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    • 5. 发明授权
    • Process for fabricating ultra-narrow dimension magnetic sensor
    • 制造超窄尺寸磁传感器的工艺
    • US08216481B2
    • 2012-07-10
    • US12581030
    • 2009-10-16
    • Liubo Hong
    • Liubo Hong
    • B44C1/22
    • B82Y10/00B82Y25/00G01R33/098G11B5/3116G11B5/3163G11B5/3909G11B2005/3996
    • A method for manufacturing a magnetoresistive read sensor that allows the sensor to be constructed with clean well defined side junctions, even at very narrow track widths. The method involves using first and second etch mask layers, that are constructed of materials such that the second mask (formed over the first mask) can act as a mask during the patterning of the first mask (bottom mask). The first mask has a well defined thickness that is defined by deposition and which is not affected by the etching processes used to define the mask. This allows the total ion milling etch mask thickness to be well controlled before the ion milling process used to define the sensor side walls.
    • 一种用于制造磁阻读取传感器的方法,即使在非常窄的轨道宽度下也能够使传感器构造成具有清晰良好定义的侧面接合点。 该方法包括使用由材料构成的第一和第二蚀刻掩模层,使得第二掩模(形成在第一掩模上)可以在图案化第一掩模(底掩模)期间用作掩模。 第一掩模具有由沉积限定的良好限定的厚度,并且其不受用于限定掩模的蚀刻工艺的影响。 这允许在用于限定传感器侧壁的离子铣削过程之前,完全控制总离子铣削蚀刻掩模厚度。
    • 6. 发明申请
    • JUNCTION ISOLATION FOR MAGNETIC READ SENSOR
    • 磁性读取传感器的连接隔离
    • US20120161264A1
    • 2012-06-28
    • US12976748
    • 2010-12-22
    • LIUBO HONGGuangli Liu
    • LIUBO HONGGuangli Liu
    • H01L29/82H01L21/02
    • H01L43/12B82Y25/00G01R33/093G11B5/3912G11B5/3932G11B5/398
    • Embodiments generally relate to a magnetic read sensor and a method for its manufacture. A multi-layer insulating material may be used to cover both the first shield layer and also the sidewalls of the sensor structure in the magnetic read sensor. The first insulating layer of the multi-layer insulating material may be deposited by an ion beam sputtering process in a chamber that does not have any oxygen gas flowing into it so that oxygen diffusion into the sensor structure is reduced or eliminated. Then, a second insulating layer of the multi-layer insulating material may be deposited by atomic layer deposition such that the second insulating layer has a greater quality than the first insulating layer. The higher quality increases the breakdown voltage for the magnetic read sensor. Thus, the magnetic read sensor of the present invention has an effective insulating portion that increases the breakdown voltage without sensor damage.
    • 实施例通常涉及磁读取传感器及其制造方法。 多层绝缘材料可用于覆盖磁读取传感器中的第一屏蔽层以及传感器结构的侧壁。 多层绝缘材料的第一绝缘层可以通过离子束溅射工艺沉积在不具有任何氧气流入其中的腔室中,从而减少或消除了扩散到传感器结构中的氧气。 然后,可以通过原子层沉积来沉积多层绝缘材料的第二绝缘层,使得第二绝缘层具有比第一绝缘层更大的质量。 更高的质量增加了磁读取传感器的击穿电压。 因此,本发明的磁读取传感器具有有效的绝缘部分,其在没有传感器损坏的情况下增加击穿电压。
    • 8. 发明申请
    • TMR READER STRUCTURE AND PROCESS FOR FABRICATION
    • TMR读取器结构和制造过程
    • US20120127615A1
    • 2012-05-24
    • US12954334
    • 2010-11-24
    • Liubo HongHonglin ZhuTsann LinZheng Gao
    • Liubo HongHonglin ZhuTsann LinZheng Gao
    • G11B5/33G01R33/32
    • G11B5/3912G01R33/098G11B5/3163G11B5/3932
    • The present invention generally relates to a TMR reader and a method for its manufacture. The TMR reader discussed herein adds a shield layer to the sensor structure. The shield layer is deposited over the capping layer so that the shield layer and the capping layer collectively protect the free magnetic layer within the sensor structure from damage during further processing. Additionally, the hard bias layer is shaped such that the entire hard bias layer underlies the hard bias capping layer so that a top lead layer is not present. By eliminating the top lead layer and including a shield layer within the sensor structure, the read gap is reduced while still protecting the free magnetic layer during later processing.
    • 本发明一般涉及TMR读取器及其制造方法。 本文中讨论的TMR读取器将一个屏蔽层添加到传感器结构。 屏蔽层沉积在覆盖层上,使得屏蔽层和覆盖层共同保护传感器结构内的自由磁性层免受进一步处理期间的损坏。 此外,硬偏压层被成形为使得整个硬偏压层位于硬偏压覆盖层的下面,使得顶部引线层不存在。 通过消除顶部引线层并且在传感器结构内包括屏蔽层,读取间隙减小,同时在稍后处理期间仍然保护自由磁性层。
    • 10. 发明申请
    • PMR WRITER AND METHOD OF FABRICATION
    • PMR WRITER和制造方法
    • US20110135959A1
    • 2011-06-09
    • US12634547
    • 2009-12-09
    • LIUBO HONG
    • LIUBO HONG
    • G11B5/33G03F7/20
    • G11B5/3116G11B5/1278G11B5/3146G11B5/315G11B5/3163
    • Embodiments of the invention provide a magnetic recording head including a write pole having increasing magnetic moment from a leading edge of the write pole to a trailing edge of the write pole, and methods for manufacturing the same. The write pole may be formed with a plurality of different magnetic material layers having different magnetic moments. A first magnetic layer may be formed with a first magnetic material adjacent a leading edge of the write pole. A second magnetic layer having a greater moment may be formed on the first magnetic layer, thereby increasing the magnetic moment from the leading edge of the write pole to the trailing edge of the write pole.
    • 本发明的实施例提供了一种磁记录头,其包括具有从写入极的前沿到写入极的后沿的磁矩增加的写入极及其制造方法。 写极可以形成有具有不同磁矩的多个不同的磁性材料层。 第一磁性层可以形成有与写入极的前沿相邻的第一磁性材料。 可以在第一磁性层上形成具有更大力矩的第二磁性层,从而增加从写入极的前沿到写入极的后沿的磁矩。