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1. 发明申请

WO2012166770A3 HEATED WAFER CARRIER PROFILING 审中-公开
标题翻译：加热滚筒载体轮廓
公开(公告)号：WO2012166770A3
公开(公告)日：2013-02-28
申请号：PCT/US2012039947
申请日：2012-05-30
申请人： VEECO INSTR INC , BOGUSLAVSKIY VADIM , MANGUM JOSHUA , KING MATTHEW , MARCELO EARL , ARMOUR ERIC A , GURARY ALEXANDER I , QUINN WILLIAM E , TAS GURAY
发明人： BOGUSLAVSKIY VADIM , MANGUM JOSHUA , KING MATTHEW , MARCELO EARL , ARMOUR ERIC A , GURARY ALEXANDER I , QUINN WILLIAM E , TAS GURAY
IPC分类号： H01L21/205 , H01L21/683
CPC分类号： H01L21/68764 , C23C16/4584 , C23C16/46 , C23C16/52 , G01N21/71 , G01N21/75 , G01N23/20033 , G01N2021/1731 , G01N2021/745 , H01L21/67109 , H01L21/68771
摘要： An apparatus provides a carrier (80) rotatable about an axis of rotation (22) where the carrier has a top surface (88) adapted to hold at least one semiconductor wafer (140) and a surface characterization tool (120) which is operative to move over a plurality of positions relative to the top surface of the carrier and/or the wafer transverse to the axis of rotation A method using the apparatus is also included.
摘要翻译：一种装置提供一个能够围绕旋转轴线（22）旋转的载体（80），其中载体具有适于保持至少一个半导体晶片（140）的表面（88）和表面表征工具（120）在相对于载体的顶表面和/或横向于旋转轴线的晶片的多个位置上移动也包括使用该装置的方法。

2. 发明申请

WO2011000494A1 OPTICAL SENSOR AND METHOD FOR DETECTING MOLECULES 审中-公开
标题翻译：光学传感器和检测分子的方法
公开(公告)号：WO2011000494A1
公开(公告)日：2011-01-06
申请号：PCT/EP2010/003784
申请日：2010-06-18
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , HEIDRICH, Helmut , LÜTZOW, Peter , VENGHAUS, Herbert , HOEKSTRA, Hugo, Joseph, Wilhelmus, Maria
发明人： HEIDRICH, Helmut , LÜTZOW, Peter , VENGHAUS, Herbert , HOEKSTRA, Hugo, Joseph, Wilhelmus, Maria
IPC分类号： G01N21/77
CPC分类号： G01N21/7746 , G01N21/39 , G01N2021/1721 , G01N2021/1731 , G01N2021/7779
摘要： The invention relates to an optical sensor comprising an optical waveguide (1) and a light-sensitive element (4) for detecting light coupled out of the waveguide (1) and also various ring resonators (2), the ring resonators (2) being coupled optically to the mentioned waveguide (1) and, with the exception of at most one of the ring resonators (2), each having a means (5) for adjusting resonance frequencies of the respective ring resonator (2) and/or of the coupling between the ring resonator (2) and the waveguide (1) and at least two of the ring resonators (2) having different optical lengths in an initial state and being disposed for having their resonance frequencies influenced by means of different variables to be measured which are specific for each of these ring resonators (2). The invention refers furthermore to a method which can be implemented with a sensor of this type for detecting molecules of at least one substance.
摘要翻译：本发明涉及一种光学传感器，包括光波导（1）和用于检测耦合在波导（1）外的光的光敏元件（4），以及各种环形谐振器（2），环形谐振器光耦合到所述波导（1），并且除了至少一个环形谐振器（2）之外，每个具有用于调节各个环形谐振器（2）和/或所述环形谐振器（2）的谐振频率的装置（5）环形谐振器（2）和波导（1）之间的耦合以及在初始状态下具有不同光学长度的环形谐振器（2）中的至少两个，并被设置成使谐振频率受待测量的不同变量的影响这些环形谐振器（2）都是特定的。本发明还涉及可以用这种类型的传感器来实施以检测至少一种物质的分子的方法。

