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    • 2. 发明申请
    • LASER PROCESSING EQUIPMENT
    • 激光加工设备
    • WO2009066918A2
    • 2009-05-28
    • PCT/KR2008/006783
    • 2008-11-18
    • KORNIC SYSTEMS CO., LTD.KIM, Hyun-JungKIM, Dae-JinEOM, Seung-HwanLEE, Kwang-Jae
    • KIM, Hyun-JungKIM, Dae-JinEOM, Seung-HwanLEE, Kwang-Jae
    • H01S3/10
    • B23K26/042
    • Laser processing equipment is provided. The laser beam processing equipment includes a laser resonator, an optical system, a chamber, a reflector, and a laser beam aligning unit. The laser resonator resonates a laser beam. The optical system converts the laser beam resonated by the laser resonator to have an energy density of a beam profile with a predetermined beam width. The laser beam converted by the optical system is radiated onto a processing object disposed in the chamber. The reflector is disposed between the laser resonator and the chamber to reflect the laser beam. The laser beam aligning unit aligns the laser beam radiated into the chamber. The laser beam aligning unit includes an aligning member installed between the reflector and the processing object and disposed in a travel path of the laser beam. The aligning member defines a through-hole that is greater in area than a cross-section of the laser beam to enable the laser beam to pass therethrough. The driver drives the reflector to control the travel path of the laser beam reflected by the reflector. The controller controls the driver to control a distance between a center of the laser beam and a center of the through-hole, based on the laser beam detected as passing through the through-hole of the aligning member.
    • 提供激光加工设备。 激光束处理设备包括激光谐振器,光学系统,腔室,反射器和激光束对准单元。 激光谐振器谐振激光束。 光学系统将由激光谐振器谐振的激光束转换成具有预定光束宽度的光束轮廓的能量密度。 由光学系统转换的激光束照射到设置在腔室中的处理物体上。 反射器设置在激光谐振器和腔室之间以反射激光束。 激光束对准单元对准辐射到腔室中的激光束。 激光束对准单元包括对准构件,该对准构件安装在反射器和处理对象之间并且设置在激光束的行进路径中。 对准构件限定面积比激光束的横截面大的通孔以使激光束能够穿过其中。 驱动器驱动反射器以控制由反射器反射的激光束的行进路径。 控制器控制驱动器基于检测为穿过对准构件的通孔的激光束来控制激光束的中心与通孔的中心之间的距离。

    • 3. 发明申请
    • DEVICE FOR GENERATING HAZE ON A PHOTOMASK
    • 用于在光电子产生烟雾的装置
    • WO2008075841A1
    • 2008-06-26
    • PCT/KR2007/006145
    • 2007-11-30
    • KORNIC SYSTEMS CO. LTD.KIM, Dae-JinGO, Gun-SupKIM, Hyun-JungEOM, Seung-HwanLEE, Kwang-Jae
    • KIM, Dae-JinGO, Gun-SupKIM, Hyun-JungEOM, Seung-HwanLEE, Kwang-Jae
    • H01L21/027
    • G03F1/72
    • Provided is a device for generating haze on a photomask having an improved structure capable of irradiating a laser beam of predetermined energy intensity onto a photomask until haze is generated, accurately obtaining the amount of laser beam energy accumulated on the photomask, and controlling an environment in a process chamber. The haze generating device includes: a laser emission unit for emitting a laser beam; an attenuator for controlling energy intensity of the laser beam; an optical system for processing the laser beam so that the laser beam has a predetermined shape and energy distribution; a process chamber having a window installed at an upper portion thereof and formed of a transparent material, through which the laser beam passes, and a space formed therein to dispose the photomask and fill a process gas, the space being separated from the outside; and an attenuator control unit for controlling the attenuator so that the laser beam of predetermined reference energy intensity is irradiated onto the photomask based on incident energy intensity of a laser beam incident to the window.
