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1. 发明申请

WO2012049374A1 BALANCED-UNBALANCED FILTER BASED ON LATERALLY COUPLED BAW THIN FILMS 审中-公开
标题翻译：基于横向耦合薄膜的平衡不平衡滤波器
公开(公告)号：WO2012049374A1
公开(公告)日：2012-04-19
申请号：PCT/FI2011/050895
申请日：2011-10-14
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT , MELTAUS, Johanna , PENSALA, Tuomas , YLILAMMI, Markku
发明人： MELTAUS, Johanna , PENSALA, Tuomas , YLILAMMI, Markku
IPC分类号： H03H3/02 , H03H9/56
CPC分类号： H03H9/0095 , H03H3/04 , H03H9/562 , H03H9/564
摘要： The invention describes an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin- film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.
摘要翻译：本发明描述了基于横向声耦合的声平衡不平衡（balun）或平衡平衡薄膜BAW滤波器。在横向声耦合薄膜BAW滤波器（LBAW）中，如果平衡端口的电极放置在压电薄膜的相对两侧，则可以实现从不平衡到平衡电信号的转换。制造过程比基于垂直声耦合的相应部件更简单。该器件还可实现阻抗变换。

2. 发明申请

WO2012049373A1 CHANGING OPERATION FREQUENCY IN A LBAW FILTER 审中-公开
标题翻译：更改LBAW过滤器中的操作频率
公开(公告)号：WO2012049373A1
公开(公告)日：2012-04-19
申请号：PCT/FI2011/050893
申请日：2011-10-14
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT , MELTAUS, Johanna , PENSALA, Tuomas , YLILAMMI, Markku
发明人： MELTAUS, Johanna , PENSALA, Tuomas , YLILAMMI, Markku
IPC分类号： H03H3/04 , H03H9/02 , H03H9/54 , H01L41/22
CPC分类号： H03H9/564 , H03H3/04
摘要： In laterally coupled BAW (LBAW) filters, the center frequency is generally determined by the thin film stack thickness. However, it is possible to affect the operation frequency with the lateral dimensions of electrodes (13), e.g., electrode width (12). Therefore, it is possible to manufacture LBAW components on a single wafer having a general thickness with electrodes (13) of a different width (12). When the different electode widths (12) are based on the specific local thickness of each element and/or the desired center frequency it is possible to manufacture components on a single wafer with accurate and optionally predetermined different center frequencies.
摘要翻译：在横向耦合的BAW（LBAW）滤波器中，中心频率通常由薄膜叠层厚度决定。然而，可以用电极（13）的横向尺寸（例如电极宽度（12））来影响操作频率。因此，可以在具有不同宽度（12）的电极（13）的具有一般厚度的单个晶片上制造LBAW部件。当不同的电极宽度（12）基于每个元件的特定局部厚度和/或期望的中心频率时，可以在单个晶片上制造具有精确且可选地预定的不同中心频率的部件。

3. 发明申请

WO2012049372A1 WIDE-BAND ACOUSTICALLY COUPLED THIN-FILM BAW FILTER 审中-公开
标题翻译：宽带超声波耦合薄膜滤波器
公开(公告)号：WO2012049372A1
公开(公告)日：2012-04-19
申请号：PCT/FI2011/050891
申请日：2011-10-14
申请人： Teknologian tutkimuskeskus VTT , MELTAUS, Johanna , PENSALA, Tuomas
发明人： MELTAUS, Johanna , PENSALA, Tuomas
IPC分类号： H03H9/56 , H03H3/02
CPC分类号： H03H9/547 , H03H9/564 , H03H9/568
摘要： The invention relates to an acoustically coupled thin-film BAW filter, comprising a piezoelectric layer (1), an input-port (2) on the piezoelectric layer(1) changing electrical signal into an acoustic wave (SAW, BAW), and an output-port (3) on the piezoelectric layer(1) changing acoustic signal into electrical signal. In accordance with the invention the ports (2, 3) include electrodes (5, 6) positioned close to each other, and the filter is designed to operate in first order thickness-extensional TE1 mode.
摘要翻译：本发明涉及一种声耦合薄膜BAW滤波器，包括压电层（1），压电层（1）上的输入端口（2），将电信号改变成声波（SAW，BAW），以及压电层（1）上的输出端口（3）将声信号改变为电信号。根据本发明，端口（2,3）包括彼此靠近定位的电极（5,6），并且滤波器被设计成以一级厚度 - 延伸TE1模式操作。

