专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO9828781A3 LAYER WITH A POROUS LAYER AREA, AN INTERFERENCE FILTER CONTAINING SUCH A LAYER AND A METHOD FOR THE PRODUCTION THEREOF 审中-公开
标题翻译：具有多层的层，包含这种层的干涉滤波器及其生产方法
公开(公告)号：WO9828781A3
公开(公告)日：1999-02-25
申请号：PCT/DE9703006
申请日：1997-12-20
申请人： FORSCHUNGSZENTRUM JUELICH GMBH , BERGER MICHAEL , KRUEGER MICHAEL , THOENISSEN MARKUS , ARENS FISCHER RUEDIGER , LUETH HANS , LANG WALTER , THEISS WOLFGANG , HILBRICH STEFAN
发明人： BERGER MICHAEL , KRUEGER MICHAEL , THOENISSEN MARKUS , ARENS-FISCHER RUEDIGER , LUETH HANS , LANG WALTER , THEISS WOLFGANG , HILBRICH STEFAN
IPC分类号： C25F3/12 , G02B5/20 , G02B5/28 , H01L21/306 , H01L
CPC分类号： H01L21/30604 , C25F3/12 , G02B5/285
摘要： The invention relates to a layer with an area made of a porous material extending from the surface of the layer to the inside of the latter, wherein the dimension of the porous layer area in the direction perpendicular to the surface of the layer exhibits different values. The invention also relates to a method for producing a layer with a porous area or a layer system, wherein said porous layer area is formed by etching and means are used to choose a physical dimension in correlation with the etching speed of the etching process in order to form at least one etching gradient.

2. 发明申请

WO9733147A3 ANALYTIC PROCESS USING POROUS SILICON TO DETECT A SUBSTANCE OR DETERMINE THE CONCENTRATION OF A SUBSTANCE IN SOLUTIONS AS WELL AS AN ANALYTIC DEVICE FOR SUCH A PROCESS 审中-公开
标题翻译：使用多孔硅检测物质的分析方法或确定解决方案中物质的浓度以及作为这种方法的分析装置
公开(公告)号：WO9733147A3
公开(公告)日：1997-10-30
申请号：PCT/DE9700361
申请日：1997-02-28
申请人： FORSCHUNGSZENTRUM JUELICH GMBH , KRUEGER MICHAEL , BERGER MICHAEL , THOENISSEN MARKUS , ARENS FISCHER RUEDIGER , LUETH HANS
发明人： KRUEGER MICHAEL , BERGER MICHAEL , THOENISSEN MARKUS , ARENS-FISCHER RUEDIGER , LUETH HANS
IPC分类号： G01N21/01 , G01N21/41 , G01N21/45 , G01N
CPC分类号： G01N21/41
摘要： In an analytic process using porous silicon, a substance is detected or its concentration in a fluid is determined, based on the change in optical properties of porous silicon as a function of the index of refraction of the substance or of the fluid containing the substance present in the pores of the porous silicon. An analytic device using porous silicon to detect a substance or determe the concentration of a substance in a fluid consists of a component which is at least partly made of porous silicon, the optical property of which is dependent on the index of refraction of the substance or of the fluid containing the substance, where a change in the optical property of porous silicon can be measured to indicate detection of the substance or to determine the concentration in the pores of the porous silicon.

3. 发明申请

WO9733302A2 COLOUR-SELECTIVE Si DETECTOR ARRAY 审中-公开
标题翻译：颜色选择性的Si检测器阵列
公开(公告)号：WO9733302A2
公开(公告)日：1997-09-12
申请号：PCT/DE9700457
申请日：1997-03-08
申请人： FORSCHUNGSZENTRUM JUELICH GMBH , MARSO MICHEL , KRUEGER MICHAEL , BERGER MICHAEL , THOENISSEN MARKUS , LUETH HANS
发明人： MARSO MICHEL , KRUEGER MICHAEL , BERGER MICHAEL , THOENISSEN MARKUS , LUETH HANS
IPC分类号： H01L27/146 , H01L31/0216 , H01L31/11 , H01L
CPC分类号： H01L31/02161 , H01L27/146 , H01L31/1105 , Y10S438/96
摘要： The invention relates to a colour-selective Si detector array. It is attractively simple and cheap to manufacture a photodetector array triggered by line and column while ensuring individual spectral sensitivity for each detector in the array. This simplifies production of an integrated colour camera. The claimed pnp-structure can be used to produce a read-out logic system and an electronic further processing system. It is also possible to apply MOS technology on the substrate.
摘要翻译：本发明涉及一种彩色选择性的Si检测器阵列。有可能在一个非常简单和廉价的方式来使具有行和列状控制的光电检测器阵列和实现对阵列中的每个检测器的个体光谱灵敏度。这就可以很容易制造集成彩色摄像机。本发明的PNP结构可以用来产生读出的逻辑和电子处理。同样，MOS技术的在基材上的执行是可能的。

