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1. 发明申请

WO2009127275A3 ELECTRODE COMB, MICROMECHANICAL COMPONENT, AND METHODS FOR THE PRODUCTION OF AN ELECTRODE COMB AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：电极的梳，微机械结构和方法的电极的梳和微机械部件
公开(公告)号：WO2009127275A3
公开(公告)日：2010-04-29
申请号：PCT/EP2008067690
申请日：2008-12-17
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： B81B3/00
CPC分类号： B81B3/004 , B81B2201/033 , B81B2201/045 , B81B2203/0136 , G02B26/0841 , H02N1/008
摘要： The invention relates to an electrode comb (52, 54) for a micromechanical component. Said electrode comb (52, 54) is designed such that at least two electrode fingers (52a, 54a) are mounted on a first fastening part (52b, 54b) at a first end while being mounted on a second fastening part (52b, 54b) at a second end lying opposite the first end. The invention additionally relates to a micromechanical component comprising a stator electrode comb (54) and an actuator electrode comb (52) between which a voltage (U) can be applied such that the actuator electrode comb (54) can be rotated about an axis of rotation (56) of the actuator electrode comb (52). The axis of rotation (56) of the actuator electrode comb (52) vertically penetrates at least one surface of an electrode finger (54a) of the stator electrode comb (44, 54). The invention further relates to a method for producing an electrode comb (52, 54) and a method for producing a micromechanical component.
摘要翻译：本发明涉及一种如此形成，使得至少两个电极指（52A，54A）在其第一端的第一附接部（52B，54B）被固定且相对的第一端部用于微机械部件的电极梳（52,54）第二端连接到第二附接部分（52B，54B）附连。此外，本发明涉及一种具有定子电极的梳（54）和致动器的电极的梳（52），在它们之间的电压（U）可应用于微机械部件，其特征在于，由（定子电极的梳54之间施加的电压（U））和致动器的电极的梳（52），致动器的电极的梳（52）（围绕致动器的电极的梳（52的旋转轴线56））是可旋转的，并且其中所述致动器的电极的梳（52）的至少一个表面的旋转（56）的轴线定子电极的梳（44,54）的电极指（54A）垂直地刺穿。此外，本发明涉及一种用于电极的梳（52,54）和用于微机械部件的制造方法的制造方法。

2. 发明申请

WO2009127273A3 METHOD FOR THE PRODUCTION OF A MICROMECHANICAL COMPONENT HAVING ELECTRODE UNITS ON TWO PLANES, AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译：用于微机械结构与电极单元两个级别和微机械结构
公开(公告)号：WO2009127273A3
公开(公告)日：2010-05-06
申请号：PCT/EP2008066715
申请日：2008-12-03
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08
CPC分类号： B81C1/00007 , B81B2201/032 , B81B2201/033 , B81B2201/045 , B81B2203/019 , B81C1/00142 , B81C2201/017
摘要： The invention relates to a method for producing a micromechanical component (10), encompassing the following steps: a first electrode unit (14) is formed in a first position relative to a bottom substrate (16); a supporting element (22) is formed which comprises a first subunit (23, 28, 30) having a first internal stress and a second subunit (23, 28, 30) having a second internal stress that differs from the first internal stress, said supporting element (22) being fastened to the first electrode unit (14) at a first end while being fastened to the bottom substrate (16) at a second end; and the supporting element (22) is bent as a result of the difference between the first internal stress and the second internal stress, the bending action causing the first electrode unit (14) to be moved from the first position relative to the bottom substrate (16) into a second position relative to the bottom substrate (16). The invention further relates to a micromechanical component (10).
摘要翻译：本发明涉及一种用于微机械部件（10）的制造方法，包括以下步骤：在一个第一位置到一个基底（16）形成第一电极单元（14）; 形成具有具有与方向上从所述第一内部应力第二残余应力偏离，第一本征电压和第二子单元（23,28,30）的第一子单元（23,28,30）的支撑部件（22），其中在所述支撑构件（22）第一端连接到所述第一电极部（14）和在第二端处与基底基板（16）被安装; 和支撑部件（22）弯曲，由于第一内部应力和第二特征电压之间的差，由于从所述第一位置到所述基底（16），所述支撑构件（22），所述第一电极单元（14）的相对于所述的第二位置的弯曲基底基板（16）被调整。此外，本发明提供了一种微机械部件（10）涉及。

3. 发明申请

WO2009095108A2 FIXED BODY JOINT AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译： SOLID STATE关节和微机械部件
公开(公告)号：WO2009095108A2
公开(公告)日：2009-08-06
申请号：PCT/EP2008065532
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81B7/00
CPC分类号： G02B26/0841 , B81B7/0006 , B81B2201/042 , B81B2203/058
摘要： The invention relates to a fixed body joint (16) for suspending a micromechanical device (2), comprising a support beam (17) and a thin layer (22) applied to the support beam (17). The thin layer extends laterally beyond the support beam (17). One or more conductor tracks (18) are embedded in said thin layer (22).
摘要翻译：根据本发明（16），用于悬挂的微机械装置（2）包括在所述轴承的光束（17）的支撑梁（17）和一个所述的固体关节淀积的薄层（22）。薄层横向延伸出经轴承梁（17）。在薄层（22）的一个或多个导体轨迹（18）嵌入。

