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    • 17. 发明授权
    • Method for manufacturing a magnetic write head
    • 磁写头制造方法
    • US08136228B2
    • 2012-03-20
    • US12343713
    • 2008-12-24
    • Aron PentekSue Siyang ZhangYi Zheng
    • Aron PentekSue Siyang ZhangYi Zheng
    • G11B5/127H04R31/00
    • G11B5/3163G11B5/112G11B5/1278G11B5/3116G11B5/3146G11B5/315Y10T29/49032Y10T29/49039Y10T29/49043Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • A method for manufacturing a magnetic write head that avoids the challenges associated with the formation of fence structures during write pole definition. A magnetic write pole material is deposited. A mask structure is deposited over the magnetic write pole material. The mask structure includes a first hard mask, a marker layer, a physically robust, inorganic RIEable image transfer layer, a second hard mask structure over the image transfer layer and a photoresist layer over the second hard mask. A reactive ion etching process can be used to transfer the image of the photoresist mask and second hard mask layer onto the image transfer layer. An ion milling is performed to define the write pole. A layer of non-magnetic material such as alumina is deposited. An ion milling is performed until the marker layer has been reached, and another reactive ion etching is performed to remove the remaining hard mask.
    • 一种用于制造写磁头的磁头的方法,其避免了写磁极定义期间与栅栏结构的形成有关的挑战。 沉积磁性写入极材料。 掩模结构沉积在磁性写入极材料上。 掩模结构包括第一硬掩模,标记层,物理上坚固的无机RIEable图像转印层,图像转印层上方的第二硬掩模结构和在第二硬掩模上的光致抗蚀剂层。 可以使用反应离子蚀刻工艺将光致抗蚀剂掩模和第二硬掩模层的图像转印到图像转印层上。 执行离子铣削以限定写入极。 沉积一层非磁性材料如氧化铝。 进行离子研磨直到达到标记层,并执行另一反应离子蚀刻以除去剩余的硬掩模。
    • 18. 发明申请
    • Method for Ultrasound Vibrometry Using Orthogonal Basis Functions
    • 使用正交基函数的超声波振幅法
    • US20110319756A1
    • 2011-12-29
    • US13254227
    • 2010-03-09
    • Yi ZhengAiping YaoJames F. GreenleafShigao ChenMatthew W. Urban
    • Yi ZhengAiping YaoJames F. GreenleafShigao ChenMatthew W. Urban
    • A61B8/00
    • G01S7/52036A61B8/485G01S7/52022G01S15/8952
    • A method for measuring a mechanical property of a subject includes using an ultrasound transducer to apply ultrasonic vibration pulses to a location in a subject in order to induce shear waves at multiple prescribed orthogonal frequencies in the subject. The ultrasound transducer is directed by an excitation signal that is composed of multiple orthogonal basis functions, each having a given frequency component corresponding to the prescribed orthogonal frequencies. The power level of each orthogonal basis function is independently adjustable. The excitation signal can be sparsely sampled, or portions of the excitation signal can be removed in order to improve tissue vibration and to provide for the interleaving ultrasonic vibration and detection pulses. Ultrasonic detection pulses are applied to at least one motion detection point, from which echo signals are received. From the received echo signals, a motion signal is determined, from which mechanical properties of the subject are calculated.
    • 用于测量受试者的机械性质的方法包括使用超声波换能器将超声波振动脉冲施加到受试者中的位置,以便在受试者中以多个规定的正交频率诱发剪切波。 超声换能器由多个正交基函数组成的激励信号引导,每个正交基函数具有对应于规定正交频率的给定频率分量。 每个正交基函数的功率电平是独立可调的。 励磁信号可以被稀疏地采样,或者可以去除激励信号的部分,以便改善组织振动并提供交织超声波振动和检测脉冲。 超声波检测脉冲被施加到至少一个运动检测点,从该运动检测点接收回波信号。 从所接收的回波信号中,确定运动信号,从而计算被摄体的机械性质。
    • 19. 发明授权
    • Write head design and method for reducing adjacent track interference at very narrow track widths
    • 用于在非常窄的轨道宽度上减少相邻轨道干扰的写头设计和方法
    • US08054586B2
    • 2011-11-08
    • US11286077
    • 2005-11-23
    • Hamid BalamaneYimin HsuAron PentekYi Zheng
    • Hamid BalamaneYimin HsuAron PentekYi Zheng
    • G11B5/33G11B5/127
    • G11B5/3163G11B5/112G11B5/1278G11B5/3116G11B5/3146G11B5/315Y10T29/49021
    • A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. A method for constructing such a write head allows for excellent control of side shield gap thickness and trailing shield gap thickness, and allows the ratio of side gap to trailing gap thicknesses to be maintained at about two to one as desired. The method includes depositing forming a write pole by constructing a mask which may include a bi-layer hard mask, and then ion milling to form the write pole. Once the write pole has been formed, a layer of alumina or some other non-magnetic material can be conformally deposited. A reactive ion mill (RIM) can be performed to open up the top of the write pole (remove the horizontally disposed portions of the alumina layer). Then, a second layer of alumina or some other non-magnetic material can be deposited, and the write pole can be plated. The thickness of the side shield gaps is defined by the sum of the final thicknesses of the first and second alumina layers, while the thickness of the first magnetic layer defines the thickness of the trailing shield gap.
    • 垂直写头,其具有围绕后屏蔽的卷绕,用于减少杂散场写入和相邻轨道干涉。 用于构造这样的写头的方法允许对侧屏蔽间隙厚度和后屏蔽间隙厚度的优良控制,并且允许侧间隙与后间隙厚度的比率根据需要保持在大约二对一。 该方法包括通过构成可包括双层硬掩模的掩模沉积形成写入极,然后进行离子铣削以形成写入极。 一旦形成了写极,就可以共形沉积一层氧化铝或其它非磁性材料。 可以执行反应离子磨(RIM)以打开写柱的顶部(去除氧化铝层的水平放置的部分)。 然后,可以沉积第二层氧化铝或一些其它非磁性材料,并且可以对写入极进行电镀。 侧屏蔽间隙的厚度由第一和第二氧化铝层的最终厚度之和限定,而第一磁性层的厚度限定了后屏蔽间隙的厚度。