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131. 发明申请

US20060215171A1 Method and apparatus for measuring displacement of a sample 有权
公开(公告)号：US20060215171A1
公开(公告)日：2006-09-28
申请号：US11188732
申请日：2005-07-26
申请人： Toshihiko Nakata , Masahiro Watanabe , Shuichi Baba , Yasuhiro Yoshitake , Mineo Nomoto
发明人： Toshihiko Nakata , Masahiro Watanabe , Shuichi Baba , Yasuhiro Yoshitake , Mineo Nomoto
IPC分类号： G01B9/02
CPC分类号： G01B9/02057 , G01B9/02003 , G01B9/02081 , G01B2290/30 , G01B2290/70 , G03F7/70775
摘要： In a displacement measurement apparatus using light interference, a probe light path is spatially separated from a reference light path. Therefore, when a temperature or refractive index distribution by a fluctuation of air or the like, or a mechanical vibration is generated, an optical path difference fluctuates between both of the optical paths, and a measurement error is generated. In the solution, an optical axis of probe light is brought close to that of reference light by a distance which is not influenced by any disturbance, a sample is irradiated with the probe light, a reference surface is irradiated with the reference light, reflected light beams are allowed to interfere with each other, and a displacement of the sample is obtained from the resultant interference light to thereby prevent the measurement error from being generated by the fluctuation of the optical path difference.

132. 发明授权

US07030394B2 Charged particle beam apparatus and automatic astigmatism adjustment method 有权
标题翻译：带电粒子束装置和自动散光调节方法
公开(公告)号：US07030394B2
公开(公告)日：2006-04-18
申请号：US10980096
申请日：2004-11-02
申请人： Masahiro Watanabe , Hiroyuki Shinada , Atsuko Takafuji , Masami Iizuka , Yasuhiro Gunji , Kouichi Hayakawa , Masayoshi Takeda
发明人： Masahiro Watanabe , Hiroyuki Shinada , Atsuko Takafuji , Masami Iizuka , Yasuhiro Gunji , Kouichi Hayakawa , Masayoshi Takeda
IPC分类号： G01B11/00
CPC分类号： G01R31/307 , H01J37/153 , H01J2237/1532 , H01J2237/216 , H01J2237/2817
摘要： According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.
摘要翻译：根据本发明，用于自动调整带电粒子束装置中的像散的技术。根据本发明的实施例可以提供一种带电粒子束装置和自动像散调节方法，其能够通过在多个像散校正量和焦点校正量中找到多个像散校正量和焦点校正量来在相对短的时间段内自动校正散光和焦点来自相对较少数量的二维图像的单一操作。具体实施例可以执行这种自动聚焦，同时最小化对受试样品造成的损害。实施例包括用于通过使用带电粒子束来进行检查，测量和以相对高的精度制造的带电粒子光学系统。

133. 发明申请

US20060060781A1 Charged-particle beam apparatus and method for automatically correcting astigmatism and for height detection 审中-公开
标题翻译：带电粒子束装置和自动校正散光和高度检测的方法
公开(公告)号：US20060060781A1
公开(公告)日：2006-03-23
申请号：US11114203
申请日：2005-04-26
申请人： Masahiro Watanabe , Masayoshi Takeda , Koichi Hayakawa , Yasuhiro Gunji
发明人： Masahiro Watanabe , Masayoshi Takeda , Koichi Hayakawa , Yasuhiro Gunji
IPC分类号： G21K7/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/153 , H01J37/265 , H01J37/28 , H01J2237/15 , H01J2237/1532 , H01J2237/216 , H01J2237/2482 , H01J2237/31793 , H01J2237/31798
摘要： Charged-particle beam arrangements (e.g., apparatus and methods) for automatically correcting astigmatism and for height detection.
摘要翻译：用于自动校正像散和高度检测的带电粒子束布置（例如，装置和方法）。

