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    • 1. 发明申请
    • INSPECTION SYSTEM EMPLOYING ILLUMINATION THAT IS SELECTABLE OVER A CONTINUOUS RANGE ANGLES
    • 采用连续角度选择的照明系统的检查系统
    • WO2007144777A3
    • 2013-07-11
    • PCT/IB2007002845
    • 2007-03-20
    • ORBOTECH LTDHURVITZ TALIMIZRAHI YARIV DRORFISCH DAVID
    • HURVITZ TALIMIZRAHI YARIV DRORFISCH DAVID
    • G01N21/00
    • G01N21/00G01N21/8806G01N2021/8825G01N2021/9513
    • An illumination device and method for inspecting objects having microscopic features is provided. The device includes an illuminator which provides a solid angle of angularly specific illumination defining an illumination angle, selected by a user from among a continuous range of possible illumination angles. The device further includes an object inspector which inspects the object illuminated by the illuminator. The illuminator may include an illumination source, a light concentrator, an illumination angle selector, disposed along a light path between the illumination source and the object inspector. The illumination angle selector may have a first position in which directly -reflected light propagates toward the object plane and a second position in which no light both selected by the illumination angle selector and directly reflected from the object plane enters the collecting lens. Rather, in the second position, only scattered light from the object plane enters the collecting lens.
    • 提供一种用于检查具有微观特征的物体的照明装置和方法。 该装置包括照明器,其提供角度特定照明的立体角,其限定由用户从可能的照射角度的连续范围中选择的照明角度。 该装置还包括检查由照明器照亮的物体的物体检查器。 照明器可以包括沿着照明源和物体检查器之间的光路布置的照明源,聚光器,照明角度选择​​器。 照明角度选择​​器可以具有第一位置,其中直接反射的光向物体平面传播,并且第二位置,其中由照明角度选择​​器选择并且直接从物体平面反射的光不会进入聚光透镜。 相反,在第二位置,仅来自物平面的散射光进入收集透镜。
    • 2. 发明申请
    • SYSTEM AND METHOD FOR INSPECTING WORKPIECES HAVING MICROSCOPIC FEATURES
    • 用于检查具有微观特征的工件的系统和方法
    • WO2007080568A3
    • 2009-04-23
    • PCT/IL2006001418
    • 2006-12-11
    • ORBOTECH LTDSAPHIER OFERADIN RAANANFISCH DAVID
    • SAPHIER OFERADIN RAANANFISCH DAVID
    • G06K9/00
    • G06K9/033G06K2209/19
    • Apparatus for high resolution processing of a generally planar workpiece having microscopic features to be imaged, comprising a video camera acquiring at least two candidate images of a microscopic portion on generally planar workpiece; a motion controller operative to effect motion, relative to the workpiece, of at least an optical element of the video camera along an optical axis extending generally normally to a location on a surface of the workpiece, the video camera acquiring the at least two candidate images at selected time intervals, each of the at least two candidate images differing by at least one image parameter; an image selector operative to select an individual image from among the at least two candidate images according to predefined criteria of image quality; and a selected image analyzer operative to analyze at least a portion of the individual image selected by the image selector.
    • 一种用于具有要成像的微观特征的大体平面的工件的高分辨率处理的装置,包括摄像机,其在大致平面的工件上获取微观部分的至少两个候选图像; 运动控制器,其操作以沿着通常大致延伸到工件表面上的位置的光轴实现至少摄像机的光学元件相对于工件的运动,摄像机获取至少两个候选图像 在选定的时间间隔,所述至少两个候选图像中的每一个与至少一个图像参数不同; 图像选择器,用于根据图像质量的预定标准从所述至少两个候选图像中选择单个图像; 以及选择的图像分析器,用于分析由图像选择器选择的单个图像的至少一部分。
    • 3. 发明申请
    • METHOD AND APPARATUS FOR VARIABLE MEMORY CELL REFRESH
    • 用于可变存储器单元刷新的方法和装置
    • WO2008085701A2
    • 2008-07-17
    • PCT/US2007/088529
    • 2007-12-21
    • INNOVATIVE SILICON S.A.FISCH, DavidCARMAN, Eric
    • FISCH, DavidCARMAN, Eric
    • G11C7/00
    • G11C11/406G11C11/40615G11C2207/104G11C2211/4016G11C2211/4067
    • The embodiments described herein allow a system using a memory array, or the memory itself, to more efficiently control refresh intervals. This reduces standby current and the overhead associated with refresh operations. One embodiment includes a variable analog refresh signal generation circuit that initiates a refresh operation on one or more memory cells of a memory array. The circuit integrates a refresh timer element with an event signal generator such that a refresh interval as defined by the refresh timer element is changed when events are detected that may change the data retention time of one or more memory cells. In various embodiments, one or more of the circuits is placed to monitor an entire memory array, different sub-arrays, or different portions of different sub-arrays. This allows additional refresh operations to be closely tied to actual events, thus increasing overall efficiency.
