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    • 2. 发明申请
    • 半導体記憶装置
    • 半导体存储设备
    • WO2009096000A1
    • 2009-08-06
    • PCT/JP2008/051303
    • 2008-01-29
    • 日本ユニサンティスエレクトロニクス株式会社舛岡 富士雄新井 紳太郎
    • 舛岡 富士雄新井 紳太郎
    • H01L21/8244H01L27/11
    • H01L27/11H01L27/1112
    •  縦型トランジスタSGTで構成されたE/R型4T-SRAMにおいて、小さいSRAMセル面積と安定した動作マージンを実現する。  4個のMOSトランジスタ及び2個の負荷抵抗素子を用いて構成されたスタティック型メモリセルにおいて、前記メモリセルを構成するMOSトランジスタは、埋め込み酸化膜上に形成された平面状シリコン層上に形成され、前記平面状シリコン層は記憶ノードであり、前記MOSトランジスタのドレイン、ゲート、ソースが垂直方向に配置され、ゲートが柱状半導体層を取り囲む構造を有し、負荷抵抗素子は前記平面状シリコン層上に形成されたポリシリコンプラグよりなる小さい面積のSRAMセルを実現する。
    • 在包括垂直型晶体管SGT的E / R型4T-SRAM中实现SRAM单元的小平面尺寸和稳定的操作裕度。 在包括四个MOS晶体管和两个负载电阻元件的静态存储单元中,构成存储单元的MOS晶体管形成在形成于嵌入氧化层上的平面硅层上,该平面硅层是存储节点,并且该MOS晶体管具有 栅极和源极沿垂直方向排列的结构,栅极包围柱状半导体层。 此外,负载电阻元件包括形成在平面硅层上的多晶硅块,从而实现具有小平面尺寸的SRAM单元。
    • 3. 发明申请
    • INTEGRATED CIRCUIT, PORTABLE DEVICE AND METHOD FOR MANUFACTURING AN INTEGRATED CIRCUIT
    • 集成电路,便携式设备及制造集成电路的方法
    • WO03023847A3
    • 2003-10-02
    • PCT/IB0203628
    • 2002-09-03
    • KONINKL PHILIPS ELECTRONICS NV
    • REINER JOACHIM CGRADENWITZ PAUL G M
    • H01L21/768H01L23/485H01L27/11H01L23/522
    • H01L27/1112H01L21/76895H01L23/485H01L27/1108H01L2924/0002H01L2924/00
    • The present invention relates to an integrated circuit, comprising: - a substrate with a first (semi-)conductive region arranged in or on the substrate; - a second (semi-)conductive region which is isolated for at least a considerable part relative to the first region and is arranged above or adjacent to the first region; - a third (semi-)conductive region which is insulated for at least a considerable part relative to the first and second (semi-)conductive regions and is arranged thereabove; - a fourth (semi-)conductive region which is insulated relative to the first, second and third (semi-)conductive regions and is arranged thereabove; and - a (semi-)conductive interconnection contact (17) which mutually connects said four (semi-)conductive regions (semi-)conductively, wherein at least two of the four (semi-)conductive regions extend substantially parallel to the substrate of the integrated circuit at a considerable lateral angle relative to each other.
    • 集成电路技术领域本发明涉及一种集成电路,包括: - 衬底,其具有布置在衬底中或衬底上的第一(半)导电区域; - 第二(半)导电区域,其相对于第一区域至少相当部分被隔离并且布置在第一区域的上方或附近; - 第三(半)导电区域,其相对于第一和第二(半)导电区域绝缘至少相当大的一部分,并且布置在其上方; - 第四(半)导电区域,其相对于第一,第二和第三(半)导电区域绝缘并且布置在其上方; 和( - )半导体区域(半导体)相互连接的(半)导电互连触点(17),其中所述四个(半)导电区域中的至少两个基本上平行于 该集成电路相对于彼此具有相当大的横向角度。
    • 9. 发明申请
    • INTEGRATED CIRCUIT, PORTABLE DEVICE AND METHOD FOR MANUFACTURING AN INTEGRATED CIRCUIT
    • 集成电路,便携式设备及制造集成电路的方法
    • WO2003023847A2
    • 2003-03-20
    • PCT/IB2002/003628
    • 2002-09-03
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.
