专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2016183618A1 MEANS AND METHOD FOR 6 DEGREES OF FREEDOM DISPLACEMENT SENSOR 审中-公开
标题翻译： 6自由度位移传感器的方法和方法
公开(公告)号：WO2016183618A1
公开(公告)日：2016-11-24
申请号：PCT/AU2016/000176
申请日：2016-05-20
申请人： ROYAL MELBOURNE INSTITUTE OF TECHNOLOGY
发明人： SMITH, Robert Masterson , FUSS, Franz Konstantin
IPC分类号： G01B9/02 , G01B11/00 , G01D5/00
CPC分类号： G01B9/02027 , G01B9/02021 , G01B9/02032
摘要： A displacement sensor comprising at least 3 interferometers and a three dimensional mirror in which the three dimensional mirror is attached to a solid body and interferometer fixed components are independently attached to a solid body and displacement of a solid body to 6 DoF is derived from the displacement of the three dimensional mirror. The three dimensional mirror is mounted on one part of a solid body and the interferometer fixed components on another part of said solid body or a part of a different solid body so that movement of one part relative to the other can be measured to 6DoF. Three interferometers are preferably orthogonally arranged about a three dimensional mirror to derive displacement of the three dimensional mirror to 6 DoF. A method of measuring displacement of a solid body includes the steps of deriving the three 3 dimensional position vectors of the three dimensional mirror from the three 3 dimensional mirror normal angles and the three 3 dimensional mirror tilt axis angles obtained from the 3 interferograms, and the linear displacement and direction of linear displacement of the three dimensional mirror is derived from the direction of movement of the fringe lines across the 3 interferograms and the three dimensional mirror position vectors. A method of overcoming linear displacement errors in a first direction as a consequence of linear displacement in a second direction when using interferometers arranged about a three dimensional mirror to measure displacement to 6 degrees of freedom.
摘要翻译：包括至少3个干涉仪的位移传感器和三维反射镜，其中三维反射镜附接到固体并且干涉仪固定部件独立地附接到固体，并且固体从6位移到6 DoF 的三维镜。三维反射镜安装在固体的一部分上，并且干涉仪将固定部件固定在所述固体的另一部分上或不同固体的一部分上，使得可以将一部分相对于另一部分的运动测量为6DF。优选地，三个干涉仪围绕三维反射镜正交布置以导致三维反射镜的位移到6DoF。测量实体位移的方法包括以下步骤：从三个三维反射镜法线角度和从3个干涉图获得的三个三维镜面倾斜轴角度导出三维反射镜的三个三维位置矢量，以及线性位移和三维反射镜的线性位移方向是通过3条干涉图和三维立体镜位置矢量的条纹线的移动方向得出的。当使用布置在三维反射镜周围的干涉仪来测量位移至6自由度时，作为第二方向上的线性位移的结果，在第一方向克服线性位移误差的方法。

2. 发明申请

WO2015155779A1 OPTICAL PHASE MEASUREMENT METHOD AND SYSTEM 审中-公开
标题翻译：光学相位测量方法与系统
公开(公告)号：WO2015155779A1
公开(公告)日：2015-10-15
申请号：PCT/IL2015/050389
申请日：2015-04-12
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： BARAK, Gilad , SHAFIR, Dror , GROSSMAN, Danny , BERLATZKY, Yoav , HAINICK, Yanir
IPC分类号： G01B11/24 , G01B9/02 , G01N21/95
CPC分类号： G01N21/956 , G01B9/02007 , G01B9/02032 , G01B9/02072 , G01B9/0209 , G01B11/0675 , G01B2210/56 , G01B2290/70 , G01N21/8806 , G01N2021/8848
摘要： A measurement system for use in measuring parameters of a patterned sample is presented. The system comprises: a broadband light source; an optical system configured as an interferometric system; a detection unit; and a control unit. The interferometric system defines illumination and detection channels having a sample arm and a reference arm comprising a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms; the detection unit comprises a configured and operable for detecting a combined light beam formed by a light beam reflected from said reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by at least two spectral interference signatures. The control unit is configured and operable for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.
摘要翻译：提出了一种用于测量图案样品参数的测量系统。该系统包括：宽带光源; 配置为干涉系统的光学系统; 检测单元; 和控制单元。所述干涉仪系统定义具有采样臂和参考臂的照明和检测通道，所述参考臂包括参考反射器，并且被配置为用于诱导所述样本和参考臂之间的光程差; 检测单元包括被配置和可操作以检测由从所述反射器反射的光束形成的组合光束和从样本支架传播的光束，以及产生指示由至少两个光谱干涉特征形成的光谱干涉图案的测量数据。控制单元被配置和操作用于接收测量数据，并将基于模型的处理应用于频谱干涉图案，以确定样本中的图案的一个或多个参数。