    • 这里描述的实施例允许使用存储器阵列或存储器本身的系统更有效地控制刷新间隔。 这减少了备用电流和与刷新操作相关的开销。 一个实施例包括可变模拟刷新信号产生电路,其启动对存储器阵列的一个或多个存储器单元的刷新操作。 电路将刷新定时器元件与事件信号发生器集成,使得当检测到可能改变一个或多个存储器单元的数据保持时间的事件时,刷新定时器元件定义的刷新间隔被改变。 在各种实施例中,放置一个或多个电路以监视整个存储器阵列,不同子阵列或不同子阵列的不同部分。 这允许额外的刷新操作与实际事件紧密相关,从而提高整体效率。
    • 6. 发明申请
    • SYSTEM AND METHOD FOR INSPECTING WORKPIECES HAVING MICROSCOPIC FEATURES
    • 用于检查具有微观特征的工件的系统和方法
    • WO2007080568A2
    • 2007-07-19
    • PCT/IL2006/001418
    • 2006-12-11
    • ORBOTECH LTD.SAPHIER, OferADIN, RaananFISCH, David
    • SAPHIER, OferADIN, RaananFISCH, David
    • G06K9/00
    • G06K9/033G06K2209/19
    • Apparatus for high resolution processing of a generally planar workpiece having microscopic features to be imaged, comprising a video camera acquiring at least two candidate images of a microscopic portion on generally planar workpiece; a motion controller operative to effect motion, relative to the workpiece, of at least an optical element of the video camera along an optical axis extending generally normally to a location on a surface of the workpiece, the video camera acquiring the at least two candidate images at selected time intervals, each of the at least two candidate images differing by at least one image parameter; an image selector operative to select an individual image from among the at least two candidate images according to predefined criteria of image quality; and a selected image analyzer operative to analyze at least a portion of the individual image selected by the image selector.
    • 一种用于具有要成像的微观特征的大体平面的工件的高分辨率处理的装置,包括摄像机,其在大致平面的工件上获取微观部分的至少两个候选图像; 运动控制器,其操作以沿着通常大致延伸到工件表面上的位置的光轴实现至少摄像机的光学元件相对于工件的运动,摄像机获取至少两个候选图像 在选定的时间间隔,所述至少两个候选图像中的每一个与至少一个图像参数不同; 图像选择器,用于根据图像质量的预定标准从所述至少两个候选图像中选择单个图像; 以及选择的图像分析器,用于分析由图像选择器选择的单个图像的至少一部分。
    • 7. 发明申请
    • METHOD AND APPARATUS FOR VARIABLE MEMORY CELL REFRESH
    • 用于可变存储器单元刷新的方法和装置
    • WO2008085701A3
    • 2009-02-12
    • PCT/US2007088529
    • 2007-12-21
    • INNOVATIVE SILICON SAFISCH DAVIDCARMAN ERIC
    • FISCH DAVIDCARMAN ERIC
    • G11C7/00
    • G11C11/406G11C11/40615G11C2207/104G11C2211/4016G11C2211/4067
    • The embodiments described herein allow a system using a memory array, or the memory itself, to more efficiently control refresh intervals. This reduces standby current and the overhead associated with refresh operations. One embodiment includes a variable analog refresh signal generation circuit that initiates a refresh operation on one or more memory cells of a memory array. The circuit integrates a refresh timer element with an event signal generator such that a refresh interval as defined by the refresh timer element is changed when events are detected that may change the data retention time of one or more memory cells. In various embodiments, one or more of the circuits is placed to monitor an entire memory array, different sub-arrays, or different portions of different sub-arrays. This allows additional refresh operations to be closely tied to actual events, thus increasing overall efficiency.
