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1. 发明申请

WO2010112048A1 SUPPLY OF A LIQUID-METAL TARGET IN X-RAY GENERATION 审中-公开
标题翻译：在X射线发生中液体金属目标的供应
公开(公告)号：WO2010112048A1
公开(公告)日：2010-10-07
申请号：PCT/EP2009/002464
申请日：2009-04-03
申请人： EXCILLUM AB , HEMBERG, Oscar , TUOHIMAA, Tomi , OTENDAL, Mikael
发明人： HEMBERG, Oscar , TUOHIMAA, Tomi , OTENDAL, Mikael
IPC分类号： H01J35/08
CPC分类号： H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008
摘要： Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump (312). The pressurized liquid metal is then conducted to a nozzle (332) and ejected into a vacuum chamber (330) in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir (334), and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump (322), suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.
摘要翻译：提出了用于将液体金属提供到电子束将冲击液态金属以产生X射线的相互作用区域的闭环循环。在根据本发明的方法中，使用高压泵（312）将液态金属的压力升高至至少10巴。然后将加压液体金属传导到喷嘴（332）并以空间连续射流的形式喷射到真空室（330）中。在通过真空室之后，将液态金属收集在收集容器（334）中，并且液态金属的压力升高到入口压力，例如压力。使用底漆泵（322），适用于高压泵的入口。本发明还涉及具有这种循环系统的相应的循环系统和X射线源。

2. 发明申请

WO2010083854A1 X-RAY WINDOW 审中-公开
公开(公告)号：WO2010083854A1
公开(公告)日：2010-07-29
申请号：PCT/EP2009/000481
申请日：2009-01-26
申请人： EXCILLUM AB , HERTZ, Hans , HEMBERG, Oscar , TUOHIMAA, Tomi , OTENDAL, Mikael
发明人： HERTZ, Hans , HEMBERG, Oscar , TUOHIMAA, Tomi , OTENDAL, Mikael
IPC分类号： H05G2/00 , G21K1/02
CPC分类号： H01J35/18 , G21K1/02 , H01J2235/082
摘要： A self-cleaning X-ray window arrangement includes a primary X-ray- transparent window element, separating an ambient pressure region from an intermediate region, and a secondary X-ray-transparent window element, separating the intermediate region from a reduced pressure region. A contaminant is expected to deposit on a side of the secondary element facing the reduced pressure region. A heat source is adapted to heat a portion of the secondary window element for thereby evaporating contaminant. The secondary element shields the primary element from the reduced pressure region, in which contaminant is present, whereas the pressure-tight primary window element carries most of the differential pressure between the ambient pressure region and the reduced pressure region. Several features of the invention help to decrease the rate at which contaminant enters the intermediate region. By maintaining the pressure in the intermediate region close to the reduced pressure, the mechanical stress on the secondary window element can be limited as well as the exposure to harmful gases.
摘要翻译：自清洁X射线窗口装置包括：初级X射线透明窗口元件，将环境压力区域与中间区域分开;以及次X射线透明窗口元件，将中间区域与减压区域分离。预期污染物沉积在面向减压区域的次级元件的一侧上。热源适于加热次窗口元件的一部分，从而蒸发污染物。次要元件将主要元件从存在污染物的减压区域屏蔽，而压力密封的主窗口元件承载环境压力区域和减压区域之间的大部分差压。本发明的几个特征有助于降低污染物进入中间区域的速率。通过保持接近减压的中间区域的压力，可以限制次窗口元件上的机械应力以及暴露于有害气体。

3. 发明申请

WO2012087238A1 ALIGNING AND FOCUSING AN ELECTRON BEAM IN AN X-RAY SOURCE 审中-公开
标题翻译：在X射线源中对准和聚焦电子束
公开(公告)号：WO2012087238A1
公开(公告)日：2012-06-28
申请号：PCT/SE2011/051557
申请日：2011-12-21
申请人： EXCILLUM AB , SUNDMAN, Björn , TUOHIMAA, Tomi , HEMBERG, Oscar
发明人： SUNDMAN, Björn , TUOHIMAA, Tomi , HEMBERG, Oscar
IPC分类号： H01J35/14 , H01J35/08
CPC分类号： H01J35/14 , H01J35/08 , H01J2235/082 , H05G1/52
摘要： The invention provides a technique for indirectly measuring the degree of alignment of a beam in an electron-optical system comprising aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practised in connection with an X-ray source which is operable to produce an X-ray target, the invention further proposes a technique for determining and controlling a width of an electron-beam at its intersection point with the target.
摘要翻译：本发明提供一种用于间接测量包括对准装置，聚焦装置和偏转装置的电子 - 光学系统中的光束对准程度的技术。为了进行测量，可以使用简单的传感器，即使是单元件传感器，只要它具有明确的空间范围。当与可操作以产生X射线靶的X射线源相结合实施时，本发明还提出了一种用于确定和控制电子束在与靶的交点处的宽度的技术。