3. 发明申请

WO2014045038A1 METROLOGY METHOD 审中-公开
标题翻译：计量方法
公开(公告)号：WO2014045038A1
公开(公告)日：2014-03-27
申请号：PCT/GB2013/052455
申请日：2013-09-19
申请人： DUPONT TEIJIN FILMS U.S. LIMITED PARTNERSHIP , RAKOS, Karl
发明人： RAKOS, Karl
IPC分类号： G01B11/24 , G01B9/02
CPC分类号： G01B11/30 , G01B9/02032 , G01B9/02048 , G01B11/2441
摘要： An interferometric method for profiling the topography of a sample surface, said method comprising the steps of: (i)a first interferometric profiling step in which a sample surface is analysed by single-frame interferometry (SFI) at a relatively low first magnification M1 to produce a map comprising pixels with planar (X,Y)-coordinates corresponding to the area of the sample surface, (ii)interrogating the pixel data obtained from the first profiling step by identifying pixel(s) which meet or exceed a Cut-Off Threshold, and which also meet or exceed a parameter N NAP which is the number of adjacent pixels all of which meet or exceed the Cut-Off Threshold; (iii)interrogating the pixel data obtained from the first profiling step by identifying pixel(s) for which no z-coordinate has been recorded; (iv)generating a Low Magnification Frame File (LMFF) which comprises the (X,Y) coordinates of the pixels derived from steps (ii) and (iii); (v)a second interferometric profiling step in which the sample surface is analysed at a relatively high second magnification M2, wherein M2>M1, wherein only selected regions of the sample surface are analysed at said second magnification M2, wherein said selected regions comprise the features associated with the (X,Y)-coordinates of the pixels in the Low Magnification Frame File; and further comprising a step selected from: (vi)the step of analysis of the output of the second interferometric profiling step to differentiate between an intrinsic defect and an extrinsic defect; (vii)the step of assessing whether said sample surface meets one or more quality control standard(s) and/or one or more target property or properties; and (viii)the step of assessing whether said sample surface is suitable as a surface for subsequent coating.
摘要翻译：一种用于对样品表面的形貌进行分析的干涉测量方法，所述方法包括以下步骤：（i）第一干涉测量步骤，其中样品表面通过单帧干涉测量（SFI）在相对低的第一放大率M1至产生包括对应于样本表面区域的平面（X，Y）坐标的像素的图，（ii）通过识别满足或超过截止的像素来询问从第一分析步骤获得的像素数据阈值，并且其也满足或超过参数N NAP，其是所有符合或超过截止阈值的相邻像素的数量; （iii）通过识别没有记录z坐标的像素来询问从第一分析步骤获得的像素数据; （iv）产生包括从步骤（ii）和（iii）导出的像素的（X，Y）坐标的低放大帧文件（LMFF）; （v）第二干涉测量步骤，其中在相对较高的第二倍率M2处分析样品表面，其中M2> M1，其中仅在所述第二放大倍率M2处分析样品表面的选定区域，其中所述选择的区域包括与低放大帧文件中的像素的（X，Y）坐标相关联的特征; 并且还包括选自以下的步骤：（vi）分析所述第二干涉测量步骤的输出以区分本征缺陷和外在缺陷的步骤; （vii）评估所述样品表面是否满足一个或多个质量控制标准和/或一个或多个目标性质或性质的步骤; 和（viii）评估所述样品表面是否适合作为后续涂层的表面的步骤。

