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1. 发明申请

WO2010077865A2 DEFECT DETECTION AND RESPONSE 审中-公开
标题翻译：缺陷检测和响应
公开(公告)号：WO2010077865A2
公开(公告)日：2010-07-08
申请号：PCT/US2009068060
申请日：2009-12-15
申请人： KLA TENCOR CORP , ZHAO GUOHENG , ZAPALAC GEORGE H , NGAI SAMUEL S H , VAEZ-IRAVANI MEHDI , LEVY ADY , DHARMADHIKARI VINEET
发明人： ZHAO GUOHENG , ZAPALAC GEORGE H , NGAI SAMUEL S H , VAEZ-IRAVANI MEHDI , LEVY ADY , DHARMADHIKARI VINEET
IPC分类号： H01L21/66 , H01L31/042
CPC分类号： G06T7/001 , G01N25/72 , G02F1/1309 , G06T2207/10048 , G06T2207/30148
摘要： To increase inspection throughput, the field of view of an infrared camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation can be provided to the sample and infrared images can be captured using the infrared camera. Moving the field of view, providing the modulation, and capturing the infrared images can be synchronized. The infrared images can be filtered to generate the time delay lock-in thermography, thereby providing defect identification. This filtering can account for the number of pixels of the infrared camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the field of view throughout the moving, thereby providing an improved signal-to-noise ratio during filtering. Localized defects can be repaired by a laser integrated into the detection system or marked by ink for later repair in the production line.
摘要翻译：为了提高检查吞吐量，红外摄像机的视野可以以恒定的速度移动到样品上。在整个移动过程中，可以向样品提供调制，并可以使用红外摄像机捕获红外图像。可以同步移动视野，提供调制和捕获红外图像。可以对红外图像进行滤波以产生延时锁定热成像，从而提供缺陷识别。该过滤可以解释红外摄像机在扫描方向上的像素数。对于光调制的情况，可以在整个移动期间为视场提供暗场区域，从而在滤波期间提供改善的信噪比。局部缺陷可以通过集成到检测系统中的激光器或由墨水标记来修复，以便在生产线中进行后续修复。

2. 发明申请

WO2012138460A2 LED SOLAR ILLUMINATOR 审中-公开
标题翻译： LED太阳能照明灯
公开(公告)号：WO2012138460A2
公开(公告)日：2012-10-11
申请号：PCT/US2012028910
申请日：2012-03-13
申请人： KLA TENCOR CORP , ZHAO GUOHENG , LEVY ADY , SALNIK ALEX , VAEZ-IRAVANI MEHDI , NICOLAIDES LENA , NGAI SAMUEL S H
发明人： ZHAO GUOHENG , LEVY ADY , SALNIK ALEX , VAEZ-IRAVANI MEHDI , NICOLAIDES LENA , NGAI SAMUEL S H
IPC分类号： G01N21/01 , F21S2/00 , F21V8/00 , G01R31/26
CPC分类号： H05B33/0803
摘要： An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.
摘要翻译：一种用于照射目标表面的装置，该装置具有多个LED阵列，其中每个阵列具有多个独立可寻址的LED，并且其中至少一个阵列以大约四十五度之间的角度设置并且相对于目标表面大约九十度，其中所有阵列将光提供到光管中，光管具有由反射材料制成的内壁，其中离开光管的光照射目标表面，以及用于调节的控制器独立寻址光源的强度。

3. 发明申请

WO2009137706A3 IN-SITU DIFFERENTIAL SPECTROSCOPY 审中-公开
标题翻译：现场差异光谱
公开(公告)号：WO2009137706A3
公开(公告)日：2010-02-25
申请号：PCT/US2009043185
申请日：2009-05-07
申请人： KLA TENCOR CORP , VAEZ-IRAVANI MEHDI , NASSER GHODSI MEHRAN , ZHAO GUOHENG
发明人： VAEZ-IRAVANI MEHDI , NASSER GHODSI MEHRAN , ZHAO GUOHENG
IPC分类号： G01J3/00 , G01J3/42
CPC分类号： H01J37/244 , G01N2223/079 , G01N2223/086 , G01N2223/33 , H01J37/256 , H01J2237/24495 , H01J2237/2511 , H01J2237/2807
摘要： A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array.
摘要翻译：具有用于产生针对样品的电子束的电子束发生器的光谱仪。电子束定位器将电子束引导到样品的位置，从而产生来自样品的二次发射流，其中二次发射流包括电子和X射线中的至少一个。二次发射流定位器将二次发射流定位在检测器阵列上，检测器阵列接收二次发射流并检测二次发射流的量和接收位置。调制器调制被引导到样品上的电子束，从而在样品上的第一位置和第二位置之间扫描电子束。提取器与调制器和检测器阵列进行信号通信。

