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21. 发明申请

US20060290930A1 Method and apparatus for inspecting pattern defects 审中-公开
标题翻译：检查图案缺陷的方法和装置
公开(公告)号：US20060290930A1
公开(公告)日：2006-12-28
申请号：US11434070
申请日：2006-05-16
申请人： Hidetoshi Nishiyama , Yukihiro Shibata , Shunji Maeda , Sachio Uto
发明人： Hidetoshi Nishiyama , Yukihiro Shibata , Shunji Maeda , Sachio Uto
IPC分类号： G01N21/00
CPC分类号： G01N21/95623
摘要： The present invention relates to a pattern defect inspection apparatus, wherein light emitted from an illumination source capable of outputting a plurality of wavelengths is linearly illuminated by an illuminating optical system. Diffracted or scattered light due to a circuit pattern or defect on a wafer is collected by an imaging optical system onto a line sensor and converted into a digital signal, and the defect is detected by a signal processing section. Then, the defect can be detected with high sensitivity since a surface to be formed by an optical axis of the illuminating optical system and an optical axis of the imaging optical system is almost collimated to a direction of a wiring pattern and further since an angle to be formed by the optical axis of the imaging optical system and the wafer is set to an angle with less diffracted light from the pattern. Thereby, the pattern defect inspection detecting various defects on the wafer with high sensitivity at high speed can be achieved.
摘要翻译：本发明涉及一种图案缺陷检查装置，其中从能够输出多个波长的照明源发射的光线由照明光学系统线性地照亮。由于晶片上的电路图案或缺陷导致的衍射或散射光被成像光学系统收集到线传感器上并转换成数字信号，并且由信号处理部分检测缺陷。然后，由于要由照明光学系统的光轴和成像光学系统的光轴形成的表面几乎准直到布线图案的方向，因此可以以高灵敏度检测缺陷，并且进一步由于与由成像光学系统的光轴形成，并且将晶片设置成与来自图案的较少衍射光的角度。由此，可以实现以高速度高灵敏度地检测晶片上的各种缺陷的图案缺陷检查。

22. 发明授权

US07142294B2 Method and apparatus for detecting defects 有权
标题翻译：检测缺陷的方法和装置
公开(公告)号：US07142294B2
公开(公告)日：2006-11-28
申请号：US10020977
申请日：2001-12-19
申请人： Yukihiro Shibata , Shunji Maeda
发明人： Yukihiro Shibata , Shunji Maeda
IPC分类号： G01N21/00 , G06K9/00
CPC分类号： G01N21/9501 , G01N21/21
摘要： An image of a sample that has high contrast both in large and fine pattern parts is acquired by using an optical system for coaxial bright field epi-illumination, forming the optical image of the sample with various transmission ratio of 0-th order diffracted light that is reflected regularly from the sample, and capturing the image by an image sensor. Optical conditioning is automatically set and in a short time by detecting a plurality of optical images of the sample under various conditions for the transmission ratio of the 0-th order diffracted light, evaluating quality of the detected images, and determining the transmission ratio of the 0-th order diffracted light showing the maximum defect detection sensitivity.
摘要翻译：通过使用用于同轴的亮场表面照明的光学系统来获得具有大的和精细图案部分中的高对比度的样本的图像，以0级衍射光的各种传输比形成样品的光学图像，从样本中经常反射，并通过图像传感器捕获图像。通过在各种条件下检测出0级衍射光的透射率，评估检测图像的质量，并确定检测到的图像的透射率，自动设置光学调理并且在短时间内检测样品的多个光学图像表示最大缺陷检测灵敏度的0级衍射光。

