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1. 发明申请

WO2016093824A1 DETECTION OF LOST WAFER FROM SPINNING CHUCK 审中-公开
标题翻译：检测从旋转OF OF OF。。。。。。。
公开(公告)号：WO2016093824A1
公开(公告)日：2016-06-16
申请号：PCT/US2014/069557
申请日：2014-12-10
申请人： TEL FSI, INC.
发明人： ROSE, Alan D. , GRUENHAGEN, Michael
IPC分类号： H01L21/67 , H01L21/68 , H01L21/687
CPC分类号： H01L21/68728 , H01L21/67288
摘要： The disclosure relates to systems and methods for detecting when a microelectronic substrate is no longer properly secured or lost from a rotating chuck. A microelectronic substrate may be secured to a rotating chuck that may rotate the substrate when exposing the substrate to the chemicals during a treatment in a process chamber. The rotating chuck may include one or more detectors to detect the position of a gripping mechanism that secure the microelectronic substrate. The detectors may generate an electrical signal that correlates to the position of the microelectronic substrate. When the electrical signal(s) exceed a threshold the system may stop rotating the chuck to prevent additional damage to the process chamber.
摘要翻译：本公开涉及用于检测何时微电子基板不再适当地固定或从旋转卡盘丢失的系统和方法。微电子衬底可以被固定到旋转卡盘，其可以在处理室中的处理期间将衬底暴露于化学物质时旋转衬底。旋转卡盘可以包括一个或多个检测器，以检测固定微电子基板的夹持机构的位置。检测器可以产生与微电子衬底的位置相关的电信号。当电信号超过阈值时，系统可能会停止旋转卡盘，以防止对处理室造成额外的损坏。

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