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1. 发明申请

WO2006030234A2 USE OF METHANOFULLERENE DERIVATIVES AS RESIST MATERIALS AND METHOD FOR FORMING A RESIST LAYER 审中-公开
标题翻译：甲烷腈衍生物用作抗蚀剂材料和形成抗蚀剂层的方法
公开(公告)号：WO2006030234A2
公开(公告)日：2006-03-23
申请号：PCT/GB2005/003587
申请日：2005-09-19
申请人： THE UNIVERSITY OF BIRMINGHAM , ROBINSON, Alex , PREECE, Jon, Andrew , PALMER, Richard, Edward
发明人： ROBINSON, Alex , PREECE, Jon, Andrew , PALMER, Richard, Edward
IPC分类号： G03F7/038
CPC分类号： B82Y30/00 , G03F7/0382 , Y10S430/115 , Y10S430/122 , Y10S430/126
摘要： The present invention relates in one aspect to the use as a resist material of a methanofullerene derivative having a plurality of open-ended addends, and to a method for forming a patterned resist layer on a substrate using the methanofullerene derivatives. The methanofullerene derivatives can be represented by the formula C 2x (CR 1 R 2 ) m where x is at least (10), m is at least (2), each addend represented by CR 1 R 2 is the same or different, and wherein each R 1 and R 2 is each a monovalent organic group, or a divalent organic group which forms a ring structure by being joined to the fullerene shell, or where both R 1 and R 2 of an addend are divalent groups, they may be mutually joined to form a ring structure, save that at least two of R 1 or two of R 2 are monovalent, or a mixture of such derivatives. The invention also resides in the use of any methanofullerene derivative which has been chemically amplified for formation of a patterned resist layer. The essential step of the method is forming a coating layer comprising the methanofullerene derivative on the substrate surface, the methanofullerene derivative being chemically amplified by including in the coating layer at least one additional component which increases the sensitivity of the exposed layer to actinic radiation which is subsequently used to pattern the layer.
摘要翻译：本发明在一个方面涉及作为具有多个开放式附加物的亚甲基富勒烯衍生物的抗蚀剂材料的用途，以及涉及在基板上形成图案化抗蚀剂层的方法，亚甲基富勒烯衍生物。亚甲基富勒烯衍生物可以由式C 2x（CR 1 R 2 2）m -Y表示，其中x是（10）中，m至少为（2），由CR 1 R 2 2表示的每个加成物是相同的或不同的，并且其中每个R 1， R 2和R 2各自为一价有机基团或通过连接至富勒烯壳而形成环结构的二价有机基团，或者其中两个R 1，和R 2中的至少两个是二价基团，它们可以相互连接形成环结构，除了R 1或R 2中的至少两个或两个以外， 2是单价的，或这些衍生物的混合物。本发明还涉及使用化学放大的任何亚甲基富勒烯衍生物用于形成图案化的抗蚀剂层。该方法的基本步骤是在基底表面上形成包含亚甲基富烯衍生物的涂层，该亚甲基富烯衍生物通过在涂层中包括至少一种增加曝光层对光化辐射敏感性的额外组分而被化学放大，随后用于图案化图层。

2. 发明申请

WO2006030240A2 NOVEL RESIST MATERIAL 审中-公开
标题翻译：新型电阻材料
公开(公告)号：WO2006030240A2
公开(公告)日：2006-03-23
申请号：PCT/GB2005/003606
申请日：2005-09-19
申请人： THE UNIVERSITY OF BIRMINGHAM , ROBINSON, Alex , PALMER, Richard, Edward
发明人： ROBINSON, Alex , PALMER, Richard, Edward
IPC分类号： G03F7/038
CPC分类号： G03F7/0382
摘要： The present invention relates to the use of fullerols having the formula C 2x (OH) n where x is at least 10 and n is at least 2 as resist materials. The invention also includes within its scope methods of patterning a fullerol-based resist layer.
摘要翻译：本发明涉及具有式C 2x（OH）n -n的富勒醇的用途，其中x至少为10且n在至少2个作为抗蚀剂材料。本发明在其范围内还包括构图富勒醇基抗蚀剂层的方法。

