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31. 发明专利

JP2012141254A Flow rate measuring device of flow controller for gas supply device and method for measuring flow rate 有权
标题翻译：用于气体供应装置的流量控制器的流量测量装置和用于测量流量的方法
公开(公告)号：JP2012141254A
公开(公告)日：2012-07-26
申请号：JP2011000904
申请日：2011-01-06
申请人： Fujikin Inc , 株式会社フジキン
发明人： SAWADA YOHEI , NAGASE MASAAKI , IKEDA SHINICHI , NISHINO KOJI , DOI RYOSUKE
IPC分类号： G01F1/00
CPC分类号： G01F5/00 , G01F1/34 , G01F1/86 , G01F15/046
摘要： PROBLEM TO BE SOLVED: To quickly and highly accurately measure the flow rate of a flow controller for gas supply device, and to simplify and miniaturize the structure of the flow rate measuring device for use in a measurement.SOLUTION: The flow rate measuring device includes: a branch line Lb for branchedly and dissociatively connecting an inlet-side end to an upstream part of a shutoff valve Vprovided at an outlet end of a gas supply line L, and connecting the outlet-side end to a gas outflow side; a shutoff valve V provided at the outlet side of the branch line Lb; a pressure detector Pd and a temperature detector Td for detecting a gas pressure and a gas temperature in the upstream side of the shutoff valve V; an arithmetic control device CP in which detecting signals from the pressure detector Pd and the temperature detector Td are input and which calculates the gas flow rate passing through the branch line Lb. The flow rate measuring device is branchedly and dissociatively connected to the upstream part of the shutoff valve Vthat is provided at the outlet end of the gas supply line L of the gas supply device GF.
摘要翻译：要解决的问题：为了快速且高精度地测量用于气体供应装置的流量控制器的流量，并且简化和小型化用于测量的流量测量装置的结构。解决方案：流量测量装置包括：分支管线Lb，用于分支和离解地连接截止阀V 0 的入口侧端部与上游部分气体供应管线L的出口端，并将出口侧端部连接到气体流出侧; 设置在分支管线Lb的出口侧的截止阀V; 用于检测截流阀V的上游侧的气体压力和气体温度的压力检测器Pd和温度检测器Td; 输入来自压力检测器Pd和温度检测器Td的信号的运算控制装置CP，其计算通过分支管路Lb的气体流量。流量测量装置分支和离解地连接到设置在气体供应装置的气体供应管线L的出口端处的截止阀V 0 的上游部分 GF。版权所有（C）2012，JPO＆INPIT

32. 发明专利

JP2011117473A Cam type control valve 有权
标题翻译： CAM型控制阀
公开(公告)号：JP2011117473A
公开(公告)日：2011-06-16
申请号：JP2009272752
申请日：2009-11-30
申请人： Fujikin Inc , 株式会社フジキン
发明人： SAWADA YOHEI , DOI RYOSUKE , NISHINO KOJI , IKEDA SHINICHI
IPC分类号： F16K31/524 , F16K7/16 , F16K31/04
CPC分类号： F16K7/16 , F16K31/047 , F16K31/52408
摘要： PROBLEM TO BE SOLVED: To provide a cam type control valve wherein a regulating screw is easily accessed when regulating the height in the vertical direction of a motor to which the cam is attached. SOLUTION: The cam type control valve consists of a valve casing 4 which contains a fluid duct 2 and valve seat 3, a valve body 5 which comes into contact with and separates from the valve seat 3 and opens/closes the fluid duct 2, a valve rod 6 which presses down the valve body 5 and abuts on the valve seat 3, a cam 7 which acts on and pushes down the valve rod 6, a motor which rotationally drives the cam 7, a motor holder 9 which holds a motor, a support frame 10 which is fixed to the valve casing 4 and vertically movably supports the motor holder 9, an elastic member 11 which biases the motor holder 9 from an upper side part of the support frame 10 and a height-regulating screw 12 which supports the motor holder 9 on the support frame 10 in a suspended manner to adjust the height with respect to the support frame 10 of the motor holder 9 and is screwed in the motor holder 9 while being slidably inserted into the upper side part of the support frame 10. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种凸轮型控制阀，其中当调节安装有凸轮的马达的垂直方向的高度时，调节螺钉容易接近。
解决方案：凸轮式控制阀由包含流体管道2和阀座3的阀壳体4构成，阀体5与阀座3接触并与阀座3分离并打开/关闭流体管道如图2所示，将阀体5压下并抵接在阀座3上的阀杆6，作用于阀杆6并推下阀杆6的凸轮7，旋转驱动凸轮7的马达，保持电动机，支撑框架10，其固定到阀壳体4并且可上下移动地支撑电动机保持器9;弹性部件11，其将电动机保持器9从支撑框架10的上侧部分偏压;高度调节螺钉 12，其以悬挂的方式支撑在支撑框架10上的电动机支架9，以相对于电动机保持器9的支撑框架10调节高度，并且在可滑动地插入到电动机支架9的上侧部分的同时旋入电动机支架9 支持框架10.版权所有（C）2011，JPO＆INP 它

