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1. 发明授权

US5830612A Method of detecting a deficiency in a charged-particle-beam exposure mask 失效
标题翻译：检测带电粒子束曝光掩模缺陷的方法
公开(公告)号：US5830612A
公开(公告)日：1998-11-03
申请号：US711935
申请日：1996-09-11
申请人： Akio Yamada , Satoru Sagou , Hitoshi Watanabe , Satoru Yamazaki , Kiichi Sakamoto , Manabu Ohno , Kenichi Kawakami , Katsuhiko Kobayashi
发明人： Akio Yamada , Satoru Sagou , Hitoshi Watanabe , Satoru Yamazaki , Kiichi Sakamoto , Manabu Ohno , Kenichi Kawakami , Katsuhiko Kobayashi
IPC分类号： G03F1/00 , G03F1/20 , H01J37/304 , H01J37/317 , G03F9/00 , G03C5/00
CPC分类号： B82Y10/00 , B82Y40/00 , G03F1/86 , H01J37/3045 , H01J37/3174 , G03F1/20 , H01J2237/2817 , H01J2237/31794
摘要： A method of detecting deficiency of an aperture used in a charged-particle-beam exposure process employing at least two exposure columns is disclosed, where each of the two exposure columns passes a charged-particle beam through the aperture formed through a mask to shape a cross section of the charged-particle beam before exposing the charged-particle beam onto an object. The method includes the steps of mounting masks having the same aperture to the at least two exposure columns; scanning, in each of the at least two exposure columns, the charged-particle beam over an area containing a mark on a surface substantially at the same height as the object after passing the charged-particle beam through the same aperture; obtaining, in each of the at least two exposure columns, a signal waveform corresponding to the scan by detecting charged particles scattered by the mark; and comparing the signal waveform between the at least two exposure columns.
摘要翻译：公开了一种检测在使用至少两个曝光柱的带电粒子束曝光工艺中使用的孔的缺陷的方法，其中两个曝光柱中的每一个通过带电粒子束穿过通过掩模形成的孔以形成在将带电粒子束暴露在物体上之前的带电粒子束的横截面。该方法包括以下步骤：将具有相同孔径的掩模安装到至少两个曝光柱; 在所述至少两个曝光柱中的每一个中，在将带电粒子束通过相同的孔之后，将包含在与物体基本上处于相同高度的表面上的标记的区域上的带电粒子束扫描; 在所述至少两个曝光列中的每一个中，通过检测由所述标记散射的带电粒子来获得对应于所述扫描的信号波形; 以及比较所述至少两个曝光列之间的信号波形。

2. 发明授权

US06222195B1 Charged-particle-beam exposure device and charged-particle-beam exposure method 失效
标题翻译：带电粒子束曝光装置和带电粒子束曝光方法
公开(公告)号：US06222195B1
公开(公告)日：2001-04-24
申请号：US09637119
申请日：2000-08-11
申请人： Akio Yamada , Satoru Sagou , Hitoshi Watanabe , Satoru Yamazaki , Kiichi Sakamoto , Manabu Ohno , Kenichi Kawakami , Katsuhiko Kobayashi
发明人： Akio Yamada , Satoru Sagou , Hitoshi Watanabe , Satoru Yamazaki , Kiichi Sakamoto , Manabu Ohno , Kenichi Kawakami , Katsuhiko Kobayashi
IPC分类号： G03F900
CPC分类号： B82Y10/00 , B82Y40/00 , G03F1/20 , G03F1/86 , H01J37/3045 , H01J37/3174 , H01J2237/2817 , H01J2237/31794
摘要： A method of detecting deficiency of an aperture used in a charged-particle-beam exposure process employing at least two exposure columns is disclosed, where each of the two exposure columns passes a charged-particle beam through the aperture formed through a mask to shape a cross section of the charged-particle beam before exposing the charged-particle beam onto an object. The method includes the steps of mounting masks having the same aperture to the at least two exposure columns; scanning, in each of the at least two exposure columns, the charged-particle beam over an area containing a mark on a surface substantially at the same height as the object after passing the charged-particle beam through the same aperture; obtaining, in each of the at least two exposure columns, a signal waveform corresponding to the scan by detecting charged particles scattered by the mark; and comparing the signal waveform between the at least two exposure columns.
摘要翻译：公开了一种检测在使用至少两个曝光柱的带电粒子束曝光工艺中使用的孔的缺陷的方法，其中两个曝光柱中的每一个通过带电粒子束穿过通过掩模形成的孔以形成在将带电粒子束暴露在物体上之前的带电粒子束的横截面。该方法包括以下步骤：将具有相同孔径的掩模安装到至少两个曝光柱; 在所述至少两个曝光柱中的每一个中，在使带电粒子束通过相同的孔之后，在包含与物体基本上在与物体相同的高度的表面上的标记的区域上扫描带电粒子束; 在所述至少两个曝光列中的每一个中，通过检测由所述标记散射的带电粒子来获得对应于所述扫描的信号波形; 以及比较所述至少两个曝光列之间的信号波形。