134. 发明申请

US20050263703A1 Pattern inspection method and apparatus using electron beam 失效
标题翻译：使用电子束的图案检查方法和装置
公开(公告)号：US20050263703A1
公开(公告)日：2005-12-01
申请号：US11176344
申请日：2005-07-08
申请人： Takashi Hiroi , Asahiro Kuni , Masahiro Watanabe , Chie Shishido , Hiroyuki Shinada , Yasuhiro Gunji , Atsuko Takafuji
发明人： Takashi Hiroi , Asahiro Kuni , Masahiro Watanabe , Chie Shishido , Hiroyuki Shinada , Yasuhiro Gunji , Atsuko Takafuji
IPC分类号： G01N23/04 , G01N23/20 , G01N23/225 , G01Q30/04 , G02F1/13 , G06T1/00 , G21K7/00 , H01J37/22 , H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/24465 , H01J2237/2817
摘要： A pattern inspection method and apparatus in which a charged particle beam is irradiated onto a surface of a specimen on which a pattern is formed, plural sensors simultaneously detect secondary particles emanated from the surface of the specimen by the irradiation, signals outputted from each sensor of the plural sensors which simultaneously detect the secondary particles are added, an image of the surface of the specimen on which the pattern is obtained from the added signals, and the image is processed to detect a defect of the pattern.
摘要翻译：一种图案检查方法和装置，其中带电粒子束照射到形成有图案的样本的表面上，多个传感器同时检测通过照射从样品表面发出的二次颗粒，从每个传感器输出的信号添加同时检测二次粒子的多个传感器，从附加的信号中添加从其获得图案的样本的表面的图像，并且处理图像以检测图案的缺陷。

135. 发明申请

US20050206888A1 Method and apparatus for inspecting a pattern formed on a substrate 失效
标题翻译：用于检查在基板上形成的图案的方法和装置
公开(公告)号：US20050206888A1
公开(公告)日：2005-09-22
申请号：US11131379
申请日：2005-05-18
申请人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
发明人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe , Masahiro Watanabe
IPC分类号： G01N21/956 , G03F7/20 , G03F9/00
CPC分类号： G03F7/7065 , G01N21/95684
摘要： A pattern inspection apparatus includes a light source which emits ultraviolet light, an irradiator which reduces coherency of the ultraviolet light and irradiates the coherency reduced ultraviolet light onto a specimen on which a pattern is formed through an objective lens, and a focus control means which projects light on the specimen from outside the objective lens, detects light reflected from the specimen by the projection and adjusts a height of the specimen relative to the objective lens. The apparatus further includes an image which forms an image of the specimen irradiated with the ultraviolet light and detects the formed image with a sensor, an image processor which processes a signal outputted from the sensor to detect a defect of the specimen, and a display which displays information of the defect detected by the image processor.
摘要翻译：图案检查装置包括发出紫外线的光源，减少紫外线的相干性并将相干性降低的紫外光照射到通过物镜形成图案的样本的照射器，以及投影从物镜外部对样品进行光照射，通过投影检测从样品反射的光，并调整样本相对于物镜的高度。该装置还包括形成用紫外线照射的样本的图像并用传感器检测形成的图像的图像，处理从传感器输出的信号以检测样本的缺陷的图像处理器，以及显示器显示由图像处理器检测到的缺陷的信息。

136. 发明申请

US20050092930A1 Charged particle beam apparatus and automatic astigmatism adjustment method 有权
标题翻译：带电粒子束装置和自动散光调节方法
公开(公告)号：US20050092930A1
公开(公告)日：2005-05-05
申请号：US10980096
申请日：2004-11-02
申请人： Masahiro Watanabe , Hiroyuki Shinada , Atsuko Takafuji , Masami Lizuka , Yasuhiro Gunji , Kouichi Hayakawa , Masayoshi Takeda
发明人： Masahiro Watanabe , Hiroyuki Shinada , Atsuko Takafuji , Masami Lizuka , Yasuhiro Gunji , Kouichi Hayakawa , Masayoshi Takeda
IPC分类号： G01R31/307 , H01J37/153 , G01K1/08 , G21K5/10 , H01J3/14 , H01J3/26 , H01J37/08
CPC分类号： G01R31/307 , H01J37/153 , H01J2237/1532 , H01J2237/216 , H01J2237/2817
摘要： According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.
摘要翻译：根据本发明，用于自动调整带电粒子束装置中的像散的技术。根据本发明的实施例可以提供一种带电粒子束装置和自动像散调节方法，其能够通过在多个像散校正量和焦点校正量中找到多个像散校正量和焦点校正量来在相对短的时间段内自动校正散光和焦点来自相对较少数量的二维图像的单一操作。具体实施例可以执行这种自动聚焦，同时最小化对受试样品造成的损害。实施例包括用于通过使用带电粒子束来进行检查，测量和以相对高的精度制造的带电粒子光学系统。