33. 发明专利

JP2010133436A Fluid controller 有权
标题翻译：流体控制器
公开(公告)号：JP2010133436A
公开(公告)日：2010-06-17
申请号：JP2008307298
申请日：2008-12-02
申请人： Fujikin Inc , 株式会社フジキン
发明人： SAWADA YOHEI , IKEDA SHINICHI , NISHINO KOJI , DOI RYOSUKE
IPC分类号： F16K31/524 , F16K7/16 , F16K31/04
摘要： PROBLEM TO BE SOLVED: To provide a fluid controller which employs a motor and prevents the motor from projecting to a body.
SOLUTION: A transmission means 10 for converting the rotation of a motor 9 into linear motion to be transmitted to a stem 8 includes a ball bearing 21 fixed to the stem 8 and an eccentric shaft 22 fixed to an output shaft 9a in the motor 9 and formed so as to come into contact with the ball bearing 21 from above. When a radial distance R from an axial core of the output shaft 9a to a contact position of a large ball 25 and an outer peripheral edge of the undersurface 22a of an eccentric shaft 22 is short, the whole of the ball bearing 21 is situated relatively at an upper side. When a radial distance R from the axial core of the output shaft 9a to the outer peripheral edge of the undersurface 22a of the eccentric shaft 22 becomes long, the whole of the ball bearing 21 is moved downward by a distance D as shown by an arrow.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种采用马达并防止马达向身体突出的流体控制器。解决方案：用于将马达9的旋转转换为直线运动以传递到杆8的传动装置10包括固定到杆8的球轴承21和固定到杆8上的输出轴9a的偏心轴22 电动机9并且形成为从上方与滚珠轴承21接触。当从输出轴9a的轴芯到偏心轴22的大球25的接触位置和下表面22a的外周边缘的径向距离R较短时，整个球轴承21位于相对位置在上边。当从输出轴9a的轴芯到偏心轴22的下表面22a的外周边缘的径向距离R变长时，整个滚珠轴承21向下移动距离D，如箭头所示。版权所有（C）2010，JPO＆INPIT

