会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Fabrication method of nanocrystals using a focused-ion beam
    • 使用聚焦离子束的纳米晶体的制造方法
    • US06475886B2
    • 2002-11-05
    • US10025696
    • 2001-12-26
    • Eun Kyu KimYoung Ju ParkTae Whan KimSeung Oun KangDong Chul ChooJae Hwan Shim
    • Eun Kyu KimYoung Ju ParkTae Whan KimSeung Oun KangDong Chul ChooJae Hwan Shim
    • H01L21425
    • C23C14/5833B82Y10/00B82Y30/00C23C14/5873C30B13/24C30B29/605H01L21/265Y10S977/949
    • Disclosed is a method for forming a nano-crystal. In the above method, there is prepared a substrate having a metal film or a semiconductor film formed thereon. A focused-ion beam is irradiated onto a plurality of positions on a surface of the metal film or the semiconductor film, whereby the metal film or the semiconductor film is removed at a focal portion of the focused-ion beam but an atomic bond in the metal film or the semiconductor film is broken at an overlapping region of the focused-ion beams due to an radiation effect of the focused-ion beam to form the nano-crystal. The method allows a few nm or less-sized nano-crystals to be formed with ease and simplicity using the focused-ion beam. As a result, the formed nano-crystals come to have a binding energy capable of restraining thermal fluctuation phenomenon at room temperature and thereby it becomes possible to fabricate a tunneling transistor capable of being operated at room temperature. Further, the invention contributes largely to a development of next generation ultra high density memory device with a memory capacitance of tera byte level or more.
    • 公开了一种形成纳米晶体的方法。 在上述方法中,制备了在其上形成有金属膜或半导体膜的基板。 聚焦离子束照射在金属膜或半导体膜的表面上的多个位置上,由此在聚焦离子束的焦点部分除去金属膜或半导体膜,但是在 金属膜或半导体膜由于聚焦离子束的辐射效应而在聚焦离子束的重叠区域断裂,形成纳米晶体。 该方法允许使用聚焦离子束容易且简单地形成几nm或更小尺寸的纳米晶体。 结果,形成的纳米晶体具有能够在室温下抑制热波动现象的结合能,从而可以制造能够在室温下操作的隧道晶体管。 此外,本发明在很大程度上有助于开发具有tera字节级或更高级别的存储电容的下一代超高密度存储器件。
    • 5. 发明申请
    • FABRICATING METHOD OF SEMICONDUCTOR DEVICE
    • 半导体器件制造方法
    • US20140273432A1
    • 2014-09-18
    • US13841132
    • 2013-03-15
    • BYUNG-HEE KIMTae-Soo KimSeong-Ho ParkYoung-Ju ParkJu-Young Jung
    • BYUNG-HEE KIMTae-Soo KimSeong-Ho ParkYoung-Ju ParkJu-Young Jung
    • H01L21/768
    • H01L21/76816H01L21/31144
    • A semiconductor device is fabricated by forming a lower conductor in a first interlayer dielectric film. A second interlayer dielectric film is formed on the lower conductor and the first interlayer dielectric film. A first hard mask pattern is formed on the second interlayer dielectric film. The first mask pattern has a first opening extending in a first direction. A planarization layer is formed on the first hard mask pattern. A mask pattern is formed on the planarization layer. The mask pattern has a second opening extending in a second direction perpendicular to the first direction. The lower conductor is positioned under an region where the first opening and the second opening overlap. A via hole and a trench connected to the via hole is formed using the first hard mask pattern and the mask pattern. The via hole exposes an upper surface of the lower conductor.
    • 通过在第一层间电介质膜中形成下导体来制造半导体器件。 第二层间电介质膜形成在下导体和第一层间电介质膜上。 在第二层间电介质膜上形成第一硬掩模图案。 第一掩模图案具有沿第一方向延伸的第一开口。 在第一硬掩模图案上形成平坦化层。 在平坦化层上形成掩模图案。 掩模图案具有沿垂直于第一方向的第二方向延伸的第二开口。 下导体位于第一开口和第二开口重叠的区域的下方。 使用第一硬掩模图案和掩模图案形成通孔和连接到通孔的沟槽。 通孔露出下导体的上表面。
    • 10. 发明授权
    • Vertical gradient freezing apparatus for compound semiconductor single
crystal growth
    • 用于化合物半导体单晶生长的垂直梯度冷冻装置
    • US5135726A
    • 1992-08-04
    • US672563
    • 1991-03-20
    • Suk Ki MinSeung Chul ParkChul Won HanYoung Ju ParkKwang Bo Shim
    • Suk Ki MinSeung Chul ParkChul Won HanYoung Ju ParkKwang Bo Shim
    • C30B11/00C30B13/22C30B29/40C30B29/42H01L21/208
    • C30B29/48C30B11/003C30B11/006C30B29/40Y10S117/90Y10T117/1012Y10T117/1092
    • A vertical gradient freeze single crystal growing apparatus utilizing a direct monitoring furnace which is possible to obtain rapid high temperature heating and uniform temperature distribution by using direct monitoring furnace as a higher temperature part furnace provided with double quartz tube applied with gold thin film, and also capable of observing entire process of single crystal growing directly by naked eye.The apparatus includes a direct monitoring furnace corresponding to higher temperature part furnace and lower temperature part furnace mounted on vertically standing guide rails so as to be moved upwardly and downwardly voluntarily thereon simultaneously or independently, and the direct monitoring furnace is provided with heater wires divided into more than two regions to inner side of protecting quartz tube provided within double quartz tube applied with gold thin film on its interior surface and formed with cooling water in and outlets and also crystal growing reaction tube capable of normal and reverse turning is provided thereto, and a number of thermocouples are provided to the furnaces.
    • 使用直接监测炉的垂直梯度冷冻单晶生长装置,其可以通过使用直接监测炉作为高温部分炉获得快速的高温加热和均匀的温度分布,所述高温部分炉具有应用金薄膜的双重石英管,并且还 能够通过肉眼观察直接生长的单晶生长过程。 该装置包括对应于高温部件炉和安装在垂直立式导轨上的低温部件炉的直接监控炉,以便同时或独立地向上和向下自主地向上和向下移动,并且直接监控炉具有分为 提供在双层石英管的内侧保护石英管的两个以上的内侧,在其内表面上涂有金薄膜并形成冷却水,出口以及能够正转和反向转动的晶体生长反应管, 一些热电偶被提供给炉子。