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    • 4. 发明申请
    • COLD CATHODE PRESSURE SENSOR
    • 冷阴极压力传感器
    • WO2006094927A3
    • 2007-05-03
    • PCT/EP2006060397
    • 2006-03-02
    • INFICON GMBHWETZIG DANIELGERDAU LUDOLF
    • WETZIG DANIELGERDAU LUDOLF
    • H01J41/06
    • G01L21/34H01J41/06
    • A cold cathode pressure sensor (10) comprises a gas-tight housing (12), a test gas inlet (18), an anode (14) and a cathode (16, 17) arranged in the housing (12), and a radiation source (20) directed towards the cathode (16, 17) in order to ignite a cold cathode discharge. The housing (12) is at least in part made of glass. The radiation source (20) is arranged outside the housing (12) and irradiates the cathode (16, 17) through the glass which makes up the housing. The wavelength of the radiation from the radiation source (20) ranges substantially from more than 350 nm to less than 1400 nm.
    • 本发明涉及一种冷阴极压力传感器(10)与气密壳体(12),具有一个标定气体入口(18),阳极(14)和在壳体(12)的阴极(16,17)和一个 涉及用于点亮冷阴极放电的阴极(16,17)的辐射源(20)。 所述壳体(12)至少部分地由玻璃形成。 所述辐射源(20)布置在所述壳体(12)的外侧,并通过在阴极(16,17)的外壳玻璃辐射。 所述辐射源(20)发射辐射基本上波长大于350nm且小于1400纳米更长。