34. 发明专利

JP2009252760A Gas supply device with carburetor 有权
标题翻译：带有加热器的气体供应装置
公开(公告)号：JP2009252760A
公开(公告)日：2009-10-29
申请号：JP2008094640
申请日：2008-04-01
申请人： Fujikin Inc , 株式会社フジキン
发明人： OSADA ATSUSHI , NAGASE MASAAKI , HIDAKA ATSUSHI , HIRATA KAORU , MATSUMOTO ATSUSHI , NISHINO KOJI , DOI RYOSUKE , IKEDA SHINICHI
IPC分类号： H01L21/31 , B01J4/00 , H01L21/205
CPC分类号： B01J4/02 , B01B1/005 , B01J2219/00162 , B01J2219/00164 , B01J2219/00191 , B01J2219/00198 , B01J2219/00213 , B01J2219/00231 , C23C16/4481 , C23C16/4485 , C23C16/45561 , F02D19/023 , F02D19/027 , F02M21/0239 , F02M21/06 , Y02T10/32 , Y10T137/6416 , Y10T137/6606
摘要： PROBLEM TO BE SOLVED: To provide a gas supply device with a carburetor that achieves energy saving and miniaturization of size, and can carry out flow control of gas easily and stably with a high precision without requiring strict temperature control on the carburetor side. SOLUTION: The gas supply device with the carburetor includes: a liquid receiving tank; a carburetor for vaporizing a liquid; a high temperature pressure type flow rate controller for regulating the flow rate of vaporized gas; and a heater for heating desired portions of the carburetor, the high temperature pressure type flow rate controller and the piping path connected thereto. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供具有实现节能和小型化的化油器的气体供给装置，并且能够以高精度容易且稳定地进行气体的流量控制，而不需要对化油器侧进行严格的温度控制。解决方案：具有化油器的气体供给装置包括：液体接收罐; 用于汽化液体的化油器; 用于调节气化气体流量的高温压力型流量控制器; 以及加热器，用于加热化油器的所需部分，高温压力型流量控制器和与其连接的管道。版权所有（C）2010，JPO＆INPIT

35. 发明专利

JP2009116904A Pressure type flow control device 有权
标题翻译：压力式流量控制装置
公开(公告)号：JP2009116904A
公开(公告)日：2009-05-28
申请号：JP2009025342
申请日：2009-02-05
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , MATSUMOTO ATSUSHI , DOI RYOSUKE , IKEDA SHINICHI , SUGIYAMA KAZUHIKO
IPC分类号： G05D7/06 , G01F1/00 , G01F1/50 , G05D16/20
摘要： PROBLEM TO BE SOLVED: To provide a pressure type flow control device capable of controlling the amount of flow that passes through an orifice with a high degree of precision, by simultaneously measuring fluid pressure and fluid temperature at the same point in a fluid under noncritical expansion conditions.
SOLUTION: The pressure type flow control device includes: an orifice 4 for controlling the amount of flow; a control valve 22 disposed at the pipework on the upstream side of the orifice 4; an upstream-side pressure sensor 10 disposed between the orifice 4 and the control valve 22 for detecting an upstream side pressure P
1; and a downstream-side pressure sensor 12 disposed at the pipework on the downstream side of the orifice 4 for detecting a downstream-side pressure P
2 . The amount of flow that passes through the orifice is controlled by the opening and closing of the control valve, while the amount of flow that passes through the orifice is calculated from the upstream-side pressure P
1 and the downstream-side pressure P
2 by the flow expression Qc=KP
2
m (P
1 -P
2 )
n . The upstream-side pressure sensor 10 or the downstream-side pressure sensor 12 is constituted of a resistance element of which electrical resistance changes, when pressure is applied; and this resistance element as a pressure sensor is used simultaneously as a temperature sensor.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种压力式流量控制装置，其能够通过同时测量流体中的相同点处的流体压力和流体温度来以高精度控制流过孔的流量在非临界膨胀条件下。解决方案：压力式流量控制装置包括：用于控制流量的孔口4; 设置在孔口4的上游侧的管路处的控制阀22; 设置在孔4和控制阀22之间的上游侧压力传感器10，用于检测设置在下游侧的管道上的上游侧压力P 1; 和下游侧压力传感器12 用于检测下游侧压力P 2 的孔口4。通过控制阀的打开和关闭来控制通过孔口的流量，而从上游侧压力P 1 计算通过孔口的流量，下游侧压力P 2 通过流动表达式Qc = KP 2 P 2 ） n 。上游侧压力传感器10或下游侧压力传感器12由施加压力时电阻变化的电阻元件构成; 并且作为压力传感器的该电阻元件同时用作温度传感器。版权所有（C）2009，JPO＆INPIT