4. 发明申请

WO9921033A3 ELEMENT COMPRISING A FILTERING STRUCTURE 审中-公开
标题翻译：过滤结构施工组件
公开(公告)号：WO9921033A3
公开(公告)日：1999-06-10
申请号：PCT/DE9803068
申请日：1998-10-20
申请人： FORSCHUNGSZENTRUM JUELICH GMBH , THOENISSEN MARKUS , LERONDEL GILLES , KRUEGER MICHAEL
发明人： THOENISSEN MARKUS , LERONDEL GILLES , KRUEGER MICHAEL
IPC分类号： G02B5/20 , G02B5/28 , H01L27/14 , H01L31/0216 , H01L31/10
CPC分类号： G02B5/285 , H01L31/02165
摘要： The invention relates to a filtering structure (R1, S1, S2) with a layering sequence comprising a number of layers (B1, B2, B3) formed from porous material. A layering sequence or a number of such layering sequences are formed inside a substrate in addition to the first layering sequence and are arranged in a staggered depthwise manner in relation to the first layering sequence. In this filtering structure, it is useful and advantageous that said additional layering sequence(s) perform(s) a filtering function differing from the first layering sequences.
摘要翻译：本发明涉及具有层序列的过滤器结构（R1，S1，S2），所述层序列包含由多孔材料形成的多个层（B1，B2，B3）。在这种情况下，相对于衬底内的第一层序列形成另一层序列或多个另外的这种层序列，并且相对于第一层序列在深度上进行排列。在这种滤波器结构的情况下，该另外的层序列施加与前一层序列不同的滤波器功能也是有利的和有利的。

5. 发明申请

WO2009127275A3 ELECTRODE COMB, MICROMECHANICAL COMPONENT, AND METHODS FOR THE PRODUCTION OF AN ELECTRODE COMB AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：电极的梳，微机械结构和方法的电极的梳和微机械部件
公开(公告)号：WO2009127275A3
公开(公告)日：2010-04-29
申请号：PCT/EP2008067690
申请日：2008-12-17
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： B81B3/00
CPC分类号： B81B3/004 , B81B2201/033 , B81B2201/045 , B81B2203/0136 , G02B26/0841 , H02N1/008
摘要： The invention relates to an electrode comb (52, 54) for a micromechanical component. Said electrode comb (52, 54) is designed such that at least two electrode fingers (52a, 54a) are mounted on a first fastening part (52b, 54b) at a first end while being mounted on a second fastening part (52b, 54b) at a second end lying opposite the first end. The invention additionally relates to a micromechanical component comprising a stator electrode comb (54) and an actuator electrode comb (52) between which a voltage (U) can be applied such that the actuator electrode comb (54) can be rotated about an axis of rotation (56) of the actuator electrode comb (52). The axis of rotation (56) of the actuator electrode comb (52) vertically penetrates at least one surface of an electrode finger (54a) of the stator electrode comb (44, 54). The invention further relates to a method for producing an electrode comb (52, 54) and a method for producing a micromechanical component.
摘要翻译：本发明涉及一种如此形成，使得至少两个电极指（52A，54A）在其第一端的第一附接部（52B，54B）被固定且相对的第一端部用于微机械部件的电极梳（52,54）第二端连接到第二附接部分（52B，54B）附连。此外，本发明涉及一种具有定子电极的梳（54）和致动器的电极的梳（52），在它们之间的电压（U）可应用于微机械部件，其特征在于，由（定子电极的梳54之间施加的电压（U））和致动器的电极的梳（52），致动器的电极的梳（52）（围绕致动器的电极的梳（52的旋转轴线56））是可旋转的，并且其中所述致动器的电极的梳（52）的至少一个表面的旋转（56）的轴线定子电极的梳（44,54）的电极指（54A）垂直地刺穿。此外，本发明涉及一种用于电极的梳（52,54）和用于微机械部件的制造方法的制造方法。

