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1. 发明专利

JP2005208712A Water hammer-less opening method for fluid channel, medical fluid supplying method using the same, and water hammer-less opening device 有权
标题翻译：用于流体通道的无水开口方法，使用该通道的医用流体供应方法和无水开式装置
公开(公告)号：JP2005208712A
公开(公告)日：2005-08-04
申请号：JP2004011497
申请日：2004-01-20
申请人： Fujikin Inc , Tadahiro Omi , 忠弘大見 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , NAGASE MASAAKI , DOI RYOSUKE , IKEDA SHINICHI , NISHIMURA RYUTARO
IPC分类号： F16L55/04 , F16K47/00 , F16K47/02 , G05D16/20
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： PROBLEM TO BE SOLVED: To rapidly open a fluid channel within a short period of time without causing any water hammer by an extremely simple device or operation. SOLUTION: This water hammer-less opening device is configured of an actuator operation type valve formed in a fluid channel, an electropneumatic converting device for supplying a two-step actuator operating pressure Pa to the actuator operation type valve, a vibration sensor fixed to the upstream side duct of the actuator operation type valve so as to be freely attached/detached, and a tuning box for inputting a vibration detection signal Pr detected by the vibration sensor, and for outputting a control signal Sc to control the level of a step operating pressure Ps' of the two-step actuator operating pressure Pa to the electropneumatic converting device, and for making the electropneumatic converting device output the two-step actuator operating pressure Pa with the step operating pressure Ps' for turning the vibration detection signal Pr to almost zero according to the adjustment of the control signal Sc. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：在短时间内快速打开流体通道，而不会通过非常简单的装置或操作造成任何水锤。解决方案：该无水锤打开装置由形成在流体通道中的致动器操作型阀构成，用于向致动器操作型阀提供两步致动器操作压力Pa的电动气动转换装置，振动传感器固定到致动器操作型阀的上游侧管道以便自由地安装/拆卸;以及调谐箱，用于输入由振动传感器检测到的振动检测信号Pr，并且用于输出控制信号Sc以控制将两步致动器操作压力Pa的步进操作压力Ps'设置到电动气动转换装置，并且使电动气动转换装置以步进操作压力Ps'输出两步致动器操作压力Pa，以转动振动检测信号根据控制信号Sc的调整，Pr几乎为零。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP2005115501A Chamber internal pressure controller and internal pressure controlled chamber 有权
标题翻译：室内压力控制器和内压控制室
公开(公告)号：JP2005115501A
公开(公告)日：2005-04-28
申请号：JP2003346497
申请日：2003-10-06
申请人： Fujikin Inc , Tadahiro Omi , 忠弘大見 , 株式会社フジキン
发明人： OMI TADAHIRO , TERAMOTO AKINOBU , UNO TOMIO , DOI RYOSUKE , NISHINO KOJI , NAKAMURA OSAMU , MATSUMOTO ATSUSHI , NAGASE MASAAKI , IKEDA SHINICHI
IPC分类号： G05D7/06 , G05D16/20
CPC分类号： G05D16/208 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： PROBLEM TO BE SOLVED: To control a chamber internal pressure with high precision over a wide range while regulating a gas flow rate fed to a chamber by preventing a flow rate control precision in a low flow rate area from lowering greatly and accurately controlling the flow rate over the whole flow rate control area. SOLUTION: A gas supply device formed of a plurality of pressure type flow rate controllers connected in parallel and a controller controlling operation of them supplies a desired gas to a chamber evacuated by a vacuum pump while controlling a gas flow rate. One of the pressure type flow rate controllers serves as a controller controlling a gas flow area for up to 10% of the maximum flow rate supplied to the chamber, while the rest of the pressure type flow rate controllers control the rest of the gas flow rate areas. A pressure detector is arranged in the chamber, and the detection value of the pressure detector is inputted to the controller for regulating a control signal to the pressure type flow rate controller. In this way, the gas supply quantity to the chamber is controlled, and the chamber internal pressure is controlled. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过防止低流量区域中的流量控制精度降低大大和精确地控制，通过在宽范围内以高精度控制室内压力，同时调节供给到室的气体流量整个流量控制区域的流量。解决方案：由并联连接的多个压力式流量控制器形成的气体供给装置和控制其操作的控制器在控制气体流量的同时将期望的气体供应到由真空泵抽真空的室。压力式流量控制器中的一个用作控制气体流动面积达到提供给腔室的最大流量的10％的控制器，而其余的压力式流量控制器控制气体流量的其余部分区域。压力检测器设置在腔室中，压力检测器的检测值被输入到控制器，用于调节对压力型流量控制器的控制信号。以这种方式，控制到室的气体供应量，并且控制室内压力。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2005195525A Small hole diameter automatic measuring instrument, small hole diameter measuring method, and shower plate manufacturing method 有权