3. 发明申请

WO2008021093A2 PROBE BEAM PROFILE MODULATED OPTICAL REFLECTANCE SYSTEM AND METHODS 审中-公开
标题翻译：探测光束调制光学反射系统和方法
公开(公告)号：WO2008021093A2
公开(公告)日：2008-02-21
申请号：PCT/US2007/017558
申请日：2007-08-07
申请人： KLA-TENCOR TECHNOLOGIES , SALNIK, Alex , NICOLAIDES, Lena , OPSAL, Jon
发明人： SALNIK, Alex , NICOLAIDES, Lena , OPSAL, Jon
IPC分类号： G01N1/00
CPC分类号： G01N21/1717 , G01N21/4788 , G01N21/55 , G01N21/636 , G01N21/9501 , G01N2021/1731 , G01N2021/214
摘要： The present invention provides a probe beam profile - modulated optical reflectivity metrology system having a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample in a manner so that the rays within the probe beam create a spread of angles of incidence. A detector array simultaneously measures intensities of the rays within the reflected/diffracted probe beam simultaneously at different angles of incidence. The intensity and angle of incidence information is used to analyze the sample.
摘要翻译：本发明提供了一种探测光束轮廓调制的光学反射率测量系统，其具有用于激励样本的调制泵浦源。一个单独的探测光束指向与样品相互作用，使得探测光束内的光线产生入射角的扩散。探测器阵列以不同的入射角同时测量反射/衍射的探测光束内的光线强度。使用强度和角度信息来分析样本。

4. 发明申请

WO2006013272A3 METHOD AND SYSTEM FOR OPTICAL DETECTION OF NANO-OBJECTS IN A LIGHT REFRACTING MEDIUM 审中-公开
标题翻译：光反射介质中纳米对象的光学检测方法与系统
公开(公告)号：WO2006013272A3
公开(公告)日：2007-01-18
申请号：PCT/FR2005001704
申请日：2005-07-01
申请人： CENTRE NAT RECH SCIENT , LOUNIS BRAHIM , COGNET LAURENT , BERCIAUD STEPHANE
发明人： LOUNIS BRAHIM , COGNET LAURENT , BERCIAUD STEPHANE
IPC分类号： G01N21/17 , G01N15/14
CPC分类号： G01N15/1475 , G01N21/1717 , G01N2021/1725 , G01N2021/1731 , G01N2021/1757
摘要： The invention concerns a method and a system for optical detection of nano-objects in a light-refracting medium. It consists in illuminating (A) a nano-object (n-o i ) and the light-refracting medium with a heating coherent periodically amplitude-modulated electromagnetic wave (HB(O)), to generate a specific temperature and refractive index profile in the vicinity of the nano-object, and with a probe coherent (PB) electromagnetic wave to generate an emerging electromagnetic wave (EPB(O)) comprising at least one component beat modulated in amplitude at the modulation frequency of the heating coherent wave; detecting (C) on the emerging wave (EPB(O)) the intensity component beat modulated in amplitude, to isolate and represent said nano-object in the light-refracting medium. The invention is useful for detecting nano-objects in an industrial, physiological or intracellular light-refracting medium.
摘要翻译：本发明涉及一种用于光折射介质中的纳米物体的光学检测的方法和系统。它包括用（A）纳米物体（无光）和具有加热相干周期性幅度调制电磁波（HB（O））的光折射介质照射（A），以产生特定温度和在纳米物体附近的折射率分布，以及用探针相干（PB）电磁波产生出现的电磁波（EPB（O）），其包括以调制频率调制的幅度调制的至少一个分量节拍加热相干波; 在新兴波（EPB（O））上检测（C）在幅度上调制的强度分量，以在光折射介质中隔离和表示所述纳米物体。本发明可用于检测工业，生理或细胞内光折射介质中的纳米物体。

