会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明申请
    • METHODS OF FORMING A MULTI-DOPED JUNCTION WITH SILICON-CONTAINING PARTICLES
    • 用含硅颗粒形成多层结的方法
    • WO2011091409A8
    • 2012-08-23
    • PCT/US2011022377
    • 2011-01-25
    • INNOVALIGHT INCSCARDERA GIUSEPPEKAN SHIHAIKELMAN MAXIMPOPLAVSKYY DMITRY
    • SCARDERA GIUSEPPEKAN SHIHAIKELMAN MAXIMPOPLAVSKYY DMITRY
    • H01L21/22H01L21/38
    • H01L21/2255H01L31/022425H01L31/068H01L31/1804Y02E10/547Y02P70/521
    • A method of forming a multi-doped junction on a substrate is disclosed. The method includes providing the substrate doped with boron atoms, the substrate comprising a front substrate surface. The method further includes depositing an ink on the front substrate surface in a ink pattern, the ink comprising a set of silicon-containing particles and a set of solvents. The method also includes heating the substrate in a baking ambient to a first temperature and for a first time period in order to create a densified film ink pattern. The method further includes exposing the substrate to a dopant source in a diffusion furnace with a deposition ambient, the deposition ambient comprising POCI3, a carrier N2 gas, a main N2 gas, and a reactive O2 gas at a second temperature and for a second time period, wherein a PSG layer is formed on the front substrate surface and on the densified film ink pattern; and heating the substrate in a drive-in ambient to a third temperature; wherein a first diffused region with a first sheet resistance is formed under the front substrate surface covered by the densified film ink pattern, and a second diffused region with a second sheet resistance is formed under the front substrate surface not covered with the densified film ink pattern, and wherein the first sheet resistance is substantially smaller than the second sheet resistance.
    • 公开了一种在衬底上形成多掺杂结的方法。 该方法包括提供掺杂有硼原子的衬底,该衬底包括前衬底表面。 该方法还包括以油墨图案在前基板表面上沉积油墨,该油墨包括一组含硅颗粒和一组溶剂。 该方法还包括将烘烤环境中的基材加热到第一温度并在第一时间段内,以便产生致密的薄膜油墨图案。 该方法还包括将基底暴露于具有沉积环境的扩散炉中的掺杂剂源,沉积环境包括POCI3,载体N2气体,主N 2气体和在第二温度下的反应性O 2气体,并且第二次 其中在前基板表面和致密薄膜墨图案上形成PSG层; 以及将驱动环境中的衬底加热至第三温度; 其特征在于,在被所述致密膜油墨图案覆盖的前面基板表面的下方形成有具有第一薄层电阻的第一扩散区域,在未被所述致密化薄膜墨水图案覆盖的所述前面基板表面的下方形成具有第二薄层电阻的第二扩散区域 ,并且其中所述第一薄层电阻基本上小于所述第二薄层电阻。