3. 发明授权

US6137111A Charged particle-beam exposure device and charged-particle-beam exposure method 失效
标题翻译：带电粒子束曝光装置和带电粒子束曝光方法
公开(公告)号：US6137111A
公开(公告)日：2000-10-24
申请号：US84952
申请日：1998-05-28
申请人： Akio Yamada , Satoru Sagou , Hitoshi Watanabe , Satoru Yamazaki , Kiichi Sakamoto , Manabu Ohno , Kenichi Kawakami , Katsuhiko Kobayashi
发明人： Akio Yamada , Satoru Sagou , Hitoshi Watanabe , Satoru Yamazaki , Kiichi Sakamoto , Manabu Ohno , Kenichi Kawakami , Katsuhiko Kobayashi
IPC分类号： G03F1/00 , G03F1/20 , H01J37/304 , H01J37/317 , G03F9/00 , H01J37/00
CPC分类号： B82Y10/00 , B82Y40/00 , G03F1/86 , H01J37/3045 , H01J37/3174 , G03F1/20 , H01J2237/2817 , H01J2237/31794
摘要： A method of detecting deficiency of an aperture used in a charged-particle-beam exposure process employing at least two exposure columns is disclosed, where each of the two exposure columns passes a charged-particle beam through the aperture formed through a mask to shape a cross section of the charged-particle beam before exposing the charged-particle beam onto an object. The method includes the steps of mounting masks having the same aperture to the at least two exposure columns; scanning, in each of the at least two exposure columns, the charged-particle beam over an area containing a mark on a surface substantially at the same height as the object after passing the charged-particle beam through the same aperture; obtaining, in each of the at least two exposure columns, a signal waveform corresponding to the scan by detecting charged particles scattered by the mark; and comparing the signal waveform between the at least two exposure columns.
摘要翻译：公开了一种检测在使用至少两个曝光柱的带电粒子束曝光工艺中使用的孔的缺陷的方法，其中两个曝光柱中的每一个通过带电粒子束穿过通过掩模形成的孔以形成在将带电粒子束暴露在物体上之前的带电粒子束的横截面。该方法包括以下步骤：将具有相同孔径的掩模安装到至少两个曝光柱; 在所述至少两个曝光柱中的每一个中，在将带电粒子束通过相同的孔之后，将包含在与物体基本上处于相同高度的表面上的标记的区域上的带电粒子束扫描; 在所述至少两个曝光列中的每一个中，通过检测由所述标记散射的带电粒子来获得对应于所述扫描的信号波形; 以及比较所述至少两个曝光列之间的信号波形。

