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    • 2. 发明申请
    • COMPENSATING FREQUENCY MISMATCH IN GYROSCOPES
    • 补偿频率误差在晶体中
    • WO2010050967A1
    • 2010-05-06
    • PCT/US2008/081985
    • 2008-10-31
    • HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.ZHANG, WenhuaWALMSLEY, Robert G.
    • ZHANG, WenhuaWALMSLEY, Robert G.
    • G01C19/00G01P9/04
    • G01C19/5755G01C19/574
    • Gyroscopes that can compensate frequency mismatch are provided. In this regard, a representative gyroscope, among others, includes a top substrate comprising an outermost structure, a first driving structure and a first sensing structure. The first driving structure and the first sensing structure are disposed within the outermost structure. The first driving structure and the first sensing structure include a first driving electrode and a first sensing electrode that are disposed on a bottom surface of the first driving structure and first sensing structure, respectively. A portion of the mass on the top surface of the first sensing structure is removed. The gyroscope further includes a bottom substrate that is disposed below the top substrate. The bottom substrate includes a second driving electrode and a second sensing electrode that are disposed on a top surface of the bottom substrate and below the first driving electrode and the first sensing electrode.
    • 提供可以补偿频率不匹配的陀螺仪。 在这方面,代表性陀螺仪其中包括包括最外面结构的顶部基底,第一驱动结构和第一感测结构。 第一驱动结构和第一感测结构设置在最外面的结构内。 第一驱动结构和第一感测结构包括分别设置在第一驱动结构和第一感测结构的底表面上的第一驱动电极和第一感测电极。 去除第一感测结构的顶表面上的质量的一部分。 陀螺仪还包括设置在顶部基板下方的底部基板。 底部基板包括设置在底部基板的顶表面上并且在第一驱动电极和第一感测电极下方的第二驱动电极和第二感测电极。