36. 发明专利

JP2008009554A Flow ratio variable type fluid supply device 有权
标题翻译：流量比可变型流体供应装置
公开(公告)号：JP2008009554A
公开(公告)日：2008-01-17
申请号：JP2006177156
申请日：2006-06-27
申请人： Fujikin Inc , 株式会社フジキン
发明人： HIRATA KAORU , SAWADA YOHEI , DOI RYOSUKE , NISHINO KOJI , IKEDA SHINICHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0664 , Y10T137/85938 , Y10T137/87314 , Y10T137/87539
摘要： PROBLEM TO BE SOLVED: To achieve the miniaturization and cost reduction of a flow ratio variable type gas diversion supply device, and to easily and quickly achieve the adjustment of the flow ratio. SOLUTION: Gas with a flow rate Q supplied from a flow rate controller 6 is diverted to a first diversion duct 1 and a second diversion duct 2 with a predetermined flow rate Q, and a first orifice 3 is interposed in the first diversion duct 1 so that the gas with the flow rate Q can be supplied from the both diversion ducts 1 and 2, and orifices 4a to 4n are interposed in the second diversion duct 2 as ducts where a plurality of branch ducts 2a to 2n are directly connected in parallel, and open/close valves Vb to Vn are interposed at the whole part or one part of the branch circuits, and the total open area S2o of the distributable orifices of the second diversion duct 2 is adjusted according to the opening or closing of the open/close valves Vb to Vn so that the gas flow with the flow rate Q can be diverted to the diversion ducts 1 and 2 with a flow ratio equal to the rate of the open area of the first orifice 3 of a first diversion circuit 1 to the total open areas of the distributable orifices of the second diversion channel 2. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了实现流量比可变型导气装置的小型化和降低成本，并且容易且快速地实现流量比的调节。解决方案：从流量控制器6提供的具有流量Q的气体被转移到具有预定流量Q的第一转向管道1和第二转向管道2，并且第一开口3插入在第一转向管道1，从而能够从两个分流管道1和2供给具有流量Q的气体，并且孔口4a至4n插入第二转向管道2中，作为多个分支管道2a至2n直接连接的管道并联，并且开/关阀Vb至Vn插入在分支回路的整个部分或一部分处，并且根据打开或关闭第二转向管2的可分配孔的总开口面积S2o被调整打开/关闭阀Vb至Vn，使得具有流量Q的气流可以转移到转向管道1和2，流量比等于第一转向回路的第一孔3的开口面积的速率 1到总开放面积的分配第二个转移渠道的能力孔。2.版权所有（C）2008，JPO＆INPIT