4. 发明申请

WO2013140396A1 PORTABLE INTERFEROMETRIC DEVICE 审中-公开
标题翻译：便携式干涉仪
公开(公告)号：WO2013140396A1
公开(公告)日：2013-09-26
申请号：PCT/IL2013/050241
申请日：2013-03-14
申请人： RAMOT AT TEL-AVIV UNIVERSITY LTD.
发明人： SHAKED, Natan Tzvi , GIRSHOVITZ, Pinhas
IPC分类号： G01B9/02
CPC分类号： G02B21/0056 , G01B9/02024 , G01B9/02032 , G01B9/02042 , G01B9/02049 , G01B9/02054 , G01B9/02057 , G01B9/02075 , G01B9/02097 , G01B9/04 , G01B11/06 , G01B2290/50 , G02B21/0008 , G02B21/0016 , G02B21/008 , G02B21/0088
摘要： The present invention provides a novel simple, portable, compact and inexpensive approach for interferometric optical thickness measurements that can be easily incorporated into an existing microscope (or other imaging systems) with existing cameras. According to the invention, the interferometric device provides a substantially stable, easy to align common path interferometric geometry, while eliminating a need for controllably changing the optical path of the beam. To this end, the inexpensive and easy to align interferometric device of the invention is configured such that it applies the principles of the interferometric measurements to a sample beam only, being a single input into the interferometric device.
摘要翻译：本发明提供了一种用于干涉光学厚度测量的新型简单，便携，紧凑和便宜的方法，其可以容易地结合到具有现有照相机的现有显微镜（或其他成像系统）中。根据本发明，干涉测量装置提供了基本上稳定的，容易对准的共同路径干涉几何，同时消除了对可控地改变光束的光路的需要。为此，本发明的便宜且易于对准的干涉测量装置被配置为使得其仅将干涉测量的原理应用于仅用于干涉测量装置的单个输入的采样光束。

5. 发明申请

WO2013124888A1 3D SHAPE MEASUREMENT APPARATUS 审中-公开
标题翻译： 3D形状测量装置
公开(公告)号：WO2013124888A1
公开(公告)日：2013-08-29
申请号：PCT/JP2012/001150
申请日：2012-02-21
申请人： SEKISUI INTEGRATED RESEARCH INC. , YAMAMOTO, Kazuki
发明人： YAMAMOTO, Kazuki
IPC分类号： G01B9/02 , G01B9/04 , G02B21/00 , G02B21/14 , G01N33/483
CPC分类号： G01B9/02097 , G01B9/02024 , G01B9/02032 , G01B9/04 , G01B2290/50 , G01B2290/70 , G02B13/22
摘要： Provided is a 3D shape measurement apparatus that can easily determine whether the object to be measured is actually located in the field of view. A polarization splitting element 13 splits light to be measured containing phase information on a measurement sample S into a first polarized beam L4-1 and a second polarized beam L4-2 different in polarization direction from the first polarized beam L4-1. A first optical system 14 telecentric on one side focuses the first and second polarized beams L4-1 and L4-2 individually. A pinhole plate 15 is provided with a first pinhole 15a and a second pinhole 15b. The first pinhole 15a forms a first projection beam L5-1 from the first polarized beam L4-1 focused by the first optical system 14. The second pinhole 15b forms a second projection beam L5-2 from the second polarized beam L4-2 focused by the first optical system 14. A second optical system 16 forms an image G of interference fringes by superimposing the first projection beam L5-1 and the second projection beam L5-2 with optical axes thereof inclined to each other.
摘要翻译：提供一种可以容易地确定被测量物体是否实际位于视野中的3D形状测量装置。偏振光分离元件13将包含测量样本S上的相位信息的被测光被分离成与第一偏振光束L4-1偏振方向不同的第一偏振光束L4-1和第二偏振光束L4-2。一方面远心的第一光学系统14分别聚焦第一和第二偏振光束L4-1和L4-2。针孔板15设置有第一针孔15a和第二针孔15b。第一针孔15a从由第一光学系统14聚焦的第一偏振光束L4-1形成第一投影光束L5-1。第二针孔15b从第二偏振光束L4-2形成第二投影光束L5-2 第一光学系统14.第二光学系统16通过将第一投影光束L5-1和第二投影光束L5-2与其彼此倾斜的光轴重叠而形成干涉条纹图像G.

