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1. 发明申请

WO2007046869A2 IN-PLANE MECHANICALLY COUPLED MICROELECTROMECHANICAL TUNING FORK RESONATORS 审中-公开
标题翻译：平面机械耦合微电子机械调谐器谐振器
公开(公告)号：WO2007046869A2
公开(公告)日：2007-04-26
申请号：PCT/US2006/019531
申请日：2006-05-19
申请人： ROBERT BOSCH GMBH , THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY , PAN, Zhiyu , CHANDLER, Rob, Norris , LUTZ, Markus , PARTRIDGE, Aaron , MATERNA, Volker , YAMA, Gary , FREY, Wilhelm
发明人： PAN, Zhiyu , CHANDLER, Rob, Norris , LUTZ, Markus , PARTRIDGE, Aaron , MATERNA, Volker , YAMA, Gary , FREY, Wilhelm
CPC分类号： H03H9/505 , H03H9/0023 , H03H9/02338 , H03H9/2468 , H03H2009/02496
摘要： There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for example, 2 or 4 resonators) that are mechanically coupled to provide, for example, a differential signal output. In one embodiment, the present invention includes four commonly shaped microelectromechanical tuning fork resonators (for example, tuning fork resonators having two or more rectangular-shaped or square-shaped tines). Each resonator is mechanically coupled to another resonator of the architecture. For example, each resonator of the architecture is mechanically coupled to another one of the resonators on one side or a corner of one of the sides. In this way, all of the resonators, when induced, vibrate at the same frequency.
摘要翻译：这里描述和示出了许多发明，以及这些发明的许多方面和实施例。在一个方面，本发明涉及一种包括机械耦合以提供例如差分信号输出的多个平面内振动微机电谐振器（例如，2或4个谐振器）的谐振器结构。在一个实施例中，本发明包括四个通常形状的微机电音叉谐振器（例如，具有两个或更多个矩形或正方形形状的叉的音叉谐振器）。每个谐振器机械耦合到该架构的另一谐振器。例如，该架构的每个谐振器在其中一个侧面的一侧或拐角上机械耦合到另一个谐振器。以这种方式，所有谐振器在被感应时以相同的频率振动。

2. 发明申请

WO2004095540A3 METHOD OF MAKING A NANOGAP FOR VARIABLE CAPACITIVE ELEMENTS AND DEVICE HAVING A NANOGAP 审中-公开
公开(公告)号：WO2004095540A3
公开(公告)日：2004-11-04
申请号：PCT/US2004/008808
申请日：2004-03-22
申请人： ROBERT BOSCH GMBH , THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
发明人： PARTRIDGE, Aaron , LUTZ, Markus , KENNY, Thomas
IPC分类号： H01L21/00
摘要： A method for fabricating a variable capacitive device including providing a base silicon-bearing compound electrode (107a-107c) which is vertically-inclined with respect to a substrate, depositing a sacrificial layer on the base electrode, depositing a silicon-bearing compound electrode (116a-117d) on the sacrificial layer which is also vertically-inclined with respect to the substrate, and removing the sacrificial layer from between the base silicon-bearing compound electrode (107a-107c) and the grown silicon-bearing compound electrode.(116a-116d) A variable capacitive device having a fixed vertically-inclined silicon-bearing compound electrode and a movable vertically-inclined silicon-bearing compound electrode produced by arranging a sacrificial layer on a base silicon-bearing compound electrode, depositing a grown silicon-bearing compound electrode on the sacrificial layer, and etching the sacrificial layer. Between the fixed silicon-bearing compound and the movable silicon-bearing compound electrode is a nanogap (120a-120d), the nanogap having a uniform width.

