专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2012135665A3 STABILIZATION OF PULSED MODE SEED LASERS 审中-公开
标题翻译：脉冲式种子激光器的稳定化
公开(公告)号：WO2012135665A3
公开(公告)日：2012-12-27
申请号：PCT/US2012031530
申请日：2012-03-30
申请人： ELECTRO SCIENT IND INC , LU FUYUAN , CHANG FENG , WU HAISHENG , SUN YUNLONG
发明人： LU FUYUAN , CHANG FENG , WU HAISHENG , SUN YUNLONG
IPC分类号： H01S3/10 , H01S5/068
CPC分类号： B23K26/0084 , B23K26/0622 , B23K26/389 , H01S3/0064 , H01S3/0085 , H01S3/0092 , H01S3/06754 , H01S3/10015 , H01S3/1618 , H01S3/1673 , H01S3/2316 , H01S3/2375 , H01S5/0428 , H01S5/06216 , H01S5/0622 , H01S5/0654
摘要： A programmable tailored laser pulse generator (10) including a pulsed seed laser source (12), a laser amplifier (20), and an optical power amplifier (30) produces high power tailored laser pulses (32) shaped in response to a programmable analog tailored pulse signal applied to a seed laser (first embodiment) or an external modulator of continuous-wave seed laser output (second embodiment). The programmable analog tailored pulse signal is generated by combining multiple individually programmable analog pulses generated by a multi-channel signal generator (18). A bias applied to the pulsed seed laser source generates pre-lasing prior to producing a tailored laser pulse so that the seed laser source spectral line and line width stabilize within a narrow gain line width of a solid-state laser amplifier, thereby to impart pulse peak stability of the laser output. The tailored laser pulse generator allows for generating harmonics at shorter wavelengths and provides an economical, reliable laser source for a variety of micromachining applications.
摘要翻译：包括脉冲种子激光源（12），激光放大器（20）和光功率放大器（30）的可编程定制激光脉冲发生器（10）产生高功率定制激光脉冲（32），其响应于可编程模拟（第一实施例）或连续波种子激光器输出的外部调制器（第二实施例）中的定制脉冲信号。可编程模拟定制脉冲信号是通过组合由多通道信号发生器（18）产生的多个单独可编程模拟脉冲而生成的。施加到脉冲种子激光源的偏压在产生定制激光脉冲之前产生预激光，使得种子激光源光谱线和线宽稳定在固态激光放大器的窄增益线宽内，从而赋予脉冲激光输出的峰值稳定性。量身定制的激光脉冲发生器允许在较短波长处产生谐波，并为各种微机械应用提供经济可靠的激光源。

2. 发明申请

WO2012173777A2 PROBE MODULE WITH INTERLEAVED SERPENTINE TEST CONTACTS FOR ELECTRONIC DEVICE TESTING 审中-公开
标题翻译：具有用于电子设备测试的交互式SERPENTINE测试联系人的探测模块
公开(公告)号：WO2012173777A2
公开(公告)日：2012-12-20
申请号：PCT/US2012040058
申请日：2012-05-31
申请人： ELECTRO SCIENT IND INC , GARCIA DOUGLAS J
发明人： GARCIA DOUGLAS J
IPC分类号： G01R31/26 , G01R1/06 , G01R31/28
CPC分类号： G01R1/06716 , G01R1/06733 , G01R3/00 , G01R31/2889 , Y10T29/49222
摘要： A probe module for testing an electronic device comprises at least two contacts, each contact including a first end portion extending in a first direction along a first line, a second end portion extending linearly in a second direction opposite from the first direction and along a second line, and a third curved portion extending between the first end portion and the second end portion. The first line is spaced apart from and in parallel with the second line, and the at least two contacts are spaced apart from each other in a direction perpendicular to the first line and the second line. Methods for making such a probe module are also taught.
摘要翻译：用于测试电子设备的探针模块包括至少两个触点，每个触点包括沿着第一线在第一方向上延伸的第一端部，在与第一方向相反的第二方向上线性延伸的第二端部，以及在所述第一端部和所述第二端部之间延伸的第三弯曲部分。第一线与第二线隔开并与第二线平行，并且至少两个触点在垂直于第一线和第二线的方向上彼此间隔开。还教导了制造这种探针模块的方法。

