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1. 发明申请

WO2010049881A1 BIOCOMPATIBLE ELECTRODES 审中-公开
标题翻译：生物电极
公开(公告)号：WO2010049881A1
公开(公告)日：2010-05-06
申请号：PCT/IB2009/054736
申请日：2009-10-26
申请人： NXP B.V. , DAAMEN, Roel , MERZ, Matthias
发明人： DAAMEN, Roel , MERZ, Matthias
IPC分类号： H01L21/768 , G01N27/403
CPC分类号： H01L21/76849 , H01L21/32134 , H01L21/7684 , H01L21/76883
摘要： A biocompatible electrode is manufactured by depositing filling metal 36 and etching back the filling metal to the surface of the surrounding insulator 30. Then, a further etch forms a recess 38 at the top of the via 32. An electrode metal 40 is then deposited and etched back to fill the recess 38 and form biocompatible electrode 42. In this way, a planar biocompatible electrode is achieved. The step of etching to form the recess may be carried out in the same CMP tool as is used to etch back the filling metal 36. A hydrogen peroxide etch may be used.
摘要翻译：通过沉积填充金属36并将填充金属蚀刻回到周围绝缘体30的表面来制造生物相容性电极。然后，另外的蚀刻在通孔32的顶部形成凹部38.然后沉积电极金属40，回蚀以填充凹部38并形成生物相容性电极42.以这种方式，实现平面生物相容性电极。蚀刻形成凹部的步骤可以在与用于回填填充金属36相同的CMP工具中进行。可以使用过氧化氢蚀刻。

2. 发明申请

WO2009016594A3 HUMIDITY SENSOR BASED ON PROGRESSIVE CORROSION OF EXPOSED MATERIAL 审中-公开
公开(公告)号：WO2009016594A3
公开(公告)日：2009-02-05
申请号：PCT/IB2008/053059
申请日：2008-07-30
申请人： NXP B.V. , HUMBERT, Aurelie , PONOMAREV, Youri, Victorovitch , MERZ, Matthias , HOOFMAN, Romano
发明人： HUMBERT, Aurelie , PONOMAREV, Youri, Victorovitch , MERZ, Matthias , HOOFMAN, Romano
IPC分类号： G01N17/04 , G01N27/12
摘要： A sensor senses a characteristic of an environment, e.g., humidity. The sensor has a substrate with strips of material that is sensitive to corrosion as a result of the characteristic. The strips are configured to respond differently to the characteristic. By means of repeatedly measuring the resistances of the strips, the environment can be monitored in terms of accumulated exposure to the characteristic. The strips are manufactured in a semiconductor technology so as to generate accurate sensors that behave predictably.

3. 发明申请

WO2011073837A1 LIQUID IMMERSION SENSOR 审中-公开
标题翻译：液体浸入式传感器
公开(公告)号：WO2011073837A1
公开(公告)日：2011-06-23
申请号：PCT/IB2010/055480
申请日：2010-11-29
申请人： NXP B.V. , HUMBERT, Aurelie , MERZ, Matthias , DAAMEN, Roel , PONOMAREV, Youri Victorovitch
发明人： HUMBERT, Aurelie , MERZ, Matthias , DAAMEN, Roel , PONOMAREV, Youri Victorovitch
IPC分类号： G01N27/04
CPC分类号： G01N27/041 , G01N27/048
摘要： Disclosed is a liquid immersion sensor comprising a substrate (10) carrying a conductive sensing element (20) and a corrosive agent (30) for corroding the conductive sensing element, said corrosive agent being immobilized in the vicinity of the conductive sensing element and being soluble in said liquid.
摘要翻译：公开了一种液浸传感器，其包括承载导电感测元件（20）的基底（10）和用于腐蚀导电感测元件的腐蚀剂（30），所述腐蚀剂固定在导电感测元件附近并且是可溶的在所述液体中。