37. 发明专利

JP2005195525A Small hole diameter automatic measuring instrument, small hole diameter measuring method, and shower plate manufacturing method 有权
标题翻译：小孔直径自动测量仪器，小孔直径测量方法和淋浴板制造方法
公开(公告)号：JP2005195525A
公开(公告)日：2005-07-21
申请号：JP2004003718
申请日：2004-01-09
申请人： Fujikin Inc , Tadahiro Omi , 忠弘大見 , 株式会社フジキン
发明人： OMI TADAHIRO , NAGASE MASAAKI , DOI RYOSUKE , NISHINO KOJI , NAKAMURA OSAMU , UNO TOMIO , IKEDA SHINICHI
IPC分类号： G01B13/10
CPC分类号： G01B13/10 , Y10T29/49432
摘要： PROBLEM TO BE SOLVED: To continuously, highly efficiently, and accurately, measure the diameter or cross section area of each of a plurality of small holes formed in a plate while determining and reporting small holes having diameter errors exceeding a set value. SOLUTION: This small hole diameter automatic measuring instrument comprises: a flow measuring part B mainly composed of an automatic pressure controller 4 for supplying a fluid to the inlet side of the small holes 8 with a set inlet side pressure P 1 controlled at a desired value while keeping an outlet side pressure P 2 of the small holes 8 in a plate 7 and an inlet side pressure P 1 of the small holes 8 in a critical state of the fluid; a plate supporter 12 for rotatably supporting the plate 7; a test probe supporter 13 thereabove for supporting a test probe 6 in an ascendable/descendable and traversable manner, the test probe 6 supplying the fluid from the measuring part B by making close contact airtightly with the inlet side of the small holes 8; a plate hold part C comprising controllers 14 and 15 for the two supporters 12 and 13; and a control part C equipped with a calculation/determination part C 2 for calculating the diameter or cross section area of each of the small holes 8 in process of supplying the fluid based on flow measurement values from the measuring part B, and an external output part C 3 for outputting relevant calculation values to the exterior. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了连续，高效，准确地测量形成在板中的多个小孔中的每一个的直径或横截面积，同时确定和报告具有超过设定值的直径误差的小孔。
解决方案：该小孔径自动测量仪器包括：主要由自动压力控制器4组成的流量测量部分B，该自动压力控制器4用于将流体供应到小孔8的入口侧，设定的入口侧压力P 1 控制在期望值，同时保持板7中的小孔8的出口侧压力P 2 和入口侧压力P 1 处于临界状态的小孔8; 用于可旋转地支撑板7的板支撑件12; 测试探针支撑件13，用于以可升降/可移动的方式支撑测试探针6，测试探针6通过与小孔8的入口侧紧密接触而从测量部分B供应流体; 包括用于两个支撑件12和13的控制器14和15的板保持部分C; 以及配备有计算/确定部件C 2 的控制部件C，用于根据来自测量装置的流量测量值计算供给流体的每个小孔8的直径或横截面面积部分B和用于将相关计算值输出到外部的外部输出部分C 3 。版权所有（C）2005，JPO＆NCIPI

38. 发明专利

JP2005010108A Automatic zero point correction device for pressure sensor, pressure control device and pressure type flow control device 有权
标题翻译：压力传感器自动零点校正装置，压力控制装置和压力型流量控制装置
公开(公告)号：JP2005010108A
公开(公告)日：2005-01-13
申请号：JP2003177135
申请日：2003-06-20
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SUGIYAMA KAZUHIKO , HINO SHOICHI , TAKAHASHI EIJI , SAEGUSA SHIN , IKEDA SHINICHI , NISHINO KOJI , DOI RYOSUKE , UENOYAMA TOYOMI , SUGITA KATSUYUKI
IPC分类号： G01L19/02 , G01L19/00 , G01L19/04
CPC分类号： G01L19/02 , G01L9/065 , G01L19/0023 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To provide a pressure sensor capable of detecting accurately the pressure regardless of its using period by correcting automatically the temporal zero point drift of the pressure sensor, and a pressure control device and a flow control device using it. SOLUTION: This pressure sensor using a semiconductor pressure-sensitive element for measuring liquid pressure is operated as follows: a sensor output voltage from the pressure sensor is outputted to the outside through an amplifier; the sensor output voltage is inputted into a temporal zero point drift correction means of the pressure sensor through a D/A converter; it is determined whether the sensor output voltage is larger than a set value or not by a sensor output determination means in the temporal zero point drift correction means; an operation condition of the pressure sensor is determined by an operation condition determination means in the temporal zero point drift correction means; and when the sensor output voltage is larger than the set value and the operation condition of the pressure sensor is under the operation condition set beforehand, a zero point correction voltage having the same voltage as the sensor output voltage and the reverse polarity thereto is inputted into an offset terminal of the amplifier through the D/A converter and the temporal zero point drift of the pressure sensor is deleted. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够通过自动校正压力传感器的时间零点漂移以及使用该压力传感器的压力控制装置和流量控制装置来精确地检测压力而不管其使用周期的压力传感器。解决方案：使用半导体压敏元件测量液体压力的压力传感器如下操作：来自压力传感器的传感器输出电压通过放大器输出到外部; 传感器输出电压通过D / A转换器输入压力传感器的时间零点漂移校正装置; 通过时间零点漂移校正装置中的传感器输出确定装置确定传感器输出电压是否大于设定值; 压力传感器的操作条件由时间零点漂移校正装置中的操作条件确定装置确定; 并且当传感器输出电压大于设定值并且压力传感器的操作条件处于预先设置的操作条件下时，将具有与传感器输出电压相同的电压和与其相反极性的零点校正电压输入到通过D / A转换器的放大器的偏移端子和压力传感器的时间零点漂移被删除。版权所有（C）2005，JPO＆NCIPI