3. 发明申请

WO2012092184A3 METHODS AND SYSTEMS FOR LINK PROCESSING USING LASER PULSES WITH OPTIMIZED TEMPORAL POWER PROFILES AND POLARIZATIONS 审中-公开
标题翻译：使用激光脉冲进行链接处理的方法和系统与优化的时间功率分布和极化
公开(公告)号：WO2012092184A3
公开(公告)日：2012-10-26
申请号：PCT/US2011067156
申请日：2011-12-23
申请人： ELECTRO SCIENT IND INC , OSAKO YASU , BRULAND KELLY J , HOOPER ANDREW , DUMESTRE JIM , LORD DAVID
发明人： OSAKO YASU , BRULAND KELLY J , HOOPER ANDREW , DUMESTRE JIM , LORD DAVID
IPC分类号： H01L21/301 , B23K26/38
CPC分类号： B23K26/364 , B23K26/0624 , B23K26/40 , B23K2201/40 , B23K2203/172 , B23K2203/50
摘要： Systems and methods ablate electrically conductive links using laser pulses with optimized temporal power profiles and/or polarizations. In certain embodiments, the polarization property of a laser beam is set such that coupling between the laser beam and an electrically conductive link reduces the pulse energy required to ablate the electrically conductive link. In one such embodiment, the polarization is selected based on a depth of a target link structure. In another embodiment, the polarization changes as deeper material is removed from a target location. In addition, or in other embodiments, a first portion of a temporal power profile of a laser beam includes a rapid rise time to heat an upper portion of an electrically conductive link so as to form cracks in a passivation layer over upper corners of the electrically conductive link, without forming cracks at lower corners of the electrically conductive link.
摘要翻译：系统和方法使用具有优化的时间功率分布和/或偏振的激光脉冲消融导电链路。在某些实施例中，激光束的偏振特性被设定为使得激光束和导电链节之间的耦合降低了烧蚀导电连接所需的脉冲能量。在一个这样的实施例中，基于目标链路结构的深度来选择极化。在另一个实施例中，当从目标位置移除较深的材料时，偏振改变。另外或在其他实施例中，激光束的时间功率分布的第一部分包括加热导电连接件的上部的快速上升时间，以便在电气的上角上的钝化层中形成裂纹导电连接件，而不会在导电连接件的下角形成裂纹。

4. 发明申请

WO2011123449A3 LASER SYSTEMS AND METHODS USING TRIANGULAR-SHAPED TAILORED LASER PULSES FOR SELECTED TARGET CLASSES 审中-公开
标题翻译：激光系统和使用三角形定制激光脉冲的选择目标类的方法
公开(公告)号：WO2011123449A3
公开(公告)日：2012-02-02
申请号：PCT/US2011030350
申请日：2011-03-29
申请人： ELECTRO SCIENT IND INC , CHO BONG H , PUGH BRIAN L , HOOPER ANDREW
发明人： CHO BONG H , PUGH BRIAN L , HOOPER ANDREW
IPC分类号： H01L21/301 , H01L21/78
CPC分类号： H01S3/1305 , B23K26/0622 , H01L23/5258 , H01L2924/0002 , H01S3/0057 , H01S3/102 , H01L2924/00
摘要： Processing workpieces, such as semiconductor wafers or other materials, with a laser, includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. At least one of the predefined temporal pulse profiles may be triangular. The target class may include, for example unpassivated electrically conductive links or other bare metal structures. Based on the target class associated with the selected target, a laser pulse is generated having a triangular temporal pulse profile. The generated laser pulse is used to process the selected structure.
摘要翻译：使用激光加工诸如半导体晶片或其他材料的工件包括选择对应于与预定义的时间脉冲轮廓相关联的目标类别对应的目标。预定义的时间脉冲轮廓中的至少一个可以是三角形的。目标类可以包括例如未激活的导电链路或其他裸机构。基于与所选择的目标相关联的目标类别，产生具有三角形时间脉冲分布的激光脉冲。所产生的激光脉冲用于处理所选择的结构。