4. 发明申请

WO2011131844A1 WIDE-BAND ACOUSTICALLY COUPLED THIN-FILM BAW FILTER 审中-公开
标题翻译：宽带超声波耦合薄膜滤波器
公开(公告)号：WO2011131844A1
公开(公告)日：2011-10-27
申请号：PCT/FI2011/050368
申请日：2011-04-21
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT , MELTAUS, Johanna , PENSALA, Tuomas
发明人： MELTAUS, Johanna , PENSALA, Tuomas
IPC分类号： H03H9/02 , H03H9/205 , H03H9/56 , H03H9/58
CPC分类号： H03H9/02228 , H03H9/0095 , H03H9/02007 , H03H9/02125 , H03H9/175 , H03H9/177 , H03H9/205 , H03H9/564 , H03H9/584 , H03H2003/0414 , Y10T29/42
摘要： In a bulk acoustic wave (BAW) filter based on laterally acoustically coupled resonators on piezoelectric thin films, one can utilize two distinct acoustic plate wave modes of different nature, for example the thickness extensional (longitudinal) TE1 and the second harmonic thickness shear (TS2) mode to form a bandpass response. The invention is based on the excitation of at least two lateral standing wave resonances belonging to different plate wave modes that facilitate the transmission of signal. The passband is designed by tailoring the wave propagation characteristics in the device such that the resonances are excited at suitable frequencies to form a passband of a desired shape. The bandwidth of the filter described herein may therefore be more than twice that of the existing state-of-the-art microacoustic filters. Consequently, it has significant commercial and technological value.
摘要翻译：在基于压电薄膜上的横向声耦合谐振器的体声波（BAW）滤波器中，可以利用不同性质的两种不同的声板波模，例如厚度延伸（纵向）TE1和二次谐波厚度剪切（TS2 ）模式以形成带通响应。本发明基于属于促进信号传输的不同平板波模式的至少两个横向驻波共振的激发。该通带是通过调整装置中的波传播特性来设计的，使得谐振在合适的频率被激发以形成所需形状的通带。因此，这里描述的滤波器的带宽可以是现有的最先进的微声滤波器的两倍以上。因此，具有重要的商业和技术价值。

5. 发明申请

WO2011042597A1 A MICROMECHANICAL RESONATOR 审中-公开
标题翻译：微机电谐振器
公开(公告)号：WO2011042597A1
公开(公告)日：2011-04-14
申请号：PCT/FI2010/050744
申请日：2010-09-27
申请人： VALTION TEKNILLINEN TUTKIMUSKESKUS , OJA, Aarne , PENSALA, Tuomas , MELTAUS, Johanna
发明人： OJA, Aarne , PENSALA, Tuomas , MELTAUS, Johanna
IPC分类号： H03H9/02 , H03H3/007 , H03H3/013 , B81B7/00 , B81B3/00
CPC分类号： H03H9/02259 , B81B3/0081 , B81B2201/0271 , H03H3/0076 , H03H9/02338 , H03H9/02448 , H03H9/2436 , H03H9/2452 , H03H9/2463 , H03H2003/027 , H03H2003/0407 , H03H2009/02496 , H03H2009/02503 , H03H2009/02511 , H03H2009/241 , H03H2009/2442
摘要： The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f o , coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).
摘要翻译：本发明涉及一种微机械谐振器，其包括第一材料（2）的衬底（1），悬挂于支撑结构（1）的谐振器（3），谐振器（3）至少部分由相同的材料（2）组成，作为用于以特定频率fo谐振的支撑结构和尺寸，用于启动，保持和耦合谐振器（3）的谐振到外部电路（6）的耦合装置（5）和包括第二材料的谐振器（3）（4），其热性质与第一材料（2）不同。根据本发明，谐振器（3）包括集中在谐振器（3）的特定位置的第二材料（4）。

6. 发明申请

WO2013068652A1 LATERALLY COUPLED BULK ACOUSTIC WAVE FILTER WITH IMPROVED PASSBAND CHARACTERISTICS 审中-公开
标题翻译：具有改进的通道特性的侧联式大声波滤波器
公开(公告)号：WO2013068652A1
公开(公告)日：2013-05-16
申请号：PCT/FI2012/051096
申请日：2012-11-09
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT
发明人： MELTAUS, Johanna , PENSALA, Tuomas
IPC分类号： H03H9/56 , H03H9/17 , H03H9/02 , H03H3/04
CPC分类号： H03H9/54 , H03H9/02086 , H03H9/02228 , H03H9/175 , H03H9/564
摘要： The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter (70) comprising a vibration layer (73) for carrying bulk acoustic waves, electrode means (71, 72, 74) comprising a first electrode (71) coupled to the vibration layer (73) for exciting to the vibration layer (73) at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode (72) coupled to the vibration layer (73) for sensing the filter pass signal, the first and second electrodes (71, 72) being laterally arranged with respect to each other, and an acoustic reflector structure (75) in acoustic connection with the vibration layer(73). According to the invention, the reflector structure (75) is adapted to acoustically isolate the vibration layer (73) from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands.
摘要翻译：本发明涉及一种包括用于承载体声波的振动层（73）的横向耦合的体声波（LBAW）滤波器（70），电极装置（71,72,74）包括耦合到振动的第一电极（71）用于向所述振动层（73）激励具有第一频带和具有第二频带的一个剪切波模式的至少一个纵波模式的层（73）和耦合到所述振动层（73）的第二电极（72）为了感测滤波器通过信号，第一和第二电极（71,72）相对于彼此横向布置，以及与振动层（73）声学连接的声反射器结构（75）。根据本发明，反射器结构（75）适于比第二频带更有效地将振动层（73）与其周围的第一频带隔离，以抑制第二频段处的剪切波模式的影响滤波器通过信号的频带。本发明有助于提高LBAW滤波器通带的质量。

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