4. 发明申请

WO2009111407A3 MULTI-SPOT SCANNING SYSTEM AND METHOD 审中-公开
标题翻译：多点扫描系统和方法
公开(公告)号：WO2009111407A3
公开(公告)日：2009-11-26
申请号：PCT/US2009035749
申请日：2009-03-02
申请人： KLA TENCOR CORP , ZHAO GUOHENG , RUNYON REX , VAEZ-IRAVANI MEHDI
发明人： ZHAO GUOHENG , RUNYON REX , VAEZ-IRAVANI MEHDI
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2201/10 , G01N2201/104 , G02B26/123 , Y10S359/90
摘要： A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This 'delay and fill' scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.
摘要翻译：使用在点之间具有预定间隙的点阵列的多点扫描技术可以有利地为大量点提供可缩放性以及消除信道之间的串扰。多点扫描技术可以为点阵列（1D或2D）选择多个点，确定点之间的分隔以最小化串扰，并且使用点阵列和全视场在晶片上执行扫描（ FOV）。执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。这种“延迟和填充”扫描允许点之间具有大的间距，从而消除检测器平面处的串扰。在一个实施例中，扫描在晶片上的期望扫描区域之外开始并结束，以确保全扫描覆盖。

5. 发明申请

WO2012082501A2 WAFER INSPECTION 审中-公开
标题翻译：波浪检查
公开(公告)号：WO2012082501A2
公开(公告)日：2012-06-21
申请号：PCT/US2011063849
申请日：2011-12-07
申请人： KLA TENCOR CORP , ZHAO GUOHENG , LEONG JENN-KUEN , VAEZ-IRAVANI MEHDI
发明人： ZHAO GUOHENG , LEONG JENN-KUEN , VAEZ-IRAVANI MEHDI
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/8806 , G01N2201/06113 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Systems and methods for inspecting a wafer are provided.
摘要翻译：提供了用于检查晶片的系统和方法。

6. 发明申请

WO9914575B1 IMPROVED SAMPLE INSPECTION SYSTEM 审中-公开
标题翻译：改进的样品检测系统
公开(公告)号：WO9914575B1
公开(公告)日：1999-06-03
申请号：PCT/US9819564
申请日：1998-09-18
申请人： KLA TENCOR CORP , VAEZ IRAVANI MEHDI , STOKOWSKI STANLEY , ZHAO GUOHENG
发明人： VAEZ-IRAVANI MEHDI , STOKOWSKI STANLEY , ZHAO GUOHENG
IPC分类号： G01N21/956 , G01J3/44 , G01N21/00 , G01N21/21 , G01N21/47 , G01N21/88 , G01N21/94 , G01N21/95 , H01L21/66 , G01B11/24 , G01N21/86
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors (78) to restrict detection to certain azimuthal angles.
摘要翻译：使用弯曲镜像表面（78）来收集由样本表面（76a）散射并且源自正常照明光束（70）和斜向照明光束（90）的辐射。所收集的辐射被聚焦到检测器（80）。通过采用两个不同波长的辐射，通过有意地在由两个光束照射的光点之间引入偏移或者通过将正常照明光束和倾斜照明光束（70,90）切换到其上，并且通过使用两个不同波长的辐射来区分源自正常照明光束和倾斜照明光束的散射辐射交替关闭。可以通过检测倾斜照明光束的镜面反射并响应于此改变照明方向来校正由样本高度变化引起的光束位置误差。蝴蝶形空间滤波器可以与曲面镜辐射收集器（78）结合使用，以将检测限制在某些方位角。

7. 发明申请

WO2005065246A3 ILLUMINATION APPARATUS AND METHODS 审中-公开
标题翻译：照明装置和方法
公开(公告)号：WO2005065246A3
公开(公告)日：2006-01-05
申请号：PCT/US2004043129
申请日：2004-12-17
申请人： KLA TENCOR TECH CORP , VAEZ-IRAVANI MEHDI , ZHAO GUOHENG , STOWKOWSKI STANLEY E
发明人： VAEZ-IRAVANI MEHDI , ZHAO GUOHENG , STOWKOWSKI STANLEY E
IPC分类号： G02B6/00 , G02B6/04 , G02B6/32 , G02B27/48
CPC分类号： G02B27/48 , G02B6/0001 , G02B6/04
摘要： Disclosed are apparatus and methods for illuminating a sample,
摘要翻译：公开了用于照亮样品的装置和方法，