39. 发明专利

JP2004199109A Flow control method for fluid using pressure-type flow controller 有权
公开(公告)号：JP2004199109A
公开(公告)日：2004-07-15
申请号：JP2002363221
申请日：2002-12-16
申请人： Fujikin Inc , 株式会社フジキン
发明人： IKEDA SHINICHI , MORIMOTO AKIHIRO , DOI RYOSUKE , NISHINO KOJI , UNO TOMIO
IPC分类号： G01F1/36 , G01F1/50 , G01F25/00 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To easily find the specific flow factor of a type of gas with high accuracy even if the physical properties of the type of gas are unknown in the case of a pressure-type flow controller. SOLUTION: This pressure-type flow controller calculates an actual flow Qg of an arbitrary fluid according to Qg = Qb×SFF when the arbitrary fluid Gg is assumed to be a flow-controlled fluid (where, Qb is a measured flow of the arbitrary fluid in the flow controller assuming that the flow-controlled fluid is a reference fluid Gb, and SFF is the specific flow factor of the arbitrary fluid Gg relative to the reference fluid Gb). The flow factor SFF is operated according to SFF = Δt(Gb)/Δt(Gg)×T(Gb)/T(Gg), (where, Δt(Gb) is time for which a pressure drop reaches an arbitrary set value under the pressure attenuation characteristic of an orifice with respect to the reference fluid Gb, Δt(Gg) is time for which a pressure drop reaches an arbitrary set value ΔP under the pressure attenuation characteristic of the orifice with respect to the arbitrary fluid Gg, T(Gb) is the temperature of the reference fluid Gb, and T(Gg) is the temperature of the arbitrary fluid Gg). COPYRIGHT: (C)2004,JPO&NCIPI

40. 发明专利

JP2014234905A ダイヤフラム弁有权
标题翻译：透膜阀
公开(公告)号：JP2014234905A
公开(公告)日：2014-12-15
申请号：JP2013118008
申请日：2013-06-04
申请人：株式会社フジキン , Fujikin Inc
发明人： SHINOHARA TSUTOMU , YAMAJI MICHIO , NISHINO KOJI , DOI RYOSUKE , IKEDA NOBUKAZU , AKAGANE TOSHIO
IPC分类号： F16K7/12 , F16K7/17
CPC分类号： F16K37/0083 , F16K7/17 , G01N27/20
摘要：【課題】簡単な構成でありながら、ダイヤフラムが破断する前に、ダイヤフラムの損傷を確実に検出することができるダイヤフラム弁を提供する。【解決手段】流体流入通路2a、及び流体流出通路2bを設けたボディ2内のシート4にダイヤフラム5接離させ流体の導通、遮断を行うダイヤフラム弁1において、ダイヤフラム5を多層構造とし、最上層のダイヤフラム表面に配線を配置し、配線の断線を検出することによりダイヤフラム5の異常を検出する。【選択図】図1
摘要翻译：要解决的问题：提供一种能够在隔膜破裂之前可靠地检测膜片损坏的隔膜阀，同时采用简单的结构。解决方案：隔膜阀1通过使膜片5接触而导致流体的传导/截留将隔膜5与设置有流体流入通道2a和流体流出通道2b的主体2内的片材4分隔开。隔膜5被构造成多层结构; 布线布置在最上层的隔膜表面上; 并且通过检测布线的断裂来检测隔膜5中的异常。

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