    • 本发明提供了一种在光掩模上产生雾度的装置,其具有能够将预定能量强度的激光束照射到光掩模上直到发生浑浊的结构,精确地获得积聚在光掩模上的激光束能量的量并控制环境 处理室。 雾化发生装置包括:激光发射单元,用于发射激光束; 用于控制激光束的能量强度的衰减器; 用于处理激光束的光学系统,使得激光束具有预定的形状和能量分布; 处理室具有安装在其上部的窗口,其由激光束通过的透明材料形成,并且形成在其中的空间以设置光掩模并填充处理气体,该空间与外部分离; 以及衰减器控制单元,用于控制衰减器,使得基于入射到窗口的激光束的入射能量强度,将预定参考能量强度的激光束照射到光掩模上。
    • 4. 发明申请
    • DEVICE FOR GENERATING HAZE ON A PHOTOMASK
    • 用于在光电子产生烟雾的装置
    • WO2008075840A1
    • 2008-06-26
    • PCT/KR2007/006143
    • 2007-11-30
    • KORNIC SYSTEMS CO., LTD.KIM, Dae-JinGO, Gun-SupKIM, Hyun-JungEOM, Seung-HwanLEE, Kwang-Jae
    • KIM, Dae-JinGO, Gun-SupKIM, Hyun-JungEOM, Seung-HwanLEE, Kwang-Jae
    • H01L21/027
    • G03F7/70916G03F1/82G03F7/70525G03F7/70533G03F7/70866
    • Provided is a device for generating haze on a photomask capable of irradiating a laser beam of predetermined energy intensity onto a photomask until haze is generated, obtaining an accurate amount of laser beam energy accumulated on the photomask, and controlling an environment in a process chamber. The haze generating device includes: a laser emission unit; an optical system for processing a laser beam emitted from the laser emission unit so that the laser beam has a predetermined shape and energy distribution; a process chamber having a window installed at an upper portion thereof and formed of a transparent material, through which the laser beam passes, and a space formed therein to dispose the photomask and fill a process gas, the space being separated from the outside; a monitoring unit for monitoring whether haze is generated on the photomask while the laser beam that passes through the optical system transmits the window and is irradiated onto the photomask disposed in the space; a moisture supply unit for supplying the space of the process chamber with moisture; a gas supply unit for supplying a mixture gas, in which one or more kinds of gases are mixed, to the space of the process chamber; a heating unit for increasing temperature in the space of the process chamber; and an environment control unit for controlling the moisture supply unit, the gas supply unit and the heating unit based on humidity, temperature and gas composition ratio in the process chamber so that a reference environment having predetermined reference humidity, temperature and gas composition ratio is formed in the space of the process chamber.
    • 提供了一种用于在光掩模上产生雾度的装置,其能够将预定能量强度的激光束照射到光掩模上直到产生雾度,获得积聚在光掩模上的精确量的激光束能量,并控制处理室中的环境。 雾化发生装置包括:激光发射单元; 用于处理从激光发射单元发射的激光束使得激光束具有预定形状和能量分布的光学系统; 处理室具有安装在其上部的窗口,其由激光束通过的透明材料形成,并且形成在其中的空间以设置光掩模并填充处理气体,该空间与外部分离; 监测单元,用于监测通过所述光学系统的激光束在所述光掩模上产生雾度的情况,并且将所述窗口照射到设置在所述空间中的光掩模上; 用于向处理室的空间供给水分的供水单元; 气体供给单元,其将混合了一种或多种气体的混合气体供给到处理室的空间; 加热单元,用于在处理室的空间中增加温度; 以及环境控制单元,用于基于处理室中的湿度,温度和气体组成比控制湿气供应单元,气体供应单元和加热单元,使得形成具有预定参考湿度,温度和气体组成比的参考环境 在处理室的空间。
    • 7. 发明申请
    • METHOD OF GENERATING PARITY INFORMATION USING LOW DENSITY PARITY CHECK
    • 使用低密度奇偶校验生成奇偶性信息的方法
    • WO2005053213A1
    • 2005-06-09
    • PCT/KR2004/003060
    • 2004-11-25
    • SAMSUNG ELECTRONICS CO., LTD.KIM, Ki-HyunKIM, Hyun-JungLEE, Yoon-Woo
    • KIM, Ki-HyunKIM, Hyun-JungLEE, Yoon-Woo
    • H04L1/00
    • H03M13/2906H03M13/1102H03M13/2903
    • The present invention relates to a method of independently generating row parity information and column parity information in an encoding process using a low density parity check (LDPC) matrix. The method comprises: generating code word vectors by generating column parity information using a parity check matrix and message information; selecting code word bits for generating row parity information among code word bits in the generated code word vectors; and generating the row parity information using the selected code word bits, wherein the selecting of the code word bits comprises: excluding code word bits related to the generation of other row parity information. Accordingly, independent parity information can be generated by generating row parity information on the basis of code word bits without related to generation of column parity information.
    • 本发明涉及在使用低密度奇偶校验(LDPC)矩阵的编码处理中独立生成行奇偶校验信息和列奇偶校验信息的方法。 该方法包括:通过使用奇偶校验矩阵和消息信息生成列奇偶校验信息来生成码字向量; 选择用于在所生成的码字矢量中的码字位之间产生行奇偶校验信息的码字位; 以及使用所选择的码字比特生成行奇偶校验信息,其中码字比特的选择包括:排除与生成其他行奇偶校验信息有关的码字比特。 因此,可以通过基于码字比特生成行奇偶校验信息来生成独立奇偶校验信息,而与生成列奇偶校验信息无关。