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    • 13. 发明授权
    • Turbo compressor
    • 涡轮压缩机
    • US06692224B2
    • 2004-02-17
    • US10097611
    • 2002-03-15
    • Haruo MiuraKazuo TakedaNaohiko TakahashiHideo NishidaHiromi KobayashiTomoyuki Ishikawa
    • Haruo MiuraKazuo TakedaNaohiko TakahashiHideo NishidaHiromi KobayashiTomoyuki Ishikawa
    • F04D2958
    • F04D25/163F04D29/5826
    • A turbo compressor, comprising two (2) pieces of rotation shafts, being disposed in parallel with each other, wherein impellers are attached on both ends of one of the rotation shafts, thereby to build up a first-stage compressor and a second-stage compressor, while an impeller on one end of the other rotation shaft, thereby to build up a third-stage compressor. In a lower side of each of the compressors, an intercooler and an after-cooler are disposed in alignment with, for cooling down an operation gas compressed in each stage. The operation gas is guided into the first-stage compressor on a side opposing to a motor, into the second-stage compressor on a side of the motor, and into the third-stage compressor on the side opposing to the motor, in the order thereof.
    • 一种涡轮压缩机,包括两个彼此平行地设置的旋转轴(2),其中叶轮安装在一个旋转轴的两端,从而构建第一级压缩机和第二级 压缩机,同时在另一旋转轴的一端上的叶轮,从而构建第三级压缩机。 在每个压缩机的下侧,中间冷却器和后冷却器设置成对准,以冷却在每个级中压缩的操作气体。 操作气体在与电动机相对的一侧被引导到第一级压缩机中,并且在电动机一侧的第二级压缩机中被引导到与电动机相对的一侧的第三级压缩机中 其中。
    • 18. 发明授权
    • Inspection method, inspection apparatus and method of production of
semiconductor device using them
    • 使用它们的半导体器件的检查方法,检查装置和制造方法
    • US5936726A
    • 1999-08-10
    • US913392
    • 1997-09-09
    • Kazuo TakedaHidetsugu IshidaAtsushi Hiraiwa
    • Kazuo TakedaHidetsugu IshidaAtsushi Hiraiwa
    • G01N21/94G01N21/00
    • G01N21/94
    • An inspection method and apparatus for discriminating the foreign particles on the surface of a sample from the foreign particles or defects within the sample, and a semiconductor-device producing method using the inspection method and apparatus. The inspection apparatus includes a light source, a first optical system that causes the light from the source to be directed to the sample, a second optical system for condensing the light coming back from the sample, a polarizing prism for separating the condensed light into polarized components, and optical detectors, for detecting the polarized components. The two optical systems, are arranged for their optical axes to make an angle of 50.degree. to 120.degree. relative to each other. The foreign particles on the surface of the sample and the foreign particles or defects within the sample are respectively discriminated from each other as side scattered light and backward scattered light by utilizing the difference between the intensity ratios of the polarized light components.
    • PCT No.PCT / JP95 / 00398 Sec。 371日期1997年9月9日 102(e)日期1997年9月9日PCT 1996年3月10日PCT公布。 第WO96 / 28721号公报 日期1996年9月19日一种用于鉴别样品表面上的异物与样品中的异物或缺陷的检查方法和装置,以及使用检查方法和装置的半导体器件制造方法。 检查装置包括光源,使来自源的光被引导到样本的第一光学系统,用于聚集从样品回来的光的第二光学系统,用于将聚光分离成偏振光的偏光棱镜 组件和光学检测器,用于检测偏振分量。 两个光学系统被布置成使它们的光轴相对于彼此成50°到120°的角度。 通过利用偏振光分量的强度比之间的差异,将样品表面上的杂质颗粒和样品中的异物或缺陷分别彼此区分为侧向散射光和反向散射光。
    • 19. 发明授权
    • Overcurrent protector with overheat prevention means
    • 具防过热保护装置
    • US5515229A
    • 1996-05-07
    • US262428
    • 1994-06-20
    • Kazuo Takeda
    • Kazuo Takeda
    • H01H37/54H01H71/12H01H77/04H02H7/085H01H37/00
    • H01H71/123H01H77/04
    • An overcurrent protection device for a motor M with an overheat prevention function having a housing 10 with fixed contacts 16, 18 and movable contacts 24, 26. A first snap acting bimetallic element 20 in the device is responsive to heat from overcurrent conditions and a second snap acting bimetallic element 40 is responsive to heat from the temperature for the motor M. The movable contacts 24, 26 are controlled by the first bimetallic element to cause engagement or nonengagement with the stationary contacts 16,18. Coupling members 42, 44 contained in the housing engage both bimetallic elements 20, 40 and allow the first overcurrent bimetallic element 20 to snap independently of the second bimetallic element 40 while providing for snap action of the second bimetallic element 40 to also cause the first bimetallic 20 to snap.
    • 一种具有防过热功能的电动机M的过电流保护装置,其具有具有固定触点16,18和可移动触点24,26的壳体10.该装置中的第一卡扣作用双金属元件20响应于过电流条件下的热量, 卡扣式双金属元件40响应于来自马达M的温度的热量。可动触头24,26由第一双金属元件控制,以引起与固定触头16,18的接合或不接合。 包含在壳体中的耦合构件42,44与双金属元件20,40两者接合,并且允许第一过电流双金属元件20独立于第二双金属元件40进行卡扣,同时提供第二双金属元件40的卡扣动作,还使第一双金属元件 20抓住。