23. 发明授权

US06874466B2 Intake valve device 失效
标题翻译：进气阀装置
公开(公告)号：US06874466B2
公开(公告)日：2005-04-05
申请号：US10844587
申请日：2004-05-13
申请人： Yukihiro Shibata , Toru Sakurai
发明人： Yukihiro Shibata , Toru Sakurai
IPC分类号： F02D9/10
CPC分类号： F02D9/1005 , F02D9/106 , F02D9/1065
摘要： An intake valve device includes a throttle body defining a bore for the flow of intake air. A throttle shaft is rotatably mounted to the throttle body. A slit is formed in the throttle shaft in a diametrical direction and extends throughout the diameter of the throttle shaft. The slit has opposing end walls along the rotational axis of the throttle shaft. A throttle valve is inserted into the slit of the throttle shaft and fixed in position relative to the throttle shaft. Possible intake air leakage channels are defined between the outer periphery of the throttle valve and the end walls of the slit. At least one restriction portion is formed on the throttle valve so as to extend into at least one of the possible leakage channels in order to narrow the possible leakage channel and reduce or inhibit the leakage of intake air.
摘要翻译：进气门装置包括限定用于进气流动的孔的节气门体。节气门轴可旋转地安装在节气门体上。节流轴在直径方向上形成狭缝，并且在节流轴的直径上延伸。狭缝沿着节流轴的旋转轴线具有相对的端壁。节流阀插入节流阀的狭缝中并相对于节流轴固定在适当的位置。可能的进气泄漏通道限定在节流阀的外周和狭缝的端壁之间。至少一个限制部分形成在节流阀上，以便延伸到至少一个可能的泄漏通道中，以便缩小可能的泄漏通道并减少或抑制进气的泄漏。

24. 发明申请

US20050052642A1 Method and its apparatus for inspecting defects 有权
标题翻译：检查缺陷的方法及其装置
公开(公告)号：US20050052642A1
公开(公告)日：2005-03-10
申请号：US10893988
申请日：2004-07-20
申请人： Yukihiro Shibata , Shunji Maeda , Hitoshi Kubota
发明人： Yukihiro Shibata , Shunji Maeda , Hitoshi Kubota
IPC分类号： G01B11/30 , G01N21/13 , G01N21/15 , G01N21/88 , G01N21/95 , G01N21/956 , G06K9/00 , H01L21/66
CPC分类号： G01N21/9501 , G01N21/13 , G01N21/8806 , G01N21/95607 , G01N21/95623 , G01N2021/154 , G01N2021/8825 , G01N2021/9513
摘要： The present invention relates to a high-sensitivity inspection method and apparatus adapted for the fine-structuring of patterns, wherein defect inspection sensitivity is improved using the following technologies: detection optical system is improved in resolution by filling the clearance between an objective lens 30 and a sample 1, with a liquid, and increasing effective NA (Numerical Aperture); and when a transparent interlayer-insulating film is formed on the surface of the sample, amplitude splitting at the interface between the liquid and the insulating film is suppressed for reduction in the unevenness of optical images in brightness due to interference of thin-film, by immersing the clearance between the objective lens and the sample, with a liquid of a refractive index close to that of the transparent film.
摘要翻译：本发明涉及一种适用于图案精细化的高灵敏度检测方法和装置，其中使用以下技术提高了缺陷检查灵敏度：通过填充物镜30与物镜30之间的间隙来提高检测光学系统的分辨率。样品1，具有液体，并且增加有效NA（数值孔径）; 并且当在样品的表面上形成透明的层间绝缘膜时，抑制液体与绝缘膜之间的界面处的振幅分裂，以减少由于薄膜的干扰引起的光学图像在亮度上的不均匀性，由将物镜与样品之间的间隙浸入折射率接近于透明膜的液体。