6. 发明申请

WO2008023217A1 PHOTOREFRACTIVE INTERFEROMETER 审中-公开
标题翻译：光电干扰仪
公开(公告)号：WO2008023217A1
公开(公告)日：2008-02-28
申请号：PCT/IB2006/052902
申请日：2006-08-22
申请人： BIOSCAN TECHNOLOGY LTD. , VOITSECHOV, Uri , KHACHATUROV, Arkady , MATCOVITCH, Avram
发明人： VOITSECHOV, Uri , KHACHATUROV, Arkady , MATCOVITCH, Avram
IPC分类号： G01N21/45 , G01B9/02 , G01D5/26 , G01B11/16
CPC分类号： G01D5/266 , G01B9/02032 , G01B9/02041 , G01B2290/70
摘要： A method of coupling optical energy comprising: generating a first beam of optical energy; generating a second beam of optical energy coherent with the first beam; polarizing optical energy from the first and second beams in a same direction; and transmitting the polarized optical energy from the first and second beams into a photorefractive body so that the energy interferes in the body to generate an interference pattern that is extant in substantially all the volume of the body.
摘要翻译：一种耦合光能的方法，包括：产生第一光能束; 产生与所述第一光束相干的第二光束; 沿相同方向偏振来自第一和第二光束的光能; 以及将来自第一和第二光束的偏振光能量传输到光折射体中，使得能量干扰身体以产生在身体的基本上所有体积中存在的干涉图案。

7. 发明申请

WO2005089299A3 INTERFEROMETER HAVING AN AUXILIARY REFERENCE SURFACE 审中-公开
标题翻译：具有辅助参考表面的干涉仪
公开(公告)号：WO2005089299A3
公开(公告)日：2007-06-07
申请号：PCT/US2005008515
申请日：2005-03-15
申请人： ZYGO CORP , DE GROOT PETER J
发明人： DE GROOT PETER J
IPC分类号： G01B9/02 , G01B11/24
CPC分类号： G01B9/02032 , G01B9/02057 , G01B9/02079 , G01B11/2441 , G01B2290/70
摘要： In general, in a first aspect, the invention features apparatus that include an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a primary reference surface and a test surface. The interferometer is configured to direct a primary portion of input electromagnetic radiation to the main cavity and an auxiliary portion of the input electromagnetic radiation to reflect from the auxiliary reference surface, wherein a first portion of the primary portion in the main cavity reflects from the primary reference surface and a second portion of the primary portion in the main cavity reflects from the test surface. The interferometer is further configured to direct the electromagnetic radiation reflected from the test surface, the primary reference surface, and the auxiliary reference to a multi-element detector to interfere with one another to form an interference pattern.
摘要翻译：通常，在第一方面，本发明的特征在于包括具有主腔和辅助参考表面的干涉仪的装置，所述主腔包括主参考表面和测试表面。所述干涉仪被配置为将输入电磁辐射的主要部分引导到所述主腔和所述输入电磁辐射的辅助部分以从所述辅助参考表面反射，其中所述主腔中的所述主要部分的第一部分从所述主腔反射参考表面和主腔中的主要部分的第二部分从测试表面反射。干涉仪还被配置为将从测试表面反射的电磁辐射引导到多元件检测器，以将干涉图形相互干扰。

