步骤：将具有相同孔径的掩模安装到至少两个曝光柱; 在所述至少两个曝光柱中的每一个中，在将带电粒子束通过相同的孔之后，将包含在与物体基本上处于相同高度的表面上的标记的区域上的带电粒子束扫描; 在所述至少两个曝光列中的每一个中，通过检测由所述标记散射的带电粒子来获得对应于所述扫描的信号波形; 以及比较所述至少两个曝光列之间的信号波形。

52. 发明授权

US5808313A Charged particle beam exposure method and charged particle beam exposure apparatus 失效
标题翻译：带电粒子束曝光方法和带电粒子束曝光装置
公开(公告)号：US5808313A
公开(公告)日：1998-09-15
申请号：US892976
申请日：1997-07-15
申请人： Akio Yamada , Hiroshi Yasuda , Hidefumi Yabara , Atsushi Saito
发明人： Akio Yamada , Hiroshi Yasuda , Hidefumi Yabara , Atsushi Saito
IPC分类号： H01L21/027 , H01J37/304 , H01J37/317 , H01J37/00
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/304 , H01J37/3174
摘要： The object of the present invention is to ensure a correct exposure even when a single exposure apparatus is used to expose a predetermined pattern, and an exposure apparatus therefor. According to the present invention, a charged particle beam exposure method, wherein a charged particle beam having a predetermined shape is irradiated to a sample to have the surface of the sample be exposed, comprises the steps of: storing a record of a first quantity of reflected electrons or a first sample current, which is detected in accordance with the charged particle beam irradiatd to the sample when a first exposure pattern is formed in a first area of the sample; and comparing a second quantity of reflected electrons or a second sample current, which is detected in accordance with the charged particle beam irradiated to the sample when the first exposure pattern is formed in a second area of the sample, with the first quantity of the reflected electrons or the first sample current which is stored when the first area is exposed, and generating a matched or unmatched signal therefor.
摘要翻译：本发明的目的在于即使使用单一的曝光装置来曝光预定图案也能确保正确的曝光及其曝光装置。根据本发明，一种带电粒子束曝光方法，其中对样品照射具有预定形状的带电粒子束以暴露样品的表面，包括以下步骤：将第一量的反射电子或第一样品电流，当在样品的第一区域中形成第一曝光图案时，其根据被照射到样品的带电粒子束来检测; 并且比较第二量的反射电子或第二样品电流，其在样品的第二区域中形成第一曝光图案时根据照射到样品的带电粒子束检测到的第一数量的反射电子或第二样品电流，电子或第一采样电流，其在第一区域被暴露时存储，并且产生匹配或不匹配的信号。

53. 发明授权

US5657415A Apparatus for reproducing moving pictures from motion parameters and moving picture coding and decoding system 失效
标题翻译：用于从运动参数和运动图像编码和解码系统再现运动图像的装置
公开(公告)号：US5657415A
公开(公告)日：1997-08-12
申请号：US365001
申请日：1994-12-28
申请人： Akio Yamada
发明人： Akio Yamada
IPC分类号： H04N7/14 , H04N7/16 , H04N19/00 , H04N19/42 , H04N19/423 , H04N19/46 , H04N19/503 , H04N19/51 , H04N19/70 , H04N19/85 , H04N21/435 , H04N5/76 , H04N5/93
CPC分类号： H04N19/537 , H04N19/20
摘要： A moving picture reproduction apparatus is disclosed which can reproduce successive moving pictures representing an appropriate movement only by extracting, from within motion information inputted as fragmentary movements, a small number of particular motion parameters of such movement as, for example, a turning movement of the face of a person or a movement of the mouth. The moving picture reproduction apparatus comprises a motion parameter extraction circuit for extracting a motion parameter from motion information of an inputted picture, a video sequence storage circuit for storing a plurality of video sequences which are series of moving pictures individually corresponding to a plurality of motion parameters, and a moving picture production circuit for reading out, in accordance with the motion parameter extracted by the motion parameter extraction means, a corresponding video sequence from the video sequence storage means and producing a reproduced moving picture from the video sequence.
摘要翻译：公开了一种运动图像再现装置，其可以仅通过从作为部分运动输入的运动信息内提取少量的特定运动参数来再现表示适当运动的连续运动图像，例如，运动信息的转动运动一个人的脸或嘴的运动。运动图像再现装置包括用于从输入图像的运动信息中提取运动参数的运动参数提取电路，用于存储多个视频序列的视频序列存储电路，所述多个视频序列是分别对应于多个运动参数的运动图像以及运动图像制作电路，用于根据运动参数提取装置提取的运动参数从视频序列存储装置中读出相应的视频序列，并从视频序列中产生再现的运动图像。