    • REINER, Joachim, C.GRADENWITZ, Paul, G., M.
    • H01L21/768
    • H01L27/1112H01L21/76895H01L23/485H01L27/1108H01L2924/0002H01L2924/00
    • The present invention relates to an integrated circuit, comprising: - a substrate with a first (semi-)conductive region arranged in or on the substrate; - a second (semi-)conductive region which is isolated for at least a considerable part relative to the first region and is arranged above or adjacent to the first region; - a third (semi-)conductive region which is insulated for at least a considerable part relative to the first and second (semi-)conductive regions and is arranged thereabove; - a fourth (semi-)conductive region which is insulated relative to the first, second and third (semi-)conductive regions and is arranged thereabove; and - a (semi-)conductive interconnection contact which mutually connects said four (semi-)conductive regions (semi-)conductively, wherein at least two of the four (semi-)conductive regions extend substantially parallel to the substrate of the integrated circuit at a considerable lateral angle relative to each other.
    • 集成电路技术领域本发明涉及一种集成电路,包括: - 衬底,其具有布置在衬底中或衬底上的第一(半)导电区域; - 第二(半)导电区域,其相对于第一区域至少相当部分被隔离并且布置在第一区域的上方或附近; - 第三(半)导电区域,其相对于第一和第二(半)导电区域绝缘至少相当大的一部分,并且布置在其上方; - 第四(半)导电区域,其相对于第一,第二和第三(半)导电区域绝缘并且布置在其上方; 以及 - 导电地互连所述四个(半)导电区域(半导体)的(半)导电互连触点,其中所述四个(半)导电区域中的至少两个基本上平行于所述集成电路的衬底延伸 相对于彼此具有相当大的横向角度。
    • 10. 发明申请
    • SRAM CELL HAVING IMPROVED POLYSILICON RESISTOR STRUCTURES AND METHOD FOR FORMING THE SAME
    • 具有改进的多晶硅电阻结构的SRAM单元及其形成方法
    • WO1997022148A1
    • 1997-06-19
    • PCT/US1996014943
    • 1996-09-18
    • ADVANCED MICRO DEVICES, INC.
    • ADVANCED MICRO DEVICES, INC.CHANG, Kuang-YehLIU, Yowjuang, W.
    • H01L27/11
    • H01L27/11H01L27/1112
    • A metal oxide semiconductor static random access memory (SRAM) includes NMOS transistors and resistor structures implemented without multiple polysilicon layers. According to a first embodiment, the SRAM cell comprises a plurality of appropriately interconnected NMOS transistors having transistor gates formed of a polysilicon layer and resistors formed of the same polysilicon layer. In accordance with a second embodiment, the SRAM cell comprises a plurality of appropriately interconnected NMOS transistors, a dielectric layer overlying the NMOS transistors, and polysilicon resistors passing through the dielectric layer to connect the NMOS transistors to a first metal layer. The dielectric layer, deposited on the NMOS transistors, defines holes exposing drain regions in the NMOS transistors. A polysilicon layer is deposited on the dielectric layer to fill the holes, and the excess polysilicon is removed.
    • 金属氧化物半导体静态随机存取存储器(SRAM)包括NMOS晶体管和不具有多个多晶硅层的电阻结构。 根据第一实施例,SRAM单元包括多个适当互连的NMOS晶体管,其具有由多晶硅层形成的晶体管栅极和由相同多晶硅层形成的电阻器。 根据第二实施例,SRAM单元包括多个适当互连的NMOS晶体管,覆盖NMOS晶体管的电介质层,以及穿过介电层的多晶硅电阻器,以将NMOS晶体管连接到第一金属层。 沉积在NMOS晶体管上的电介质层限定了暴露在NMOS晶体管中的漏极区域的孔。 在电介质层上沉积多晶硅层以填充孔,并且去除多余的多晶硅。