6. 发明申请

WO2009086978A3 PRODUCTION METHOD FOR A MICROMECHANICAL ELECTROSTATIC ADJUSTER DEVICE AND MICROMECHANICAL ELECTROSTATIC ADJUSTER DEVICE 审中-公开
标题翻译： PROCESS微型机械静态修正及MICRO电荷调节
公开(公告)号：WO2009086978A3
公开(公告)日：2010-04-01
申请号：PCT/EP2008065575
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81C1/00
CPC分类号： B81C1/00666 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/019 , B81C1/00166 , B81C2201/0167 , H02N1/002
摘要： The invention relates to a production method for a micromechanical electrostatic adjuster device (10), comprising the steps: application of a first conducting layer (12) to a substrate (28,30), etching the first conducting layer (12) to form at least one first electrode (16) in the material of the first conducting layer (12), application of a separation layer (32a) to the first conducting layer (12), application of a second conducting layer to the separation layer (32a), etching the second conducting layer to form at least one second electrode (22) in the material of the second conducting layer and application of a cover layer (40) to the second electrode (22) and bending the second electrode (22) by means of a mechanical compression load exerted on the second electrode (22) by means of the cover layer (40). The invention further relates to a corresponding micromechanical electrostatic adjuster device.
摘要翻译：本发明涉及一种用于微机械静电调节器（10）的制造方法，包括以下步骤：基部（28,30）上沉积第一导电层（12），蚀刻所述第一导电层（12），用于形成至少一个第一电极（ 16）从第一导电层（12）的材料，在施加第一导电层（12）上的脱模层（32a），其上沉积隔离层（32A）上的第二导电层，蚀刻第二导电层，以形成至少一个从第二导电层的材料，并施加于第二电极（22）的覆盖层（40）和由在第二电极上的覆盖层（40）中的一个的装置的第二电极（22）的弯曲的第二电极（22）（22）施加机械压应力。本发明还涉及一种相应的微机械静电调节器。

7. 发明申请

WO2009127273A3 METHOD FOR THE PRODUCTION OF A MICROMECHANICAL COMPONENT HAVING ELECTRODE UNITS ON TWO PLANES, AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译：用于微机械结构与电极单元两个级别和微机械结构
公开(公告)号：WO2009127273A3
公开(公告)日：2010-05-06
申请号：PCT/EP2008066715
申请日：2008-12-03
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08
CPC分类号： B81C1/00007 , B81B2201/032 , B81B2201/033 , B81B2201/045 , B81B2203/019 , B81C1/00142 , B81C2201/017
摘要： The invention relates to a method for producing a micromechanical component (10), encompassing the following steps: a first electrode unit (14) is formed in a first position relative to a bottom substrate (16); a supporting element (22) is formed which comprises a first subunit (23, 28, 30) having a first internal stress and a second subunit (23, 28, 30) having a second internal stress that differs from the first internal stress, said supporting element (22) being fastened to the first electrode unit (14) at a first end while being fastened to the bottom substrate (16) at a second end; and the supporting element (22) is bent as a result of the difference between the first internal stress and the second internal stress, the bending action causing the first electrode unit (14) to be moved from the first position relative to the bottom substrate (16) into a second position relative to the bottom substrate (16). The invention further relates to a micromechanical component (10).
摘要翻译：本发明涉及一种用于微机械部件（10）的制造方法，包括以下步骤：在一个第一位置到一个基底（16）形成第一电极单元（14）; 形成具有具有与方向上从所述第一内部应力第二残余应力偏离，第一本征电压和第二子单元（23,28,30）的第一子单元（23,28,30）的支撑部件（22），其中在所述支撑构件（22）第一端连接到所述第一电极部（14）和在第二端处与基底基板（16）被安装; 和支撑部件（22）弯曲，由于第一内部应力和第二特征电压之间的差，由于从所述第一位置到所述基底（16），所述支撑构件（22），所述第一电极单元（14）的相对于所述的第二位置的弯曲基底基板（16）被调整。此外，本发明提供了一种微机械部件（10）涉及。

