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    • 5. 发明申请
    • Thin-film transistor device and a method for manufacturing the same
    • 薄膜晶体管器件及其制造方法
    • US20090001361A1
    • 2009-01-01
    • US12155801
    • 2008-06-10
    • Takeo ShibaTomihiro HashizumeYuji SuwaTadashi Arai
    • Takeo ShibaTomihiro HashizumeYuji SuwaTadashi Arai
    • H01L51/00H01L51/40
    • H01L51/0012H01L27/283H01L51/0004H01L51/0022H01L51/0545H01L51/0558H01L51/105
    • The present invention provides a method of manufacturing a thin-film transistor device. This method enables improvement in performance of a complementary TFT circuit incorporated in a thin- and light-weighted image display device or a flexible electronic device and also enables reduction of power consumption and reduction of manufacturing cost of the circuit. Further in the method, the number of manufacturing steps is decreased so that mass production and growth in size of thin film transistor devices are facilitated through a printing technique. In this method, electrodes forming n-type and p-type TFT and an organic semiconductor are made of the same material in both types of TFT by the solution-process and/or printable process method. A first polarizable thin-film 7 is formed on an interface between a gate insulator and a semiconductor, and also a second polarizable thin film 8 provided on an interface between source and drain electrodes 5 and a semiconductor film 9. A complementary thin-film transistor device is manufactured by selectively exposing either the n-type TFT area or the p-type TFT area to light to remove the polarizing function from the first and second polarizable thin films in the area.
    • 本发明提供一种制造薄膜晶体管器件的方法。 该方法能够提高并入薄型和轻型图像显示装置或柔性电子装置中的互补TFT电路的性能,并且还能够降低功耗并降低电路的制造成本。 此外,在该方法中,制造步骤的数量减少,从而通过印刷技术促进了薄膜晶体管器件的大规模生产和尺寸增长。 在这种方法中,通过溶液处理和/或可印刷的方法,形成n型和p型TFT的电极和有机半导体由两种类型的TFT由相同的材料制成。 第一可极化薄膜7形成在栅极绝缘体和半导体之间的界面上,以及设置在源电极和漏电极5与半导体膜9之间的界面上的第二可极化薄膜8.互补薄膜晶体管 通过将n型TFT区域或p型TFT区域选择性地暴露于光以从该区域中的第一和第二可极化薄膜去除偏振功能来制造器件。
    • 7. 发明申请
    • Method for fabricating image display device
    • 图像显示装置的制造方法
    • US20070134893A1
    • 2007-06-14
    • US11702576
    • 2007-02-06
    • Mutsuko HatanoShinya YamaguchiTakeo ShibaMitsuharu TaiHajime Akimoto
    • Mutsuko HatanoShinya YamaguchiTakeo ShibaMitsuharu TaiHajime Akimoto
    • H01L21/20
    • H01L21/02683G02F1/13454H01L21/02532H01L21/02609H01L21/2026H01L27/12H01L27/1285H01L29/04
    • There is provided a method for fabricating an image display device having an active matrix substrate including high-performance transistor circuits operating with high mobility as drive circuits for driving pixel portions which are arranged as a matrix. The portion of a polysilicon film formed in a drive circuit region DAR1 provided on the periphery of the pixel region PAR of the active matrix substrate SUB1 composing the image display device is irradiated and scanned with a pulse modulated laser beam or a pseudo CW laser beam to be reformed into a quasi-strip-like-crystal silicon film having a crystal boundary continuous in the scanning direction so that discrete reformed regions each composed of the quasi-strip-like-crystal silicon film are formed. In virtual tiles TL composed of the discrete reformed regions, drive circuits having active elements such as thin-film transistors or the like are formed such that the channel directions thereof coincide with the direction of crystal growth in the quasi-strip-like-crystal silicon film.
    • 提供一种制造具有有源矩阵基板的图像显示装置的方法,所述有源矩阵基板包括以高迁移率运行的高性能晶体管电路作为用于驱动作为矩阵布置的像素部分的驱动电路。 形成在构成图像显示装置的有源矩阵基板SUB1的像素区域PAR的周围的驱动电路区域DAR 1中的多晶硅膜的部分被照射并用脉冲调制激光束或伪CW激光 光束被重新形成具有在扫描方向上连续的晶体边界的准带状晶体硅膜,从而形成各自由准带状晶体硅膜构成的分立的重整区域。 在由分立重构区域构成的虚拟瓦片TL中,形成具有诸如薄膜晶体管等有源元件的驱动电路,使得其沟道方向与准带状晶体硅中的晶体生长方向一致 电影。