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1. 发明授权

US08139320B2 Write head having independent side shield and trailing shield throat height 有权
标题翻译：写头具有独立的侧面屏蔽和尾部屏蔽喉部高度
公开(公告)号：US08139320B2
公开(公告)日：2012-03-20
申请号：US11966086
申请日：2007-12-28
申请人： Wen-Chien David Hsiao , Yinshi Liu , Yi Zheng
发明人： Wen-Chien David Hsiao , Yinshi Liu , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic recording. The magnetic write head includes a write pole having a pole tip region and a flared region. The write pole also has a trailing, wrap-around magnetic shield that is separated from the sides of the write pole by a non-magnetic side gap layer. The write head is formed such that the side gap spacing is larger in the flared region than in the pole tip region. This varying gap spacing can be formed by depositing a non-magnetic material using a collimated sputter deposition aligned substantially perpendicular to the air bearing surface. This collimated sputtering deposits the non-magnetic material more readily on the sides of the write pole in the flared region than in the pole tip region.
摘要翻译：用于垂直磁记录的磁写头。磁写头包括具有极尖区域和扩口区域的写入极。写极还具有通过非磁性侧间隙层与写入极的两侧分离的后围环绕磁屏蔽。写头形成为使得扩张区域中的侧间隙间隔大于极尖区域中的间隙间距。可以通过使用基本垂直于空气轴承表面排列的准直溅射沉积物沉积非磁性材料来形成这种变化的间隙间隔。这种准直的溅射使非磁性材料更容易地在扩展区域中的写入极的侧面上比在磁极尖端区域中沉积。

2. 发明申请

US20100163422A1 ASSISTED DEPOSITION, NARROW TRENCH DAMASCENE PROCESS FOR MANUFACTURING A WRITE POLE OF A MAGNETIC WRITE HEAD 有权
标题翻译：辅助沉积，用于制造磁性写头的写入点的NARROW TRENCH DAMASCENE工艺
公开(公告)号：US20100163422A1
公开(公告)日：2010-07-01
申请号：US12345828
申请日：2008-12-30
申请人： Wen-Chien David Hsiao , Yinshi Liu , Yi Zheng
发明人： Wen-Chien David Hsiao , Yinshi Liu , Yi Zheng
IPC分类号： C25D5/02 , B44C1/22 , C23C14/04
CPC分类号： C25D7/001 , G11B5/1278 , G11B5/1871 , G11B5/3116 , G11B5/3163 , Y10T29/49044 , Y10T29/49048
摘要： A method for forming a magnetic write head using a damascene process that does not form voids in the magnetic structure. An opening is formed in an alumina layer, the opening being configured to define a trench. Then a first layer of magnetic material is deposited into the trench. A CMP process is then performed to remove any voids that have formed in the first magnetic layer. Then a second layer of magnetic material is deposited over the first layer of magnetic material. In another embodiment of the invention, a opening is formed in the alumina layer, and a first layer of magnetic material is electroplated into the opening. A thin layer of non-magnetic material is then deposited, and a second layer of magnetic material is deposited over the thin layer of non-magnetic material. The thin layer of alumina advantageously provides a laminate structure that avoids data erasure.
摘要翻译：一种使用在磁性结构中不形成空隙的镶嵌工艺形成磁写头的方法。在氧化铝层中形成开口，该开口构造成限定沟槽。然后将第一层磁性材料沉积到沟槽中。然后执行CMP处理以去除在第一磁性层中形成的任何空隙。然后在第一层磁性材料上沉积第二层磁性材料。在本发明的另一个实施例中，在氧化铝层中形成开口，并将第一层磁性材料电镀到开口中。然后沉积薄的非磁性材料层，并且第二层磁性材料沉积在非磁性材料的薄层上。氧化铝的薄层有利地提供了避免数据擦除的层压结构。