25. 发明授权

US06674890B2 Defect inspection method and apparatus therefor 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US06674890B2
公开(公告)日：2004-01-06
申请号：US09733092
申请日：2000-12-11
申请人： Shunji Maeda , Kenji Oka , Hiroshi Makihira , Yasuhiko Nakayama , Minoru Yoshida , Yukihiro Shibata , Chie Shishido
发明人： Shunji Maeda , Kenji Oka , Hiroshi Makihira , Yasuhiko Nakayama , Minoru Yoshida , Yukihiro Shibata , Chie Shishido
IPC分类号： G06K900
CPC分类号： G06T7/001 , G01R31/308 , G01R31/311 , G03F7/7065 , G06T7/0004 , G06T2207/10061 , G06T2207/30121 , G06T2207/30148
摘要： A pattern inspection method and apparatus in which an image of a first pattern formed on a sample and an image of a second pattern formed on the sample is detected. At least one of the first pattern image and the second pattern image is converted to a gray level so as to be substantially the same with each other by linear combination including a gain and offset. A defect of the sample is detected by using the first pattern image and the second pattern image at least one of which has been converted to the gray level and a result of the detection is outputted to an external storage or processor by a communication arrangement.
摘要翻译：检测形成在样本上的第一图案的图像和形成在样本上的第二图案的图像的图案检查方法和装置。第一图案图像和第二图案图像中的至少一个被转换为灰度级，以便通过包括增益和偏移的线性组合彼此基本相同。通过使用第一图案图像和其中至少一个已经被转换为灰度级的第二图案图像和通过通信装置将检测结果输出到外部存储器或处理器来检测样本的缺陷。

26. 发明授权

US6132162A Storage construction for spare tire of motor vehicle 失效
标题翻译：机动车备胎仓储施工
公开(公告)号：US6132162A
公开(公告)日：2000-10-17
申请号：US453446
申请日：1999-12-03
申请人： Yasuo Kito , Yukihiro Shibata , Masanobu Hanazaki , Kei Ikeda
发明人： Yasuo Kito , Yukihiro Shibata , Masanobu Hanazaki , Kei Ikeda
IPC分类号： B62D43/04
CPC分类号： B62D43/045
摘要： A storage construction in which a spare tire of a motor vehicle is stored, comprising: a tire storage portion for storing the spare tire, which is disposed under a floor panel of the motor vehicle; a hoisting cable at one end of which a hanger engageable with a hub hole of the spare tire is provided; a hoist around which the other end of the hoisting cable is wound and which lifts the spare tire by winding the hoisting cable so as to store the spare tire in the tire storage portion and lowers the spare tire from the tire storage portion by unwinding the hoisting cable; an operating handle which is detachably inserted into an insertion portion of the hoist from a cabin of the motor vehicle such that winding and unwinding of the hoisting cable by the hoist are performed by operating the operating handle; a detachment preventing device which prevents detachment of the operating handle from the hoist before the spare tire is lifted to a hoisting completion position by the hoist; and a contact member which is secured to the hoisting cable and is brought into contact, when the spare tire has been lifted to the hoisting completion position by the hoist, with the detachment preventing device so as to set the detachment preventing device to an inoperative state such that the operating handle can be detached from the hoist.
摘要翻译：一种存储机动车辆的备用轮胎的存储结构，其特征在于，包括：轮胎收纳部，其将备用轮胎存储在所述机动车辆的地板面下; 提供电缆，其一端设有可与备用轮胎的轮毂孔接合的吊架; 提升电缆的另一端缠绕的升降机，并且通过卷绕提升电缆提升备用轮胎，以便将备用轮胎存储在轮胎存储部分中，并且通过展开提升将备用轮胎从轮胎存储部分降低电缆; 操作手柄，其从机动车辆的车厢可拆卸地插入到提升机的插入部分中，使得通过操作操作手柄来执行由提升机卷绕和退绕的提升电缆; 防拆装置，其在所述备用轮胎由所述起重机提升到提升完成位置之前，防止所述操作手柄从所述起重机脱离; 以及接触构件，其通过所述提升机将所述备用轮胎提升到所述提升完成位置时，固定在所述提升缆绳上并与所述接触构件接触，所述防拆装置将所述防脱装置设定为不工作状态使得操作手柄能够与起重机分离。

