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1. 发明申请

WO2008043079A2 SYSTEMS AND METHODS FOR DETECTION AND CLASSIFICATION OF WATERBORNE PARTICLES USING A MULTIPLE ANGLE LIGHT SCATTERING (MALS) INSTRUMENT 审中-公开
标题翻译：使用多角度散射仪（MALS）仪器检测和分类水波粒子的系统和方法
公开(公告)号：WO2008043079A2
公开(公告)日：2008-04-10
申请号：PCT/US2007/080609
申请日：2007-10-05
申请人： JMAR TECHNOLOGIES, INC. , ADAMS, John, A. , CROUSORE, Kristina, M. , TETERS, Cherish, K. , HEMBERG, Oscar
发明人： ADAMS, John, A. , CROUSORE, Kristina, M. , TETERS, Cherish, K. , HEMBERG, Oscar
IPC分类号： G01N21/00
CPC分类号： G01N15/147 , G01N15/1429 , G01N15/1459 , G01N15/1475 , G01N21/53 , G01N2015/0088 , G01N2015/1477 , G01N2015/1486 , G01N2015/1488 , G01N2015/1497
摘要： A particle detection system to identify and classify particles is programmed to capture digitized images of the particle generated by directing a light source through a fluid that includes the particle. The particle scatters the light and the scattered light is detected using a detector. The detector creates a digital signal corresponding to the particle, which is used by the system to generate biological optical signal. This biological optical signal can then be used to classify the event, or particle.
摘要翻译：用于识别和分类粒子的粒子检测系统被编程以捕获通过将光源引导通过包括粒子的流体而产生的粒子的数字化图像。颗粒散射光，并使用检测器检测散射光。检测器产生对应于粒子的数字信号，该数字信号被系统用于生成生物光信号。然后可以将该生物学光信号用于对事件或粒子进行分类。

2. 发明申请

WO2006135902A2 SYSTEMS AND METHODS FOR A MULTIPLE ANGLE LIGHT SCATTERING (MALS) INSTRUMENT HAVING TWO-DIMENSIONAL DECTECTOR ARRAY 审中-公开
标题翻译：用于具有两维分辨率阵列的多角度散射（MALS）仪器的系统和方法
公开(公告)号：WO2006135902A2
公开(公告)日：2006-12-21
申请号：PCT/US2006/023043
申请日：2006-06-13
申请人： JMAR RESEARCH, INC. , ADAMS, John, A. , BLOOM, Scott, H. , CHAN, Victor, J. , CROUSORE, Kristina, M. , GOTTLIEB, Joseph, S. , HEMBERG, Oscar , LYON, John, J. , SPIVEY, Brett, A.
发明人： ADAMS, John, A. , BLOOM, Scott, H. , CHAN, Victor, J. , CROUSORE, Kristina, M. , GOTTLIEB, Joseph, S. , HEMBERG, Oscar , LYON, John, J. , SPIVEY, Brett, A.
IPC分类号： G01N15/02
CPC分类号： G01N15/1463 , G01N15/1434 , G01N15/1459 , G01N15/147 , G01N15/1475 , G01N33/1893 , G01N2015/0088
摘要： A particle detection system uses a reflective optic comprising a curved surface to detect high angle scattered light generated by a particle in a liquid medium, when a laser beam is incident on the particle. When the particles transit the laser beam, light is scattered in all directions and is described by MIE scattering theory for particles about the size of the wavelength of light and larger or Rayleigh Scattering when the particles are smaller than the wavelength of light. By using the reflective optic, the scattered light can be detected over angles that are greater than normally obtainable.
摘要翻译：当激光束入射到粒子上时，粒子检测系统使用包括弯曲表面的反射光学器件来检测由液体介质中的粒子产生的高角散射光。当粒子通过激光束时，光在所有方向上散射，并且当颗粒小于光的波长时，通过MIE散射理论对关于光的波长大小或Rayleigh散射的粒子的粒子进行描述。通过使用反射光学元件，可以在大于通常可获得的角度上检测散射光。