3. 发明申请

US20100155366A1 METHOD FOR CREATING A MAGNETIC WRITE POLE HAVING A STEPPED PERPENDICULAR POLE VIA CMP-ASSISTED LIFTOFF 有权
标题翻译：通过CMP辅助提升器创建具有阶梯式贯穿孔的磁性写入点的方法
公开(公告)号：US20100155366A1
公开(公告)日：2010-06-24
申请号：US12343044
申请日：2008-12-23
申请人： Amanda Baer , Wen-Chien David Hsiao , John I. Kim , Yinshi Liu , Vladimir Nikitin , Trevor W. Olson , Hicham Moulay Sougrati , Yuan Yao
发明人： Amanda Baer , Wen-Chien David Hsiao , John I. Kim , Yinshi Liu , Vladimir Nikitin , Trevor W. Olson , Hicham Moulay Sougrati , Yuan Yao
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A method for manufacturing a magnetic write head having a stepped, recessed, high magnetic moment pole connected with a write pole. The stepped pole structure helps to channel magnetic flux to the write pole without leaking write field to the magnetic medium. This allows the write head to maintain a high write field strength at very small bit sizes. The method includes depositing a dielectric layer and a first CMP layer over substrate that can include a magnetic shaping layer. A mask is formed over the dielectric layer, the mask having an opening to define the stepped pole structure. The image of the mask is transferred into the dielectric layer. A high magnetic moment material is deposited and a chemical mechanical polishing is performed to planarize the magnetic material and dielectric layer.
摘要翻译：一种用于制造具有与写入极连接的阶梯式，凹入的高磁矩极的磁性写入头的方法。阶梯式极点结构有助于将磁通量传递到写入极，而不会将写入场泄漏到磁性介质。这允许写头在非常小的位尺寸下保持高的写场强度。该方法包括在可包括磁性成形层的衬底上沉积介电层和第一CMP层。在电介质层上形成掩模，掩模具有限定阶梯极结构的开口。掩模的图像被转移到电介质层中。沉积高磁矩材料并执行化学机械抛光以使磁性材料和电介质层平坦化。

4. 发明授权

US07633713B2 Method for controlling the formation of the trailing shield gap during perpendicular head fabrication and head formed thereby 失效
标题翻译：用于在垂直头部制造期间控制尾部屏蔽间隙的形成以及由此形成的头部的方法
公开(公告)号：US07633713B2
公开(公告)日：2009-12-15
申请号：US11047965
申请日：2005-01-31
申请人： Tsung Y. Chen , Yinshi Liu
发明人： Tsung Y. Chen , Yinshi Liu
IPC分类号： G11B5/147 , G11B5/127
CPC分类号： G11B5/112 , G11B5/1278 , Y10T29/49021
摘要： A method for controlling the formation of the trailing shield gap during perpendicular head fabrication and head formed thereby are disclosed. The in-situ trailing shield gap deposition process removes the pre-sputter process that can damage the write pole material. Further, a seed pre-layer is formed on top of the trailing shield gap to absorb any non-uniformity of the trailing shield gap and to control issues resulting from the pre-sputter process originating from the trailing shield seed deposition.
摘要翻译：公开了一种用于在垂直头部制造期间控制后屏蔽间隙的形成和由此形成的头部的方法。原位后屏蔽间隙沉积工艺去除了可能损坏写入极材料的预溅射工艺。此外，在尾部屏蔽间隙的顶部上形成种子预置层以吸收尾部屏蔽间隙的任何不均匀性并且控制源于后屏蔽种子沉积的预溅射过程所引起的问题。

5. 发明申请

US20090166183A1 METHOD OF MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD WITH STEPPED TRAILING MAGNETIC SHIELD USING COLLIMATED SPUTTER DEPOSITION 审中-公开
标题翻译：使用拼接式溅射沉积法制作具有步进磁带的磁性磁头的普通磁头的方法
公开(公告)号：US20090166183A1
公开(公告)日：2009-07-02
申请号：US11965981
申请日：2007-12-28
申请人： Yinshi Liu , Theodore Yong , Yi Zheng
发明人： Yinshi Liu , Theodore Yong , Yi Zheng
IPC分类号： C23C14/46 , C25D3/00 , B05D5/12
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a magnetic write head having a stepped trailing shield. The stepped trailing shield is formed by forming a non-magnetic bump over a write pole prior to electroplating a wrap-around magnetic shield. This bump is formed by constructing a mask having an opening configured to define the non-magnetic bump. A magnetic material is then sputter deposited. In order to decrease deposition of the magnetic material on the sides of the mask, a collimator is used to align the deposited material along a plane substantially parallel with an air bearing surface plane. This collimation of the deposited magnetic material greatly facilitates liftoff, and more importantly prevents the formation of fences which would otherwise have to be removed by a harsh, aggressive process.
摘要翻译：一种用于制造具有阶梯式后挡板的磁写头的方法。在电镀环绕磁屏蔽之前，通过在写入极上形成非磁性凸块来形成阶梯式后屏蔽。通过构造具有限定非磁性凸块的开口的掩模形成该凸块。然后溅射沉积磁性材料。为了减少磁性材料在掩模的侧面的沉积，使用准直仪沿着基本平行于空气轴承表面的平面对准沉积的材料。沉积的磁性材料的这种准直极大地促进了剥离，并且更重要的是防止栅栏的形成，否则这些栅栏必须通过苛刻的侵蚀性过程被去除。