4. 发明申请

WO2013178251A1 COATED X-RAY WINDOW 审中-公开
标题翻译：涂层X射线窗口
公开(公告)号：WO2013178251A1
公开(公告)日：2013-12-05
申请号：PCT/EP2012/060042
申请日：2012-05-29
申请人： EXCILLUM AB , TUOHIMAA, Tomi , HEMBERG, Oscar
发明人： TUOHIMAA, Tomi , HEMBERG, Oscar
IPC分类号： H01J35/18
CPC分类号： H01J35/18 , H01J35/025 , H05G1/02
摘要： An X-ray window comprises a primary (22) and a secondary window element (72, 74, 76). In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the secondary window element via a charge-drain layer (76). To prevent large debris particles from short-circuiting the secondary window element, the current for heating the window element flows through heating circuitry (72) which is electrically insulated from the charge- drain layer.
摘要翻译： X射线窗口包括初级（22）和次级窗口元件（72,74,76）。为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。同时，源自电子照射和/或沉积带电粒子的电荷将通过电荷 - 漏极层（76）从次窗口元件排出。为了防止大的碎屑颗粒使次窗口元件短路，用于加热窗口元件的电流流过与电荷 - 漏极层电绝缘的加热电路（72）。

5. 发明申请

WO2012072146A1 COATED X-RAY WINDOW 审中-公开
标题翻译：涂层X射线窗口
公开(公告)号：WO2012072146A1
公开(公告)日：2012-06-07
申请号：PCT/EP2010/068843
申请日：2010-12-03
申请人： EXCILLUM AB , HEMBERG, Oscar , TUOHIMAA, Tomi
发明人： HEMBERG, Oscar , TUOHIMAA, Tomi
IPC分类号： H01J35/18
CPC分类号： H01J35/18 , H01J35/00 , H01J35/02 , H01J35/025 , H01J35/08 , H01J2235/082 , H01J2235/168 , H01J2235/183 , H05G1/08
摘要： An X-ray window comprises a primary (22) and a secondary (70) window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the window element. To prevent large debris particles from short-circuiting the window element and changing the desired heating pattern, the current for heating the window element flows through a layer (72) which is insulated from the charge-drain layer (76).
摘要翻译： X射线窗口包括初级（22）和次级（70）窗口元件。为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。同时，从电子照射和/或沉积带电粒子的电荷被排出窗口元件。为了防止大的碎屑颗粒使窗元件短路并改变期望的加热模式，用于加热窗口元件的电流流过与电荷 - 漏极层（76）绝缘的层（72）。

6. 发明申请

WO2013185829A1 LIMITING MIGRATION OF TARGET MATERIAL 审中-公开
标题翻译：限制目标材料的移动
公开(公告)号：WO2013185829A1
公开(公告)日：2013-12-19
申请号：PCT/EP2012/061352
申请日：2012-06-14
申请人： EXCILLUM AB , HEMBERG, Oscar , TUOHIMAA, Tomi , TAKMAN, Per
发明人： HEMBERG, Oscar , TUOHIMAA, Tomi , TAKMAN, Per
IPC分类号： G21K5/04 , H01J35/04
CPC分类号： H01J29/62 , G21K1/08 , G21K5/04 , H01J35/04 , H01J35/08 , H01J35/14 , H01J2235/082 , H01J2235/16
摘要： In an electron irradiation system (1), a gas-tight housing (60) encloses a cathode region (10) and an irradiation region (20), which communicate through at least an aperture (22). In the cathode region, there is arranged a high-voltage cathode (11) for emitting an electron beam. In the irradiation region, there is an irradiation site (21) arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field (E) designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.
摘要翻译：在电子照射系统（1）中，气密壳体（60）包围通过至少一个孔（22）连通的阴极区域（10）和照射区域（20）。在阴极区域设置有用于发射电子束的高电压阴极（11）。在照射区域中，设有用于容纳被照射的静止或移动物体的照射部位（21）。阴极降解碎屑的迁移通过设计成防止带正电荷的颗粒经由孔径进入阴极区域的电场（E）来限制。本发明可以用实现能量阈值的轴向电场或使带电粒子偏离导入阴极区域的轨迹的横向场来实现。

