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    • 4. 发明申请
    • TEST GAS LEAKAGE DETECTOR
    • 测试气体泄漏检测
    • WO1996024828A1
    • 1996-08-15
    • PCT/EP1995005079
    • 1995-12-21
    • LEYBOLD AKTIENGESELLSCHAFTBÖHM, ThomasWIDT, Rudi
    • LEYBOLD AKTIENGESELLSCHAFT
    • G01M03/20
    • G01M3/202
    • The invention concerns a test gas leakage detector (1) with an inlet (2), a detector (3) in the form of a mass spectrometer, a first friction pump stage (5) which is driven in counter-flow, a second friction pump stage (7), an intermediate connection (6) between the first and second friction pump stages, a pre-vacuum pump (8), a first connection line (13) which can be shut off between the leakage detector inlet (2) and the inlet side (9) of the pre-vacuum pump (8), and with a second line (15) which can be shut off between the leakage detector inlet (2) and the intermediate connection (6). In order to detect leaks without using oil, the pre-vacuum pump (8) is a diaphragm pump. In order to shorten the response time, it is advantageous if the conductance of the connection line (15) between the inlet (2) of the leakage detector (1) and the intermediate inlet (6) is adjustable.
    • 本发明涉及一种测试气体泄漏检测器(1)具有入口(2),具有设计为质谱仪检测器(3),具有在逆流第一摩擦泵级(5)操作时,与第二摩擦泵级(7),与中间端子( 6)(第一和第二摩擦泵级之间(与前级泵8)(与第一,可关闭的连接线13)的泄漏检测器的入口2)和所述入口侧(9)之间的前 - 真空泵(8)和具有第二, 泄漏检测器的入口(2)和所述中间连接之间可关闭线(15)(6); 使无油泄漏检测中,提出的是,预真空泵(8)是隔膜泵。 为了实现更短的响应时间,这是有利的,关于它的导电性的泄漏检测器(1)的入口(2)和中间入口(6)之间的连接线(15)是可控的。