5. 发明申请

WO2006099453A1 HIGH PERFORMANCE CCD-BASED THERMOREFLECTANCE IMAGING USING STOCHASTIC RESONANCE 审中-公开
标题翻译：使用STOCHASTIC共振的高性能基于CCD的热变像成像
公开(公告)号：WO2006099453A1
公开(公告)日：2006-09-21
申请号：PCT/US2006/009235
申请日：2006-03-15
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY (MIT) , LUEERSSEN, Dietrich , RAM, Rajeev, J. , HUDGINGS, Janice, A. , MAYER, Peter, M.
发明人： LUEERSSEN, Dietrich , RAM, Rajeev, J. , HUDGINGS, Janice, A. , MAYER, Peter, M.
IPC分类号： G01N21/17 , G01N25/18 , G06T5/50
CPC分类号： G01J5/0003 , G01K11/125 , G01N21/1717 , G01N21/55 , G01N25/18 , G01N2021/1731
摘要： The invention is directed to systems and methods of digital signal processing and in particular to systems and methods for measurements of thermoreflectance signals, even when they are smaller than the code width of a digital detector used for detection. For example, in some embodiments, the number of measurements done is selected to be sufficiently large so as to obtain an uncertainty less than the code width of the detector. This allows for obtaining images having an enhanced temperature resolution. The invention is also directed to methods for predicting the uncertainty in measurement of the signal based on one or more noise variables associated with the detection process and the number of measurement iterations.
摘要翻译：本发明涉及数字信号处理的系统和方法，特别涉及用于测量热反射信号的系统和方法，即使它们小于用于检测的数字检测器的代码宽度。例如，在一些实施例中，完成的测量数量被选择为足够大，以便获得小于检测器的代码宽度的不确定性。这允许获得具有增强的温度分辨率的图像。本发明还涉及用于基于与检测过程相关联的一个或多个噪声变量和测量迭代次数来预测信号测量的不确定性的方法。

6. 发明申请

WO2017191118A1 SYSTEM AND METHOD FOR MONITORING REAGENT CONCENTRATIONS 审中-公开
标题翻译：监测试剂浓度的系统和方法
公开(公告)号：WO2017191118A1
公开(公告)日：2017-11-09
申请号：PCT/EP2017/060387
申请日：2017-05-02
申请人： VENTANA MEDICAL SYSTEMS, INC. , F. HOFFMANN-LA ROCHE AG
发明人： ALKANDRY, Emily S. , GILCHRIST, Collin Andrew , HERNANDEZ, Jamie L. , ILES, Shawn M. , JONES, Lisa A. , KOZIKOWSKI, III, Raymond Thomas , MOYA, Pete , TOTH, Tyler , WHITTIER, Danton Xixo
IPC分类号： G01N21/27 , G01N21/41 , G01N21/43 , G01N21/552 , G01N21/75
CPC分类号： G01N21/552 , G01N1/312 , G01N21/272 , G01N21/4133 , G01N21/43 , G01N21/75 , G01N2021/1731 , G01N2201/025 , G01N2201/0612 , G01N2201/0639
摘要： The present invention relates to a system and method for monitoring changes in reagent concentration, and in particular, to a system and method for monitoring for changes in reagent concentrations within small volumes of liquids in contact with a biological sample (908) disposed on a substrate such as a microscope slide (906) using a refractometer based on the reflection of a laser beam (900) coupled to the sample (908) via a prism (904).
摘要翻译：本发明涉及用于监测试剂浓度变化的系统和方法，具体涉及用于监测与生物体接触的少量液体内的试剂浓度变化的系统和方法基于经由棱镜（904）耦合到样本（908）的激光束（900）的反射，使用折射计设置在诸如显微镜载玻片（906）的衬底上的样本（908）。