3. 发明申请

WO2006115592A1 ANTI-STICTION TECHNIQUE FOR ELECTROMECHANICAL SYSTEMS AND ELECTROMECHANICAL DEVICE EMPLOYING SAME 审中-公开
标题翻译：机电系统的防伪技术及其使用的电化学装置
公开(公告)号：WO2006115592A1
公开(公告)日：2006-11-02
申请号：PCT/US2006/008600
申请日：2006-03-10
申请人： GMBH, Robert, Bosch , ULM, Markus , METZ, Matthias , STARK, Brian , YAMA, Gary , LUTZ, Markus , PARTRIDGE, Aaron , FREY, Wilhelm
发明人： ULM, Markus , METZ, Matthias , STARK, Brian , YAMA, Gary , LUTZ, Markus , PARTRIDGE, Aaron , FREY, Wilhelm
IPC分类号： B81C1/00
CPC分类号： B81C1/0096 , B81B3/0005 , B81C2201/112 , B82Y30/00 , H01L2224/13 , H01L2924/1461 , H01L2924/00
摘要： A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.
摘要翻译：机械结构设置在室中，其至少一部分由封装结构限定。第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预成型件部分，以密封抗静电通道。第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静电通道。该至少一个部分与机电装置分开制造，然后固定在机电装置上。第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。一种器件包括衬底，封装结构和机械结构。抗静电层设置在机械结构的至少一部分上。在基板和封装结构中的至少一个中形成抗静电通道。帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。

4. 发明申请

WO2007005132A1 MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME 审中-公开
标题翻译： MEMS谐振器阵列结构及其操作和使用方法
公开(公告)号：WO2007005132A1
公开(公告)日：2007-01-11
申请号：PCT/US2006/019628
申请日：2006-05-19
申请人： ROBERT BOSCH GMBH , LUTZ, Markus , PARTRIDGE, Aaron , PAN, Zhiyu
发明人： LUTZ, Markus , PARTRIDGE, Aaron , PAN, Zhiyu
IPC分类号： H03H9/02 , H03H9/24 , H03H9/46 , H03H9/50
CPC分类号： H03H9/2405 , H03H3/0076 , H03H9/02338 , H03H9/02448 , H03H9/2431 , H03H9/462 , H03H9/505 , H03H2009/02354 , H03H2009/0244 , H03H2009/02496 , H03H2009/02503 , H03H2009/02511 , H03H2009/02527
摘要： Mechanically coupled MEMS resonators 102 a, b, c, d are arranged in an N x M array. Each resonator includes straight elongated beam sections 106 a, b, c, d. Each elongated beam section is connected to another elongated beam section at a distal end via a curved sections 108 a, b, c, d thereby forming a geometric shape (e.g., rounded square). Each resonator is mechanically coupled to at least one other adjacent resonator of the array via a resonator coupling section 104, which may be disposed between elongated beam sections of adjacent resonators. The resonators, oscillate at the same frequency in a combined elongating (or breathing) mode and bending mode. The resonators of the array may include nodal points 114 (i.e., portions of the resonator that are stationary, during oscillation of the resonator) in the curved sections. The nodal points are preferable locations to anchor the resonators.
摘要翻译：机械耦合MEMS谐振器102a，b，c，d以N×M阵列排列。每个谐振器包括直的细长梁段106a，b，c，d。每个细长梁部分经由弯曲部分108a，b，c，d连接到远端处的另一个细长梁部分，从而形成几何形状（例如，圆角正方形）。每个谐振器经由谐振器耦合部分104机械地耦合到阵列的至少一个其它相邻的谐振器，谐振器耦合部分104可以设置在相邻谐振器的细长的波束部分之间。谐振器以组合的延长（或呼吸）模式和弯曲模式以相同的频率振荡。阵列的谐振器可以包括在弯曲部分中的节点114（即谐振器的在谐振器的振荡期间是静止的部分）。节点是锚定谐振器的优选位置。