5. 发明申请

WO2011123254A2 WEDGE-FACETED NONLINEAR CRYSTAL FOR HARMONIC GENERATION 审中-公开
标题翻译：用于和谐生成的WEDGE-FACETED非线性晶体
公开(公告)号：WO2011123254A2
公开(公告)日：2011-10-06
申请号：PCT/US2011028880
申请日：2011-03-17
申请人： ELECTRO SCIENT IND INC , PENG XIAOYUAN , WANG HAIWEN
发明人： PENG XIAOYUAN , WANG HAIWEN
IPC分类号： H01S3/102 , H01S3/108
CPC分类号： G02F1/3534 , G02F1/3544 , H01S3/0092
摘要： Lasers and laser systems generate different wavelengths by nonlinear sum or difference frequency conversion. A wedge-faceted nonlinear crystal (30') compensates for the spatial walk-off phenomenon associated with critical phase matching of a nonlinear crystal in the production of harmonic laser output at peak power.
摘要翻译：激光器和激光系统通过非线性或差分频率转换产生不同的波长。楔形非线性晶体（30'）补偿与峰值功率下的谐波激光输出的产生中的非线性晶体的临界相位匹配相关的空间偏移现象。

6. 发明申请

WO2010138804A3 METHOD AND APPARATUS FOR HYBRID RESOLUTION FEEDBACK OF A MOTION STAGE 审中-公开
标题翻译：运动阶段混合分解反馈的方法和装置
公开(公告)号：WO2010138804A3
公开(公告)日：2011-03-31
申请号：PCT/US2010036556
申请日：2010-05-28
申请人： ELECTRO SCIENT IND INC , ALPAY MEHMET
发明人： ALPAY MEHMET
IPC分类号： B23K26/08 , B23K26/02 , B23K26/42
CPC分类号： B23K26/0823 , B23K26/042 , B23K26/083
摘要： A method and apparatus is presented for obtaining high resolution positional feedback from motion stages 52 in indexing systems 10 without incurring the costs associated with providing high resolution positional feedback from the entire range of motion by combining low resolution/low cost feedback devices 72 with high resolution/high cost feedback devices 74, 76, 78, 80, 82, 84, 86, 88.
摘要翻译：提出了一种用于从分度系统10中的运动级52获得高分辨率位置反馈的方法和装置，而不会产生与通过组合具有高分辨率的低分辨率/低成本反馈装置72从整个运动范围提供高分辨率位置反馈相关联的成本 /高成本反馈装置74,76,78,80,82,84,86,88。

7. 发明申请

WO2009123845A9 PROGRAMMABLE GAIN TRANS-IMPEDANCE AMPLIFIER OVERLOAD RECOVERY CIRCUIT 审中-公开
标题翻译：可编程增益变阻器放大器过载恢复电路
公开(公告)号：WO2009123845A9
公开(公告)日：2010-11-04
申请号：PCT/US2009037062
申请日：2009-03-13
申请人： ELECTRO SCIENT IND INC , MCCURRY BRANDON , JOHANSEN BRIAN
发明人： MCCURRY BRANDON , JOHANSEN BRIAN
IPC分类号： G01R31/02 , G01R19/00 , G01R27/26
CPC分类号： G01R31/028 , G01R19/0092
摘要： Embodiments of an apparatus for measuring the leakage current of capacitive components is taught. One embodiment includes a first stage amplifier configured to receive an input from a serially-connected capacitive component at an inverting input and a feedback resistor in a feedback path of the first stage amplifier. A resistance value of the feedback resistor is programmable based on an expected value of the leakage current and a corresponding voltage output.
摘要翻译：教导了用于测量电容性部件的漏电流的装置的实施例。一个实施例包括第一级放大器，其被配置为在反相输入处接收来自串联连接的电容分量的输入和在第一级放大器的反馈路径中的反馈电阻。反馈电阻的电阻值可根据漏电流的期望值和相应的电压输出进行编程。