8. 发明申请

WO2009095108A2 FIXED BODY JOINT AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译： SOLID STATE关节和微机械部件
公开(公告)号：WO2009095108A2
公开(公告)日：2009-08-06
申请号：PCT/EP2008065532
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81B7/00
CPC分类号： G02B26/0841 , B81B7/0006 , B81B2201/042 , B81B2203/058
摘要： The invention relates to a fixed body joint (16) for suspending a micromechanical device (2), comprising a support beam (17) and a thin layer (22) applied to the support beam (17). The thin layer extends laterally beyond the support beam (17). One or more conductor tracks (18) are embedded in said thin layer (22).
摘要翻译：根据本发明（16），用于悬挂的微机械装置（2）包括在所述轴承的光束（17）的支撑梁（17）和一个所述的固体关节淀积的薄层（22）。薄层横向延伸出经轴承梁（17）。在薄层（22）的一个或多个导体轨迹（18）嵌入。

9. 发明申请

WO2010046155A3 ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：静电驱动，微机械结构和方法用于静电驱动器和微机械部件
公开(公告)号：WO2010046155A3
公开(公告)日：2010-12-16
申请号：PCT/EP2009060881
申请日：2009-08-24
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： H02N1/00
CPC分类号： H02N1/006 , Y10T29/49002
摘要： The invention relates to an electrostatic drive having an interior frame (16), at least one intermediate frame (14) surrounding the interior frame, and an exterior frame (12) surrounding the interior frame (12) and the at least one intermediate frame (14), wherein two adjacent frames (12, 14, 16) of the interior, intermediate, and exterior frames (12, 14, 16) are connected to each other via a spring element (22, 24, 26), wherein the spring elements (22, 24, 26) through which two adjacent frames (12, 14, 16) of the interior, intermediate, and exterior frames (12, 14,16) are connected to each other are disposed such that the longitudinal directions of the spring elements (22, 24, 26) are positioned on a mutual spring longitudinal axis (28), and wherein electrode fingers are disposed on frame joists (12a,14a,16a) of the interior frame (16), of the at least one intermediate frame (14), and of the exterior frame (12), said joists being aligned directly parallel to the spring longitudinal axis (28). The invention further relates to a method for producing an electrostatic drive. The invention also relates to a micromechanical component (10) and to a method for producing a micromechanical component (10).
摘要翻译：本发明涉及一种具有内框架（16），至少一个围绕所述内框架中间框架（14）和所述内框架（12）和所述至少一个中间框架（14）围绕所述外框架（12），每两个相邻的帧（的静电驱动 12，14，16）（通过至少一个弹簧元件（22，24，26）内，中间和外框架12，14，16）被连接到彼此，其中所述弹簧元件（22，24,26），通过该内层，中间和外框架（12，14,16）中的每两个相邻的帧（12，14，16）连接在一起，被布置成使得所述弹簧元件（22，24，26）的一个共同的弹簧轴线的纵向方向（28）位于和直接平行于所述弹簧纵向轴线的内框架（16）的（28）框架梁（12A，14A，16A），所述至少一个中间框架（14）和所述外框架（12）的电极指排列。本发明还涉及一种静电驱动器的制造方法。此外，本发明提供了一种微机械部件（10）和用于微机械部件的制造方法（10）涉及。

10. 发明申请

WO2009124605A2 MICROMECHANICAL COMPONENT HAVING A SLANTED STRUCTURE AND CORRESPONDING PRODUCTION METHOD 审中-公开
标题翻译：与斜面结构及相应方法微机械结构
公开(公告)号：WO2009124605A2
公开(公告)日：2009-10-15
申请号：PCT/EP2008066388
申请日：2008-11-28
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： The invention relates to a micromechanical component having a slanted structure and to a corresponding production method. Said component comprises a substrate (1) having a surface (O); a first anchor (3e; 3e') that is provided on the surface (O) of the substrate (1) and which extends away from the substrate (1); and at least one arm (3c, 3d; 3c; 3c') that is oriented away from the anchor (3e; 3e') and that is provided on one lateral surface (S1, S2; S1'; S1'') of the anchor (3e; 3e').
摘要翻译：本发明提供了螺旋结构和相应的制造方法的微机械部件。该组件包括具有表面（O）的基板（1）; 在基板（1）的表面上的第一锚（3E，3E“），该（O）被设置，并且从衬底（1）延伸离开; 指向离开和在侧面的至少一个; '（其被从电枢倾斜臂3c和3d，3c和3c）中所提供的电枢的（S1，S2 S1”，S1' '）（3E，3E） '（图3e' 3E）是。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式