5. 发明申请

WO2009079188A9 MEMS RESONATOR STRUCTURE AND METHOD FOR USE IN ASSOCIATION WITH THE RESONATOR STRUCTURE 审中-公开
公开(公告)号：WO2009079188A9
公开(公告)日：2009-06-25
申请号：PCT/US2008/084946
申请日：2008-11-26
申请人： ROBERT BOSCH GmbH , LUTZ, Markus , PAN, Zhiyu , PARTRIDGE, Aaron
发明人： LUTZ, Markus , PAN, Zhiyu , PARTRIDGE, Aaron
IPC分类号： H03H3/007 , H03H9/02 , B81B3/00
摘要： A microelectromechanical resonator may include one or more resonator masses that oscillates in a bulk mode and that includes a first plurality of regions each having a density, and a second plurality of regions each having a density, the density of each of the second plurality of regions differing from the density of each of the first plurality of regions. The second plurality of regions may be disposed in a non-uniform arrangement. The oscillation may include a first state in which the resonator mass is contracted, at least in part, in a first and/or a second direction, and expanded, at least in part, in a third and/or a fourth direction, the second direction being opposite the first direction, the fourth direction being opposite the third direction.

6. 发明申请

WO2009079186A1 MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME 审中-公开
标题翻译： MEMS谐振器阵列结构及其操作和使用方法
公开(公告)号：WO2009079186A1
公开(公告)日：2009-06-25
申请号：PCT/US2008/084913
申请日：2008-11-26
申请人： ROBERT BOSCH GMBH , LUTZ, Markus , PAN, Zhiyu , PARTRIDGE, Aaron
发明人： LUTZ, Markus , PAN, Zhiyu , PARTRIDGE, Aaron
IPC分类号： H03H9/46
CPC分类号： H03B5/30 , H03H9/02259 , H03H9/02338 , H03H9/2405 , H03H9/2447 , H03H9/505 , H03H2009/0233 , H03H2009/02385 , H03H2009/0244 , H03H2009/02503
摘要： Resonators arranged in an NxM MEMS array structure includes substantially straight elongated beam sections connected by curved/rounded sections. Each resonator is mechanically coupled to at least one adjacent resonator of the array via a coupling section, each elongated beam section connected to another elongated beam section at a distal end via the curved/rounded sections forming a geometric shape, and the coupling sections are disposed between elongated beam sections of adjacent resonators. The resonators, when induced, oscillate at substantially the same frequency, in combined elongating/breathing and bending modes, (i.e, beam sections exhibiting elongating/breathing-like and bending-like motions). One or more of the array structure's resonators may include one or more nodal points (i.e, substantially stationary and/or experience little movement), which are suitable and/or preferable locations to anchor the resonator/array to the substrate, in one or more areas of the structure's curved sections.
摘要翻译：以NxM MEMS阵列结构排列的谐振器包括通过弯曲/圆形部分连接的基本上直的细长梁段。每个谐振器经由耦合部分机械地耦合到阵列的至少一个相邻的谐振器，每个细长的波束部分通过形成几何形状的弯曲/圆形部分在远端连接到另一个细长的波束部分，并且耦合部分被布置在相邻谐振器的细长梁部分之间。谐振器在诱导时以组合的伸长/呼吸和弯曲模式（即，呈现延长/呼吸状和弯曲状运动的梁部分）以基本上相同的频率摆动。一个或多个阵列结构的谐振器可以包括一个或多个节点（即，基本上静止和/或经历少量运动），其是在一个或多个位置中将谐振器/阵列锚定到衬底的合适的和/或优选的位置结构弯曲部分的区域。