27. 发明授权

US6091075A Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus 失效
标题翻译：自动对焦检测方法，自动对焦检测装置和检查装置
公开(公告)号：US6091075A
公开(公告)日：2000-07-18
申请号：US87901
申请日：1998-06-01
申请人： Yukihiro Shibata , Shunji Maeda , Hiroshi Makihara , Minoru Yoshida , Yasuhiko Nakayama , Kenji Oka
发明人： Yukihiro Shibata , Shunji Maeda , Hiroshi Makihara , Minoru Yoshida , Yasuhiko Nakayama , Kenji Oka
IPC分类号： G01N21/95 , G02B21/24 , G01N21/00 , G01N21/88
CPC分类号： G02B21/241 , G01N21/9501
摘要： An automatic focus detection method comprises the steps of: irradiating onto a single spot of a sample a plurality of beams of illuminating light transmitted and condensed through an objective lens in a symmetrically diagonal manner with respect to an optical axis of the objective lens; branching reflected light from the same spot of the illuminated sample after transmission through the objective lens, in directions of illumination symmetrical with respect to the optical axis so as to obtain a plurality of optical images; and causing a photoelectric conversion device to receive the branched optical images for conversion to an electric signal representing light intensity distribution of the images, whereby a defocus of the sample is detected based on a discrepancy between the optical axis and the center of the light intensity distribution.
摘要翻译：一种自动对焦检测方法，包括以下步骤：以相对于物镜的光轴对称对角线的方式，将通过物镜透射和聚光的多束照明光照射在样品的单个点上; 在相对于光轴对称的照明方向透射物镜之后，将来自照射样品的同一点的反射光分支，以获得多个光学图像; 并且使光电转换装置接收用于转换为表示图像的光强度分布的电信号的分支光学图像，由此基于光轴和光强度分布的中心之间的差异来检测样品的散焦。

28. 发明授权

US5614926A Word processor with a handwriting text processing function 失效
标题翻译：文字处理器具有手写文字处理功能
公开(公告)号：US5614926A
公开(公告)日：1997-03-25
申请号：US579033
申请日：1995-12-19
申请人： Hiroyuki Shigematsu , Hirofumi Nishikawa , Yukihiro Shibata
发明人： Hiroyuki Shigematsu , Hirofumi Nishikawa , Yukihiro Shibata
IPC分类号： G06F3/033 , G06F3/048 , G09G5/00
CPC分类号： G06F3/04883
摘要： A word processor is provided with a handwriting text processing function. A display displays document and text processing information. A pointing device enters handwritten text processing figures on a display. A memory stores text processing instructions associated with an text processing figure drawn on the screen. A direction in which the pointing device is moved on the screen to draw a figure, a length of the drawn figure on the screen, and/or which of several regions of the display the pointing device is presently pointing to are determined and used to distinguish different text processing functions associated with the same basic handwritten text processing figure. The word processor uses this information to selectively execute different kinds of text processing instructions such as an up-scroll of the screen, a down-scroll of the screen, a display of document head, a display of document tail, a display of underline, a display of line head, an arbitrary cursor movement, and a cursor shift on the same line.
摘要翻译：文字处理器具有手写文字处理功能。显示器显示文档和文本处理信息。指示设备在显示器上输入手写文字处理图。存储器存储与在屏幕上绘制的文本处理图形相关联的文本处理指令。指定设备在屏幕上移动以绘制图形的方向，屏幕上绘制的图形的长度和/或指示设备当前指向的显示器的几个区域中的哪一个被确定并用于区分不同的文字处理功能与相同的基本手写文字处理图相关联。字处理器使用该信息来选择性地执行不同类型的文本处理指令，例如屏幕的向上滚动，屏幕的向下滚动，文档头的显示，文档尾部的显示，下划线的显示，行头的显示，任意的光标移动和同一行上的光标移位。