3. 发明申请

WO2010112048A1 SUPPLY OF A LIQUID-METAL TARGET IN X-RAY GENERATION 审中-公开
标题翻译：在X射线发生中液体金属目标的供应
公开(公告)号：WO2010112048A1
公开(公告)日：2010-10-07
申请号：PCT/EP2009/002464
申请日：2009-04-03
申请人： EXCILLUM AB , HEMBERG, Oscar , TUOHIMAA, Tomi , OTENDAL, Mikael
发明人： HEMBERG, Oscar , TUOHIMAA, Tomi , OTENDAL, Mikael
IPC分类号： H01J35/08
CPC分类号： H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008
摘要： Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump (312). The pressurized liquid metal is then conducted to a nozzle (332) and ejected into a vacuum chamber (330) in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir (334), and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump (322), suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.
摘要翻译：提出了用于将液体金属提供到电子束将冲击液态金属以产生X射线的相互作用区域的闭环循环。在根据本发明的方法中，使用高压泵（312）将液态金属的压力升高至至少10巴。然后将加压液体金属传导到喷嘴（332）并以空间连续射流的形式喷射到真空室（330）中。在通过真空室之后，将液态金属收集在收集容器（334）中，并且液态金属的压力升高到入口压力，例如压力。使用底漆泵（322），适用于高压泵的入口。本发明还涉及具有这种循环系统的相应的循环系统和X射线源。

4. 发明申请

WO2012087238A1 ALIGNING AND FOCUSING AN ELECTRON BEAM IN AN X-RAY SOURCE 审中-公开
标题翻译：在X射线源中对准和聚焦电子束
公开(公告)号：WO2012087238A1
公开(公告)日：2012-06-28
申请号：PCT/SE2011/051557
申请日：2011-12-21
申请人： EXCILLUM AB , SUNDMAN, Björn , TUOHIMAA, Tomi , HEMBERG, Oscar
发明人： SUNDMAN, Björn , TUOHIMAA, Tomi , HEMBERG, Oscar
IPC分类号： H01J35/14 , H01J35/08
CPC分类号： H01J35/14 , H01J35/08 , H01J2235/082 , H05G1/52
摘要： The invention provides a technique for indirectly measuring the degree of alignment of a beam in an electron-optical system comprising aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practised in connection with an X-ray source which is operable to produce an X-ray target, the invention further proposes a technique for determining and controlling a width of an electron-beam at its intersection point with the target.
摘要翻译：本发明提供一种用于间接测量包括对准装置，聚焦装置和偏转装置的电子 - 光学系统中的光束对准程度的技术。为了进行测量，可以使用简单的传感器，即使是单元件传感器，只要它具有明确的空间范围。当与可操作以产生X射线靶的X射线源相结合实施时，本发明还提出了一种用于确定和控制电子束在与靶的交点处的宽度的技术。

5. 发明申请

WO2006093687A1 METHOD AND APPARATUS FOR EUV LIGHT SOURCE TARGET MATERIAL HANDLING 审中-公开
标题翻译： EUV光源目标材料处理方法与装置
公开(公告)号：WO2006093687A1
公开(公告)日：2006-09-08
申请号：PCT/US2006/005541
申请日：2006-02-17
申请人： CYMER, INC. , ALGOTS, John, Martin , HEMBERG, Oscar , CHUNG, Tae, H.
发明人： ALGOTS, John, Martin , HEMBERG, Oscar , CHUNG, Tae, H.
IPC分类号： H01J35/20 , G21K5/10
CPC分类号： H05G2/003 , H05G2/005 , H05G2/006 , H05G2/008
摘要： An EUV light source plasma source material handling system and method is disclosed which may comprise a droplet generator having droplet generator plasma source material reservoir (212) in fluid communication with a droplet formation capillary and maintained within a selected range of temperatures sufficient to keep the plasma source material in a liquid form; a plasma source material supply system having a supply reservoir (214) in fluid communication with the droplet generator plasma source material reservoir and holding at least a replenishing amount of plasma source material in liquid form for transfer to the droplet generator plasma source material reservoir, while the droplet generator is on line; a transfer mechanism (210) transferring liquid plasma source material from the supply reservoir to the droplet generator plasma source material reservoir, while the droplet generator is on line. The supply reservoir may comprise a solid form of the plasma source material used to periodically form from a portion of the material in solid form the material in liquid form.
摘要翻译：公开了一种EUV光源等离子体源材料处理系统和方法，其可以包括具有与液滴形成毛细管流体连通的液滴发生器等离子体源材料储存器（212）的液滴发生器，并保持在足以保持等离子体的温度的选定范围内液体形式的原料; 等离子体源材料供应系统，其具有与液滴发生器等离子体源材料储存器流体连通的供给储存器（214），并且至少保持液体形式的补充量的等离子体源材料以转移到液滴发生器等离子体源材料储存器，同时液滴发生器在线; 当液滴发生器在线时，传送机构（210）将液体等离子体源材料从供应储存器传送到液滴发生器等离子体源材料储存器。供应储存器可以包括固体形式的等离子体源材料，其用于从液体形式的固体形式的固体形式的一部分周期性地形成。