4. 发明申请

WO2010023611A1 ELECTROCHEMICAL POTENTIOMETRIC SENSING WITHOUT REFERENCE ELECTRODE 审中-公开
标题翻译：无参考电极的电化学电位感测
公开(公告)号：WO2010023611A1
公开(公告)日：2010-03-04
申请号：PCT/IB2009/053710
申请日：2009-08-24
申请人： NXP B.V. , MERZ, Matthias , PONOMAREV, Youri, V. , CURATOLA, Gilberto
发明人： MERZ, Matthias , PONOMAREV, Youri, V. , CURATOLA, Gilberto
IPC分类号： G01N27/403 , G01N27/333 , G01N27/414
CPC分类号： G01N27/4148 , G01N27/4145
摘要： The invention relates to a method of determining a charged particle concentration in an analyte (100), the method comprising steps of: i) determining at least two measurement points of a surface-potential versus interface-temperature curve (c1, c2, c3, c4), wherein the interface temperature is obtained from a temperature difference between a first interface between a first ion-sensitive dielectric (Fsd) and the analyte (100) and a second interface between a second ion-sensitive dielectric (Ssd) and the analyte (100), and wherein the surface-potential is obtained from a potential difference between a first electrode (Fe) and a second electrode (Se) onto which said first ion-sensitive dielectric (Fsd) and said second ion-sensitive dielectric (Ssd) are respectively provided, And ii) calculating the charged particle concentration from locations of the at least two measurement points of said curve (c1, c2, c3, c4). This method, which still is a potentiometric electrochemical measurement, exploits the temperature dependency of a surface-potential of an ion-sensitive dielectric in an analyte. The invention further provides an electrochemical sensor for determining a charged particle concentration in an analyte. The invention also provides various sensors which can be used to determine the charged particle concentration, i.e. EGFET’s and EIS capacitors.
摘要翻译：本发明涉及一种测定分析物（100）中带电粒子浓度的方法，所述方法包括以下步骤：i）确定表面电位对界面温度曲线（c1，c2，c3，c3）的至少两个测量点， c4），其中界面温度是从第一离子敏感介质（Fsd）和分析物（100）之间的第一界面与第二离子敏感介质（Ssd）和分析物之间的第二界面（100），并且其中所述表面电位由所述第一离子敏感电介质（Fsd）和所述第二离子敏感电介质（Ssd）上的第一电极（Fe）和第二电极（Se）之间的电位差获得，），和ii）从所述曲线（c1，c2，c3，c4）的至少两个测量点的位置计算带电粒子浓度。这种仍然是电位电化学测量的方法利用分析物中离子敏感电介质的表面电位的温度依赖性。本发明还提供了一种用于测定分析物中带电粒子浓度的电化学传感器。本发明还提供可用于确定带电粒子浓度的各种传感器，即EGFET和EIS电容器。

5. 发明申请

WO2010020912A1 APPARATUS AND METHOD FOR MOLECULE DETECTION USING NANOPORES 审中-公开
标题翻译：使用纳米分子检测的装置和方法
公开(公告)号：WO2010020912A1
公开(公告)日：2010-02-25
申请号：PCT/IB2009/053560
申请日：2009-08-12
申请人： NXP B.V. , MERZ, Matthias
发明人： MERZ, Matthias
IPC分类号： G01N33/487 , H01L23/498
CPC分类号： G01N33/48721 , H01L2924/0002 , H01L2924/00
摘要： A detector device : a source region (S), a drain region (D) and a gate contact (100) on a substrate (104), with a channel region between the source and drain regions (S, D), an insulator layer over the substrate, comprising vias (140, 142, 144) filled with conductor material, wherein the vias (140, 142, 144) are provided over the source, drain regions and a gate contact, an additional via (152) through the insulator layer, defining a first chamber leading to a first side of the channel region, a nanopore etched from this first chamber through the channel region, and connecting the first chamber to a second chamber, a drive means (60) for providing a voltage bias between the two chambers, a drive means for providing a voltage between the source and drain regions and gate, a current sensor (64) for sensing a charge flow between the source and the drain regions.
摘要翻译：检测器装置：在源极和漏极区域（S，D）之间具有沟道区域的衬底（104）上的源极区（S），漏极区（D）和栅极接触（100），绝缘体层在衬底上，包括填充有导体材料的通孔（140,142,144），其中通孔（140,142,144）设置在源极，漏极区域和栅极接触之上，通过绝缘体的附加通孔（152）层，限定通向通道区域的第一侧的第一室，从该第一室通过沟道区蚀刻的纳米孔，以及将第一室连接到第二室;驱动装置（60），用于在两个腔室，用于在源极和漏极区域和栅极之间提供电压的驱动装置，用于感测源极和漏极区域之间的电荷流的电流传感器（64）。