4. 发明授权

US5391886A Charged particle beam exposure system and method of exposing a pattern on an object by such a charged particle beam exposure system 失效
标题翻译：带电粒子束曝光系统和通过这种带电粒子束曝光系统将图案曝光在物体上的方法
公开(公告)号：US5391886A
公开(公告)日：1995-02-21
申请号：US131670
申请日：1993-10-05
申请人： Akio Yamada , Yoshihisa Oae , Satoru Yamazaki , Tomohiko Abe , Katsuhiko Kobayashi , Kiichi Sakamoto , Junko Hatta
发明人： Akio Yamada , Yoshihisa Oae , Satoru Yamazaki , Tomohiko Abe , Katsuhiko Kobayashi , Kiichi Sakamoto , Junko Hatta
IPC分类号： H01J37/317 , H01J37/00
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/3174
摘要： A method of exposing a pattern on a substrate by a charged particle beam includes the steps of energizing first and second mask deflectors provided at an upstream side of a stencil mask simultaneously to obtain a first relativistic relationship of energization between the first and second mask deflectors, energizing the first mask deflector and simultaneously the second mask deflector according to the first relativistic relationship so as to hit a selected aperture on the stencil mask, to obtain an absolute deflection of the charged particle beam as a function of the energization of the first mask deflector, energizing third and fourth mask deflectors provided at a downstream side of the stencil mask simultaneously to obtain a second relativistic relationship of energization between the third and fourth mask deflectors, and energizing the first through fourth mask deflectors according to the first and second relativistic relationship and further to the absolute relationship, such that the charged particle beam is deflected away from an optical axis and hit a selected aperture on the stencil mask while traveling parallel to the optical axis, and such that the charged particle beam passed through the stencil mask is deflected toward the optical axis and deflected again such that the charged particle beam travels toward the substrate in alignment with the optical axis.
摘要翻译：通过带电粒子束在衬底上曝光图案的方法包括以下步骤：同时向在模板掩模的上游侧提供的第一和第二掩模偏转器同时激励，以获得第一和第二掩模偏转器之间的通电的第一相对论关系，激励第一掩模偏转器并且根据第一相对论关系同时施加第二掩模偏转器，以便击打模板掩模上的选定孔径，以获得作为第一掩模偏转器的通电的函数的带电粒子束的绝对偏转同时激励设置在模板掩模的下游侧的第三和第四掩模偏转器，以获得第三和第四掩模偏转器之间的通电的第二相对论关系，以及根据第一和第二相对论关系激励第一至第四掩模偏转器;以及进一步到绝对的关系，这样带电粒子束偏离光轴并且在平行于光轴移动的同时撞击模板掩模上的选定孔径，并且使得通过模板掩模的带电粒子束向光轴偏转并再次偏转带电粒子束与光轴对准地朝向衬底移动。

5. 发明授权

US08123544B2 Electrical connector assembly adapted to withstand rotational movement 有权
标题翻译：适于承受旋转运动的电连接器组件
公开(公告)号：US08123544B2
公开(公告)日：2012-02-28
申请号：US12916991
申请日：2010-11-01
申请人： Katsuhiko Kobayashi
发明人： Katsuhiko Kobayashi
IPC分类号： H01R13/627
CPC分类号： H01R13/6275
摘要： An electrical connector assembly, which can easily disengage a first connector from a second connector without damaging constructional elements when excessive rotational moment is exerted on the one connector when connected to the second connector, is provided. The electrical connector assembly includes a first connector and a second connector that connect with each other. The first connector includes a first housing, a first contact, and a latch. The second connector includes a second housing having a second contact and a shell attached to the second housing so as to cover the second housing.
摘要翻译：提供了一种电连接器组件，其提供了当连接到第二连接器时在一个连接器上施加过大的旋转力矩时，可以容易地将第一连接器从第二连接器脱离而不损坏结构元件。电连接器组件包括彼此连接的第一连接器和第二连接器。第一连接器包括第一壳体，第一接触件和闩锁件。第二连接器包括具有第二接触件的第二壳体和附接到第二壳体以便覆盖第二壳体的壳体。