54. 发明授权

US5631113A Electron-beam exposure system for reduced distortion of electron beam spot 失效
标题翻译：电子束曝光系统，减少电子束斑变形
公开(公告)号：US5631113A
公开(公告)日：1997-05-20
申请号：US435157
申请日：1995-05-05
申请人： Takamasa Satoh , Hiroshi Yasuda , Akio Yamada , Junichi Kai , Yoshihisa Oae , Keiji Yamada , Toru Oshima
发明人： Takamasa Satoh , Hiroshi Yasuda , Akio Yamada , Junichi Kai , Yoshihisa Oae , Keiji Yamada , Toru Oshima
IPC分类号： H01L21/027 , H01J37/153 , G03L5/00 , H01J37/00
CPC分类号： H01J37/153 , H01J2237/1504 , H01J2237/1532 , H01J2237/3175
摘要： An electron-beam exposure system includes an astigmatic compensation circuit that increases a voltage applied across a pair of electrodes forming an electrostatic sub-deflector and simultaneously decreases a voltage applied across another pair of electrodes forming the same electrostatic sub-deflector with a same magnitude as in the case of increasing the voltage, wherein the magnitude of the voltage change is changed in response to the deflection of the electron-beam caused by a main deflector.
摘要翻译：电子束曝光系统包括像散补偿电路，其增加施加在形成静电副偏转器的一对电极上的电压，并且同时降低施加在形成相同静电副偏转器的另一对电极上施加的电压，其具有与在增加电压的情况下，其中电压变化的大小响应于由主偏转器引起的电子束的偏转而改变。

55. 发明授权

US5574062A Coumarin derivative and use thereof 失效
标题翻译：香豆素衍生物及其用途
公开(公告)号：US5574062A
公开(公告)日：1996-11-12
申请号：US347467
申请日：1994-12-13
申请人： Koichi Hashimoto , Akio Yamada , Hirokazu Hamano , Shigehiro Mori , Hisako Moriuchi
发明人： Koichi Hashimoto , Akio Yamada , Hirokazu Hamano , Shigehiro Mori , Hisako Moriuchi
IPC分类号： C07D311/16 , C07D407/04 , C07D409/04 , A61K31/37 , C07D311/20
CPC分类号： C07D407/04 , C07D311/16 , C07D409/04
摘要： The present invention provides compounds having 12-lipoxygenase inhibitory effect and medicines inhibiting 12-lipoxygenase selectively, and relates to novel coumarin derivatives and medicines containing the compounds as effective ingredients. Furthermore, this invention relates to compounds capable of converting to compounds inhibiting 12-lipoxygenase activities selectively according to the cleavage of modified moieties in vivo and medicines inhibiting 12-lipoxygenase selectively, and relates to novel coumarin derivatives having acyl groups as modified moieties and medicines containing the compounds as effective ingredients. The compounds of the present invention can inhibit 12-lipoxygenase strongly and selectively, and being useful as medicines for preventing and treating various circulatory diseases such as arteriosclerosis and vasospasm and for preventing of the metastasis of some kinds of cancers, and show low toxicity and few side effects.
摘要翻译： PCT No.PCT / JP94 / 00615 Sec。 371日期1994年12月13日第 102（e）日期1994年12月13日PCT 1994年4月12日PCT PCT。公开号WO94 / 24119 日期：1994年10月27日本发明提供具有12-脂肪氧合酶抑制作用的化合物和选择性抑制12-脂肪氧合酶的药物，涉及新型香豆素衍生物和含有该化合物作为有效成分的药物。此外，本发明涉及能够根据体内修饰部分的切割和选择性抑制12-脂肪氧合酶的药物选择性地转化成抑制12-脂肪氧合酶活性的化合物的化合物，并且涉及具有酰基作为修饰部分的新型香豆素衍生物和含有该化合物为有效成分。本发明化合物能够强烈，有选择地抑制12-脂肪氧合酶，可用作预防和治疗各种循环系统疾病如动脉硬化和血管痉挛以及预防某些癌症转移的药物，并且显示低毒性和少量副作用。