6. 发明申请

WO2010001277A1 CHIP INTEGRATED ION SENSOR 审中-公开
标题翻译：芯片集成离子传感器
公开(公告)号：WO2010001277A1
公开(公告)日：2010-01-07
申请号：PCT/IB2009/052072
申请日：2009-05-19
申请人： NXP B.V. , MERZ, Matthias
发明人： MERZ, Matthias
IPC分类号： G01N27/414
CPC分类号： G01N27/227
摘要： A chip integrated ion sensor is provided, which comprises a substrate having arranged thereon an electrolyte insulator semiconductor structure and a reference electrode. In particular, the electrolyte insulator semiconductor (EIS) structure may be formed on a chip already processed, i.e. the EIS structure may be formed in a Back End process on an already formed chip comprising a plurality of formed electronic components. In particular, the ion sensor may be adapted to form an ion concentration sensor, e.g. a pH sensor, i.e. may form a pH sensor. The reference electrode may be a non-polarizable electrode. In particular, the reference electrode may comprise Ag or AgCl as material.
摘要翻译：提供一种芯片集成离子传感器，其包括其上布置有电解质绝缘体半导体结构和参考电极的基板。特别地，可以在已经处理的芯片上形成电解绝缘体半导体（EIS）结构，即EIS结构可以在已经形成的包括多个形成的电子部件的芯片的后端工艺中形成。特别地，离子传感器可以适于形成离子浓度传感器，例如， pH传感器，即可形成pH传感器。参考电极可以是非极化电极。特别地，参考电极可以包括Ag或AgCl作为材料。

7. 发明申请

WO2008132643A1 APPARATUS AND METHOD FOR MOLECULE DETECTION USING NANOPORES 审中-公开
标题翻译：使用纳米分子检测的装置和方法
公开(公告)号：WO2008132643A1
公开(公告)日：2008-11-06
申请号：PCT/IB2008/051438
申请日：2008-04-15
申请人： NXP B.V. , MERZ, Matthias , PONOMAREV, Youri, V. , CURATOLA, Gilberto
发明人： MERZ, Matthias , PONOMAREV, Youri, V. , CURATOLA, Gilberto
IPC分类号： C12Q1/68 , G01N27/414 , G01N15/12
CPC分类号： G01N33/48721 , C12Q1/6869 , G01N27/414 , C12Q2565/631
摘要： A detector device comprises a substrate (50), a source region (S) and a drain region (D), and a channel region (65) between the source and drain regions. A nanopore (54) passes through the channel region, and connects fluid chambers (56,58) on opposite sides of the substrate. A voltage bias is provided between the fluid chambers,the source and drain regions and a charge flow between the source and drain regions is sensed. The device uses a nanopore for the confinement of a sample under test (for example nucleotides) close to a sensor. The size of the sensor can be made similar to the spacing of adjacent nucleotides in a DNA strand. In this way, the disadvantages of PCR based techniques for DNA sequencing are avoided, and single nucleotide resolution can be attained.
摘要翻译：检测器装置包括衬底（50），源区（S）和漏区（D），以及在源区和漏区之间的沟道区（65）。纳米孔（54）穿过沟道区域，并且连接在衬底的相对侧上的流体室（56,58）。在流体室，源极和漏极区之间提供电压偏置，并且感测源区和漏区之间的电荷流。该装置使用纳米孔来限制待测样品（例如核苷酸）靠近传感器。可以使传感器的尺寸与DNA链中相邻核苷酸的间隔相似。以这种方式，避免了基于PCR的DNA测序技术的缺点，可以实现单核苷酸分辨率。

8. 发明申请

WO2010029507A1 SENSOR HAS COMBINED IN-PLANE AND PARALLEL-PLANE CONFIGURATION 审中-公开
标题翻译：传感器组合在平面和平行平面配置中
公开(公告)号：WO2010029507A1
公开(公告)日：2010-03-18
申请号：PCT/IB2009/053959
申请日：2009-09-10
申请人： NXP B.V. , HUMBERT, Aurelie , MERZ, Matthias
发明人： HUMBERT, Aurelie , MERZ, Matthias
IPC分类号： G01N27/02 , G01N27/22
CPC分类号： G01N27/223
摘要： A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.
摘要翻译：传感器感测传感器环境的物理参数的大小。传感器具有第一和第二电极以及它们之间的材料层。该材料具有电性能，例如电容或电阻，其值取决于物理参数的大小。第一电极形成在第一层中，并且第二电极形成在与第一层不同的第二层中。第一层在沟槽旁边具有沟槽和高度。沟槽具有底壁和侧壁。材料位于底壁和侧壁上以及高度的顶部。沟槽容纳至少一部分第二电极。第二个电极离开了形成在高程顶部的材料。