6. 发明授权

US08110085B2 Assisted deposition, narrow trench damascene process for manufacturing a write pole of a magnetic write head 有权
标题翻译：辅助沉积，窄沟槽镶嵌工艺，用于制造磁头写磁头
公开(公告)号：US08110085B2
公开(公告)日：2012-02-07
申请号：US12345828
申请日：2008-12-30
申请人： Wen-Chien David Hsiao , Yinshi Liu , Yi Zheng
发明人： Wen-Chien David Hsiao , Yinshi Liu , Yi Zheng
IPC分类号： C25D5/02 , G11B5/127 , H04R31/00
CPC分类号： C25D7/001 , G11B5/1278 , G11B5/1871 , G11B5/3116 , G11B5/3163 , Y10T29/49044 , Y10T29/49048
摘要： A method for forming a magnetic write head using a damascene process that does not form voids in the magnetic structure. An opening is formed in an alumina layer, the opening being configured to define a trench. Then a first layer of magnetic material is deposited into the trench. A CMP process is then performed to remove any voids that have formed in the first magnetic layer. Then a second layer of magnetic material is deposited over the first layer of magnetic material. In another embodiment of the invention, a opening is formed in the alumina layer, and a first layer of magnetic material is electroplated into the opening. A thin layer of non-magnetic material is then deposited, and a second layer of magnetic material is deposited over the thin layer of non-magnetic material. The thin layer of alumina advantageously provides a laminate structure that avoids data erasure.
摘要翻译：一种使用在磁性结构中不形成空隙的镶嵌工艺形成磁写头的方法。在氧化铝层中形成开口，该开口构造成限定沟槽。然后将第一层磁性材料沉积到沟槽中。然后执行CMP处理以去除在第一磁性层中形成的任何空隙。然后在第一层磁性材料上沉积第二层磁性材料。在本发明的另一个实施例中，在氧化铝层中形成开口，并将第一层磁性材料电镀到开口中。然后沉积薄的非磁性材料层，并且第二层磁性材料沉积在非磁性材料的薄层上。氧化铝的薄层有利地提供了避免数据擦除的层压结构。

7. 发明授权

US07950137B2 Method for manufacturing a magnetic write head 有权
标题翻译：磁写头制造方法
公开(公告)号：US07950137B2
公开(公告)日：2011-05-31
申请号：US11766711
申请日：2007-06-21
申请人： Christian Rene Bonhote , Thomas Dudley Boon, Jr. , Ming Jiang , Jordan Asher Katine , Quang Le , Yinshi Liu , Xhavin Sinha , Sue Siyang Zhang , Yi Zheng
发明人： Christian Rene Bonhote , Thomas Dudley Boon, Jr. , Ming Jiang , Jordan Asher Katine , Quang Le , Yinshi Liu , Xhavin Sinha , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3169 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a write pole for perpendicular magnetic recording for accurately defining a side shield throat height and write pole flare point. The magnetic structure includes a write pole portion and first and second side shield portions. The side shields portions are magnetically connected with the write pole portion in a region in front of an intended air bearing surface plane (e.g. in the direction from which lapping will progress). The side shields portions are each separated from the write pole portion in a region behind the intended air bearing surface plane by notches that terminate at a desired location relative to the intended air bearing surface plane and which open up in a region behind the intended air bearing surface plane.
摘要翻译：一种制造用于垂直磁记录的写磁极的方法，用于准确地限定侧屏蔽喉高度和写磁极点。磁性结构包括写极部分和第一和第二侧面屏蔽部分。侧屏蔽部分在预期的空气轴承表面（例如沿着研磨过程的方向）前面的区域中与写入极部分磁性连接。侧面屏蔽部分分别与预期的空气支承面平面后面的区域中的写入磁极部分分开，该凹口终止于相对于预期的空气轴承表面平面的期望位置，并且在预期的空气轴承后面的区域中开口表面。