56. 发明授权

US5404018A Method of and an apparatus for charged particle beam exposure 失效
标题翻译：带电粒子束曝光的方法和装置
公开(公告)号：US5404018A
公开(公告)日：1995-04-04
申请号：US843172
申请日：1992-02-28
申请人： Hiroshi Yasuda , Yoshihisa Oae , Akio Yamada , Nobuyuki Yasutake , Hisayasu Nishino
发明人： Hiroshi Yasuda , Yoshihisa Oae , Akio Yamada , Nobuyuki Yasutake , Hisayasu Nishino
IPC分类号： G03F7/20 , H01J37/317 , H01L21/027 , H01L21/30 , H01J3/26
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3174 , H01J2237/30483 , H01J2237/31764
摘要： A charged particle beam exposure apparatus employs a main deflector made of electromagnetic coils and a subdeflector made of electrostatic deflection electrodes. An exposure method used for this apparatus is capable of shortening a wait time of the main deflector. The main deflector deflects a charged particle beam in a direction X, while the subdeflector deflects the beam around the deflecting position of the main deflector to expose an object to the beam. An area to be exposed on the object is divided into thin subfields such that the width, in an X-axis direction of each subfield, is approximately 1/3 the length in a Y-axis direction of the same.
摘要翻译：带电粒子束曝光装置采用由电磁线圈制成的主偏转器和由静电偏转电极制成的子偏转器。用于该装置的曝光方法能够缩短主导流板的等待时间。主偏转器使方向X上的带电粒子束偏转，而子偏转器将光束偏转在主偏转器的偏转位置附近，以将物体暴露于光束。要曝光在物体上的区域被划分为薄的子场，使得每个子场的X轴方向上的宽度大约为其Y轴方向上的长度的1/3。

57. 发明授权

US5272347A Apparatus for adjusting a focal position of an electron beam and electron beam projection apparatus including the same 失效
标题翻译：用于调整电子束的焦点位置的装置和包括该电子束的电子束投影装置
公开(公告)号：US5272347A
公开(公告)日：1993-12-21
申请号：US968144
申请日：1992-10-29
申请人： Yoshihisa Oae , Akio Yamada , Hiroshi Yasuda
发明人： Yoshihisa Oae , Akio Yamada , Hiroshi Yasuda
IPC分类号： H01J37/141 , H01J37/21 , H01J37/305 , H01J37/317
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/1413 , H01J37/21 , H01J37/3174
摘要： An electron beam projection apparatus providing a magnetic refocusing lens for adjusting a focal position of an electron beam on an object. An axis of an auxiliary magnetic field produced by the magnetic refocusing lens is required equivalently to agree to that of a convergent magnetic field produced by a magnetic object lens. An inclination adjustment apparatus of the magnetic refocusing lens provides a rolling mechanism being independently rotatable on two axes being perpendicular to each other and also perpendicular to a direction of an axis of a convergent magnetic field. With this inclination adjustment apparatus, adjustment operation is improved.
摘要翻译：一种提供用于调节物体上的电子束的焦点位置的磁性重聚焦透镜的电子束投影装置。由磁性重聚焦透镜产生的辅助磁场的轴等同于与由磁性物镜产生的会聚磁场的轴相一致。磁性重聚焦透镜的倾斜调节装置提供滚动机构，该滚动机构可以在彼此垂直并垂直于会聚磁场的轴的方向的两个轴上独立地旋转。通过该倾斜调节装置，可以提高调整动作。