6. 发明授权

US07628636B2 Electrical connector 失效
标题翻译：电连接器
公开(公告)号：US07628636B2
公开(公告)日：2009-12-08
申请号：US11951758
申请日：2007-12-06
申请人： Chao Hsueh Yu , Chien Tsai Hui , Katsuhiko Kobayashi
发明人： Chao Hsueh Yu , Chien Tsai Hui , Katsuhiko Kobayashi
IPC分类号： H01R13/627
CPC分类号： H01R13/6275 , H01R9/031 , H01R12/59 , H01R12/716 , H01R12/88
摘要： An electrical connector for connection to a complementary electrical connector is disclosed. The electrical connector includes a housing having a concavity and a latch rotatably carried by the housing. The latch includes a rotary section having a first curved edge, a second curved edge, and a tab received that is received by the concavity. The latch further includes a lock extending from the rotary section for connection with the complementary electrical connector.
摘要翻译：公开了一种用于连接到互补电连接器的电连接器。电连接器包括具有凹部的壳体和由壳体可旋转地承载的闩锁。闩锁包括具有第一弯曲边缘，第二弯曲边缘和由凹部接纳的接收件的旋转部分。闩锁还包括从旋转部分延伸的用于与互补电连接器连接的锁。

7. 发明授权

US06746265B2 Electrical connector assembly and male connector used in the same 失效
标题翻译：电连接器组件和公连接器使用在同一个
公开(公告)号：US06746265B2
公开(公告)日：2004-06-08
申请号：US09966238
申请日：2001-09-28
申请人： Hiroshi Shirai , Katsuhiko Kobayashi , Naotaka Sasame , Takaki Naito , Doron Lapidot
发明人： Hiroshi Shirai , Katsuhiko Kobayashi , Naotaka Sasame , Takaki Naito , Doron Lapidot
IPC分类号： H01R13627
CPC分类号： H01R13/6275 , H01R13/6581 , H01R13/6594
摘要： The male connector 1 has a metal shielding shell 4 that accommodates a housing 2 and a synthetic resin enclosure 8 that covers approximately the rear half of this shielding shell 4. Fastening parts 40 and protruding parts 42 are formed by stamping in the upper-side shell half-body 4a. A metal latching arm 44 which is formed with the approximate shape of a shallow inverted V, and which has an engaging part 54, is disposed between these fastening parts 40 and protruding parts 42. The latching arm 44 can be pressed by means of a finger-catch part 68. This configuration obtains the desired shielding performance while maintaining a compact size in a shielded electrical connector assembly.
摘要翻译：阳连接器1具有容纳壳体2的金属屏蔽壳体4和覆盖该屏蔽壳体4的后半部的合成树脂外壳8.紧固部件40和突出部件42通过在上侧壳体半身体4a。在这些紧固部件40和突出部件42之间设置有形成为具有浅倒V形状并且具有接合部54的近似形状的金属锁定臂44.闩锁臂44可以通过手指 - 配置部分68.该配置获得期望的屏蔽性能，同时在屏蔽电连接器组件中保持紧凑的尺寸。

8. 发明授权

US06176725B1 Card edge connector 失效
标题翻译：卡缘连接器
公开(公告)号：US06176725B1
公开(公告)日：2001-01-23
申请号：US09361758
申请日：1999-07-27
申请人： Katsuhiko Kobayashi , Shinichi Hashimoto
发明人： Katsuhiko Kobayashi , Shinichi Hashimoto
IPC分类号： H01R1362
CPC分类号： H01R12/88 , H01R12/83
摘要： The present invention provides a card edge electrical connector which makes it possible to achieve reliable grounding of a daughter board to a mother board via latch members thereof. Card edge connector (1) is equipped with an insulating housing (10), which is to be attached to a mother board (50) and which has a daughter board-accommodating recess (11) that extends in the direction of length thereof, and metal latch members (30), which are disposed in the vicinity of end portions of the housing (10) with respect to the direction of length of the housing and which hold a daughter board (60) at a second angle when the daughter board (60) is rotated to the second angle after being inserted into the daughter board-accommodating recess (11) at a first angle. The latch members (30) are connected to a ground path of the mother board (50). Metal ground auxiliary contact members (40), which have first resilient contact portions (43) that resiliently engage a ground path of the daughter board (60) and second resilient contact portions (44) that resiliently engage the latch members (30) are attached to the housing (10).
摘要翻译：本发明提供了一种卡缘电连接器，其可以通过其闩构件来实现子板与母板的可靠接地。卡缘连接器（1）配备有要连接到母板（50）的绝缘壳体（10），并且具有在其长度方向上延伸的子板容纳凹部（11），并且金属闩锁构件（30），其相对于壳体的长度方向设置在壳体（10）的端部附近，并且当子板（30）处于第二角度时保持子板（60） 60）在以第一角度插入到子板容纳凹部（11）中之后旋转到第二角度。闩锁构件（30）连接到母板（50）的接地路径。具有弹性地接合子板（60）的接地路径的第一弹性接触部分（43）和弹性地接合闩锁构件（30）的第二弹性接触部分（44）的金属接地辅助接触构件（40）被附接到所述壳体（10）。