8. 发明授权

US07436629B2 Laminated magnetic structure for use in a perpendicular magnetic write head 失效
标题翻译：用于垂直磁写头的层压磁结构
公开(公告)号：US07436629B2
公开(公告)日：2008-10-14
申请号：US11877578
申请日：2007-10-23
申请人： James Mac Freitag , Hardayal Singh Gill , Yimin Hsu , Yinshi Liu
发明人： James Mac Freitag , Hardayal Singh Gill , Yimin Hsu , Yinshi Liu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/147 , G11B5/3116 , G11B5/3146
摘要： A magnetic structure for use in a perpendicular magnetic write head that prevents magnetic domain formation and reduces magnetic remanence in the structure. The magnetic structure includes magnetic layers sandwiched between thin non-magnetic layers. Each of the magnetic layers includes a relatively thicker layer of CoFe sandwiched between relatively thinner layers of NiFe.
摘要翻译：用于垂直磁写头的磁结构，其防止磁畴形成并减小结构中的磁残余。磁性结构包括夹在薄的非磁性层之间的磁性层。每个磁性层包括夹在相对较薄的NiFe层之间的相对较厚的CoFe层。

9. 发明申请

US20080037168A1 LAMINATED MAGNETIC STRUCTURE FOR USE IN A PERPENDICULAR MAGNETIC WRITE HEAD 失效
标题翻译：层叠磁性结构用于一个普通的磁头
公开(公告)号：US20080037168A1
公开(公告)日：2008-02-14
申请号：US11877578
申请日：2007-10-23
申请人： James Freitag , Hardayal Gill , Yimin Hsu , Yinshi Liu
发明人： James Freitag , Hardayal Gill , Yimin Hsu , Yinshi Liu
IPC分类号： G11B5/187
CPC分类号： G11B5/1278 , G11B5/147 , G11B5/3116 , G11B5/3146
摘要： A magnetic structure for use in a perpendicular magnetic write head that prevents magnetic domain formation and reduces magnetic remanence in the structure. The magnetic structure includes magnetic layers sandwiched between thin non-magnetic layers. Each of the magnetic layers includes a relatively thicker layer of CoFe sandwiched between relatively thinner layers of NiFe.
摘要翻译：用于垂直磁写头的磁结构，其防止磁畴形成并减小结构中的磁残余。磁性结构包括夹在薄的非磁性层之间的磁性层。每个磁性层包括夹在相对较薄的NiFe层之间的相对较厚的CoFe层。

10. 发明授权

US07239478B1 Write element for perpendicular recording in a data storage system 有权
标题翻译：在数据存储系统中用于垂直记录的写入元素
公开(公告)号：US07239478B1
公开(公告)日：2007-07-03
申请号：US10769409
申请日：2004-01-31
申请人： Kyusik Sin , Yinshi Liu , Benjamin Chen , Francis H. Liu
发明人： Kyusik Sin , Yinshi Liu , Benjamin Chen , Francis H. Liu
IPC分类号： G11B5/127
CPC分类号： G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A write element for perpendicular recording in a data storage system is fabricated to maintain the thickness of a side shield at both edges of a pole P3, and to form the pole P3 in a trapezoidal shape. Forming a side shield around the pole P3 removes stray fields, creating a quiet, noise-free write element and preventing side erasure. The fabrication method utilizes a magnetic buffer layer to protect a shield gap during trim of the pole P3, and thus to provide the shield gap with a uniform thickness. The magnetic buffer layer also protects the shield gap and pole P3 when the top hard mask is removed. Consequently, the write field is made uniform across the track width. The fabrication method uses a metal in the shield gap to improve the pole geometry after pole trim and to provide a uniform edge to the pole P3.
摘要翻译：制造用于在数据存储系统中进行垂直记录的写入元件，以将侧屏蔽件的厚度保持在极点P 3的两个边缘处，并且形成梯形形状的极点3。在P 3周围形成一个侧面屏蔽可去除杂散场，创建一个安静，无噪音的写入元件，并防止侧面擦除。该制造方法利用磁性缓冲层来保护极P 3的修整期间的屏蔽间隙，从而提供具有均匀厚度的屏蔽间隙。当去除顶部硬掩模时，磁缓冲层还保护屏蔽间隙和极点P 3。因此，写入磁道在磁道宽度上是均匀的。制造方法使用屏蔽间隙中的金属来改善极修整之后的极几何形状，并且向极P 3提供均匀的边缘。

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