3. 发明申请

WO2006030239A2 NOVEL RESIST MATERIAL AND METHOD FOR FORMING A PATTERNED RESIST LAYER ON A SUBSTRATE 审中-公开
标题翻译：用于在衬底上形成图案化电阻层的新型电阻材料和方法
公开(公告)号：WO2006030239A2
公开(公告)日：2006-03-23
申请号：PCT/GB2005/003605
申请日：2005-09-19
申请人： THE UNIVERSITY OF BIRMINGHAM , PALMER, Richard, Edward , ROBINSON, Alex , PREECE, Jon, Andrew
发明人： PALMER, Richard, Edward , ROBINSON, Alex , PREECE, Jon, Andrew
IPC分类号： G03F7/038
CPC分类号： G03F7/0382 , Y10S430/106 , Y10S430/115 , Y10S430/122
摘要： The present invention resides in a method for the formation of a patterned resist layer on a substrate surface by patternwise irradiation with actinic radiation. The first step of the method is formation of a coating layer comprising a substituted triphenylene compound having a diameter of between 1 and 3 nm, a sensitizer which increases the sensitivity of the exposed layer to the actinic radiation used in a subsequent irradiation step and a cross-linker on the substrate surface. Subsequently the coating layer is irradiated patternwise, and unirradiated areas of the coating layer are removed. The invention also resides in a resist material comprising a solution of: - (i) as the principal resist material a triphenylene derivative having a diameter of from 1 to 3 rim, (ii) a sensitizer which increases the sensitivity of the resist material to actinic radiation, and (iii) a cross linker capable of cross linking molecules of the triphenylene derivative, said cross linker optionally being constituted by a moiety attached to said triphenylene derivative.
摘要翻译：本发明在于通过用光化学辐射进行图案照射来在衬底表面上形成图案化抗蚀剂层的方法。该方法的第一步是形成包含直径在1和3nm之间的取代三亚苯化合物的涂布层，增加曝光层对后续照射步骤中使用的光化辐射的敏感性的敏化剂， - 连接器在基板表面上。随后将涂层按照图案照射，并除去未被照射的涂层区域。本发明还涉及抗蚀剂材料，其包含以下溶液：（i）作为主要抗蚀剂材料的直径为1至3 rim的三亚苯衍生物，（ii）增加抗蚀剂材料对光化性的敏感性的敏化剂辐射，和（iii）能够交联三亚苯衍生物的分子的交联剂，所述交联剂任选由与所述三亚苯衍生物连接的部分构成。

4. 发明申请

WO2011061501A3 METHANOFULLERENE DERIVATIVES, PHOTORESIST COMPOSITION CONTAINING IT AND METHOD FOR FORMING A RESIST LAYER 审中-公开
公开(公告)号：WO2011061501A3
公开(公告)日：2011-05-26
申请号：PCT/GB2010/002129
申请日：2010-11-18
申请人： THE UNIVERSITY OF BIRMINGHAM , ROBINSON, Alex , PALMER, Richard , PREECE, Jon, Andrew
发明人： ROBINSON, Alex , PALMER, Richard , PREECE, Jon, Andrew
IPC分类号： G03F7/038
摘要： The invention provides methanofullerene derivatives having side chains with acid- labile protecting groups and their use as photoresist materials in a photoresist composition, and particularly as positive - tone photoresists.

5. 发明申请

WO2011018601A1 METHOD OF FORMING AN ELECTRICAL CIRCUIT USING FULLERENE DERIVATIVES 审中-公开
标题翻译：使用富勒烯衍生物形成电路的方法
公开(公告)号：WO2011018601A1
公开(公告)日：2011-02-17
申请号：PCT/GB2010/001409
申请日：2010-07-26
申请人： THE UNIVERSITY OF BIRMINGHAM , GIBBONS, Francis , ROBINSON, Alex , PALMER, Richard , PREECE, Jon Andrew
发明人： GIBBONS, Francis , ROBINSON, Alex , PALMER, Richard , PREECE, Jon Andrew
IPC分类号： H01L51/00 , H01L21/768 , H01L29/786
CPC分类号： H01L21/76838 , B82Y10/00 , H01L21/76823 , H01L21/76825 , H01L51/0021 , H01L51/0046 , H01L2224/48091 , H01L2224/4847 , H01L2224/4918 , H01L2224/85201 , H01L2224/85801 , H01L2224/8585 , H01L2924/01012 , H01L2924/01047 , H01L2924/01055 , H01L2924/01079 , H01L2924/10253 , H01L2924/00014 , H01L2924/00
摘要： The present invention resides in a method of forming an electrical circuit, comprising forming on a substrate a non-conducting film having as its major constituent one or more fullerene derivatives, followed by exposing a selected region of said film to actinic radiation whereby to cause said selected region to become conductive. At least one electrical contact is provided (at any stage of the process) in physical contact with said selected region. The invention also reides in an electrical circuit producible by the above method.
摘要翻译：本发明在于一种形成电路的方法，包括在基底上形成具有主要成分的一种或多种富勒烯衍生物的非导电膜，然后将所述膜的选定区域暴露于光化辐射，从而使所述所选区域变得导电。提供至少一个电触头（在该过程的任何阶段）与所述选定区域物理接触。本发明还可以通过上述方法制造的电路中。

