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    • 2. 发明授权
    • Pressure sensor
    • 压力传感器
    • US4382247A
    • 1983-05-03
    • US181839
    • 1980-08-27
    • Gunther StecherKurt SpitzenbergerKlaus Muller
    • Gunther StecherKurt SpitzenbergerKlaus Muller
    • G01L7/08G01L9/00
    • G01L9/0055G01L9/0044G01L9/0075
    • A deformable membrane is made by applying, by thick-film technology, a glass-ceramic paste over a vaporizable or burnable filler material, containing primarily carbon black in a binder which, in turn, is located on a substrate, for example of ceramic, glass, enameled metal or the like. The substrate for example is about 1.5 cm square, the membrane glass ceramic being applied as a circular dot of about 0.5 cm diameter. After solidifying the paste forming the membrane in a protective gas atmosphere, for example at about 950.degree. C., the filler is burned out in an oxidizing atmosphere, to escape through pores in the membrane material. By selecting a membrane material which has a lower thermal coefficient of expansion than that of the substrate, after burning, the membrane will assume a convex shape leaving a hollow space (8) beneath it and the substrate. The membrane is pressure-sensitive, for example when a predetermined quantity of a predetermined gas under a predetermined pressure is sealed therein, or if access to the interior of the space is provided through the substrate, for example by a tiny duct which is connected to a flange or stub connection. Electrical output can be obtained by applying either a metallic layer cover the membrane and utilizing the capacity of the metallic layer with respect to a counter electrode, or applying strain-compression sensitive resistors on the membrane. The membrane, after the electrodes or resistors are applied, is coated with a protective glass glaze (6). The pressure transducer is particularly for determining the pressure conditions in the induction pipe of an internal combustion engine.
    • 通过厚膜技术将玻璃陶瓷浆料涂覆在可蒸发或可燃的填充材料上制成可变形膜,该填充材料主要在粘合剂中包含炭黑,粘合剂又位于例如陶瓷的基材上, 玻璃,搪瓷金属等。 基板例如是约1.5cm 2正方形,膜玻璃陶瓷作为约0.5cm直径的圆点施加。 在保护气体气氛中,例如在约950℃下固化形成膜的糊料之后,填充剂在氧化气氛中燃烧,以通过膜材料中的孔逸出。 通过选择具有比基板更低的热膨胀系数的膜材料,在燃烧之后,膜将呈现凸形,在其下方留下中空空间(8)和基板。 膜是压敏的,例如当预定量的预定压力下的预定气体被密封在其中时,或者如果通过衬底提供对空间内部的接近,例如通过连接到 法兰或短线连接。 通过施加金属层覆盖膜并利用相对于对电极的金属层的能力,或在膜上施加应变压敏敏感电阻,可以获得电输出。 在施加电极或电阻器之后,膜被涂覆有保护性玻璃釉(6)。 压力传感器特别用于确定内燃机的感应管中的压力状况。
    • 4. 发明授权
    • Device for measuring a flowing air quantity
    • 用于测量流动空气量的装置
    • US5186051A
    • 1993-02-16
    • US656097
    • 1991-02-27
    • Gunther StecherHans HechtDietrich BergfriedBotho ZiegenbeinRichard Muehlheim
    • Gunther StecherHans HechtDietrich BergfriedBotho ZiegenbeinRichard Muehlheim
    • G01F1/68G01F1/684G01F1/692G01F1/698
    • G01F1/692G01F1/684G01F1/698
    • A device for measuring a flowing air quantity is proposed which comprises a sensor element which is exposed to the flowing air, is constructed in thick-film technology and contains a heating film resistor (R.sub.H), which is arranged on an insulating substrate (10) and through which current flows, and a sensor film resistor (R.sub.S) which is likewise arranged on the insulating substrate (10), serves to sense the temperature of the heating film resistor (R.sub.H) and is a component of a bridge circuit. The heating film resistor (R.sub.H) and the sensor film resistor (R.sub.S), separated from one another by an intermediate film (13) which is a good conductor of heat but is electrically insulating, are accommodated in a bubble (11) which is made of ceramic material, in particular of glass ceramic, and is arched on the insulating substrate (10). The thin diaphragm (14) made of a ceramic material ensures effective thermal uncoupling of the film resistors (R.sub.H, R.sub.S) from the insulating substrate (10). Short response times are thereby achieved.
