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1. 发明申请

WO2005029178A2 A SYSTEM AND METHOD FOR THE DIRECT IMAGING OF COLOR FILTERS 审中-公开
标题翻译：用于彩色滤光片直接成像的系统和方法
公开(公告)号：WO2005029178A2
公开(公告)日：2005-03-31
申请号：PCT/IL2004/000882
申请日：2004-09-22
申请人： ORBOTECH LTD. , GROSS, Abraham , ADIN, Raanan , KATZIR, Yigal , FISCH, David
发明人： GROSS, Abraham , ADIN, Raanan , KATZIR, Yigal , FISCH, David
IPC分类号： G03F
CPC分类号： G03F7/70425 , G03F7/0007 , G03F7/70383
摘要： A system and method for the laser direct imaging of stripe patterns onto a photosensitized surface comprising scanning a laser beam over a photo sensitized, surface. Stripe patterns are exposed by employing a pulse laser and synchronizing the delivery of pulses to expose additive regions of stripes. Alternatively, a laser is scanned over a rotated panel, and the speed of translation, speed of scanning and degree of rotation are coordinated to expose each stripe continuously, and avoid exposing regions between stripes.
摘要翻译：一种用于将条纹图案激光直接成像到光敏表面上的系统和方法，包括在光致敏表面上扫描激光束。通过采用脉冲激光和同步脉冲的传递以暴露条纹的附加区域来暴露条纹图案。或者，激光在旋转的面板上扫描，并且平移速度，扫描速度和旋转程度被协调以连续地暴露每个条纹，并且避免在条纹之间暴露区域。

2. 发明申请

WO2007043051A2 PHOTOCONDUCTIVE BASED ELECTRICAL TESTING OF TRANSISTOR ARRAYS 审中-公开
标题翻译：晶体管阵列的基于光电的电气测试
公开(公告)号：WO2007043051A2
公开(公告)日：2007-04-19
申请号：PCT/IL2006/001179
申请日：2006-10-15
申请人： ORBOTECH LTD. , LEIZERSON, Ilya , GROSS, Abraham , ADIN, Raanan , BEN-TOLILA, Raphael
发明人： LEIZERSON, Ilya , GROSS, Abraham , ADIN, Raanan , BEN-TOLILA, Raphael
IPC分类号： G06T7/00
CPC分类号： G09G3/006 , G01R31/311 , G09G3/3648 , G09G2300/08
摘要： Apparatus for testing microelectronic components on a substrate, including a scanner operative to scan a light beam over a plurality of thin film transistors disposed on a substrate, one transistor at a time, so as to induce a photoconductive response in the plurality of transistors, one transistor at a time; current sensing circuitry operative, synchronously with said scanner, to measure an output induced by the photoconductive response associated with a transistor and to generate photoconductive response output values, the photoconductive response output values representing a photoconductive response induced by the light beam, for one transistor at a time from among the plurality of transistors; and diagnostic apparatus operative to analyze the electronic response output values and to characterize each of the transistors in accordance therewith.
摘要翻译：用于测试衬底上的微电子部件的装置，包括扫描器，其操作以扫描设置在衬底上的多个薄膜晶体管上的光束，一次一个晶体管，以便在所述多个晶体管中引起光电导响应，一个晶体管一次; 电流感测电路与所述扫描器同步地操作，以测量由与晶体管相关联的光电导响应引起的输出，并产生光电导响应输出值，光电导响应输出值表示由光束引起的光导响应，对于一个晶体管来自多个晶体管的时间; 以及诊断装置，用于分析电子响应输出值并根据其来表征每个晶体管。

3. 发明申请

WO2007080568A2 SYSTEM AND METHOD FOR INSPECTING WORKPIECES HAVING MICROSCOPIC FEATURES 审中-公开
标题翻译：用于检查具有微观特征的工件的系统和方法
公开(公告)号：WO2007080568A2
公开(公告)日：2007-07-19
申请号：PCT/IL2006/001418
申请日：2006-12-11
申请人： ORBOTECH LTD. , SAPHIER, Ofer , ADIN, Raanan , FISCH, David
发明人： SAPHIER, Ofer , ADIN, Raanan , FISCH, David
IPC分类号： G06K9/00
CPC分类号： G06K9/033 , G06K2209/19
摘要： Apparatus for high resolution processing of a generally planar workpiece having microscopic features to be imaged, comprising a video camera acquiring at least two candidate images of a microscopic portion on generally planar workpiece; a motion controller operative to effect motion, relative to the workpiece, of at least an optical element of the video camera along an optical axis extending generally normally to a location on a surface of the workpiece, the video camera acquiring the at least two candidate images at selected time intervals, each of the at least two candidate images differing by at least one image parameter; an image selector operative to select an individual image from among the at least two candidate images according to predefined criteria of image quality; and a selected image analyzer operative to analyze at least a portion of the individual image selected by the image selector.
摘要翻译：一种用于具有要成像的微观特征的大体平面的工件的高分辨率处理的装置，包括摄像机，其在大致平面的工件上获取微观部分的至少两个候选图像; 运动控制器，其操作以沿着通常大致延伸到工件表面上的位置的光轴实现至少摄像机的光学元件相对于工件的运动，摄像机获取至少两个候选图像在选定的时间间隔，所述至少两个候选图像中的每一个与至少一个图像参数不同; 图像选择器，用于根据图像质量的预定标准从所述至少两个候选图像中选择单个图像; 以及选择的图像分析器，用于分析由图像选择器选择的单个图像的至少一部分。

