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    • 8. 发明申请
    • FOURIER TRANSFORM SPECTROMETER APPARATUS MULTI-ELEMENT MEMS
    • FOURIER变换光谱仪器多元MEMS
    • WO2005082007A3
    • 2006-09-08
    • PCT/US2005005884
    • 2005-02-25
    • B & W TEK INCWANG SEAN XIAOLU
    • WANG SEAN XIAOLU
    • G01J3/28G01J3/10G01J3/433G01J3/453G01J5/02
    • G01J3/10G01J3/021G01J3/433G01J3/453
    • A Fourier Transform (FT) spectrometer apparatus uses multi-element MEMS (Micro-Electro-Mechanical-Systems) or D-MEMS (Diffractive Micro-Electro-Mechanical-Systems) devices. A polychromatic light source is first diffracted or refracted by a dispersive component such as a grating or prism. The dispersed beam is intersected by a multi-element MEMS apparatus. The MEMS apparatus encodes each spectral component thereof with different time varying modulation through corresponding MEMS element. The light radiation is then spectrally recombined as a single beam. The beam is further split into to a reference beam and a probe beam. The probe light is directed to a sample and then the transmitted or reflected light is collected. Both the reference beam and probe beam are detected by a photo-detector. The detected time varying signal is analyzed by Fourier transformation to resolve the spectral components of the sample under measurement.
    • 傅立叶变换(FT)光谱仪装置使用多元件MEMS(微机电系统)或D-MEMS(衍射微机电系统)装置。 多色光源首先被诸如光栅或棱镜之类的色散成分衍射或折射。 分散的光束由多元件MEMS装置相交。 MEMS装置通过相应的MEMS元件对其每个频谱分量进行不同的时变调制。 然后将光辐射作为单个光束进行光谱重组。 光束进一步分成参考光束和探测光束。 探针光被引导到样品,然后收集透射或反射的光。 参考光束和探测光束均由光电检测器检测。 通过傅里叶变换分析检测到的时变信号,以解析测量样品的光谱分量。