137. 发明授权

US06828554B2 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same 失效
公开(公告)号：US06828554B2
公开(公告)日：2004-12-07
申请号：US10785949
申请日：2004-02-26
申请人： Takashi Hiroi , Maki Tanaka , Masahiro Watanabe , Asahiro Kuni , Yukio Matsuyama , Yuji Takagi , Hiroyuki Shinada , Mari Nozoe , Aritoshi Sugimoto
发明人： Takashi Hiroi , Maki Tanaka , Masahiro Watanabe , Asahiro Kuni , Yukio Matsuyama , Yuji Takagi , Hiroyuki Shinada , Mari Nozoe , Aritoshi Sugimoto
IPC分类号： G01N2300
CPC分类号： H01J37/28 , H01J2237/2817
摘要： A method of detecting a defect includes of determining an image acquisition condition for irradiating a converged electron beam onto a specimen and detecting a secondary electron emanated from the specimen, acquiring an image by detecting the secondary electron emanated from the specimen in synchronism with the irradiation of the electron beam, processing the acquired image to detect a defect on the specimen, and outputting information regarding the detected defect. The image acquisition condition is determined based on plural images which are acquired by changing at least one of acceleration condition of the secondary electron and an electrical field in the vicinity of the specimen.

138. 发明授权

US06793483B2 Combustion burner 失效
标题翻译：燃烧器
公开(公告)号：US06793483B2
公开(公告)日：2004-09-21
申请号：US10375212
申请日：2003-02-26
申请人： Masahiro Watanabe
发明人： Masahiro Watanabe
IPC分类号： F24C114
CPC分类号： F23D11/103 , F23D11/16 , F23G7/05
摘要： A combustion burner includes an air supply case connected to an air supply mouth a position at a position on the air supply case from a rear end part to a tip portion thereof, which supplies air from air supply equipment; a nozzle body attached so as to cover a tip portion of the air supply case, and having a jet nozzle formed in a center part of the nozzle body; a fuel nozzle in the nozzle body so as to supply air from the air supply case through an air jet hole, placed between the tip perimeter part of the fuel nozzle and the jet nozzle, having a frusto-conically shaped fuel supply passage, and which supplies air from a tip portion thereof; a plurality of air guide holes provided between an outer circumferential portion of the fuel nozzle and the nozzle body so as to supply air from the air jet hole in a spiral pattern; a fuel supply support member in the fuel supply passage, which supplies fuel from at least two fuel supply holes in an opposite spiral pattern from the tip end of the fuel nozzle; and at least two fuel supply pipes, one end part of the fuel supply pipes being connected to the fuel supply holes, another end part thereof being connected to a fuel supply which supplies waste oil, heavy oil and the like; and a water supply, which supplies water, dirty water and the like. Water, air, and oil, including waste oil, heavy oil and the like are mixed as an emulsion at a top part of a nozzle and mixed fuel is burned at lower cost without dissociation of the emulsion. The combustion burner of the invention obviates the need for expensive equipment, including a mixer, heretofore conventionally required, and can be used independently of such mixing equipment.
摘要翻译：燃烧器包括：空气供给箱，其从供气口的空气供给装置的后端部到顶端部的空气供给箱上的位置与空气供给口连接; 喷嘴体，其安装成覆盖所述供气箱的前端部，并且具有形成在所述喷嘴体的中心部的喷嘴; 喷嘴主体中的燃料喷嘴，以便通过设置在燃料喷嘴的尖端周边部分和喷嘴之间的空气喷射孔从空气供给箱供给空气，具有截头圆锥形的燃料供给通道，从其尖端部分供应空气; 多个空气引导孔，设置在燃料喷嘴的外周部分和喷嘴体之间，以便以螺旋形式从喷气孔供应空气; 燃料供给通道中的燃料供给支撑构件，其以与燃料喷嘴的前端相反的螺旋图案从至少两个燃料供给孔供应燃料; 和至少两个燃料供给管，燃料供给管的一个端部连接到燃料供给孔，另一个端部连接到供给废油，重油等的燃料供给部; 以及供水，供水，脏水等。水，空气和油，包括废油，重油等在喷嘴的顶部作为乳液混合，并且混合燃料以较低的成本燃烧而不会使乳液分解。本发明的燃烧器不需要昂贵的设备，包括迄今为止常规要求的混合器，并且可独立于这种混合设备使用。

