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    • 5. 发明授权
    • Pressure sensor
    • 压力传感器
    • US4382247A
    • 1983-05-03
    • US181839
    • 1980-08-27
    • Gunther StecherKurt SpitzenbergerKlaus Muller
    • Gunther StecherKurt SpitzenbergerKlaus Muller
    • G01L7/08G01L9/00
    • G01L9/0055G01L9/0044G01L9/0075
    • A deformable membrane is made by applying, by thick-film technology, a glass-ceramic paste over a vaporizable or burnable filler material, containing primarily carbon black in a binder which, in turn, is located on a substrate, for example of ceramic, glass, enameled metal or the like. The substrate for example is about 1.5 cm square, the membrane glass ceramic being applied as a circular dot of about 0.5 cm diameter. After solidifying the paste forming the membrane in a protective gas atmosphere, for example at about 950.degree. C., the filler is burned out in an oxidizing atmosphere, to escape through pores in the membrane material. By selecting a membrane material which has a lower thermal coefficient of expansion than that of the substrate, after burning, the membrane will assume a convex shape leaving a hollow space (8) beneath it and the substrate. The membrane is pressure-sensitive, for example when a predetermined quantity of a predetermined gas under a predetermined pressure is sealed therein, or if access to the interior of the space is provided through the substrate, for example by a tiny duct which is connected to a flange or stub connection. Electrical output can be obtained by applying either a metallic layer cover the membrane and utilizing the capacity of the metallic layer with respect to a counter electrode, or applying strain-compression sensitive resistors on the membrane. The membrane, after the electrodes or resistors are applied, is coated with a protective glass glaze (6). The pressure transducer is particularly for determining the pressure conditions in the induction pipe of an internal combustion engine.
    • 通过厚膜技术将玻璃陶瓷浆料涂覆在可蒸发或可燃的填充材料上制成可变形膜,该填充材料主要在粘合剂中包含炭黑,粘合剂又位于例如陶瓷的基材上, 玻璃,搪瓷金属等。 基板例如是约1.5cm 2正方形,膜玻璃陶瓷作为约0.5cm直径的圆点施加。 在保护气体气氛中,例如在约950℃下固化形成膜的糊料之后,填充剂在氧化气氛中燃烧,以通过膜材料中的孔逸出。 通过选择具有比基板更低的热膨胀系数的膜材料,在燃烧之后,膜将呈现凸形,在其下方留下中空空间(8)和基板。 膜是压敏的,例如当预定量的预定压力下的预定气体被密封在其中时,或者如果通过衬底提供对空间内部的接近,例如通过连接到 法兰或短线连接。 通过施加金属层覆盖膜并利用相对于对电极的金属层的能力,或在膜上施加应变压敏敏感电阻,可以获得电输出。 在施加电极或电阻器之后,膜被涂覆有保护性玻璃釉(6)。 压力传感器特别用于确定内燃机的感应管中的压力状况。