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    • 26. 发明申请
    • METHOD FOR PRODUCING HOLLOW STRUCTURE
    • 生产中空结构的方法
    • US20110123935A1
    • 2011-05-26
    • US12909329
    • 2010-10-21
    • Wataru KusakiToshinobu Ishihara
    • Wataru KusakiToshinobu Ishihara
    • G03F7/20B32B38/10
    • B32B38/10
    • Provided is a fabrication method with which a laminate having a hollow structure can be produced more easily, while enabling to produce a multilayer structure as well. That is, a method for producing a hollow structure, a fabrication method by stacking-up a structural material among fabrication methods of a hollow structure on a substrate, the method including a step of forming a structural material layer on a substrate, a step of forming a pattern on the structural material layer, a step of forming a sacrificial material layer by burying between the patterns with a water-soluble or an alkaline-soluble polymer as the sacrificial material to be buried between the patterns, a step of further laminating a structural material layer and forming a pattern on the structural material layer laminated, and a step of finally removing the sacrificial material after all of lamination is completed.
    • 提供了一种能够更容易地制造具有中空结构的层叠体的制造方法,同时能够制造多层结构。 也就是说,制造中空结构体的方法,在基材的中空结构体的制造方法中堆叠结构材料的制造方法,该方法包括在基板上形成结构材料层的工序, 在结构材料层上形成图案,通过用水溶性或碱溶性聚合物之间掩埋图案形成牺牲材料层作为待掩埋在图案之间的牺牲材料的步骤,进一步层压 结构材料层并在层压的结构材料层上形成图案,并且完成所有层压之后最后去除牺牲材料的步骤。