139. 发明授权

US06768226B2 Electric circuit shielding 失效
标题翻译：电路屏蔽
公开(公告)号：US06768226B2
公开(公告)日：2004-07-27
申请号：US10191573
申请日：2002-07-10
申请人： Masahiro Watanabe , Kazuo Kato
发明人： Masahiro Watanabe , Kazuo Kato
IPC分类号： H04B1500
CPC分类号： H04B15/02 , H05K9/0064
摘要： A measuring circuit capable of performing a high-accuracy measurement by eliminating inductive influence from an ambient noise voltage source. An electric circuit including a signal circuit of high impedance, a wiring conductor and a meter is provided with a shielding resistance member having a significantly lower resistance than that of the signal circuit in dependence on an inter-terminal voltage of the high impedance signal circuit and a shield formed of an electrically conductive material disposed in association with the wiring conductor. A voltage distribution function of the shielding resistance member is matched equally to that of an inter-terminal voltage distribution function of the signal circuit. By measuring a line voltage through the medium of the high impedance signal circuit shielded by the shielding resistor, high accuracy measurement can be realized without undergoing adverse influences of parasitic capacitance and induction.
摘要翻译：一种能够通过消除来自环境噪声电压源的电感影响而进行高精度测量的测量电路。包括高阻抗信号电路，布线导体和仪表的电路设置有屏蔽电阻部件，该屏蔽电阻部件的阻抗明显低于信号电路的电阻，这取决于高阻抗信号电路的端子间电压，由与布线导体相关联地设置的导电材料形成的屏蔽。屏蔽电阻部件的电压分配功能与信号电路的端子间电压分配功能的电压分配功能相同。通过测量通过屏蔽电阻屏蔽的高阻抗信号电路的介质的线路电压，可以实现高精度测量，而不会受到寄生电容和感应的不利影响。

140. 发明授权

US06744057B2 Convergent charged particle beam apparatus and inspection method using same 有权
标题翻译：收敛带电粒子束装置及其检验方法
公开(公告)号：US06744057B2
公开(公告)日：2004-06-01
申请号：US10426702
申请日：2003-05-01
申请人： Maki Tanaka , Masahiro Watanabe , Takashi Hiroi , Hiroyuki Shinada , Taku Ninomiya
发明人： Maki Tanaka , Masahiro Watanabe , Takashi Hiroi , Hiroyuki Shinada , Taku Ninomiya
IPC分类号： H01J37244
CPC分类号： H01J37/21 , G01N2001/2893 , H01J2237/2817 , H01J2237/304
摘要： A convergent charged particle beam apparatus and method of detecting an electron beam image of a specimen in which a converged electron beam is irradiated and scanned over a surface of a specimen which is mounted on a movable stage and moves at least in one direction. An electron beam image of the surface of the specimen mounted on the stage is observed and a height of the specimen mounted on the stage is detected. A focus position of the electron beam is controlled in accordance with the height detected.
摘要翻译：收敛带电粒子束装置和方法，其检测其中会聚的电子束在安装在可移动台上并且至少沿一个方向移动的样本的表面上照射和扫描的样本的电子束图像。观察安装在载物台上的试样的表面的电子束图像，并检测安装在载物台上的试样的高度。根据检测到的高度来控制电子束的聚焦位置。

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