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    • 7. 发明申请
    • ORGANIC POLYMERIC ANTIREFLECTIVE COATINGS DEPOSITED BY CHEMICAL VAPOR DEPOSITION
    • 化学蒸气沉积沉积的有机聚合物抗反射涂层
    • WO01063358A1
    • 2001-08-30
    • PCT/US2001/003568
    • 2001-02-02
    • G03F7/11C23C16/46G03F7/09H01L21/027G03C1/76G03C1/492G03C1/494G03F7/00G11B7/24
    • G03F7/091Y10S430/136Y10S430/151
    • An improved method for applying organic antireflective coatings to substrate surfaces and the resulting precursor structures are provided. Broadly, the methods comprise chemical vapor depositing (CVD) an antireflective compound on the substrate surface. In one embodiment, the compound is highly strained (e.g., having a strain energy of at least about 10 kcal/mol) and comprises two cyclic moieties joined to one another via a linkage group. The most preferred monomers are [2.2](1,4)-naphthalenophane and [2.2](9,10)-anthracenophane. The CVD processes comprise heating the antireflective compound so as to vaporize it, and then pyrolizing the vaporized compound to form stable diradicals which are subsequently polymerized on a substrate surface in a deposition chamber. The inventive methods are useful for providing highly conformal antireflective coatings on large substrate surfaces having super submicron (0.25 mu m or smaller) features.
    • 提供了一种用于将有机抗反射涂层施加到基底表面和所得前体结构的改进方法。 广泛地,这些方法包括在基片表面上化学气相沉积(CVD)抗反射化合物。 在一个实施方案中,化合物是高度应变的(例如具有至少约10kcal / mol的应变能),并且包含通过连接基彼此连接的两个环状部分。 最优选的单体是[2.2](1,4) - 萘环戊烷和[2.2](9,10) - 蒽环庚烷。 CVD工艺包括加热抗反射化合物以使其蒸发,然后热解汽化的化合物以形成稳定的双基质,随后在沉积室中的基底表面上聚合。 本发明的方法可用于在具有超亚微米(0.25μm或更小)特征的大的基片表面上提供高保形抗反射涂层。