标题翻译：小孔直径自动测量仪器，小孔直径测量方法和淋浴板制造方法
公开(公告)号：JP2005195525A
公开(公告)日：2005-07-21
申请号：JP2004003718
申请日：2004-01-09
申请人： Fujikin Inc , Tadahiro Omi , 忠弘大見 , 株式会社フジキン
发明人： OMI TADAHIRO , NAGASE MASAAKI , DOI RYOSUKE , NISHINO KOJI , NAKAMURA OSAMU , UNO TOMIO , IKEDA SHINICHI
IPC分类号： G01B13/10
CPC分类号： G01B13/10 , Y10T29/49432
摘要： PROBLEM TO BE SOLVED: To continuously, highly efficiently, and accurately, measure the diameter or cross section area of each of a plurality of small holes formed in a plate while determining and reporting small holes having diameter errors exceeding a set value. SOLUTION: This small hole diameter automatic measuring instrument comprises: a flow measuring part B mainly composed of an automatic pressure controller 4 for supplying a fluid to the inlet side of the small holes 8 with a set inlet side pressure P 1 controlled at a desired value while keeping an outlet side pressure P 2 of the small holes 8 in a plate 7 and an inlet side pressure P 1 of the small holes 8 in a critical state of the fluid; a plate supporter 12 for rotatably supporting the plate 7; a test probe supporter 13 thereabove for supporting a test probe 6 in an ascendable/descendable and traversable manner, the test probe 6 supplying the fluid from the measuring part B by making close contact airtightly with the inlet side of the small holes 8; a plate hold part C comprising controllers 14 and 15 for the two supporters 12 and 13; and a control part C equipped with a calculation/determination part C 2 for calculating the diameter or cross section area of each of the small holes 8 in process of supplying the fluid based on flow measurement values from the measuring part B, and an external output part C 3 for outputting relevant calculation values to the exterior. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了连续，高效，准确地测量形成在板中的多个小孔中的每一个的直径或横截面积，同时确定和报告具有超过设定值的直径误差的小孔。
解决方案：该小孔径自动测量仪器包括：主要由自动压力控制器4组成的流量测量部分B，该自动压力控制器4用于将流体供应到小孔8的入口侧，设定的入口侧压力P 1 控制在期望值，同时保持板7中的小孔8的出口侧压力P 2 和入口侧压力P 1 处于临界状态的小孔8; 用于可旋转地支撑板7的板支撑件12; 测试探针支撑件13，用于以可升降/可移动的方式支撑测试探针6，测试探针6通过与小孔8的入口侧紧密接触而从测量部分B供应流体; 包括用于两个支撑件12和13的控制器14和15的板保持部分C; 以及配备有计算/确定部件C 2 的控制部件C，用于根据来自测量装置的流量测量值计算供给流体的每个小孔8的直径或横截面面积部分B和用于将相关计算值输出到外部的外部输出部分C 3 。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2004264881A Flow control method of hydrogen fluoride gas, and flow control device for hydrogen fluoride gas used therefor 有权
公开(公告)号：JP2004264881A
公开(公告)日：2004-09-24
申请号：JP2003010162
申请日：2003-01-17
申请人： Fujikin Inc , Tadahiro Omi , Tokyo Electron Ltd , 忠弘大見 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SUGIYAMA KAZUHIKO , MIZUSAWA KANEYOSHI , TAKAHASHI EIJI , UNO TOMIO , NISHINO KOJI , DOI RYOSUKE , IKEDA SHINICHI , NAGASE MASAAKI
IPC分类号： G05D7/06
CPC分类号： H01L21/67023 , G05D7/0635 , Y10T137/6416 , Y10T137/6606 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To enable the precise flow control, with respect to a flow rate range of about 3-300 SCCM, of HF gas to be supplied to a vacuum chamber or the like by use of a pressure type flow control device. SOLUTION: In this flow control method of hydrogen fluoride gas using the pressure type flow control device, the flow rate of the gas passing through an orifice in the state where the ratio P 2 /P 1 of the gas pressure P 1 on the orifice upstream side gas and the gas pressure P 2 on the orifice downstream side is retained at a critical pressure ratio of gas or less is calculated as Q=KP 1 (wherein K is a constant). The hydrogen fluoride gas is passed through the orifice while heating the pressure type flow control device to a temperature of 40°C or higher. COPYRIGHT: (C)2004,JPO&NCIPI