7. 发明申请

WO2007030268A1 BREATH-MODE RING RESONATOR STRUCTURE, AND METHOD OF DESIGNING, OPERATING AND USING SAME 审中-公开
标题翻译：环境模式环谐振器结构及其设计，操作和使用方法
公开(公告)号：WO2007030268A1
公开(公告)日：2007-03-15
申请号：PCT/US2006/031454
申请日：2006-08-11
申请人： ROBERT BOSCH GMBH , PAN, Zhiyu , LUTZ, Markus , PARTRIDGE, Aaron
发明人： PAN, Zhiyu , LUTZ, Markus , PARTRIDGE, Aaron
IPC分类号： H03H9/02
CPC分类号： H03H9/2431 , H03H3/0077 , H03H9/0023 , H03H9/02244 , H03H9/02259 , H03H9/02338 , H03H2009/02354 , H03H2009/02496 , H03H2009/02503 , H03H2009/02527
摘要： The present invention is directed to one or more microelectromechanical ring resonator structures having a substantially circular outer surface and a substantially circular inner surface. The microelectromechanical ring resonator (s) include an anchor support element (26) having an impedance matching structure (28) coupled to at least one substrate anchor (30) . The impedance matching structure may be a beam, having a predetermined length, which couples the ring resonator (s) to substrate anchor. In one embodiment, the impedance matching structure operates in a bulk-elongation mode . In another embodiment, the impedance matching structure operates in a flexure mode. In operation, when induced, the microelectromechanical ring resonator structure oscillates in an elongating/compressing or breathing mode (or in a primarily or substantially elongating or breathing mode) . In this regard, the ring resonator structure exhibits an elongating/compressing-like or breathing-like motion.
摘要翻译：本发明涉及一种或多种具有基本圆形的外表面和基本上圆形的内表面的微机电环谐振器结构。微机电环谐振器包括具有耦合到至少一个衬底锚（30）的阻抗匹配结构（28）的锚支撑元件（26）。阻抗匹配结构可以是具有预定长度的光束，其将环形谐振器耦合到衬底锚固件。在一个实施例中，阻抗匹配结构以体伸长模式工作。在另一个实施例中，阻抗匹配结构以弯曲模式工作。在操作中，当感应时，微机电环谐振器结构以伸长/压缩或呼吸模式（或主要或基本上延长或呼吸模式）振荡。在这方面，环形谐振器结构呈现伸长/压缩状或呼吸状运动。

8. 发明申请

WO2007143058A3 METHODS FOR TRAPPING CHARGE IN A MICROELECTROMECHANICAL SYSTEM AND MICROELECTROMECHANICAL SYSTEM EMPLOYING SAME 审中-公开
公开(公告)号：WO2007143058A3
公开(公告)日：2007-12-13
申请号：PCT/US2007/012878
申请日：2007-05-31
申请人： ROBERT BOSCH GMBH , LUTZ, Markus , PARTRIDGE, Aaron , STARK, Brian, H.
发明人： LUTZ, Markus , PARTRIDGE, Aaron , STARK, Brian, H.
IPC分类号： H01L21/00
摘要： Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.

9. 发明申请

WO2005045885A2 ANTI-STICTION TECHNIQUE FOR THIN FILM AND WAFER-BONDED ENCAPSULATED MICROELECTROMECHANICAL SYSTEMS 审中-公开
标题翻译：薄膜和波纹粘合微电子系统的防伪技术
公开(公告)号：WO2005045885A2
公开(公告)日：2005-05-19
申请号：PCT/US2004/018892
申请日：2004-06-15
申请人： ROBERT BOSCH GMBH , LUTZ, Markus , PARTRIDGE, Aaron
发明人： LUTZ, Markus , PARTRIDGE, Aaron
IPC分类号： H01L
CPC分类号： B81C1/0096 , B81B3/0005 , B82Y10/00 , B82Y30/00
摘要： There are many inventions described and illustrated herein. In one aspect, present invention is directed to a thin film or wafer encapsulated MEMS, and technique of fabricating or manufacturing a thin film or wafer encapsulated MEMS employing the antistiction techniques of the present invention. In one embodiment, after encapsulation of the MEMS, an anti-stiction channel is formed thereby providing "access" to the chamber containing some or all of the active members or electrodes of the mechanical structures of the MEMS. Thereafter, an anti-stiction fluid (for example, gas or gas-vapor) is introduced into the chamber via the anti-stiction channel. The anti-stiction fluid may deposit on one, some or all of the active members or electrodes of the mechanical structures thereby providing an anti-stiction layer (for example, a monolayer coating or self-assembled monolayer) and/or out-gassing molecules on such members or electrodes. After introduction and/or application of the anti-stiction fluid, the anti-stiction channel may be sealed, capped, plugged and/or closed to define and control the mechanical damping environment within the chamber. In this regard, sealing, capping and/or closing the chamber establishes the environment within the chamber containing and/or housing the mechanical structures. This environment provides the predetermined, desired and/or selected mechanical damping of the mechanical structure as well as suitable hermeticity. The parameters (for example, pressure) of the final encapsulated fluid (for example, a gas or a gas vapor) in which the mechanical structures are to operate may be controlled, selected and/or designed to provide a desired and/or predetermined operating environment.
摘要翻译：这里描述和说明了许多发明。一方面，本发明涉及薄膜或晶片封装的MEMS，以及使用本发明的抗静电技术制造或制造薄膜或晶片封装的MEMS的技术。在一个实施例中，在MEMS的封装之后，形成抗静电通道，从而提供“接入”室，其包含MEMS的机械结构的一些或全部有源部件或电极。此后，抗静电液体（例如，气体或气体 - 蒸气）经由抗静电通道被引入腔室。抗静电液体可以沉积在机械结构的一个，一些或所有活性部件或电极上，从而提供抗静电层（例如，单层涂层或自组装单层）和/或排气分子在这些构件或电极上。在引入和/或施加抗静电流体之后，防静电通道可被密封，封盖，堵塞和/或关闭以限定和控制室内的机械阻尼环境。在这方面，腔室的密封，封盖和/或闭合在室内建立包含和/或容纳机械结构的环境。该环境提供机械结构的预定的，期望的和/或选择的机械阻尼以及合适的气密性。可以控制，选择和/或设计机械结构将要运行的最终封装流体（例如，气体或气体蒸气）的参数（例如压力），以提供期望的和/或预定的操作环境。