    • 这里描述的实施例允许使用存储器阵列或存储器本身的系统更有效地控制刷新间隔。 这减少了备用电流和与刷新操作相关的开销。 一个实施例包括可变模拟刷新信号产生电路,其启动对存储器阵列的一个或多个存储器单元的刷新操作。 电路将刷新定时器元件与事件信号发生器集成,使得当检测到可能改变一个或多个存储器单元的数据保持时间的事件时,刷新定时器元件定义的刷新间隔被改变。 在各种实施例中,放置一个或多个电路以监视整个存储器阵列,不同子阵列或不同子阵列的不同部分。 这允许额外的刷新操作与实际事件紧密相关,从而提高整体效率。
    • 9. 发明申请
    • MEMORY ARRAY HAVING A SEGMENTED BIT LINE ARCHITECTURE
    • 内存阵列拥有一个分隔的位线架构
    • WO2008008329A3
    • 2008-10-02
    • PCT/US2007015717
    • 2007-07-10
    • INNOVATIVE SILICON SAFISCH DAVIDBRON MICHEL
    • FISCH DAVIDBRON MICHEL
    • G11C11/34G11C16/04
    • H01L27/108G11C7/12G11C7/18G11C11/4097G11C2207/002G11C2211/4016H01L27/10802H01L29/7841
    • An integrated memory circuit device having a memory cell array (102) including a plurality of bit lines (e.g., 32a, 32b) and a plurality of bit line segments (e.g., 32a1, 32b1) wherein each bit line segment is coupled to an associated bit line (32a, 32b). The memory cell array (102) further includes a plurality of memory cells (12), wherein each memory cell (12) includes a transistor (14) having a first region, a second region, a body region, and a gate coupled to an associated word line (28) via an associated word line segment. A first group of memory cells (12) is coupled to the first bit line (32a) via the first bit line segment (32a1) and a second group of memory cells (12) is coupled to the second bit line (32b) via the second bit line segment (32b1). A plurality of isolation circuits (104), disposed between each bit line segment (32a1, 32b1) and its associated bit line (32a, 32b), responsively connect the associated bit line segment to or disconnect the associated bit line segment (32a1, 32b1) from the associated bit line (32a, 32b).
    • 一种具有包括多个位线(例如,32a,32b)和多个位线段(例如,32a1,3b1)的存储单元阵列(102)的集成存储器电路器件,其中每个位线段耦合到相关联的 位线(32a,32b)。 存储单元阵列(102)还包括多个存储器单元(12),其中每个存储器单元(12)包括具有第一区域,第二区域,体区域和耦合到第一区域的栅极的晶体管(14) 相关联的字线(28)。 第一组存储器单元(12)经由第一位线段(32a1)耦合到第一位线(32a),并且第二组存储器单元(12)经由第二位线段 第二位线段(32b1)。 设置在每个位线段(32a1,32b1)和其相关联的位线(32a,32b)之间的多个隔离电路(104)响应地将相关联的位线段连接到或断开相关联的位线段(32a1,312b) )从相关联的位线(32a,32b)。
    • 10. 发明申请
    • INTEGRATED CIRCUIT INCLUDING MEMORY ARRAY HAVING A SEGMENTED BIT LINE ARCHITECTURE AND METHOD OF CONTROLLING AND/OR OPERATING SAME
    • 集成电路,包括具有分段位线架构的存储器阵列及其控制和/或操作的方法
    • WO2008008329A2
    • 2008-01-17
    • PCT/US2007/015717
    • 2007-07-10
    • INNOVATIVE SILICON S.A.FISCH, DavidBRON, Michel
    • FISCH, DavidBRON, Michel
    • G11C5/06
    • H01L27/108G11C7/12G11C7/18G11C11/4097G11C2207/002G11C2211/4016H01L27/10802H01L29/7841
    • An integrated circuit device (e.g., a logic device or a memory device) having a memory cell array including a plurality of bit lines (e.g., first and second bit lines) and a plurality of bit line segments (e.g., first and second bit line segments) wherein each bit line segment is coupled to an associated bit line. The memory cell array further includes a plurality of memory cells, wherein each memory cell includes a transistor having a first region, a second region, a body region, and a gate coupled to an associated word line via an associated word line segment. A first group of memory cells is coupled to the first bit line via the first bit line segment and a second group of memory cells is coupled to the second bit line via the second bit line segment. A plurality of isolation circuits, disposed between each bit line segment and its associated bit line, responsively connect the associated bit line segment to or disconnect the associated bit line segment from the associated bit line.
    • 具有包括多个位线(例如,第一和第二位线)和多个位线段(例如,第一和第二位线)的存储单元阵列的集成电路器件(例如,逻辑器件或存储器件) 段),其中每个位线段耦合到相关联的位线。 存储单元阵列还包括多个存储单元,其中每个存储单元包括具有第一区域,第二区域,体区域和经由相关联的字线段耦合到关联字线的栅极的晶体管。 第一组存储器单元经由第一位线段耦合到第一位线,并且第二组存储器单元经由第二位线段耦合到第二位线。 设置在每个位线段与其相关位线之间的多个隔离电路响应地将相关联的位线段连接到相关联的位线段或将其与相关联的位线断开。