5. 发明专利

JP2004213638A Closing method of fluid path, water hammer-less valve device and water hammer-less closing device 有权
公开(公告)号：JP2004213638A
公开(公告)日：2004-07-29
申请号：JP2003414383
申请日：2003-12-12
申请人： Fujikin Inc , Tadahiro Omi , 忠弘大見 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , NAGASE MASAAKI , DOI RYOSUKE , IKEDA SHINICHI , NISHIMURA RYUTARO
IPC分类号： F16K31/04 , F16K31/02 , F16K31/12 , G05D16/02
摘要： PROBLEM TO BE SOLVED: To urgently close a fluid path without generating a water hammer and in short time by an extremely simple device and operation. SOLUTION: This water hammer-less closing device is constituted of an actuator-operated valve interposed on the fluid path, an electropneumatic converter for supplying two-stage actuator operation pressure Pa to the actuator-operated valve, an oscillation sensor attachably/detachably fixed to a duct on the upstream side of the actuator-operated valve, and a tuning box in which an oscillation detection signal Pr detected by the oscillation sensor is inputted and from which a control signal Sc is outputted for controlling the size of step operation pressure Ps' of the two-stage actuator operation pressure Pa to the electropneumatic converter and also the two-stage actuator operation pressure Pa of the step operation pressure Ps' is outputted, by which the oscillation detection signal Pr becomes approximately zero, being outputted from the electropneumatic converter by adjustment of the control signal Sc. COPYRIGHT: (C)2004,JPO&NCIPI

6. 发明专利

JP2014238391A 原料流体濃度検出器有权
标题翻译：原料流体浓度检测器
公开(公告)号：JP2014238391A
公开(公告)日：2014-12-18
申请号：JP2014096920
申请日：2014-05-08
申请人：国立大学法人徳島大学 , Univ Of Tokushima , 株式会社フジキン , Fujikin Inc
发明人： DEGUCHI YOSHIHIRO , NAGASE MASAAKI , DOI RYOSUKE , IKEDA NOBUKAZU , NISHINO KOJI , YAMAJI MICHIO , YAKUSHIJIN TADAYUKI
IPC分类号： G01N21/05 , G01N21/33
CPC分类号： G01N9/00 , G01N9/24 , G01N21/05 , G01N21/33 , G01N21/59 , G01N21/85 , G01N2201/08
摘要：【課題】有機原料流体の供給系等で使用する濃度計の構造の簡素化、小型化、製品コストの引下げを図り、光透過窓の透明度を一定に保って安定した濃度測定が出来ると共に、気密性能や耐パーティクル性を高めた濃度計を提供する。【解決手段】検出器本体2と、検出器本体2の上面または下面に設けた光発振部及び光検出部とからなる光分析式原料流体濃度検出器であって、検出器本体には上面及び下面に少なくとも一つの凹部を形成し、検出器本体の流体入口から凹部に連通する流体流路と、凹部間を連通する流体通路と、凹部から検出器本体の流体出口に連通する流体流路とを備えた構成とし、最も入口に近い凹部に光発振部を配置し、残りの凹部に光検出部を配置する構成とする。【選択図】図1
摘要翻译：要解决的问题：为了提供一种在具有简化的结构的有机原料流体的供给系统等中使用的浓度计的尺寸和制造成本的降低，能够在保持透光性的同时保持稳定的浓度测量窗口常数，并提高气密性能和颗粒阻力性能。解决方案：一种光分析型原料流体浓度检测器，包括检测器主体2和设置在检测器主体2的上表面或下表面上的光振动部分和光检测部分检测器主体在其上表面和下表面上具有至少一个凹部，包括：从所述检测器主体的流体入口与所述凹部连通的流体流动通道; 在所述凹部之间连通的流体通路; 以及从所述凹部与所述检测器主体的流体出口连通的流体流路。光振动部配置在最靠近入口的凹部，光检测器配置在残留凹部。