9. 发明授权

US5863213A Memory card connector and adapter therefor 失效
标题翻译：存储卡连接器及适配器
公开(公告)号：US5863213A
公开(公告)日：1999-01-26
申请号：US959868
申请日：1997-10-29
申请人： Ikuo Enomoto , Katsuhiko Kobayashi
发明人： Ikuo Enomoto , Katsuhiko Kobayashi
IPC分类号： H01R31/06 , H01R13/62
CPC分类号： H01R12/83 , H01R12/721 , H01R31/06
摘要： An adapter is removably mountable on one end of a memory card of predetermined length. The adapter has a protrusion which registers with a notch in the end of the memory card, and the adapter has a substitute notch which provides the memory card with an effective length that is equal to a specified longer length than the predetermined length. The adapter permits the memory card of predetermined length to be reliably mated with an electrical connector that is dimensioned to receive a memory card of the specified longer length.
摘要翻译：适配器可拆卸地安装在具有预定长度的存储卡的一端上。适配器具有与存储卡端部的凹口对准的突起，并且适配器具有替代凹口，其为存储卡提供等于指定的比预定长度长的长度的有效长度。适配器允许具有预定长度的存储卡与电连接器可靠地配合，该电连接器的尺寸被设计成接收具有指定长度的存储卡。

10. 发明授权

US5633694A Ophthalmometric apparatus for generating an image of a selection and a surface of an eyeground of a subject 失效
标题翻译：用于产生选择的图像和被摄体的眼底的表面的眼用计量装置
公开(公告)号：US5633694A
公开(公告)日：1997-05-27
申请号：US509337
申请日：1995-07-31
申请人： Toshifumi Mihashi , Satoru Niimura , Katsuhiko Kobayashi
发明人： Toshifumi Mihashi , Satoru Niimura , Katsuhiko Kobayashi
IPC分类号： A61B3/10 , A61B3/14
CPC分类号： A61B3/145
摘要： The present invention relates to an ophthalmometric apparatus and is intended to provide an ophthalmometric apparatus that generates image signals representing a section of a measuring portion of a measuring eye. A first light source emits light rays having a comparatively short coherence length, a measuring optical system converges a light beam emitted by the first light source on a position substantially corresponding to the pupil of the measuring eye to illuminate a measuring portion, a beam splitter separates a reference optical path from the measuring optical path of the measuring optical system, a reference optical system including a reflecting mirror reflects a reference light beam, an interference optical system combines a reflected measuring light beam and a reflected reference light beam reflected by the reference optical system for interference, an image pickup device having a plurality of image sensing elements disposed in a substantially conjugate relation with the measuring portion receives an interference light beam provided by the interference optical system, an image signal generating unit generates image signals representing a section of the measuring eye from the output signals of the image pickup device when the reflecting mirror is shifted.
摘要翻译：本发明涉及一种检眼仪，其目的是提供一种产生表示测量眼的测量部分的图像信号的检眼仪。第一光源发射具有相对短的相干长度的光线，测量光学系统将由第一光源发射的光束会聚在基本对应于测量眼的光瞳的位置上，以照亮测量部分，分束器分离来自测量光学系统的测量光路的参考光路，包括反射镜的参考光学系统反射参考光束，干涉光学系统将反射的测量光束和由参考光学反射的反射参考光束组合具有与测量部分基本上共轭的多个图像感测元件的图像拾取装置接收由干涉光学系统提供的干涉光束，图像信号产生单元产生表示该干涉光学系统的一部分的图像信号从输出信号测量眼睛当反射镜被移动时，图像拾取装置的ls。

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