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    • 6. 发明申请
    • SILICON PHOTONICS PHOTODETECTOR INTEGRATION
    • 硅光电照相机整合
    • WO2014107504A1
    • 2014-07-10
    • PCT/US2014/010064
    • 2014-01-02
    • INTERNATIONAL BUSINESS MACHINES CORPORATION
    • ASSEFA, SolomonKHATER, Marwan, H.KIEWRA, Edward, W.SHANK, Steven, M.
    • H01L21/00H01S5/026
    • H01L33/52G06F17/5068H01L27/14
    • A method of forming an integrated photonic semiconductor structure having a photonic device and adjacent CMOS devices may include depositing a first silicon nitride layer over the adjacent CMOS devices and depositing an oxide layer over the first silicon nitride layer, wherein the oxide layer conformally covers the first silicon nitride layer and the underlying adjacent CMOS devices to form a substantially planarized surface over the adjacent CMOS devices. A second silicon nitride layer is then deposited over the oxide layer and a region corresponding to forming the photonic device. A germanium layer is deposited over the oxide layer and the region corresponding to forming the photonic device. The germanium layer deposited over the adjacent CMOS devices is etched to form a germanium active layer within the photonic region, whereby the oxide layer and the second silicon nitride layer protect the adjacent CMOS devices during the etching of the germanium.
    • 形成具有光子器件和相邻CMOS器件的集成光子半导体结构的方法可以包括在相邻的CMOS器件上沉积第一氮化硅层并在第一氮化硅层上沉积氧化物层,其中氧化物层保形地覆盖第一 氮化硅层和下面的相邻CMOS器件,以在相邻的CMOS器件上形成基本平坦化的表面。 然后在氧化物层上沉积第二氮化硅层和对应于形成光子器件的区域。 在氧化物层和对应于形成光子器件的区域上沉积锗层。 蚀刻沉积在相邻CMOS器件上的锗层,以在光子区域内形成锗有源层,由此在蚀刻锗期间,氧化物层和第二氮化硅层保护相邻的CMOS器件。
    • 7. 发明申请
    • DIGITAL OPTICAL SWITCH
    • 数字光开关
    • WO2010052089A1
    • 2010-05-14
    • PCT/EP2009/063107
    • 2009-10-08
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONVAN CAMPENHOUT, JorisVLASOV, YuriiASSEFA, SolomonKIM, Young-HeeGREEN, William, Michael
    • VAN CAMPENHOUT, JorisVLASOV, YuriiASSEFA, SolomonKIM, Young-HeeGREEN, William, Michael
    • G02F1/225G02F1/313
    • G02F1/3136G02F1/2257G02F2001/0151G02F2001/311
    • An optical switch includes a plurality of optical interferometric structures (10,20,30,90) serially connected between at least one optical input node (101) and two optical output nodes (199, 299). A primary waveguide (100) directly connects an optical input node (101) and a first optical output node (199). A complementary waveguide (200), which is directly connected to a second optical output node (299), is evanescently coupled with the primary waveguide (100) in a pair of optically coupled sections (18,28,38,98) provided in each optical interferometric structure. Each optical interferometric structure also includes a pair of decoupled sections (12,22,32,92), which includes a primary decoupled section (112,122,132,192) embedding a portion of the primary waveguide (100) and a complementary decoupled section (212,222,232,292) which includes a portion of the complementary waveguide (200). The complementary decoupled section is embedded in a phase tuning structure (13,23,33,93) that allows modulation of the phase of the optical signal passing through. The phase tuning structure can be a PIN diode or a heater. The optical switch provides less insertion loss, less crosstalk, and wider bandwidth than prior art optical switches.
    • 光开关包括串联连接在至少一个光输入节点(101)和两个光输出节点(199,299)之间的多个光干涉结构(10,20,30,90)。 初级波导(100)直接连接光输入节点(101)和第一光输出节点(199)。 直接连接到第二光输出节点(299)的互补波导(200)与主波导(100)瞬时耦合在一对光耦合部分(18,28,38,98)中,每对光耦合部分 光学干涉结构。 每个光学干涉测量结构还包括一对解耦部分(12,22,32,92),其包括嵌入主波导(100)的一部分的初级去耦部分(112,122,132,192)和互补解耦部分(212,222,232,292),其包括 互补波导(200)的一部分。 互补解耦部分嵌入在允许调制通过的光信号的相位的相位调谐结构(13,23,33,93)中。 相位调谐结构可以是PIN二极管或加热器。 与现有技术的光开关相比,光开关提供较少的插入损耗,较少的串扰和更宽的带宽。