58. 发明授权

US5103835A Impedance monitoring device for preventing urinary incontinence 失效
标题翻译：用于预防尿失禁的阻抗监测装置
公开(公告)号：US5103835A
公开(公告)日：1992-04-14
申请号：US691474
申请日：1991-04-25
申请人： Akio Yamada , Masayoshi Fuse
发明人： Akio Yamada , Masayoshi Fuse
IPC分类号： A61F5/37 , A61B5/20 , A61F5/44 , A61F5/48 , A61N1/36
CPC分类号： A61B5/202 , A61F5/48 , A61N1/36007
摘要： A monitoring device for preventing urinary incontinence has the following components: a high-frequency constant-current power supply adapted to supply a pair of terminals which are set on the surface of a human body across the urinary bladder; a high-frequency voltage signal detecting means which conducts wave detection from a high-frequency voltage signal sensed by a pair of sensing electrodes which are set on the human body surface at positions on the path of the high-frequency electrical current flowing between the pair of terminals; a DC component detecting means 13 which detects the DC component of the signal detected by the high-frequency voltage signal detecting means; a variance component detecting means for detecting variance component of the signal detected by the high-frequency voltage signal detecting means; a variance-to-DC ratio computing means for computing the ratio between the DC component and the variance component; and a variance-to-DC ratio evaluating means for activating an informing means when the computed value of the variance-to-DC ratio has reached a predetermined threshold level.
摘要翻译：用于预防尿失禁的监视装置具有以下部件：高频恒流电源，其适于提供设置在穿过所述膀胱的人体表面上的一对端子; 高频电压信号检测装置，其从在一对感测电极感测到的高频电压信号中进行波检测，所述高频电压信号被设置在人体表面上的在所述对之间流动的高频电流的路径上的位置的终端; DC分量检测装置13，检测由高频电压信号检测装置检测的信号的DC分量; 方差分量检测装置，用于检测由高频电压信号检测装置检测的信号的方差分量; 用于计算DC分量和方差分量之间的比率的方差到DC比计算装置; 以及方差 - 直流比评估装置，用于当所计算的所述方差 - 直流比的值已经达到预定的阈值电平时激活通知装置。

59. 发明授权

US5029222A Photoelectron image projection apparatus 失效
标题翻译：光电子图像投影仪
公开(公告)号：US5029222A
公开(公告)日：1991-07-02
申请号：US238047
申请日：1988-08-30
申请人： Akio Yamada , Hiroshi Yasuda , Kiichi Sakamoto , Jinko Kudou
发明人： Akio Yamada , Hiroshi Yasuda , Kiichi Sakamoto , Jinko Kudou
IPC分类号： G03F7/26 , G03F9/00 , H01J37/30 , H01L21/32
CPC分类号： G03F9/00 , G03F7/26 , H01J37/30 , H01L21/32 , H01J2237/2817 , H01J2237/31779 , H01J2237/31794
摘要： A photoelectron image projection apparatus has a device for detecting an image of a pattern of a mask within a predetermined projection region of the mask. An image signal describing the detected image is compared with a reference image signal which is known from the pattern of the mask, and a defect in the projection pattern is detected when the two compared image signals differ.

60. 发明授权

US4848846A Portable power tool 失效
标题翻译：便携式电动工具
公开(公告)号：US4848846A
公开(公告)日：1989-07-18
申请号：US14656
申请日：1987-02-13
申请人： Akio Yamada , Sakuji Tsunemitsu, deceased
发明人： Akio Yamada , Sakuji Tsunemitsu, deceased
IPC分类号： A01D34/68 , A01D34/08 , A01D34/90
CPC分类号： A01D34/90
摘要： A portable power tool comprising a support tube connected to an engine by means of an intervening clutch casing, a slider tube slidably fitted to the support tube and spring-biased forward relative to the support tube, a connecting rod connected to a front end of the slider tube and pivotally supporting a cutter holder, a rotary cutter rotatably supported by the holder, a flexible shaft for transmitting a drive force of the engine to the cutter for rotation, a lever mounted on a rear portion of the slider tube, and a wire extending rearward from the lever for connection to the clutch casing, whereby when the lever is pivoted to slide the slider tube relative to the support tube, the holder is pivotally moved to change the orientation of the cutter.
摘要翻译：一种便携式电动工具，其包括通过中间离合器壳体连接到发动机的支撑管，可滑动地装配到所述支撑管并且相对于所述支撑管向前弹簧偏置的滑动管，连接到所述支撑管的前端的连杆滑动管并且枢转地支撑刀架，由保持器可旋转地支撑的旋转刀具，用于将发动机的驱动力传递到切割器以旋转的柔性轴，安装在滑动管的后部的杆，从杠杆向后延伸以连接到离合器壳体，由此当杠杆枢转以相对于支撑管滑动滑动管时，保持器枢转地移动以改变切割器的取向。

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