7. 发明申请

WO2017125928A1 DEVICES AND METHODS TO MEASURE SMALL DISPLACEMENTS 审中-公开
标题翻译：测量小位移的装置和方法
公开(公告)号：WO2017125928A1
公开(公告)日：2017-07-27
申请号：PCT/IL2017/050074
申请日：2017-01-19
申请人： YEDA RESEARCH AND DEVELOPMENT CO. LTD.
发明人： LUBOMIRSKY, Igor , LAZOVSKI, Guy
IPC分类号： G01N21/17 , G01N21/21 , G01B11/16 , G01R29/22 , G01N25/16
CPC分类号： G01N21/211 , G01B11/168 , G01N21/1717 , G01N25/16 , G01N2021/1729 , G01N2021/1731 , G01R29/22
摘要： Methods, devices and apparatus for measuring expansion/contraction properties of a material are described. According to an embodiment a method comprises: providing a device, said device comprising a sample comprising said material, said sample comprising a first surface and a second surface, a first substrate and a second substrate connected to said first surface and to said second surface of said sample, respectively, a reflective material attached to said second substrate, and two electrical contacts each independently in contact with said sample; applying voltage to said sample using said electrical contacts; illuminating said reflective material using a light source, such that said illumination comprises light having known and controllable polarization; collecting light reflected off said reflective material; measuring amplitude and phase of an oscillating change in polarization of the reflected light; and extracting parameters related to expansion/contraction from said reflected light measurement, thus evaluating said expansion/contraction properties of said material.
摘要翻译：描述了用于测量材料的膨胀/收缩特性的方法，装置和设备。根据一个实施例，一种方法包括：提供装置，所述装置包括含有所述材料的样本，所述样本包括第一表面和第二表面，第一基底和第二基底连接到所述第一表面和所述第二表面所述样品分别为附着于所述第二基板的反射材料，以及各自独立地与所述样品接触的两个电触点; 使用所述电触点向所述样品施加电压; 使用光源照射所述反射材料，使得所述照射包括具有已知和可控偏振的光; 收集从所述反射材料反射的光; 测量反射光的偏振振荡变化的幅度和相位; 并从所述反射光测量中提取与膨胀/收缩有关的参数，从而评估所述材料的所述膨胀/收缩性质。

8. 发明申请

WO2012143072A1 METHOD OF DETECTING MOLECULES AND OPTICAL SENSOR 审中-公开
标题翻译：检测分子和光学传感器的方法
公开(公告)号：WO2012143072A1
公开(公告)日：2012-10-26
申请号：PCT/EP2012/001175
申请日：2012-04-19
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , HEIDRICH, Helmut , LÜTZOW, Peter , PERGANDE, Daniel , SCHADE, Wolfgang
发明人： HEIDRICH, Helmut , LÜTZOW, Peter , PERGANDE, Daniel , SCHADE, Wolfgang
IPC分类号： G01N21/77
CPC分类号： G01N21/255 , G01N21/27 , G01N21/39 , G01N21/7746 , G01N2021/1731 , G01N2021/7789
摘要： The invention relates to a method for detecting molecules of a particular substance by means of an optical sensor. This method comprises the steps of - bringing the sensor into contact with a fluid to be analyzed, - coupling light of a first wavelength (λ 1 ) into an optical resonator (3) of the sensor, the resonator (3) being covered at least partially with an active layer of a covering material for selectively adsorbing a group of substances, - coupling light of a second wavelength (λ 2 ) into the same resonator (3) or into a second optical resonator (3') of the sensor, the second resonator (3') being covered at least partially with an active layer of the same covering material - detecting, for each of the first and the second wavelengths (λ 1 ( λ 2 ), an optical signal coupled out of an optical path containing the respective resonator (3, 3'), - varying an optical length of the respective resonator (3, 3') or the respective wavelength (λ 1 ( λ 2 ) such that an interval comprising at least one resonance of the respective resonator (3, 3') is scanned, and - detecting a broadening of this resonance indicating an absorption of the light fed into the respective resonator (3, 3') by molecules accumulated at the active layer of this resonator (3, 3'). The invention also relates to an optical sensor designed for performing this method.
摘要翻译：本发明涉及通过光学传感器检测特定物质的分子的方法。该方法包括以下步骤：使传感器与要分析的流体接触， - 将第一波长（λ1）的光耦合到传感器的光学谐振器（3）中，至少覆盖谐振器（3）部分地具有用于选择性吸附一组物质的覆盖材料的活性层 - 将第二波长（λ2）的光耦合到相同的谐振器（3）中或耦合到传感器的第二光学谐振器（3'）中，至少部分地用相同覆盖材料的有源层覆盖第二谐振器（3'） - 对于第一和第二波长（λ1（λ2））中的每一个，检测从包括相应的谐振器（3,3'）， - 改变相应谐振器（3,3'）的光学长度或相应的波长（λ1（λ2）），使得包括相应谐振器的至少一个谐振的间隔（ 3,3'），并且 - 检测该共振指示的变宽通过在该谐振器（3,3'）的有源层处累积的分子吸收馈送到各个谐振器（3,3'）中的光。本发明还涉及设计用于执行该方法的光学传感器。