7. 发明申请

WO2007133144A1 DEBRIS REDUCTION IN ELECTRON-IMPACT X-RAY SOURCES 审中-公开
标题翻译：电子冲击X射线源的减少损耗
公开(公告)号：WO2007133144A1
公开(公告)日：2007-11-22
申请号：PCT/SE2007/000448
申请日：2007-05-08
申请人： JETTEC AB , HERTZ, Hans, M. , OTENDAL, Mikael , TUOHIMAA, Tomi
发明人： HERTZ, Hans, M. , OTENDAL, Mikael , TUOHIMAA, Tomi
IPC分类号： H01J35/08 , H05G2/00
CPC分类号： H01J35/08 , G21K2207/005 , H01J2235/082 , H05G2/005
摘要： A method for generating x-ray radiation, comprising the steps of forming a target jet by urging a liquid substance under pressure through an outlet opening, the target jet propagating through an area of interaction; and directing at least one electron beam onto the target jet in the area of interaction such that the electron beam interacts with the target jet to generate x-ray radiation; wherein the full width at half maximum of the electron beam in the transverse direction of the target jet is about 50% or less of the target jet transverse dimension. A system for carrying out the method is also disclosed.
摘要翻译：一种用于产生x射线辐射的方法，包括以下步骤：通过在压力下通过出口开启液体物质形成目标射流，所述目标射流通过相互作用区域传播; 并且在相互作用的区域中将至少一个电子束引导到目标射流上，使得电子束与目标射流相互作用以产生x射线辐射; 其中电子束在目标射流的横向方向上的半个最大宽度为靶射流横向尺寸的约50％或更小。还公开了一种用于执行该方法的系统。

8. 发明申请

WO2021099202A1 CHARACTERIZATION OF AN ELECTRON BEAM 审中-公开
公开(公告)号：WO2021099202A1
公开(公告)日：2021-05-27
申请号：PCT/EP2020/081854
申请日：2020-11-12
申请人： EXCILLUM AB
发明人： TAKMAN, Per , TUOHIMAA, Tomi , LUNDSTRÖM, Ulf
IPC分类号： H01J35/14 , H05G1/52
摘要： A method for characterizing an electron beam in a liquid metal jet X-ray source is disclosed. The method comprises providing said electron beam and directing said electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving said electron beam after it has traversed said interaction region; scanning said electron beam over at least part of said interaction region; measuring X-ray radiation generated by interaction between said electron beam and said electron beam dump during said scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on said X-ray profile. A corresponding liquid metal jet X-ray source is also disclosed.

9. 发明申请

WO2018073375A1 STRUCTURED X-RAY TARGET 审中-公开
标题翻译：结构化的X射线靶
公开(公告)号：WO2018073375A1
公开(公告)日：2018-04-26
申请号：PCT/EP2017/076770
申请日：2017-10-19
申请人： EXCILLUM AB
发明人： TUOHIMAA, Tomi , TAKMAN, Per , SOFIIENKO, Andrii
IPC分类号： H01J35/30 , H01J35/14 , H01J35/08
摘要： A system and method for generating X-ray radiation is disclosed. The system comprises an electron source (200) operable to generate an electron beam (I) and an X-ray target (100) for generating X-ray radiation upon interaction with the electron beam. The method comprises moving the electron beam over an edge separating a first region (110) and a second region (120) of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.
摘要翻译：公开了用于产生X射线辐射的系统和方法。该系统包括可操作以产生电子束（I）的电子源（200）和用于在与电子束相互作用时产生X射线辐射的X射线靶（100）。该方法包括使电子束在将X射线靶的第一区域（110）和第二区域（120）分开的边缘上移动，其中第一区域和第二区域在相互作用时具有不同的产生X射线辐射的能力与电子束。该系统允许基于指示电子束与第一区域之间以及电子束与第二区域之间的相互作用的量的变化来确定电子束的横向延伸，并且电子束的移动

10. 发明申请

WO2017149006A1 LIQUID TARGET X-RAY SOURCE WITH JET MIXING TOOL 审中-公开
标题翻译：液体目标X射线源与喷射混合工具
公开(公告)号：WO2017149006A1
公开(公告)日：2017-09-08
申请号：PCT/EP2017/054752
申请日：2017-03-01
申请人： EXCILLUM AB
发明人： HANSSON, Björn , TUOHIMAA, Tomi , JOHANSSON, Göran
IPC分类号： H01J35/08
摘要： An X-ray source (100) and a corresponding method for generating X-ray radiation are disclosed. The X-ray source comprises a target generator (110), an electron source (120) and a mixing tool (130). The target generator is adapted to form a liquid jet (112) propagating through an interaction region (I), whereas the electron source is adapted to provide an electron beam (122) directed towards the interaction region such that the electron beam interacts with the liquid jet to generate X-ray radiation (124). The mixing tool is adapted to induce mixing of the liquid jet at a distance downstream of the interaction region such that a maximum surface temperature (T max ) of the liquid jet is below a threshold temperature. By controlling the maximum surface temperature, vaporisation, and thus the amount of contaminations originating from the jet, may be reduced.
摘要翻译：公开了一种用于产生X射线辐射的X射线源（100）和相应的方法。该X射线源包括目标发生器（110），电子源（120）和混合工具（130）。目标发生器适于形成通过相互作用区域（I）传播的液体射流（112），而电子源适于提供指向相互作用区域的电子束（122），使得电子束与液体以产生X射线辐射（124）。混合工具适于在相互作用区域下游的一定距离引起液体射流的混合，使得液体射流的最大表面温度（T max）低于阈值温度。通过控制最高表面温度，可以减少汽化，从而减少来自射流的污染物的量。

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