7. 发明专利

JP2013019003A Raw material gas supply device for semiconductor manufacturing device 有权
标题翻译：用于半导体制造设备的原材料气体供应装置
公开(公告)号：JP2013019003A
公开(公告)日：2013-01-31
申请号：JP2011151375
申请日：2011-07-08
申请人： Fujikin Inc , 株式会社フジキン
发明人： NAGASE MASAAKI , HIDAKA ATSUSHI , HIRATA KAORU , DOI RYOSUKE , NISHINO KOJI , IKEDA SHINICHI
IPC分类号： C23C16/448 , H01L21/31
CPC分类号： C23C16/448 , C23C16/4485 , C23C16/45561 , C23C16/52 , Y10T137/86485
摘要： PROBLEM TO BE SOLVED: To provide a raw material gas supply device that is configured to achieve the simplification and miniaturization of a structure, in which only a raw material gas which is vapor of a liquid raw material gas can be stably supplied to a process chamber while controlling a flow rate at high precision without using a carrier gas.SOLUTION: The raw material gas supply device is constituted in such a manner that the temperature of a source tank 5 storing a liquid raw material gas is held to a set value, further, the supply pressure of the raw material gas G1, which is vapor of the liquid raw material gas derived from an upper space part inside the source tank, to a process chamber 11 is controlled by an automatic pressure regulator 6, and the raw material gas G1 is supplied to the process chamber via an throttle part while holding the pressure of the raw material gas inside the secondary side gas flow passage of the automatic pressure regulator to a desired set pressure.
摘要翻译：解决的问题：提供一种原料气体供给装置，其被构造为实现仅能够将液态原料气体的蒸汽的原料气体稳定地供给到的结构的简化和小型化处理室，同时以高精度控制流量而不使用载气。解决方案：原料气体供给装置构成为使得储存液体原料气体的源罐5的温度保持在设定值，此外，原料气体G1的供给压力，将来自源槽内的上部空间部分的液体原料气体的蒸气通过自动压力调节器6控制到处理室11，原料气体G1经由节气门部分同时将原料气体的压力保持在自动压力调节器的次级侧气体流路内，达到期望的设定压力。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2008015581A Operation abnormality detecting method in downstream side valve of throttle mechanism of pressure type flow rate control apparatus 有权
标题翻译：压力型流量控制装置的压力机构下游侧阀的操作异常检测方法
公开(公告)号：JP2008015581A
公开(公告)日：2008-01-24
申请号：JP2006183061
申请日：2006-07-03
申请人： Fujikin Inc , 株式会社フジキン
发明人： NAGASE MASAAKI , DOI RYOSUKE , IKEDA SHINICHI , NISHINO KOJI , HIRATA KAORU , SUGITA KATSUYUKI , MATSUMOTO ATSUSHI
IPC分类号： G05D7/06 , G01F1/00 , G01F1/36
CPC分类号： G05D7/0635 , G01F1/36 , G01F15/005 , G01F15/022
摘要： PROBLEM TO BE SOLVED: To make opening of a downstream side valve of a throttle mechanism to be easily determined from a varying state of a flow rate output signal at operation time of a pressure type flow rate control apparatus since it is disadvantageous that an opening operation of the downstream side valve of the throttle mechanism cannot be determined by existence of the flow rate output signal on the mechanism in a conventional pressure type flow rate control apparatus. SOLUTION: In the pressure type flow rate control apparatus, the downstream side valve of the throttle mechanism is made to be opened while a flow rate setting value Qe to be inputted into the pressure type flow rate control apparatus is made to be varied, and magnitude ΔV of variation of the flow rate output signal Qo from the pressure type control apparatus in which the flow rate setting value Qe being varied is to be detected. When the magnitude ΔV of variation of the flow rate output signal Qo is larger than a determined value, an opening operation of the downstream side valve of the throttle mechanism is to be determined as normal, while the opening operation is to be determined as abnormal when the magnitude ΔV of the variation is smaller than the predetermined value. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了在压力式流量控制装置的运行时间内从流量输出信号的变化状态容易地确定节流机构的下游侧阀的打开，因为不利的是节气门机构的下游侧阀的打开动作不能由现有的压力式流量控制装置的机构的流量输出信号的存在来确定。解决方案：在压力式流量控制装置中，使节流机构的下游侧阀打开，同时输入到压力式流量控制装置的流量设定值Qe变化，并且要检测来自其中改变流量设定值Qe的压力型控制装置的流量输出信号Qo的变化幅度ΔV。当流量输出信号Qo的变化幅度ΔV大于确定值时，节流机构的下游侧阀的打开操作将被正常地确定，而打开操作将被确定为异常变化的幅度ΔV小于预定值。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2008010510A Material vaporization supply apparatus and automatic pressure regulator used therefor 有权
标题翻译：材料蒸发供应装置及其自动调压器
公开(公告)号：JP2008010510A
公开(公告)日：2008-01-17
申请号：JP2006177113
申请日：2006-06-27
申请人： Fujikin Inc , 株式会社フジキン
发明人： HIRATA KAORU , NAGASE MASAAKI , HIDAKA ATSUSHI , MATSUMOTO ATSUSHI , DOI RYOSUKE , NISHINO KOJI , IKEDA SHINICHI
IPC分类号： H01L21/205 , C23C16/455
CPC分类号： C23C16/4481 , C23C16/52 , G05D16/2013 , Y10T137/7737
摘要： PROBLEM TO BE SOLVED: To provide a material vaporization supply apparatus which can accurately control the supply quantity of material to a process chamber, and is used for semiconductor manufacture by MODVC method. SOLUTION: The material vaporization supply apparatus is comprised of a source tank for accumulating material; a flow rate control device which adjusts a carrier gas from a carrier gas supply source at a constant flow rate, and supplies it to the material in the source tank; a primary piping route to lead a mixed gas Go of material vapor G 4 and a carrier gas G 1 accumulating in the upper space of the source tank; an automatic pressure regulator which adjusts the opening of a control valve provided at the end of the primary piping route on the basis of the detected values of pressure and temperature of the mixed gas Go of the primary piping route, and holds the pressure of the mixed gas Go in the source tank at a constant value by adjusting the sectional area of the route distributing the mixed gas Go; and a constant-temperature heater which heats a part other than a computation control unit of the source tank and the automatic pressure regulator at a set temperature. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够精确地控制处理室的材料供给量的材料蒸发供给装置，并且通过MODVC方法用于半导体制造。
解决方案：材料蒸发供应装置由用于堆积材料的源罐组成; 流量控制装置，其以恒定的流量调节来自载气供给源的载气，并将其供给到源罐中的材料; 引导物料蒸气G 4 的混合气体Go的主要管道路线和积聚在源罐的上部空间中的载气G 1 基于主要管路的混合气体Go的压力和温度的检测值，调整设置在主管路的末端的控制阀的开度的自动压力调节器，并且保持混合的压力气体通过调整分配混合气体Go的路径的截面积，以恒定值进入源罐; 以及恒温加热器，其在设定温度下加热源罐的计算控制单元和自动压力调节器以外的部分。版权所有（C）2008，JPO＆INPIT

