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1. 发明申请

WO2005101121A3 OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES 审中-公开
标题翻译：光学元件曝光过程
公开(公告)号：WO2005101121A3
公开(公告)日：2006-07-06
申请号：PCT/EP2005003875
申请日：2005-04-13
申请人： ZEISS CARL SMT AG , GELLRICH BERNHARD , KUGLER JENS , LIMBACH GUIDO , KALLER JULIAN , SCHERLE HANS JUERGEN , SCHMEREK DIETER , MUELLER DETLEV , SCHLETTERER THOMAS
发明人： GELLRICH BERNHARD , KUGLER JENS , LIMBACH GUIDO , KALLER JULIAN , SCHERLE HANS JUERGEN , SCHMEREK DIETER , MUELLER DETLEV , SCHLETTERER THOMAS
IPC分类号： G03F7/20
CPC分类号： G03F7/70933 , G02B7/023 , G02B27/0006 , G03B27/52 , G03F7/70341 , G03F7/70808 , G03F7/70833
摘要： An optical element unit (3) is provided comprising an optical element group (7) ; a housing (3.1)receiving said optical element group and having an inner housing part (3.4) and an exit end (3.2) ; and a purge unit connected to said housing and providing a purge medium to said inner housing part. The optical element group comprises an ultimate optical element (9). The ultimate optical element is located at the exit end of housing and separates the inner housing part from an environment external to the housing. The ultimate optical element and the housing define a sealing gap (12). The purge unit (15) provides purge medium to the sealing gap to prevent intrusion of contaminants into the inner housing part.
摘要翻译：提供一种光学元件单元（3），包括光学元件组（7）; 接收所述光学元件组并具有内部壳体部分（3.4）和出口端（3.2）的壳体（3.1）; 以及净化单元，其连接到所述壳体并且向所述内壳体部件提供净化介质。光学元件组包括最终光学元件（9）。最终的光学元件位于壳体的出口端处，并将内部壳体部件与壳体外部的环境分离。最终光学元件和壳体限定密封间隙（12）。净化单元（15）为清洁介质提供密封间隙，以防止污染物侵入内壳体部分。

2. 发明申请

WO2006119970A2 ASSEMBLY FOR ADJUSTING OF AN OPTICAL ELEMENT 审中-公开
标题翻译：组装调整光学元件
公开(公告)号：WO2006119970A2
公开(公告)日：2006-11-16
申请号：PCT/EP2006004337
申请日：2006-05-09
申请人： ZEISS CARL SMT AG , SCHOEPPACH AMIN , STEINBACH MANFRED , SCHLETTERER THOMAS , LOPEZ-REAL ERNESTO
发明人： SCHOEPPACH AMIN , STEINBACH MANFRED , SCHLETTERER THOMAS , LOPEZ-REAL ERNESTO
IPC分类号： G02B7/02 , G03F7/20
CPC分类号： G03F7/70825 , G02B7/005 , G02B7/023 , G03F7/70258
摘要： An assembly for fixation or adjusting of an optical element (1) with regard to an outer mount or support (4) wherein the optical element (1) is alignable with regard to a structure of the optical arrangement, particularly the objective structure or the objective barrel, having an optical axis or with regard to neighbouring mounts by means of an adjusting arrangement, is characterized in that the adjusting arrangement comprises at least an elastic means (9), particularly a spring, an elastic rod or stick, an elastic tape or an elastic gear wheel or an elastic gear box by which a force or a torque is applicable to the optical element (1).
摘要翻译：一种用于相对于外部安装件或支撑件（4）固定或调整光学元件（1）的组件，其中所述光学元件（1）可相对于所述光学装置的结构，特别是所述物镜结构或所述物镜具有光轴或通过调节装置相对于相邻安装件的镜筒的特征在于，所述调节装置至少包括弹性装置（9），特别是弹簧，弹性杆或杆，弹性带或弹性齿轮或弹性齿轮箱，其中力或扭矩适用于光学元件（1）。