    • PCT No.PCT / DE89 / 00524 Sec。 371日期1991年2月27日 102(e)1991年2月27日PCT PCT 1989年8月9日PCT公布。 公开号WO90 / 02317 日本1990年3月8日提出了一种用于测量流动空气量的装置,其包括暴露于流动空气的传感器元件,以厚膜技术构成,并且包括加热膜电阻器(RH) 在绝缘基板(10)上流过电流,同时设置在绝缘基板(10)上的传感器膜电阻(RS)用于感测加热膜电阻(RH)的温度,并且是组件 的桥电路。 通过中间膜(13)彼此分离的加热膜电阻器(RH)和传感器膜电阻器(RS),它们是良好的导热体,但是是电绝缘的,被容纳在制成的气泡(11)中 的陶瓷材料,特别是玻璃陶瓷,并且在绝缘基板(10)上拱起。 由陶瓷材料制成的薄膜(14)确保薄膜电阻器(RH,RS)与绝缘衬底(10)的有效热解耦。 从而实现了较短的响应时间。
    • 6. 发明授权
    • Flat electrochemical sensor, and method of its manufacture
    • 平面电化学传感器及其制造方法
    • US4294679A
    • 1981-10-13
    • US145738
    • 1980-05-01
    • Helmut MaurerKlaus MullerErnst LinderFranz RiegerGunther Stecher
    • Helmut MaurerKlaus MullerErnst LinderFranz RiegerGunther Stecher
    • G01N27/41B01L3/00G01N27/406G01N27/407G01N27/409G01N27/413G01N27/416G01N27/48G01N27/58
    • G01N27/4071G01N27/4067G01N27/48Y10T29/49002
    • To apply a measured quantity of air to the electrodes applied to a plate-like solid electrolyte body, which may be a chip on a carrier or may, itself, form the carrier, grooves, flutes, ducts, or depressions are formed in the carrier and/or a cover plate, the grooves terminating at an edge portion with access to the gas to be supplied, and having a size such that their clear height is preferably in the lower micron region, and a width, preferably under 1 mm, and particularly between 0.2 and 0.4 mm. The higher limits are applicable to apply, for example, air to a reference electrode, to apply ambient oxygen thereto; the lower limits are appropriate when operating the sensor as a polarographic sensor, in which the diffusion limited current, upon application of a bias voltage, is an analog measure of the oxygen concentration in the gas, and the gas supply to the electrode must be suitably controlled to prevent saturation conditions. The grooves may be formed, for example, by sandblasting or by applying insulating material in the form of posts, ridges, and the like, on the respective element, filling the space therebetween with a filler substance which, upon subsequent sintering, escapes, thus leaving the voids forming the grooves, depressions, and the like.
    • 为了将应用于板状固体电解质体的电极施加测量量的空气,该固体电解质体可以是载体上的芯片,或者可以自身形成载体,在载体中形成凹槽,凹槽,管道或凹陷 和/或盖板,所述槽终止于边缘部分,具有进入待供应气体的通道,并且具有这样的尺寸,使得它们的透明高度优选地在较低的微米区域中,宽度优选地在1mm以下,以及 特别是在0.2和0.4毫米之间。 上限适用于将例如空气施加到参比电极,以向其施加环境氧; 当将传感器作为极谱传感器操作时,下限是适当的,其中在施加偏压时扩散受限电流是气体中氧浓度的模拟测量,并且对电极的气体供应必须适当 控制以防止饱和条件。 凹槽可以例如通过喷砂或通过在各个元件上施加柱状物,脊等的形式的绝缘材料形成,用填充物填充其间的空间,该填充物在随后的烧结时逸出,因此 留下形成凹槽,凹陷等的空隙。
    • 10. 发明授权
    • Method of making an electrical thick-film, free-standing,
self-supporting structure, particularly for sensors used with internal
combustion engines
    • 制造电气厚膜,独立式,自支撑结构的方法,特别是用于内燃机的传感器
    • US4816200A
    • 1989-03-28
    • US412290
    • 1982-08-27
    • Gunther StecherHerbert Zimmermann
    • Gunther StecherHerbert Zimmermann
    • G01K7/22G01N33/00H05K3/46C04B33/32
    • H05K3/4685G01K7/223G01N33/0009
    • A free-standing, self-supporting layer of glass-ceramic or crystallized glass is applied by thick-film technology over a presintered layer made of a vaporizable or etchable material which, after sintering the thick-flim glass-ceramic or crystallized glass layer (3) to a substrate (1), is removed by heating or etching. The layer (2) to be removed is preferably applied in paste form with the glass-ceramic thick-film layer (3) thereover either in form of a crossing bridge, as a partially covering cantilever, or entirely surrounding the layer 2, in which latter case the thick-film layer (3) is of porous construction so that the volatile or vaporizable components of the underlying layer (2) can escape through the thick-film layer (3). A typical layer which is volatile or vaporizable includes carbon black, a resin binder and a solvent, applied to a substrate, for example of ceramic or enameled metal, over which the glass-ceramic layer is applied. Electrically conductive tracks can be applied directly on the substrate beneath the layer (2) to be removed, and to the thick-film layer, or in the form of strain or temperature-sensitive resistors, for connection to an external circuit evaluating deformation of the free-standing layer by capacitative or resistance change, to obtain pressure sensors, vibration sensors, acceleration sensors, and the like of minute construction. A typical dimension of the thick-film layer is in the order of tens of micrometers, with the free space after removal of the filler (2) being also about in the order of tens of micrometers.
    • 玻璃陶瓷或结晶玻璃的独立自支撑层通过厚膜技术施加在由可蒸发或可蚀刻材料制成的预烧结层上,其在烧结厚玻璃陶瓷或结晶玻璃层之后 3)通过加热或蚀刻除去基板(1)。 要除去的层(2)优选以玻璃陶瓷厚膜层(3)以交叉桥形式,作为部分覆盖悬臂或完全围绕层2以糊状形式施加,其中 后一种情况下,厚膜层(3)具有多孔结构,使得下层(2)的挥发性或可汽化组分可以通过厚膜层(3)逸出。 挥发性或可汽化性的典型层包括炭黑,树脂粘合剂和溶剂,其施加到例如陶瓷或搪瓷金属的基底上,在其上施加玻璃陶瓷层。 导电轨道可以直接施加在待除去的层(2)下面的基底上,并且可以应用于厚膜层,或以应变或温度敏感电阻器的形式,用于连接到评估变形的外部电路 通过电容或电阻变化独立的层,获得微小结构的压力传感器,振动传感器,加速度传感器等。 厚膜层的典型尺寸为几十微米,去除填料(2)之后的自由空间也约为几十微米。