9. 发明申请

WO2010023610A1 ELECTROCHEMICAL POTENTIOMETRIC SENSING 审中-公开
标题翻译：电化学电位感测
公开(公告)号：WO2010023610A1
公开(公告)日：2010-03-04
申请号：PCT/IB2009/053709
申请日：2009-08-24
申请人： NXP B.V. , MERZ, Matthias
发明人： MERZ, Matthias
IPC分类号： G01N27/333 , G01N27/414
CPC分类号： G01N27/4148 , G01N27/4145
摘要： The invention relates to a method of determining a charged particle concentration in an analyte (100), the method comprising steps of: i) determining at least two measurement points of a surface-potential versus interface-temperature curve (c1, c2, c3, c4), wherein the interface temperature is defined as a temperature of the interface between a measurement electrode and the analyte (100), wherein the surface-potential is defined at the interface, and ii) calculating the charged particle concentration from locations of the at least two measurement points of said curve (c1, c2, c3, c4).This method, which still is a potentiometric electrochemical measurement, exploits the temperature dependency of a surface-potential of a measurement electrode. The invention further provides an electrochemical sensor and electrochemical sensor system for determining a charged particle concentration in an analyte. The invention also provides various sensors which can be used to determine the charged particle concentration, i.e. EGFET's and EIS capacitors.
摘要翻译：本发明涉及一种测定分析物（100）中带电粒子浓度的方法，所述方法包括以下步骤：i）确定表面电位对界面温度曲线（c1，c2，c3，c3）的至少两个测量点， c4），其中所述界面温度定义为测量电极和所述分析物（100）之间的界面的温度，其中所述界面处限定所述表面电位，以及ii）从所述界面处的位置计算所述带电粒子浓度所述曲线（c1，c2，c3，c4）的至少两个测量点。仍然是电位电化学测量的该方法利用测量电极的表面电位的温度依赖性。本发明还提供了用于确定分析物中带电粒子浓度的电化学传感器和电化学传感器系统。本发明还提供可用于确定带电粒子浓度的各种传感器，即EGFET和EIS电容器。

10. 发明申请

WO2011064622A1 A DEVICE HAVING A CORROSION DETECTION FUNCTION AND A METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：具有腐蚀检测功能的装置及其制造方法
公开(公告)号：WO2011064622A1
公开(公告)日：2011-06-03
申请号：PCT/IB2009/055393
申请日：2009-11-27
申请人： NXP B.V. , HUMBERT, Aurelie , LAMBERT, Magali , PONOMAREV, Youri,Victorovitch , MERZ, Matthias , HOOFMAN, Romano
发明人： HUMBERT, Aurelie , LAMBERT, Magali , PONOMAREV, Youri,Victorovitch , MERZ, Matthias , HOOFMAN, Romano
IPC分类号： G01D5/34 , G01M11/08 , G01N17/00 , G01N17/04
CPC分类号： G01N17/04 , G01D5/34 , G01N21/774 , G01N2021/7773
摘要： A device (100) comprising a substrate (102) having a corrodible material, a grating (104) formed on and/or in the substrate (102), an electromagnetic radiation source (106) formed on and/or in the substrate (102) and adapted for directing an electromagnetic radiation beam (108) onto the grating (104), an electromagnetic radiation detector (110) formed on and/or in the substrate (102) and adapted for detecting the electromagnetic radiation beam (108) after interaction with the grating (104), and an evaluation unit (112) formed on and/or in the substrate (100) and adapted for evaluating a corrosion state of the corrodible material based on the detected electromagnetic radiation beam (108).
摘要翻译：一种包括具有可腐蚀材料的衬底（102），形成在衬底（102）上和/或衬底（102）中的光栅（104）的器件（100），形成在衬底（102）和/或衬底（102）上的电磁辐射源）并且适于将电磁辐射束（108）引导到光栅（104）上，电磁辐射检测器（110）形成在衬底（102）上和/或衬底（102）上并且适于在相互作用之后检测电磁辐射束（108）与所述光栅（104）和形成在所述基板（100）上和/或所述基板（100）中并且适于基于所检测的电磁辐射束（108）评估所述可腐蚀材料的腐蚀状态的评估单元（112）。

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