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    • 7. 发明申请
    • INTEGRATED CAPACITOR WITH INTERLINKED LATERAL FINS
    • 集成电容器,具有相互连接的横向FINS
    • WO2010059334A1
    • 2010-05-27
    • PCT/US2009/061952
    • 2009-10-23
    • XILINX, INC.
    • QUINN, Patrick, J.
    • H01L23/522H01L21/02H01L23/528H01G4/228H01G4/30H01L27/08H01L27/02
    • H01L27/0207H01L23/5223H01L27/0805H01L28/86H01L2924/0002H01L2924/3011H01L2924/00
    • A capacitor (100) in an integrated circuit ("IC") has a first node conductor (102) formed in a first metal layer of the IC with a first spine (118, 132) extending along a first direction, a first vertical element (152) extending from the first spine along a second direction perpendicular to the first direction. A first capital element (153) extends along the first direction, and a first serif element (150) extends from the capital element. The capacitor also has a second node conductor (104) having a second spine (106, 140), a second vertical element (142) extending from the second spine toward the first spine, a second capital element (145), and a second serif element (148) extending from the second capital between the first vertical element (152) and the first serif element (150).
    • 集成电路(“IC”)中的电容器(100)具有形成在IC的第一金属层中的第一节点导体(102),其具有沿第一方向延伸的第一脊(118,132),第一垂直元件 (152)沿着与所述第一方向垂直的第二方向从所述第一脊部延伸。 第一资本元素(153)沿着第一方向延伸,并且第一衬线元素(150)从资本元素延伸。 电容器还具有第二节点导体(104),其具有第二脊(106,140),从第二脊向第一脊延伸的第二垂直元件(142),第二资本元件(145)和第二衬线 元件(148)从第二首都在第一垂直元件(152)和第一衬线元件(150)之间延伸。
    • 9. 发明申请
    • METHOD OF FORMING A DRAM BIT LINE CONTACT
    • 形成DRAM位线接触的方法
    • WO1996026544A1
    • 1996-08-29
    • PCT/US1996001841
    • 1996-02-09
    • MICRON TECHNOLOGY, INC.
    • MICRON TECHNOLOGY, INC.JOST, MarkDENNISON, Charles, H.PAREKH, Kunal
    • H01L27/108
    • H01L27/10844H01L21/76885H01L21/76897H01L23/485H01L27/105H01L27/10808H01L27/10852H01L28/40H01L28/82H01L28/84H01L28/86H01L28/90H01L2924/0002H01L2924/00
    • Semiconductor memory devices and methods for forming the devices are disclosed. In one embodiment, the devices include a) a semiconductor substrate (11); b) a field effect transistor gate (14) positioned outwardly of the semiconductor substrate; c) opposing active areas (24, 26) formed within the semiconductor substrate on opposing sides of the gate; d) a capacitor electrically connected with one of the active areas; the capacitor comprising an inner storage node (36), a capacitor dielectric layer (38), and an outer cell node (40); the inner storage node electrically connecting with the one active area and physically contacting the one active area; e) a bit line (46); f) a dielectric insulating layer (44) positioned intermediate the bit line and the other active area; and g) an electrically conductive bit line plug (36, 38, 40, 39) extending through the insulating layer to contact with the other active area and electrically interconnect the bit line with the other active area. Constructions in which the bit line plug comprises an electrically conductive annular ring are also disclosed.
    • 公开了用于形成器件的半导体存储器件和方法。 在一个实施例中,器件包括a)半导体衬底(11); b)位于半导体衬底外侧的场效应晶体管栅极(14); c)在栅极的相对侧上形成在半导体衬底内的相对的有源区(24,26); d)与有源区域之一电连接的电容器; 所述电容器包括内部存储节点(36),电容器介电层(38)和外部单元节点(40); 所述内部存储节点与所述一个活动区域电连接并物理接触所述一个活动区域; e)位线(46); f)位于位线和另一个有效区域之间的介电绝缘层(44); 以及g)延伸穿过所述绝缘层的导电位线插头(36,38,40,39)以与所述另一个有源区域接触并将所述位线与所述另一个有源区域电互连。 还公开了位线插头包括导电环形圈的结构。