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    • 2. 发明申请
    • MASKLESS DIRECT WRITE OF COPPER USING AN ANNULAR AEROSOL JET
    • 使用环形气溶胶射流进行铜的直接写入
    • WO2006041657A9
    • 2006-06-29
    • PCT/US2005034323
    • 2005-09-27
    • OPTOMEC DESIGNRENN MICHAEL JKING BRUCE HGIRIDHARAN MANAMPATHY GSHEU JYH-CHERNG
    • RENN MICHAEL JKING BRUCE HGIRIDHARAN MANAMPATHY GSHEU JYH-CHERNG
    • B41J2/015B05D5/12C23C18/00
    • H05K3/105B05B17/0615C23C18/08H01L2924/14H05K3/14
    • Methods and apparatus for the deposition of a source material (10) are disclosed. An atomizer (12) renders a supply of source material (10) into many discrete particles. A force applicator (14) propels the particles in continuous, parallel streams of discrete particles. A collimator (16) controls the direction of flight of the particles in the stream prior to their deposition on a substrate (18). In an alternative embodiment of the invention, the viscosity of the particles may be controlled to enable complex depositions of non-conformal or three­ dimensional surfaces. The invention also includes a wide variety of substrate treatments which may occur before, during or after deposition. In yet another embodiment of the invention, a virtual or cascade impactor may be employed to remove selected particles from the deposition stream. Also a method and apparatus for maskless deposition of copper lines on a target, specifically relating to localized solution-based deposition of copper using an annular aerosol jet and subsequent material processing using conventional thermal techniques or laser processing.
    • 公开了用于沉积源材料(10)的方法和装置。 雾化器(12)使源材料(10)供应成许多离散颗粒。 力施加器(14)推动颗粒以连续,平行的离散颗粒流。 准直仪(16)在其沉积在基底(18)上之前控制流中颗粒的飞行方向。 在本发明的一个可选实施例中,可以控制颗粒的粘度以实现非保形或三维表面的复杂沉积。 本发明还包括可以在沉积之前,期间或之后进行的各种衬底处理。 在本发明的又一个实施例中,可以采用虚拟或级联冲击器从沉积流中去除选定的颗粒。 还提供一种用于在目标上无掩模地沉积铜线的方法和设备,具体涉及使用环形气溶胶射流的局部溶液基沉积铜和随后使用常规热技术或激光处理的材料处理。
    • 4. 发明申请
    • MINIATURE AEROSOL JET AND AEROSOL JET ARRAY
    • 微型气溶胶射流和气溶胶射流阵列
    • WO2006065978A2
    • 2006-06-22
    • PCT/US2005/045394
    • 2005-12-13
    • OPTOMEC DESIGN COMPANYRENN, Michael, J.KING, Bruce, H.PAULSEN, Jason, A.
    • RENN, Michael, J.KING, Bruce, H.PAULSEN, Jason, A.
    • A62C31/00B05B7/0416B05B7/0884C23C18/06F23D11/16
    • A miniaturized aerosol jet, or an array of miniaturized aerosol jets for direct printing of various aerosolized materials. In the most commonly used embodiment, an aerosol stream is focused and deposited onto a planar or non-planar target, forming a pattern that is thermally or photochemically processed to achieve physical, optical, and/or electrical properties near that of the corresponding bulk material. The apparatus uses an aerosol jet deposition head to form an annularly propagating jet composed of an outer sheath flow and an inner aerosol­laden carrier flow. Miniaturization of the deposition head facilitates the fabrication and operation of arrayed deposition heads, enabling construction and operation of arrays of aerosol jets capable of independent motion and deposition. Arrayed aerosol jets provide an increased deposition rate, arrayed deposition, and multi-material deposition.
    • 微型气溶胶喷射器或用于直接印刷各种气溶胶化材料的小型气溶胶喷射器阵列。 在最常用的实施例中,气溶胶流被聚焦并沉积在平面或非平面目标上,形成热或光化学处理的图案以实现接近相应散装材料的物理,光学和/或电学特性 。 该设备使用气溶胶喷射沉积头来形成由外部鞘流和内部气溶胶和害羞载流流组成的环形传播射流。 沉积头的小型化有助于阵列沉积头的制造和操作,使得能够独立运动和沉积的气溶胶射流阵列的构建和操作成为可能。 阵列式气溶胶喷头提供了更高的沉积速率,阵列式沉积和多材料沉积。
    • 7. 发明申请
    • MASKLESS DIRECT WRITE OF COPPER USING AN ANNULAR AEROSOL JET
    • 使用ANNULAR AEROSOL喷嘴的铜的直接写入
    • WO2006041657A3
    • 2008-01-10
    • PCT/US2005034323
    • 2005-09-27
    • OPTOMEC DESIGNRENN MICHAEL JKING BRUCE HGIRIDHARAN MANAMPATHY GSHEU JYH-CHERNG
    • RENN MICHAEL JKING BRUCE HGIRIDHARAN MANAMPATHY GSHEU JYH-CHERNG
    • H01L21/20B05D5/12B41J2/015C23C18/00
    • H05K3/105B05B17/0615C23C18/08H01L2924/14H05K3/14
    • Methods and apparatus for the deposition of a source material (10) are disclosed. An atomizer (12) renders a supply of source material (10) into many discrete particles. A force applicator (14) propels the particles in continuous, parallel streams of discrete particles. A collimator (16) controls the direction of flight of the particles in the stream prior to their deposition on a substrate (18). In an alternative embodiment of the invention, the viscosity of the particles may be controlled to enable complex depositions of non-conformal or three­ dimensional surfaces. The invention also includes a wide variety of substrate treatments which may occur before, during or after deposition. In yet another embodiment of the invention, a virtual or cascade impactor may be employed to remove selected particles from the deposition stream. Also a method and apparatus for maskless deposition of copper lines on a target, specifically relating to localized solution-based deposition of copper using an annular aerosol jet and subsequent material processing using conventional thermal techniques or laser processing.
