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    • 1. 发明申请
    • HYDROGEN SENSOR
    • 氢传感器
    • WO2010149519A3
    • 2011-11-17
    • PCT/EP2010058308
    • 2010-06-14
    • INFICON GMBHWETZIG DANIEL
    • WETZIG DANIEL
    • G01N7/10
    • G01N15/00
    • A hydrogen sensor comprises a housing (10), which is closed off by a membrane (14) that is made of palladium and selectively only pervious to hydrogen. The housing is evacuated and contains a Pirani pressure sensor (22). The membrane (14) and the Pirani pressure sensor (22) are each attached to a carrier (11, 12). Both carriers are joined directly next to one another or kept at a distance by a connection piece (25). The hydrogen sensor has a high sensitivity and a low response time due to the relatively large membrane surface and the low housing volume. It can be produced in a small size and integrated in the handle of a sniffer-type leak indicator.
    • 一种氢传感器包括由一仅选择性氢气可渗透膜(14)由钯的封闭的壳体(10)。 外壳抽真空并包含一个皮拉尼压力传感器(22)。 所述膜(14)和所述压力皮拉尼传感器(22)是在载体上的(11,12)的每个。 两个支承件直接地或通过在保持一定距离的连接件(25)彼此接合。 氢传感器具有高的灵敏度并且由于相对较大的膜表面和低壳体的容积,低响应时间的。 它的尺寸小,以产生和可以被集成到一个嗅探检漏器的手柄。
    • 2. 发明申请
    • COLD CATHODE PRESSURE SENSOR
    • 冷阴极压力传感器
    • WO2006094927A3
    • 2007-05-03
    • PCT/EP2006060397
    • 2006-03-02
    • INFICON GMBHWETZIG DANIELGERDAU LUDOLF
    • WETZIG DANIELGERDAU LUDOLF
    • H01J41/06
    • G01L21/34H01J41/06
    • A cold cathode pressure sensor (10) comprises a gas-tight housing (12), a test gas inlet (18), an anode (14) and a cathode (16, 17) arranged in the housing (12), and a radiation source (20) directed towards the cathode (16, 17) in order to ignite a cold cathode discharge. The housing (12) is at least in part made of glass. The radiation source (20) is arranged outside the housing (12) and irradiates the cathode (16, 17) through the glass which makes up the housing. The wavelength of the radiation from the radiation source (20) ranges substantially from more than 350 nm to less than 1400 nm.
    • 本发明涉及一种冷阴极压力传感器(10)与气密壳体(12),具有一个标定气体入口(18),阳极(14)和在壳体(12)的阴极(16,17)和一个 涉及用于点亮冷阴极放电的阴极(16,17)的辐射源(20)。 所述壳体(12)至少部分地由玻璃形成。 所述辐射源(20)布置在所述壳体(12)的外侧,并通过在阴极(16,17)的外壳玻璃辐射。 所述辐射源(20)发射辐射基本上波长大于350nm且小于1400纳米更长。
    • 6. 发明申请
    • SNIFFING LEAK DETECTOR HAVING A MULTI-STAGE DIAPHRAGM PUMP
    • 嗅吸测漏多级隔膜泵
    • WO2015036282A3
    • 2015-05-28
    • PCT/EP2014068582
    • 2014-09-02
    • INFICON GMBH
    • HILGERS HEIKEBRUHNS HJALMARWETZIG DANIELROLFF NORBERT
    • G01M3/20
    • G01M3/205F04D19/046G01L19/0654
    • The invention relates to a sniffing leak detector having a mass spectrometer (12) for analysing hydrogen or helium, a turbomolecular pump (14), which is connected to the mass spectrometer (12) and the outlet (18) of which is connected to a pre-vacuum pump (20), and a sniffing probe, which has a plurality of suction lines (38, 40) and is connected to the inlet (16) of the turbomolecular pump (14), characterised by an at least three-stage vacuum pump (28), the input stage (22) of which forms the pre-vacuum pump (20) and is connected via a blocked throttle (46) to the outlet (18) of the turbomolecular pump (14), wherein an intermediate inlet (34, 36) is provided in each case between adjacent stages (22, 24, 26) of the vacuum pump (28), wherein each intermediate inlet (34, 36) is connected to a different suction line of the sniffing probe, and at least one of the suction lines (38, 40) is connected as an intake line (38) to the inlet (16) of the turbomolecular pump (14) to achieve different gas flows.
    • 用质谱仪(12),用于氢气或氦气,一种与连接到与前级泵(20)的涡轮分子泵(14)和它的出口(18)的质谱仪(12)中的分析的嗅探泄漏检测器连接,并且多个抽吸管线(38,40 ),具有嗅探器探针(用涡轮分子泵(14),其特征在于的入口16)(由至少三个级真空泵28),输入级(22)形成的预真空泵(20)和一个互锁扼流圈(46) 连接到涡轮分子泵(14)的出口(18),其中在每种情况下,真空泵(28)的中间入口(34,36)被提供,每个中间入口(34,36)与相邻级(22,24,26)之间 吸入探针的另一抽吸管线被连接和抽吸线中的至少一个(38,40)和吸入线路(38)连接到涡轮分子泵(14)的入口(16),以实现不同的气体流版本 被防止。