8. 发明申请

WO2017003983A1 INTERFEROMETRIC ROLL-OFF MEASUREMENT USING A STATIC FRINGE PATTERN 审中-公开
标题翻译：使用静态FRINGE模式进行干涉测量
公开(公告)号：WO2017003983A1
公开(公告)日：2017-01-05
申请号：PCT/US2016/039712
申请日：2016-06-28
申请人： CORNING INCORPORATED
发明人： BEAN, Alexander Timothy , DUNN, Thomas James , LEE, Christopher Alan , TRONOLONE, Mark Joseph
IPC分类号： G01N21/95 , G01B11/24
CPC分类号： G01B11/2441 , G01B9/02032 , G01B9/02044 , G01N21/9503 , G06T7/0006 , G06T7/64 , G06T2207/30148
摘要： An apparatus (20) for measuring the surface contour of a target area of a substrate (10) has a light source (22) to emit a measurement light beam. A beam splitting element (74) defines a measurement axis (OM) and a reference axis (OR). A substrate holder (76) disposes the target area along the measurement axis and tilted away from normal incidence, about a tilt axis (T) that orthogonally intersects the measurement axis, according to a predetermined tilt angle (Tθ) that is a function of the measurement light beam wavelength. An imaging sensor (40) records a fringe pattern generated from the measurement light beam and a reference light beam. A computer extracts frequency profiles from the recorded fringe pattern, each profile taken in a direction that is orthogonal to the direction of the tilt axis, wherein the programmed instructions further compute changes in the contour of the target area surface according to the frequency profiles.
摘要翻译：用于测量基板（10）的目标区域的表面轮廓的装置（20）具有发射测量光束的光源（22）。分束元件（74）限定测量轴（OM）和参考轴（OR）。基板保持器（76）根据作为所述测量轴的函数的预定倾斜角（Tθ），围绕与测量轴正交的倾斜轴（T）沿着测量轴布置目标区域并且倾斜远离法向入射测量光束波长。成像传感器（40）记录从测量光束和参考光束产生的条纹图案。计算机从记录的条纹图案中提取频率分布，每个轮廓沿与倾斜轴的方向正交的方向拍摄，其中编程的指令还根据频率分布计算目标区域表面轮廓的变化。