3. 发明申请

WO2008037496A2 PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS WITH IMPROVED IMAGING PROPERTIES AND METHOD FOR IMPROVING THE IMAGING PROPERTIES OF THE PROJECTION OBJECTIVE 审中-公开
标题翻译：具有改进成像性能的微型成像设备的投影目标和用于改善投影目标的成像性质的方法
公开(公告)号：WO2008037496A2
公开(公告)日：2008-04-03
申请号：PCT/EP2007008476
申请日：2007-09-28
申请人： ZEISS CARL SMT AG , BECKENBACH MARIELLA , RIEF KLAUS , BERTELE ANDREAS , SIGEL BENJAMIN , BLEIDISTEL SASCHA , HUMMEL WOLFGANG , FROMMEYER ANDREAS , GRUNER TORALF , SCHWAER JOCHEN , SCHWAER BAERBEL , SCHLETTERER THOMAS , HOEGELE ARTUR , SCHOEPPACH ARMIN
发明人： BECKENBACH MARIELLA , RIEF KLAUS , BERTELE ANDREAS , SIGEL BENJAMIN , BLEIDISTEL SASCHA , HUMMEL WOLFGANG , FROMMEYER ANDREAS , GRUNER TORALF , SCHWAER JOCHEN , SCHWAER BAERBEL , SCHLETTERER THOMAS , HOEGELE ARTUR , SCHOEPPACH ARMIN
IPC分类号： G03F7/20
CPC分类号： G03F7/70825 , G02B7/023 , G02B13/14 , G02B27/0068 , G03F7/70058 , G03F7/70266
摘要： A projection objective for microlithography comprises a plurality of lenses (32, 34, 36, 38, 42) which in each case have a local optical axis (40), a first manipulator (60) with a first actuator (46, 72) and at least one second actuator (48, 74) being assigned to at least one first lens (42) from the plurality of lenses (32, 34, 36, 38). A first force input and/or moment input can be realized by means of the first actuator (46, 72) and a second force input and/or moment input can be realized by means of the second actuator (48, 74), wherein the first force input and/or moment input and the second force input and/or moment input differ with regard to at least one of the parameters: intensity of the force and/or moment input, direction of the force input relative to the local optical axis (40), direction of the moment input relative to a periphery of the first lens (42).
摘要翻译：用于微光刻的投影物镜包括多个分别具有局部光轴（40）的透镜（32,34,36,38,42），具有第一致动器（46,72）的第一机械手（60）和至少一个第二致动器（48,74）被分配给来自所述多个透镜（32,34,36,38）中的至少一个第一透镜（42）。借助第一致动器（46,72）可以实现第一力输入和/或力矩输入，并且借助第二致动器（48,74）可以实现第二力输入和/或力矩输入，其中，第一力输入和/或力矩输入以及第二力输入和/或力矩输入相对于至少一个参数不同：力和/或力矩输入的强度，力输入相对于局部光轴的方向（40），所述力矩输入相对于所述第一透镜（42）的周边的方向。

4. 发明申请

WO2005101082A3 OPTICAL ELEMENT AND FIXTURE FOR AN OPTICAL ELEMENT 审中-公开
标题翻译：光学元件，并支持光学元件
公开(公告)号：WO2005101082A3
公开(公告)日：2006-01-26
申请号：PCT/EP2005003900
申请日：2005-04-13
申请人： ZEISS CARL SMT AG , SCHLETTERER THOMAS , SORG FRANZ
发明人： SCHLETTERER THOMAS , SORG FRANZ
IPC分类号： G02B7/02 , G03F7/20
CPC分类号： G02B7/022 , G02B7/023 , G03F7/70825
摘要： Disclosed is an optical element, particularly a lens, comprising an element body (2.1) with an optically effective first area (2.2) that is provided with an optical axis (2.3), and an edge area (2.6) which surrounds the element body (2.1) in a circumferential direction thereof and in which at least one first holding zone (2.7) is arranged. Said first holding zone (2.7) encompasses at least one first contact region (2.8) that is embodied so as to cooperate with a first holding device (3) for retaining the element body (2.1). The edge area (2.6) embodies the first contact region (2.8) only to a limited extent in a first circumferential zone that is restricted in the circumferential direction, and/or the edge area (22.6) embodies the first contact region (22.8) in a manner that is limited in the direction of the optical axis (22.3) only on two contact surfaces (22.10, 22.11) of the element body (22.1) which are spaced apart in the direction of the optical axis (22.3) and are disposed in the area of a circumferential outer edge (42.16, 42.17) of the element body (22.1), respectively, at least one of said contact surfaces (22.10, 22.11) extending at least in part in the direction of the optical axis (22.3).
摘要翻译：一种光学元件，特别是透镜，其包括一个元件体（2.1）带有光学有效的第一区域（2.2）具有光轴（2.3），并且在素体的圆周方向中循环的（2.1）的边缘区域（2.6），其中至少中，第一支撑部分（2.7）布置，其中，所述第一支撑部分（2.7），其具有至少一个第一接触区域（2.8），其适于与第一保持装置（3）配合，用于保持所述元件本体（2.1），并且其中（边缘区域 2.6）在素体（2.1）的圆周方向上的第一接触区域（2.8）只限于有限中的第一外围区域形成的圆周方向和/或其中所述边缘区域（22.6）的第一接触部（22.8）（在光轴方向22.3）只有有限的在两个在光轴的方向上间隔开的（22.3）的接触面的元件主体（22.10，22.11）（22.1）的形式，每个范围素体（22.1）的圆周外缘（42.16，42.17）布置并且其至少一部分在光学规则轴线的方向上的（22.3）延伸。

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