4. 发明申请

WO2003061354A3 SYSTEM AND METHODS FOR CONVEYING AND TRANSPORTING LEVITATED ARTICLES 审中-公开
公开(公告)号：WO2003061354A3
公开(公告)日：2003-07-24
申请号：PCT/IL2002/001046
申请日：2002-12-27
申请人： ORBOTECH LTD. , COREFLOW LTD. , ADIN, Raanan , YASSOUR, Yuval
发明人： ADIN, Raanan , YASSOUR, Yuval
IPC分类号： G06F19/00
摘要： A system and methodology for conveying generally planar substrates such as printed circuit board, flat panel display and interconnect device substrates, in a levitated state, to and from a scanning or imaging location, including an air flow conveyor having a substrate flattening functionality, and a scanning or imaging device, and scanning and imaging systems and methodologies employing such article conveying systems and methodologies.

5. 发明申请

WO2004083901A2 DETECTION OF MACRO-DEFECTS USING MICRO-INSPECTION INPUTS 审中-公开
标题翻译：使用微检查输入检测宏观缺陷
公开(公告)号：WO2004083901A2
公开(公告)日：2004-09-30
申请号：PCT/IL2004/000253
申请日：2004-03-17
申请人： ORBOTECH LTD. , SHIGERU, Yamamoto , SAPHIER, Ofer , ADIN, Raanan
发明人： SHIGERU, Yamamoto , SAPHIER, Ofer , ADIN, Raanan
IPC分类号： G02B
CPC分类号： G01N21/956
摘要： Apparatus for inspection includes optical inspection functionality (28) for providing at least one optical inspection output representative of a pattern of repeating cells on a substrate. Analysis functionality (32) is operative to receive the at least one optical inspection output and to isolate pre-selected features of the repeating cells. Analysis reporting functionality is operative on the isolated pre-selected features of the repeating cells for providing an output (34) indication of variations in at least one of the isolated pre-selected features, which variations occur over plural ones of the repeating cells.
摘要翻译：用于检查的装置包括光学检查功能（28），用于提供表示基板上的重复单元的图案的至少一个光学检查输出。分析功能（32）可操作以接收所述至少一个光学检查输出并且隔离所述重复单元的预选特征。分析报告功能对于重复单元的隔离的预先选择的特征进行操作，用于提供分离的预先选择的特征中的至少一个中的变化的输出（34）指示，该变化发生在多个重复单元上。

6. 发明申请

WO2004079496A2 SYSTEM FOR FABRICATING ELECTRICAL CIRCUITS EMPLOYING A FLUID FLOW SUPPORTER 审中-公开
标题翻译：用于制造流体流动支架的制造电路的系统
公开(公告)号：WO2004079496A2
公开(公告)日：2004-09-16
申请号：PCT/IL2004/000201
申请日：2004-03-02
申请人： ORBOTECH LTD. , SHIGERU, Yamamoto , ADIN, Raanan
发明人： SHIGERU, Yamamoto , ADIN, Raanan
IPC分类号： G06F
CPC分类号： H05K13/0061
摘要： A system and method for supporting a flat substrate during fabrication, employing a fluid flow supporter operating at a first fluid pressure and a first flow volume. A high pressure, low volume, fluid input is converted to reduce the pressure and increase the volume. The system and method are useful for levitating in-fabrication electrical circuits, such a flat panel displays, undergoing an electrical circuit fabrication operation.
摘要翻译：一种用于在制造期间支撑平坦基板的系统和方法，其采用以第一流体压力和第一流量操作的流体流动支撑件。转换高压，低体积的流体输入以减小压力并增加体积。该系统和方法对于经历电路制造操作的悬浮制造电路（例如平板显示器）是有用的。

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