9. 发明申请

WO2016051283A3 INTERFEROMETRIC SYSTEM WITH VARIABLE OPTICS FOR NON-COHERENT LIGHT SOURCE AND METHOD OF INTERFEROMETRIC SYSTEM ALIGNMENT 审中-公开
标题翻译：用于非相干光源的可变光学的干涉系统和干涉系统对准方法
公开(公告)号：WO2016051283A3
公开(公告)日：2016-08-04
申请号：PCT/IB2015002350
申请日：2015-08-12
申请人： VYSOKÉ UČENÍ TECHNICKÉ V BRNĚ , TESCAN ORSAY HOLDING A S
发明人： CHMELIK RADIM , DOSTÁL ZBYNĚK , KOLMAN PAVEL , SLABÝ TOMÁŠ , LOŠTÁK MARTIN
IPC分类号： G01B9/02 , G01B9/023 , G02B21/00 , G03H1/00 , G03H1/04
CPC分类号： G01B9/02024 , G01B9/02032 , G01B9/02047 , G01B9/0209 , G02B21/0052 , G03H1/0443 , G03H2001/005 , G03H2001/0456 , G03H2222/24 , G03H2223/23
摘要： Interferometric system with variable optics for non-coherent source of radiation and method of interferometric system alignment The invention relates to the interferometric system for creation of hologram with spatial carrier frequency comprising a source of radiation (1) with low coherence, behind which a field plane (2) optically conjugated with an output image plane (10) is arranged, a beam splitter (4) for splitting the beam of radiation into two separate branches of interferometer, an object branch with plurality of optical elements, a reference branch with plurality of optical elements, a diffraction grating (7), an extender (12), a transmission system of reflectors and a detector arranged in the output image plane (10), wherein the plurality of optical elements in the object branch includes a objective lens (5.12), wherein the objective lens used in the reference branch is not identical with the one used in the object branch, which means a significant financial saving. The system comprises object and reference input imaging systems (5.1) and (5.2) and object and reference output imaging systems (8.1) and (8.2) wherein one of them includes an optical element with variable focal length.
摘要翻译：具有用于非相干辐射源的可变光学器件的干涉测量系统和干涉系统对准方法本发明涉及用于创建具有空间载波频率的全息图的干涉测量系统，其包括具有低相干性的辐射源（1）（2）与输出图像平面（10）光学共轭;分束器（4），用于将辐射束分成干涉仪的两个独立分支，具有多个光学元件的物体分支，具有多个光学元件的参考分支光学元件，衍射光栅（7），扩展器（12），布置在输出图像平面（10）中的反射器的传输系统和检测器，其中物体分支中的多个光学元件包括物镜（5.12 ），其中在参考分支中使用的物镜与物体分支中使用的物镜不相同，这意味着显着的财政储蓄。该系统包括对象和参考输入成像系统（5.1）和（5.2）以及对象和参考输出成像系统（8.1）和（8.2），其中一个包括具有可变焦距的光学元件。

10. 发明申请

WO2014020597A1 SYSTEM FOR PERFORMING DUAL PATH, TWO-DIMENSIONAL OPTICAL COHERENCE TOMOGRAPHY (OCT) 审中-公开
标题翻译：用于执行双路径，二维光学相干光谱（OCT）的系统
公开(公告)号：WO2014020597A1
公开(公告)日：2014-02-06
申请号：PCT/IL2013/050641
申请日：2013-07-28
申请人： ADOM, ADVANCED OPTICAL TECHNOLOGIES LTD.
发明人： ARIELI, Yoel , WEITZMAN, Yosef
IPC分类号： G01B9/02 , G02B27/10 , A61B6/00
CPC分类号： G01B9/0203 , A61B3/102 , G01B9/02032 , G01B9/02036 , G01B9/02043 , G01B9/02044 , G01B9/02057 , G01B9/02065 , G01B9/02091 , G01B2290/60
摘要： A system (10) for measuring a physical characteristic of an object (1 1) using dual path, two-dimensional Optical Coherence Tomography (OCT) includes an extended broadband light source (13) producing an incident light beam (14) and an interferometer (15) having a beam splitter (16) that splits the incident beam into first and second component (17, 18) beams and directs the second component beam (18) on to a moveable mirror (19) for creating an optical path difference between the first component beam (17) and a reflection (20) of the second component beam. A focusing lens (21) having a focal plane (22) focuses the first component beam and the reflection of the second component beam to form a fringe pattern (23) on the focal plane, and a configurable imaging system (25) images the fringe pattern on to a plane (12) of the object to allow two-dimensional measurement of the object without spatial scanning.
摘要翻译：使用双路径二维光学相干断层摄影（OCT）测量物体（11）的物理特性的系统（10）包括产生入射光束（14）的扩展宽带光源（13）和干涉仪（15），其具有将入射光束分成第一和第二分量（17,18）的分束器（16），并将第二分量光束（18）引导到可移动反射镜（19）上，以产生第二分量光束第一分量光束（17）和第二分量光束的反射（20）。具有焦平面（22）的聚焦透镜（21）将第一分量光束和第二分量光束的反射聚焦以在焦平面上形成条纹图案（23），并且可配置成像系统（25）对边缘进行成像图案对象的平面（12），以允许物体的二维测量而不进行空间扫描。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式