8. 发明申请

WO2009151984A3 REFERENCED INSPECTION DEVICE 审中-公开
标题翻译：参考检验设备
公开(公告)号：WO2009151984A3
公开(公告)日：2010-03-18
申请号：PCT/US2009045704
申请日：2009-05-29
申请人： KLA TENCOR CORP , DOYLE PAUL , ZHAO GUOHENG , BELYAEV ALEXANDER , RUNYON J REX
发明人： DOYLE PAUL , ZHAO GUOHENG , BELYAEV ALEXANDER , RUNYON J REX
IPC分类号： H01L21/66
CPC分类号： H01L21/6838
摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
摘要翻译：一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

9. 发明申请

WO0146684A9 IN-SITU METALIZATION MONITORING USING EDDY CURRENT MEASUREMENTS AND OPTICAL MEASUREMENTS 审中-公开
标题翻译：使用EDDY电流测量和光学测量的现场金属化监测
公开(公告)号：WO0146684A9
公开(公告)日：2002-05-23
申请号：PCT/US0035358
申请日：2000-12-22
申请人： KLA TENCOR CORP , LEHMAN KURT R , LEE SHING M , JOHNSON WALT , FIELDEN JOHN , ZHAO GUOHENG , NIKOONAHAD MEHRDAD
发明人： LEHMAN KURT R , LEE SHING M , JOHNSON WALT , FIELDEN JOHN , ZHAO GUOHENG , NIKOONAHAD MEHRDAD
IPC分类号： G01B7/06 , B24B37/013 , B24B49/10 , G01B7/00 , G01B11/06 , G01N27/72
CPC分类号： B24B37/013 , B24B49/105 , G01N27/72
摘要： Disclosed is a method of obtaining information in-situ regarding a film of a sample using an eddy probe during a process for removing the film. The eddy probe has at least one sensing coil. An AC voltage is applied to the sensing coil(s) of the eddy probe. One or more first signals are measured in the sensing coil(s) of the eddy probe when the sensing coil(s) are positioned proximate the film of the sample. One or more second signals are measured in the sensing coil(s) of the eddy probe when the sensing coil(s) are positioned proximate to a reference material having a fixed composition and/or distance from the sensing coil. The first signals are calibrated based on the second signals so that undesired gain and/or phase changes within the first signals are corrected. A property value of the film is determined based on the calibrated first signals. An apparatus for performing the above described method is also disclosed. Additionally, a chemical mechanical polishing (CMP) system for polishing a sample with a polishing agent and monitoring the sample is disclosed. The CMP system includes a polishing table, a sample carrier arranged to hold the sample over the polishing table, and an eddy probe.
摘要翻译：公开了一种在除去膜的过程中使用涡流探针在原位获取样品的膜的方法。涡流探头具有至少一个感测线圈。交流电压被施加到涡流探头的感测线圈上。当感测线圈靠近样品的膜定位时，在涡流探针的感测线圈中测量一个或多个第一信号。当感测线圈靠近具有与感测线圈的固定成分和/或距离的参考材料定位时，在涡流探针的感测线圈中测量一个或多个第二信号。第一信号基于第二信号进行校准，从而校正第一信号内的不期望的增益和/或相位变化。基于校准的第一信号确定胶片的属性值。还公开了一种用于执行上述方法的装置。此外，公开了一种用抛光剂抛光样品并监测样品的化学机械抛光（CMP）系统。 CMP系统包括抛光台，布置成将样品保持在抛光台上的样品载体和涡流探针。

10. 发明申请

WO2012112616A3 COMPOSITE POLARIZER WITH ADJUSTABLE POLARIZATION ANGLES 审中-公开
标题翻译：具有可调极化角度的复合极化器
公开(公告)号：WO2012112616A3
公开(公告)日：2012-11-15
申请号：PCT/US2012025130
申请日：2012-02-14
申请人： KLA TENCOR CORP , ZHAO GUOHENG
发明人： ZHAO GUOHENG
IPC分类号： G02B5/30 , G01N21/88
CPC分类号： G02B27/286 , G01N21/21 , G01N21/8806 , G01N21/9501 , G01N2021/8848 , G02B5/3066 , G02B27/283
摘要： An adjustable, composite polarizer can include first and second plate polarizers and an adjusting apparatus. The adjusting apparatus can adjust a pitch angle and a roll angle for the first and second plate polarizers while maintaining a predetermined, minimal distance between those plates. In this configuration, the adjustable, composite polarizer can provide mirror symmetric polarization with respect to an incident plane while providing the flexibility of any polarization.
摘要翻译：可调节的复合偏振器可以包括第一和第二板偏振器和调节装置。调节装置可以在保持这些板之间预定的最小距离的同时，调整第一和第二板偏振器的俯仰角和滚动角。在这种配置中，可调整的复合偏振器可以提供相对于入射平面的镜对称极化，同时提供任何偏振的柔性。

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