9. 发明申请

WO2008118573A2 METHODS AND SYSTEMS FOR DETECTING CONCEALED OBJECTS 审中-公开
标题翻译：用于检测隐蔽对象的方法和系统
公开(公告)号：WO2008118573A2
公开(公告)日：2008-10-02
申请号：PCT/US2008/054513
申请日：2008-02-21
申请人： ISCON VIDEO IMAGING, INC. , KHODOR, Leonid , DROZNIN, Henry , GORIAN, Izrail , DOUBININA, Galina
发明人： KHODOR, Leonid , DROZNIN, Henry , GORIAN, Izrail , DOUBININA, Galina
CPC分类号： G01N21/1717 , G01N2021/1731
摘要： Methods and systems for detecting the presence of concealed objects. One embodiment of the method of these teachings for detecting the presence of concealed objects is passive, does not require any external radiation source, uses thermal radiation of a body as a source of radiation. Other embodiments include unique systems, devices, methods, and apparatus to determine the presence of a concealed object.
摘要翻译：用于检测隐藏对象存在的方法和系统。用于检测隐藏物体的存在的这些教导的方法的一个实施例是无源的，不需要任何外部辐射源，使用身体的热辐射作为辐射源。其他实施例包括用于确定隐藏对象的存在的独特系统，设备，方法和装置。

10. 发明申请

WO2006013272A2 PROCEDE ET SYSTEME DE DETECTION OPTIQUE DE NANO-OBJETS DANS UN MILIEU REFRINGENT 审中-公开
标题翻译：光反射介质中纳米对象的光学检测方法与系统
公开(公告)号：WO2006013272A2
公开(公告)日：2006-02-09
申请号：PCT/FR2005/001704
申请日：2005-07-01
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) , LOUNIS, Brahim , COGNET, Laurent , BERCIAUD, Stéphane
发明人： LOUNIS, Brahim , COGNET, Laurent , BERCIAUD, Stéphane
IPC分类号： G01N
CPC分类号： G01N15/1475 , G01N21/1717 , G01N2021/1725 , G01N2021/1731 , G01N2021/1757
摘要： L'invention concerne un procédé et un système de détection optique de nano-objets dans un milieu réfringent. On illumine (A) un nano-objet (n-o i ) et le milieu réfringent avec une onde électromagnétique cohérente de chauffage modulée périodiquement (HB(Ω)) en amplitude, pour engendrer un profil déterminé de température et d'indice de réfraction au voisinage du nano-objet, et avec une onde électromagnétique cohérente de sonde (PB) pour engendrer une onde de sonde émergente (EPB(Ω)) comportant au moins une composante d'intensité modulée en amplitude par battement à la fréquence de modulation de l'onde cohérente de chauffage. On détecte (C) sur l'onde émergente (EPB(Ω)) la composante d'intensité modulée en amplitude par battement, pour mettre en évidence et représenter ce nano-objet dans le milieu réfringent. Application à la détection de nano-objets dans un milieu réfringent industriel, physiologique ou intra-cellulaire.
摘要翻译：本发明涉及一种用于光折射介质中的纳米物体的光学检测的方法和系统。它包括照亮（A）纳米物体（n-o

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