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    • 1. 发明申请
    • GRAZING INCIDENCE INTERFEROMETRY FOR MEASURING TRANSPARENT PLANE-PARALLEL PLATES
    • 用于测量透明平面平行板的抛光发生干涉
    • WO99027342A2
    • 1999-06-03
    • PCT/US1998/024673
    • 1998-11-19
    • G01B9/02G01B11/06G01B11/24G01B11/30G01M11/00G02B13/08G01M11/02G01B13/08
    • G01B11/06G01B9/02021G01B9/02022G01B9/02028G01B9/02058
    • A grazing incidence interferometer includes an extended light source for limiting spatial coherence of reference and test beams. A test plate is oriented at a grazing incidence to the test beam so that a first portion of the test beam is reflected from the front surface of the test plate, a second portion of the test beam is reflected from the back surface of the test plate, and the two test beam portions are sheared with respect to each other. The spatial coherence of the test beam is related to the lateral shear between the first and second test beam portions to significantly reduce contrast of an interference fringe pattern between the front and back surfaces of the test plate. Also, the reference beam is realigned with just one of the two test beam portions to favor the formation of an interference pattern between the reference surface and one of the front and back surfaces of the test plate over the formation of an interference pattern between the reference surface and the other of the front and back surfaces of the test plate.
    • 掠入射干涉仪包括用于限制参考和测试光束的空间相干性的扩展光源。 测试板以测试光束的掠入射取向,使得测试光束的第一部分从测试板的前表面反射,测试光束的第二部分从测试板的后表面反射 并且两个测试光束部分相对于彼此剪切。 测试光束的空间相干性与第一和第二测试光束部分之间的横向剪切有关,以显着降低测试板的前表面和后表面之间的干涉条纹图案的对比度。 此外,参考光束仅与两个测试光束部分中的一个重新对准,以有利于在参考表面与测试板的前表面和后表面中的一个之间形成干涉图案,以形成干涉图案之间的干涉图案 表面和测试板的前后表面中的另一个。
    • 5. 发明申请
    • METHODS AND APPARATUS FOR CAPTURING IMAGES OF AN ENVIRONMENT
    • 捕捉环境图像的方法和设备
    • WO2018035385A1
    • 2018-02-22
    • PCT/US2017/047454
    • 2017-08-17
    • NEXTVR INC.
    • COLE, DavidMOSS, Alan, McKaySTRAUB, Michael, P.
    • G01B13/08
    • Customer wide angle lenses and methods and apparatus for using such lenses in individual cameras as well as pairs of cameras intended for stereoscopic image capture are described. The lenses are used in combination with sensors to capture different portions of an environment at different resolutions. In some embodiments ground is capture at a lower resolution than sky which is captured at a lower resolution than a horizontal area of interest. Various asymmetries in lenses and/or lens and sensor placement are described which are particularly well suited for stereoscopic camera pairs where the proximity of one camera to the adjacent camera may interfere with the field of view of the cameras.
    • 描述了客户广角镜头以及用于在单个照相机中使用这种镜头的方法和设备以及用于立体图像捕获的成对照相机。 镜头与传感器结合使用,以不同分辨率拍摄环境的不同部分。 在一些实施例中,地面以低于分辨率低于感兴趣的水平面积捕获的天空的分辨率捕获。 描述了镜头和/或镜头和传感器放置中的各种不对称,其特别适合于立体相机对,其中一个相机与相邻相机的接近可能干扰相机的视场。
    • 6. 发明申请
    • PROXIMITY SENSOR NOZZLE SHROUD WITH FLOW CURTAIN
    • 接近传感器喷嘴与流动幕
    • WO2006062985A2
    • 2006-06-15
    • PCT/US2005/044144
    • 2005-12-07
    • ASML HOLDING N.V.VOGEL, Herman
    • VOGEL, Herman
    • G01B13/08
    • G03F7/70933G03F7/70341G03F9/7023
    • The present invention is directed to an apparatus for reducing the impact of cross winds on gas flow emitted from a nozzle. The apparatus includes a shroud that affixes to the nozzle. A plenum is located inside the shroud that holds a shroud gas, which is fed into the plenum through one or more intake holes. The shroud gas is emitted out through a series of openings, such as holes or slots, along a bottom surface of the shroud in a direction away from the nozzle. The shroud gas that is emitted forms an air curtain around the nozzle to prevent cross winds from impacting the flow of gas out of the nozzle. In one application, the apparatus is used with a lithography gas gauge proximity sensor. The apparatus can also be used with nozzles that emit liquids, such as, for example, an immersion lithography proximity sensor.
    • 本发明涉及一种用于减少横风对从喷嘴排出的气流的影响的装置。 该装置包括固定在喷嘴上的护罩。 一个充气室位于护罩内,保持护罩气体,护罩气体通过一个或多个进气孔进入气室。 护罩气体沿远离喷嘴的方向沿护罩的底面通过一系列开口(例如孔或狭槽)排出。 排出的护罩气体在喷嘴周围形成一个空气幕,以防止交叉风影响气流从喷嘴流出。 在一个应用中,该设备与光刻气量计接近传感器一起使用。 该设备还可以与喷射液体的喷嘴一起使用,例如浸没式光刻接近传感器。
    • 7. 发明申请
    • HOT FILL APPARATUS AND PROCESS THEREFOR
    • 热敷装置及其过程
    • WO01011314A1
    • 2001-02-15
    • PCT/US2000/021323
    • 2000-08-04
    • B29C49/80G01N3/60G01B13/08
    • G01N3/60B29C49/80
    • A hot fill apparatus for use in the testing of hollow thermoplastic containers, the apparatus having a reverse osmosis filter system (within 102), and a fill head system (52). The reverse osmosis filter system removes chlorine and other particulates and contaminants from the water prior to the water entering the heater system. The heater system is designed to maintain strict temperature control of the water while maintaining a steady flow rate and pressure. The fill head system includes a manually operated spigot and an automatically operated fill head, the operations of which are mutually exclusive.
    • 一种用于测试中空热塑性容器的热填充装置,该装置具有反渗透过滤系统(102内)和填充头系统(52)。 反渗透过滤系统在水进入加热器系统之前从水中除去氯和其他颗粒物和污染物。 加热器系统设计用于在保持稳定的流量和压力的同时保持严格的水温控制。 填充头系统包括手动操作的插口和自动操作的填充头,其操作是相互排斥的。