8. 发明申请

WO2010099420A3 FLEXURE GUIDE BEARING FOR SHORT STROKE STAGE 审中-公开
标题翻译：用于短行程的FLEXURE GUIDE轴承
公开(公告)号：WO2010099420A3
公开(公告)日：2010-10-28
申请号：PCT/US2010025551
申请日：2010-02-26
申请人： ELECTRO SCIENT IND INC , KOSMOWSKI MARK T
发明人： KOSMOWSKI MARK T
IPC分类号： B23K26/08 , B23K26/04 , B23K26/42
CPC分类号： B23K26/046 , B23K26/035 , F16C29/008 , F16C29/025 , F16C32/0618 , G02B7/08 , G12B5/00 , H01L21/68 , H01L21/68785 , Y10S33/21
摘要： A laser processing system in which a laser beam propagates along a beam axis and through a lens for incidence on a work surface of a target specimen mounted on a support. The lens forms a focal region of the laser beam. The support is operatively connected to a multiple-axis positioning system that moves the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface. An assembly includes at least one flexure that supports the lens and guides movement of the lens along the beam axis in response to a motive force to adjust the focal region of the laser beam relative to the work surface.
摘要翻译：一种激光加工系统，其中激光束沿光束轴传播并通过透镜入射到安装在支撑物上的目标样品的工作表面上。该透镜形成激光束的焦点区域。支架可操作地连接到多轴定位系统，该系统使激光束和目标样本相对于彼此移动，以将激光束定位在工作表面上的选定位置。一种组件包括至少一个挠曲件，所述挠曲件支撑所述透镜并且响应于动力来引导所述透镜沿着所述射束轴线的移动，以相对于所述工作表面调整所述激光束的焦点区域。

9. 发明申请

WO2010083091A2 PULSE TEMPORAL PROGRAMMABLE ULTRAFAST BURST MODE LASER FOR MICROMACHINING 审中-公开
标题翻译：脉冲时间可编程超声波激光模式激光
公开(公告)号：WO2010083091A2
公开(公告)日：2010-07-22
申请号：PCT/US2010020364
申请日：2010-01-07
申请人： ELECTRO SCIENT IND INC , PENG XIAOYUAN , HOOPER ANDREW
发明人： PENG XIAOYUAN , HOOPER ANDREW
IPC分类号： H01S3/10 , B23K26/36 , H01L21/82
CPC分类号： H01S3/2316 , B23K26/0624 , H01S3/06758 , H01S3/2383 , H01S5/0085 , H01S5/12 , H01S2301/08
摘要： A laser processing system provides a burst of ultrafast laser pulses having a selectively shaped burst envelope. A burst pulse laser includes a high repetition rate ultrafast laser to deliver a pulse train with each pulse in the train having an independently controlled amplitude. The respective amplitudes of each ultrafast pulse in a group define a "burst envelope." In addition to independently controlling the amplitude of each ultrafast pulse within the burst envelope, the system may also provide selective control of spacing between each ultrafast pulse and/or the overall temporal width of the burst envelope. Thus, the system provides selective shaping of the burst envelope for particular laser processing applications.
摘要翻译：激光处理系统提供具有选择性形状的突发包络的超快激光脉冲的脉冲串。突发脉冲激光器包括高重复率超快速激光器，以传递脉冲串，列车中的每个脉冲具有独立控制的振幅。组中每个超快脉冲的相应幅度定义为“脉冲包络”。除了独立地控制突发包络内的每个超快速脉冲的振幅之外，系统还可以提供对每个超快脉冲之间的间隔和/或突发包络的总时间宽度的选择性控制。因此，该系统为特定的激光处理应用提供了脉冲包络的选择性整形。

10. 发明申请

WO2010005636A3 METHOD FOR DEFINING SAFE ZONES FOR LASER MACHINING SYSTEMS 审中-公开
标题翻译：定义激光加工系统安全区域的方法
公开(公告)号：WO2010005636A3
公开(公告)日：2010-03-04
申请号：PCT/US2009044611
申请日：2009-05-20
申请人： ELECTRO SCIENT IND INC , ALPAY MEHMET E , SADIKIN HENY , CHILDERS DAVID
发明人： ALPAY MEHMET E , SADIKIN HENY , CHILDERS DAVID
IPC分类号： B23K26/42 , B23K26/00 , G06F17/50
CPC分类号： B23K26/38 , B23K26/60
摘要： A method for defining machine cutting path safety zones for use in laser machining devices. The method includes indentifying safety zone positional coordinates in a computer aided design model, using a machine vision system to image the modeled physical machining device, determining the positional difference between the design model safety zone points and the imaged points and converting the design model safety zone coordinates into machine specific coordinates for input into a machining cutting path program.
摘要翻译：定义用于激光加工设备的机器切割路径安全区的方法。该方法包括在计算机辅助设计模型中识别安全区域位置坐标，使用机器视觉系统对建模的物理机械加工装置成像，确定设计模型安全区域点和成像点之间的位置差异，并将设计模型安全区域坐标转换为机床专用坐标，以便输入到加工切削路径程序中。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式