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1. 发明申请

WO2013138049A1 PLASMA REACTOR WITH CONDUCTIVE MEMBER IN REACTION CHAMBER FOR SHIELDING SUBSTRATE FROM UNDESIRABLE IRRADIATION 审中-公开
标题翻译：具有导电构件的反应室中的等离子体反应器，用于从不可辐射辐照的屏蔽基板
公开(公告)号：WO2013138049A1
公开(公告)日：2013-09-19
申请号：PCT/US2013/027414
申请日：2013-02-22
申请人： SYNOS TECHNOLOGY, INC.
发明人： LEE, Sang, In , LEE, Ilsong , YANG, Hyo, Seok
IPC分类号： C23C16/455
CPC分类号： H01L21/322 , C23C16/308 , C23C16/345 , C23C16/402 , C23C16/4412 , C23C16/45536 , C23C16/45544 , C23C16/45551 , C23C16/45591 , C23C16/50 , H01J37/32357 , H01J37/32623 , H01L21/02178 , H01L21/02274 , H01L21/0228
摘要： Placing a conductive member between a plasma chamber in a remote plasma reactor and a substrate to shield the substrate from irradiation of undesirable electromagnetic radiation, ions or electrons. The conductive member blocks the electromagnetic radiation, neutralizes ions and absorbs the electrons. Radicals generated in the plasma chambers flows to the substrate despite the placement of the conductive member. In this way, the substrate is exposed to the radicals whereas damages to the substrate due to electromagnetic radiations, ions or electrons are reduced or removed.
摘要翻译：将导电构件放置在远程等离子体反应器中的等离子体室与基板之间，以屏蔽基板免受不需要的电磁辐射，离子或电子的照射。导电构件阻挡电磁辐射，中和离子并吸收电子。在等离子体室中产生的自由基流过衬底，尽管导电构件的放置。以这种方式，衬底暴露于自由基，同时减少或去除由电磁辐射，离子或电子引起的对衬底的损伤。

2. 发明申请

WO2013148446A1 SCANNING INJECTOR ASSEMBLY MODULE FOR PROCESSING SUBSTRATE 审中-公开
标题翻译：扫描注射器组件模块用于处理基板
公开(公告)号：WO2013148446A1
公开(公告)日：2013-10-03
申请号：PCT/US2013/033208
申请日：2013-03-21
申请人： SYNOS TECHNOLOGY, INC.
发明人： PAK, Samuel, S. , LEE, Sang In , LEE, Ilsong , YANG, Hyo Seok
IPC分类号： C23C16/00
CPC分类号： C23C16/45544 , C23C16/4412 , C23C16/45551 , C23C16/45561 , C23C16/45589
摘要： An injection module assembly (IMA) that moves along a predetermined path to inject gas onto a substrate and discharge excess gas is described. The IMA may be used for processing a substrate that is difficult to move for various reasons such as a large size and weight of the substrate. The IMA is connected to one or more sets of jointed arms with structures to provide one or more paths for injecting the gas or discharging the excess gas. The IMA is moved by a first driving mechanism (e.g., linear motor) and the jointed arms are separately operated by a second driving mechanism (e.g., pulleys and cables) to reduce force or torque caused by the weight of the jointed arms. The movement of the first driving mechanism and the second driving mechanism is synchronized to move the IMA and the jointed arms.
摘要翻译：描述了沿着预定路径移动以将气体注入基板并排出多余气体的注射模块组件（IMA）。 IMA可以用于处理由于各种原因（例如基板的大尺寸和重量）而难以移动的基板。 IMA连接到具有结构的一组或多组接合臂，以提供用于喷射气体或排出多余气体的一个或多个路径。 IMA由第一驱动机构（例如，线性马达）移动，并且连接的臂由第二驱动机构（例如，滑轮和电缆）分开操作，以减少由连接臂的重量引起的力或扭矩。第一驱动机构和第二驱动机构的运动被同步以移动IMA和连接臂。

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