6. 发明申请

WO2019180445A1 LUMINESCENT COMPOUNDS 审中-公开
公开(公告)号：WO2019180445A1
公开(公告)日：2019-09-26
申请号：PCT/GB2019/050809
申请日：2019-03-21
申请人： THE UNIVERSITY OF BIRMINGHAM
发明人： ROBINSON, Alex , PREECE, Jon , O'CALLAGHAN, Gregory , VIRZBICKAS, Karolis , JONES, Owen , ZHAO, Dennis , BUTLIN, Michael , SUND, Sareena
IPC分类号： C07D413/04 , C07C211/61 , C07D263/52 , H01L51/50
摘要： Polycyclic aromatic hydrocarbon derivatives represented by the following general formula: (I) wherein R independently represents an aromatic group and/or an aliphatic group; Q is one of a cyclic aliphatic hydrocarbon, a cyclic aromatic hydrocarbon, a polycyclic hydrocarbon, a polycyclic aromatic hydrocarbon, and/or a fused polycyclic aromatic hydrocarbon; wherein the substituents independently comprise one or more of a hydrogen atom, a deuterium atom, a fluorine atom, a chlorine atom, a bromine atom, a carbon atom, an oxygen atom (e.g. an alkylated oxygen atom), a nitrogen atom (e.g. an alkylated nitrogen atom), a cyano group, a nitro group, an alkyl group and/or an aryl group; p is an integer of 1 to 2; q is an integer of 1 to 4; Y 1 and Y 2 independently represent one or more of a hydrogen atom, a deuterium atom, a fluorine atom, a chlorine atom, a bromine atom, a carbon atom, an oxygen atom (e.g. an alkylated oxygen atom), a nitrogen atom (e.g. an alkylated nitrogen atom), a cyano group, a nitro group, an alkyl group and/or an aryl group; and x is an integer of 0, 1, 2, 3, 4, 5, 6, 7, 8, 9, 10 or more.

7. 发明申请

WO2019180444A1 LUMINESCENT COMPOUNDS 审中-公开
公开(公告)号：WO2019180444A1
公开(公告)日：2019-09-26
申请号：PCT/GB2019/050806
申请日：2019-03-21
申请人： THE UNIVERSITY OF BIRMINGHAM
发明人： ROBINSON, Alex , PREECE, Jon , O'CALLAGHAN, Gregory , VIRZBICKAS, Karolis , JONES, Owen , ZHAO, Dennis , BUTLIN, Michael , SUND, Sareena
IPC分类号： C07D277/60 , C07C211/61 , H01L51/50
摘要： Polycyclic aromatic hydrocarbons represented by the following general formula (I) wherein X is one of nitrogen, phosphorus, arsenic, antimony, bismuth, sulphur, selenium, tellurium; R independently represents an aromatic group and/or an aliphatic group; Q is one of a cyclic aliphatic hydrocarbon, a cyclic aromatic hydrocarbon, a polycyclic hydrocarbon, a polycyclic aromatic hydrocarbon, and/or a fused polycyclic aromatic hydrocarbon; wherein the substituents independently comprise one or more of a hydrogen atom, a deuterium atom, a fluorine atom, a chlorine atom, a bromine atom, a carbon atom, an oxygen atom (e.g. an alkylated oxygen atom), a nitrogen atom (e.g. an alkylated nitrogen atom), a cyano group, a nitro group, an alkyl group and/or anaryl group; p is an integer of 1 to 2; q is an integer of 1 to 4; Y 1 and Y 2 independently represent one or more of a hydrogen atom, a deuterium atom, a fluorine atom, a chlorine atom, a bromine atom, a carbon atom, an oxygen atom (e.g. an alkylated oxygen atom), a nitrogen atom (e.g. an alkylated nitrogen 20 atom), a cyano group, a nitro group, an alkyl group and/oranaryl group; and x is an integer of 0, 1, 2, 3, 4, 5, 6, 7, 8, 9, 10 or more.

8. 发明申请

WO2013117908A1 SPIN ON HARD-MASK MATERIAL 审中-公开
标题翻译：旋转硬掩模材料
公开(公告)号：WO2013117908A1
公开(公告)日：2013-08-15
申请号：PCT/GB2013/050219
申请日：2013-01-31
申请人： THE UNIVERSITY OF BIRMINGHAM
发明人： FROMMHOLD, Andreas , ROBINSON, Alex , MANYAM, Jedsada
IPC分类号： C08K9/04 , C01B31/02 , C09C3/08 , H01L21/00
CPC分类号： C09D161/14 , B05D1/005 , B05D3/02 , C08K9/04 , C09C1/44 , C09C1/56 , H01L21/02118 , H01L21/02282 , H01L21/3081 , H01L21/3086
摘要： Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative and a crosslinking agent. Further disclosed is a process for forming a hard-mask.
摘要翻译：本文公开和要求保护的是用于形成具有富勒烯衍生物和交联剂的旋涂硬掩模的组合物。进一步公开的是形成硬掩模的方法。

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