6. 发明申请

WO2013185829A1 LIMITING MIGRATION OF TARGET MATERIAL 审中-公开
标题翻译：限制目标材料的移动
公开(公告)号：WO2013185829A1
公开(公告)日：2013-12-19
申请号：PCT/EP2012/061352
申请日：2012-06-14
申请人： EXCILLUM AB , HEMBERG, Oscar , TUOHIMAA, Tomi , TAKMAN, Per
发明人： HEMBERG, Oscar , TUOHIMAA, Tomi , TAKMAN, Per
IPC分类号： G21K5/04 , H01J35/04
CPC分类号： H01J29/62 , G21K1/08 , G21K5/04 , H01J35/04 , H01J35/08 , H01J35/14 , H01J2235/082 , H01J2235/16
摘要： In an electron irradiation system (1), a gas-tight housing (60) encloses a cathode region (10) and an irradiation region (20), which communicate through at least an aperture (22). In the cathode region, there is arranged a high-voltage cathode (11) for emitting an electron beam. In the irradiation region, there is an irradiation site (21) arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field (E) designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.
摘要翻译：在电子照射系统（1）中，气密壳体（60）包围通过至少一个孔（22）连通的阴极区域（10）和照射区域（20）。在阴极区域设置有用于发射电子束的高电压阴极（11）。在照射区域中，设有用于容纳被照射的静止或移动物体的照射部位（21）。阴极降解碎屑的迁移通过设计成防止带正电荷的颗粒经由孔径进入阴极区域的电场（E）来限制。本发明可以用实现能量阈值的轴向电场或使带电粒子偏离导入阴极区域的轨迹的横向场来实现。

7. 发明申请

WO2006093693A3 METHOD AND APPARATUS FOR EUV PLASMA SOURCE TARGET DELIVERY 审中-公开
公开(公告)号：WO2006093693A3
公开(公告)日：2006-09-08
申请号：PCT/US2006/005647
申请日：2006-02-17
申请人： CYMER, INC. , ALGOTS, John Martin , FOMENKOV, Igor V. , ERSHOV, Alexander I. , PARTLO, William N. , SANDSTROM, Richard L. , HEMBERG, Oscar , BYKANOV, Alexander N. , COBB, Dennis W.
发明人： ALGOTS, John Martin , FOMENKOV, Igor V. , ERSHOV, Alexander I. , PARTLO, William N. , SANDSTROM, Richard L. , HEMBERG, Oscar , BYKANOV, Alexander N. , COBB, Dennis W.
IPC分类号： H05G2/00 , G21G5/00 , G21G4/00
摘要： An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.