10. 发明专利

JP2007095042A Method of detecting abnormality in fluid supply system using flow rate control device having pressure sensor 有权
标题翻译：使用具有压力传感器的流量控制装置检测流体供应系统中的异常的方法
公开(公告)号：JP2007095042A
公开(公告)日：2007-04-12
申请号：JP2006228526
申请日：2006-08-25
申请人： Fujikin Inc , 株式会社フジキン
发明人： NAGASE MASAAKI , DOI RYOSUKE , IKEDA SHINICHI , NISHINO KOJI , HIRATA KAORU , SUGITA KATSUYUKI , MATSUMOTO ATSUSHI
IPC分类号： G05D7/06
CPC分类号： G01F1/42 , F16K37/0091 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To simply, quickly, and accurately check abnormalities, such as an operational malfunction and a seat leakage of a plurality of valves assembled in a fluid supply system, using a flow rate control device, without removing the valves from a pile line of the fluid supply system with the use of a function of the flow rate control device having a pressure sensor. SOLUTION: In the fluid supply system having the flow rate control device provided with the pressure sensor that has a flow rate setting mechanism, a flow rate/pressure display mechanism and/or a flow rate self-diagnosis mechanism, abnormality of the flow rate control device and a control valve on the upstream side or on the downstream side of the flow rate control device is detected, by using a pressure display value of the flow rate control device and/or a diagnosis value of the flow rate self-diagnosis mechanism. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：使用流量控制装置简单，快速，准确地检查组装在流体供应系统中的多个阀的运行故障和阀座泄漏的异常，而不需要移除阀通过使用具有压力传感器的流量控制装置的功能，从流体供应系统的桩线。解决方案：在具有设置有具有流量设定机构，流量/压力显示机构和/或流量自诊断机构的压力传感器的流量控制装置的流体供给系统中，通过使用流量控制装置的压力显示值和/或流量控制装置的诊断值来检测流量控制装置的上游侧或下游侧的流量控制装置和控制阀，诊断机制。版权所有（C）2007，JPO＆INPIT

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