10. 发明申请

WO2006124303A1 MICROELECTROMECHANICAL RESONATOR STRUCTURE, AND METHOD OF DESIGNING, OPERATING AND USING SAME 审中-公开
标题翻译：微电子谐振器结构及其设计，操作和使用方法
公开(公告)号：WO2006124303A1
公开(公告)日：2006-11-23
申请号：PCT/US2006/017070
申请日：2006-05-03
申请人： ROBERT BOSCH GMBH , PARTRIDGE, Aaron , LUTZ, Markus
发明人： PARTRIDGE, Aaron , LUTZ, Markus
IPC分类号： H03H9/24 , H03H9/02
CPC分类号： H03H9/2431 , H03H9/02259 , H03H9/02338 , H03H9/02448 , H03H9/2405 , H03H2009/02354 , H03H2009/02496 , H03H2009/02503 , H03H2009/02511 , H03H2009/02527
摘要： A micromechanical resonator structure including a plurality of straight or substantially straight beam sections that are connected by curved or rounded sections. Each elongated beam section is connected to another elongated beam section at a distal end via the curved or rounded sections thereby forming a geometric shape having at least two elongated beam sections that are interconnected via curved or rounded sections (for example, a rounded triangle shape, rounded square or rectangle shape). The structure includes one or more nodal points or areas (i.e., portions of the resonator structure that are stationary, experience little movement, and/or are substantially stationary during oscillation of the resonator structure) in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator structure to the substrate. In operation, the resonator structure oscillates in a combined elongating (or breathing) mode and bending mode; that is, the beam sections (which oscillate or vibrate at the same frequency) exhibit an elongating-like (or breathing-like) motion and a bending-like motion.
摘要翻译：微机械谐振器结构包括通过弯曲或圆形部分连接的多个直的或基本上直的梁部分。每个细长梁部分经由弯曲或圆形部分在远端处连接到另一个细长梁部分，从而形成具有至少两个细长梁部分的几何形状，所述细长梁部分经由弯曲或圆形部分（例如，圆形三角形形状，圆形正方形或矩形）。该结构包括在弯曲部分的一个或多个部分或区域中的一个或多个节点或区域（即，谐振器结构的静止的部分，经历少量运动和/或在谐振器结构的振荡期间基本静止）的结构。节点是合适的和/或优选的位置，以将谐振器结构锚固到衬底。在操作中，谐振器结构以组合延长（或呼吸）模式和弯曲模式振荡; 也就是说，波束部分（以相同的频率振荡或振动）表现出伸长状（或呼吸状）运动和弯曲状运动。

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