    • 公开了用于沉积源材料(10)的方法和装置。 雾化器(12)将源材料(10)供应到许多离散的颗粒中。 力施加器(14)推动颗粒处于连续的,平行的离散颗粒流中。 准直器(16)在其沉积在基底(18)上之前控制颗粒在流中的飞行方向。 在本发明的替代实施方案中,可以控制颗粒的粘度以使复合物沉积非保形或三维表面。 本发明还包括可以在沉积之前,期间或之后发生的各种各样的基底处理。 在本发明的另一个实施例中,可以使用虚拟或级联冲击器来从沉积流中去除所选择的颗粒。 还有一种用于将铜线无掩模沉积在靶上的方法和装置,特别涉及使用环形气溶胶射流的铜的局部溶液沉积,以及使用常规热技术或激光加工的随后材料处理。
    • 8. 发明申请
    • MINIATURE AEROSOL JET AND AEROSOL JET ARRAY
    • 微型航空喷气机和喷气式喷气式飞机阵列
    • WO2006065978A3
    • 2006-10-19
    • PCT/US2005045394
    • 2005-12-13
    • OPTOMEC DESIGNRENN MICHAEL JKING BRUCE HPAULSEN JASON A
    • RENN MICHAEL JKING BRUCE HPAULSEN JASON A
    • A62C31/00B05B1/28B05B7/06B05B7/12F23D11/10
    • A62C31/00B05B7/0416B05B7/0884C23C18/06F23D11/16
    • A miniaturized aerosol jet, or an array of miniaturized aerosol jets for direct printing of various aerosolized materials. In the most commonly used embodiment, an aerosol stream is focused and deposited onto a planar or non-planar target, forming a pattern that is thermally or photochemically processed to achieve physical, optical, and/or electrical properties near that of the corresponding bulk material. The apparatus uses an aerosol jet deposition head to form an annularly propagating jet composed of an outer sheath flow and an inner aerosol­laden carrier flow. Miniaturization of the deposition head facilitates the fabrication and operation of arrayed deposition heads, enabling construction and operation of arrays of aerosol jets capable of independent motion and deposition. Arrayed aerosol jets provide an increased deposition rate, arrayed deposition, and multi-material deposition.
    • 小型化气溶胶喷射器或用于直接印刷各种气雾化材料的小型化气溶胶喷射器阵列。 在最常用的实施例中,气溶胶流被聚焦并沉积到平面或非平面靶上,形成热或光化学处理的图案,以达到靠近相应散装材料的物理,光学和/或电特性 。 该装置使用气溶胶喷射沉积头来形成由外护套流和内部气囊载体流组成的环形传播射流。 沉积头的小型化有助于阵列沉积头的制造和操作,使得能够独立运动和沉积的气溶胶喷嘴阵列的构造和操作成为可能。 阵列气溶胶喷射器提供增加的沉积速率,排列沉积和多材料沉积。
    • 10. 发明申请
    • OPTICAL FIBER TO ROD LENS JOINING METHOD AND INTERFACE STRUCTURE
    • 光纤到杆镜联接方法和界面结构
    • WO9101011A2
    • 1991-01-24
    • PCT/US9003804
    • 1990-07-02
    • OPTOMEC DESIGN
    • SWANN THOMAS A
    • G02B6/255G02B6/32
    • G02B6/32G02B6/2551G02B6/2552
    • In order to make possible the provision of a good fusion joint with low optical losses between an optical fiber and a graded index (GRIN) glass rod lens with considerably larger diameter, the end of the GRIN lens to which the optical fiber is to be joined is tapered down radially the extent of at least one third the radius of the cylindrical lens at a considerably oblique angle. It is then possible to make a mechanically good fused joint with low transmission losses in the mid portion of the reduced-diameter end of the lens by heating the butt joint with an electric arc. The taper may be frusto-conical, convex or concave.
    • 为了使通过熔化特征在于光纤和渐变折射率透镜(GRIN)之间的低光学损耗的良好密封由基本上较大直径玻璃棒,GRIN透镜的端部处的纤维 必须连接的光学部件被径向切割成圆锥形,以具有其半径等于圆柱形透镜的半径的至少三分之一的基本上倾斜的角度。 然后,可以通过电弧的装置加热所述对接接头,以获得通过机械熔合良好与所述透镜的直径减小端部的中间部分低传输损耗的接头。 圆锥形尺寸的构型可以是截头圆锥形,凸形或凹形。