8. 发明申请

WO2010083854A1 X-RAY WINDOW 审中-公开
公开(公告)号：WO2010083854A1
公开(公告)日：2010-07-29
申请号：PCT/EP2009/000481
申请日：2009-01-26
申请人： EXCILLUM AB , HERTZ, Hans , HEMBERG, Oscar , TUOHIMAA, Tomi , OTENDAL, Mikael
发明人： HERTZ, Hans , HEMBERG, Oscar , TUOHIMAA, Tomi , OTENDAL, Mikael
IPC分类号： H05G2/00 , G21K1/02
CPC分类号： H01J35/18 , G21K1/02 , H01J2235/082
摘要： A self-cleaning X-ray window arrangement includes a primary X-ray- transparent window element, separating an ambient pressure region from an intermediate region, and a secondary X-ray-transparent window element, separating the intermediate region from a reduced pressure region. A contaminant is expected to deposit on a side of the secondary element facing the reduced pressure region. A heat source is adapted to heat a portion of the secondary window element for thereby evaporating contaminant. The secondary element shields the primary element from the reduced pressure region, in which contaminant is present, whereas the pressure-tight primary window element carries most of the differential pressure between the ambient pressure region and the reduced pressure region. Several features of the invention help to decrease the rate at which contaminant enters the intermediate region. By maintaining the pressure in the intermediate region close to the reduced pressure, the mechanical stress on the secondary window element can be limited as well as the exposure to harmful gases.
摘要翻译：自清洁X射线窗口装置包括：初级X射线透明窗口元件，将环境压力区域与中间区域分开;以及次X射线透明窗口元件，将中间区域与减压区域分离。预期污染物沉积在面向减压区域的次级元件的一侧上。热源适于加热次窗口元件的一部分，从而蒸发污染物。次要元件将主要元件从存在污染物的减压区域屏蔽，而压力密封的主窗口元件承载环境压力区域和减压区域之间的大部分差压。本发明的几个特征有助于降低污染物进入中间区域的速率。通过保持接近减压的中间区域的压力，可以限制次窗口元件上的机械应力以及暴露于有害气体。

9. 发明申请

WO2003096764A1 METHOD AND ARRANGEMENT FOR PRODUCING RADIATION 审中-公开
标题翻译：生产辐射的方法和装置
公开(公告)号：WO2003096764A1
公开(公告)日：2003-11-20
申请号：PCT/EP2003/004984
申请日：2003-05-13
申请人： JETTEC AB , BERGLUND, Magnus , HANSSON, Björn , HEMBERG, Oscar , HERTZ, Hans , RYMELL, Lars
发明人： BERGLUND, Magnus , HANSSON, Björn , HEMBERG, Oscar , HERTZ, Hans , RYMELL, Lars
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/008
摘要： A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of (210) generating a primary target by urging a liquid under pressure through a nozzle; (220) directing an energy pre-pulse onto the primary target to generate a secondary target in the form of a gas or plasma cloud; (230) allowing the thus formed sec ondary target to expand for a predetermined period of time; and (240) directing a main energy pulse onto the secondary target when the predetermined period of time has elapsed in order to produce a plasma radiating X-ray or EW radiation. The pre-pulse has a beam waist size that is larger, in at least one dimension, than the corresponding dimension of the primary target.
摘要翻译：公开了一种产生具有增加的通量稳定性和均匀性的辐射等离子体的方法。该方法包括以下步骤：（210）通过在压力下迫使液体通过喷嘴产生主要目标; （220）将能量预脉冲引导到主要靶上以产生气体或等离子体云的形式的次要靶; （230），允许如此形成的第二目标扩展预定时间段; 以及（240）当经过预定时间段时，将主能脉冲引导到次目标上，以产生等离子体辐射X射线或EW辐射。预脉冲具有比主要目标的对应尺寸更大的至少一个维度的束腰尺寸。

10. 发明申请

WO2013178251A1 COATED X-RAY WINDOW 审中-公开
标题翻译：涂层X射线窗口
公开(公告)号：WO2013178251A1
公开(公告)日：2013-12-05
申请号：PCT/EP2012/060042
申请日：2012-05-29
申请人： EXCILLUM AB , TUOHIMAA, Tomi , HEMBERG, Oscar
发明人： TUOHIMAA, Tomi , HEMBERG, Oscar
IPC分类号： H01J35/18
CPC分类号： H01J35/18 , H01J35/025 , H05G1/02
摘要： An X-ray window comprises a primary (22) and a secondary window element (72, 74, 76). In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the secondary window element via a charge-drain layer (76). To prevent large debris particles from short-circuiting the secondary window element, the current for heating the window element flows through heating circuitry (72) which is electrically insulated from the charge- drain layer.
摘要翻译： X射线窗口包括初级（22）和次级窗口元件（72,74,76）。为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。同时，源自电子照射和/或沉积带电粒子的电荷将通过电荷 - 漏极层（76）从次窗口元件排出。为了防止大的碎屑颗粒使次窗口元件短路，用于加热窗口元件的电流流过与电荷 - 漏极层电绝缘的加热电路（72）。

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