29. 发明授权

US09255793B2 Defect inspection method and device thereof 有权
标题翻译：缺陷检查方法及其装置
公开(公告)号：US09255793B2
公开(公告)日：2016-02-09
申请号：US13521086
申请日：2011-02-09
申请人： Yukihiro Shibata , Toshifumi Honda , Taketo Ueno , Atsushi Taniguchi
发明人： Yukihiro Shibata , Toshifumi Honda , Taketo Ueno , Atsushi Taniguchi
IPC分类号： G01N21/55 , G06F19/00 , G01B11/30 , G01N21/956 , H01L21/67
CPC分类号： G01B11/303 , G01N21/956 , H01L21/67288
摘要： A defect inspection device includes an irradiation unit for simultaneously irradiating different regions on a sample with illumination light under different optical conditions, the sample being predesigned to include patterns repeatedly formed thereupon, wherein the patterns are to be formed in the same shape; a detection unit for detecting, for each of the different regions, a beam of light reflected from each region irradiated with the illumination light; a defect candidate extraction unit for extracting defect candidates under the different optical conditions for each of the different regions, by processing detection signals corresponding to the reflected light which is detected; a defect extraction unit for extracting defects by integrating the defect candidates extracted under the different optical conditions; and a defect classifying unit for calculating feature quantities of the extracted defects and classifies the defects according to the calculated feature quantities.
摘要翻译：缺陷检查装置包括：照射单元，用于在不同光学条件下用照明光同时照射样品上的不同区域，所述样品被预先设计为包括在其上重复形成的图案，其中所述图案将被形成为相同的形状; 检测单元，用于针对每个所述不同区域检测从照射光照射的每个区域反射的光束; 缺陷候选提取单元，用于通过处理与检测到的反射光相对应的检测信号来提取在不同区域的不同光学条件下的缺陷候选; 缺陷提取单元，用于通过对在不同光学条件下提取的缺陷候选进行积分来提取缺陷; 以及缺陷分类单元，用于计算提取的缺陷的特征量，并根据所计算的特征量对缺陷进行分类。

30. 发明授权

US08958062B2 Defect inspection method and device using same 有权
标题翻译：缺陷检查方法和装置使用相同
公开(公告)号：US08958062B2
公开(公告)日：2015-02-17
申请号：US13701834
申请日：2011-07-01
申请人： Yukihiro Shibata , Toshiyuki Nakao , Yuta Urano , Toshifumi Honda
发明人： Yukihiro Shibata , Toshiyuki Nakao , Yuta Urano , Toshifumi Honda
IPC分类号： G01N21/00 , G01N21/956 , G01N21/88 , G01N21/95
CPC分类号： G01N21/956 , G01N21/8806 , G01N21/9501
摘要： In order to enable inspections to be conducted at a sampling rate higher than the pulse oscillation frequency of a pulsed laser beam emitted from a laser light source, without damaging samples, a defect inspection method is disclosed, wherein: a single pulse of a pulsed laser beam emitted from the laser light source is split into a plurality of pulses; a sample is irradiated with this pulse-split pulsed laser beam; scattered light produced by the sample due to the irradiation is focused and detected; and defects on the sample are detected by using information obtained by focusing and detecting the scattered light from the sample. Said defect inspection method is configured such that the splitting a single pulse of the pulsed laser beam into a plurality of pulses is controlled in such a manner that the peak values of the split pulses are substantially uniform.
摘要翻译：为了使得能够以高于从激光光源发射的脉冲激光束的脉冲振荡频率的采样率进行检查，而不损害样品，公开了一种缺陷检查方法，其中：脉冲激光的单个脉冲从激光光源发射的光束被分成多个脉冲; 用脉冲分割脉冲激光束照射样品; 聚焦和检测由于照射产生的样品产生的散射光; 通过使用通过聚焦和检测来自样品的散射光获得的信息来检测样品上的缺陷。所述缺陷检查方法被配置为使得将脉冲激光束的单个脉冲分裂成多个脉冲以使得分离脉冲的峰值基本上均匀的方式被控制。

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