4. 发明申请

WO2010046155A3 ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：静电驱动，微机械结构和方法用于静电驱动器和微机械部件
公开(公告)号：WO2010046155A3
公开(公告)日：2010-12-16
申请号：PCT/EP2009060881
申请日：2009-08-24
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： H02N1/00
CPC分类号： H02N1/006 , Y10T29/49002
摘要： The invention relates to an electrostatic drive having an interior frame (16), at least one intermediate frame (14) surrounding the interior frame, and an exterior frame (12) surrounding the interior frame (12) and the at least one intermediate frame (14), wherein two adjacent frames (12, 14, 16) of the interior, intermediate, and exterior frames (12, 14, 16) are connected to each other via a spring element (22, 24, 26), wherein the spring elements (22, 24, 26) through which two adjacent frames (12, 14, 16) of the interior, intermediate, and exterior frames (12, 14,16) are connected to each other are disposed such that the longitudinal directions of the spring elements (22, 24, 26) are positioned on a mutual spring longitudinal axis (28), and wherein electrode fingers are disposed on frame joists (12a,14a,16a) of the interior frame (16), of the at least one intermediate frame (14), and of the exterior frame (12), said joists being aligned directly parallel to the spring longitudinal axis (28). The invention further relates to a method for producing an electrostatic drive. The invention also relates to a micromechanical component (10) and to a method for producing a micromechanical component (10).
摘要翻译：本发明涉及一种具有内框架（16），至少一个围绕所述内框架中间框架（14）和所述内框架（12）和所述至少一个中间框架（14）围绕所述外框架（12），每两个相邻的帧（的静电驱动 12，14，16）（通过至少一个弹簧元件（22，24，26）内，中间和外框架12，14，16）被连接到彼此，其中所述弹簧元件（22，24,26），通过该内层，中间和外框架（12，14,16）中的每两个相邻的帧（12，14，16）连接在一起，被布置成使得所述弹簧元件（22，24，26）的一个共同的弹簧轴线的纵向方向（28）位于和直接平行于所述弹簧纵向轴线的内框架（16）的（28）框架梁（12A，14A，16A），所述至少一个中间框架（14）和所述外框架（12）的电极指排列。本发明还涉及一种静电驱动器的制造方法。此外，本发明提供了一种微机械部件（10）和用于微机械部件的制造方法（10）涉及。

5. 发明申请

WO2009124605A2 MICROMECHANICAL COMPONENT HAVING A SLANTED STRUCTURE AND CORRESPONDING PRODUCTION METHOD 审中-公开
标题翻译：与斜面结构及相应方法微机械结构
公开(公告)号：WO2009124605A2
公开(公告)日：2009-10-15
申请号：PCT/EP2008066388
申请日：2008-11-28
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： The invention relates to a micromechanical component having a slanted structure and to a corresponding production method. Said component comprises a substrate (1) having a surface (O); a first anchor (3e; 3e') that is provided on the surface (O) of the substrate (1) and which extends away from the substrate (1); and at least one arm (3c, 3d; 3c; 3c') that is oriented away from the anchor (3e; 3e') and that is provided on one lateral surface (S1, S2; S1'; S1'') of the anchor (3e; 3e').
摘要翻译：本发明提供了螺旋结构和相应的制造方法的微机械部件。该组件包括具有表面（O）的基板（1）; 在基板（1）的表面上的第一锚（3E，3E“），该（O）被设置，并且从衬底（1）延伸离开; 指向离开和在侧面的至少一个; '（其被从电枢倾斜臂3c和3d，3c和3c）中所提供的电枢的（S1，S2 S1”，S1' '）（3E，3E） '（图3e' 3E）是。

6. 发明申请

WO2009086978A3 PRODUCTION METHOD FOR A MICROMECHANICAL ELECTROSTATIC ADJUSTER DEVICE AND MICROMECHANICAL ELECTROSTATIC ADJUSTER DEVICE 审中-公开
标题翻译： PROCESS微型机械静态修正及MICRO电荷调节
公开(公告)号：WO2009086978A3
公开(公告)日：2010-04-01
申请号：PCT/EP2008065575
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81C1/00
CPC分类号： B81C1/00666 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/019 , B81C1/00166 , B81C2201/0167 , H02N1/002
摘要： The invention relates to a production method for a micromechanical electrostatic adjuster device (10), comprising the steps: application of a first conducting layer (12) to a substrate (28,30), etching the first conducting layer (12) to form at least one first electrode (16) in the material of the first conducting layer (12), application of a separation layer (32a) to the first conducting layer (12), application of a second conducting layer to the separation layer (32a), etching the second conducting layer to form at least one second electrode (22) in the material of the second conducting layer and application of a cover layer (40) to the second electrode (22) and bending the second electrode (22) by means of a mechanical compression load exerted on the second electrode (22) by means of the cover layer (40). The invention further relates to a corresponding micromechanical electrostatic adjuster device.
摘要翻译：本发明涉及一种用于微机械静电调节器（10）的制造方法，包括以下步骤：基部（28,30）上沉积第一导电层（12），蚀刻所述第一导电层（12），用于形成至少一个第一电极（ 16）从第一导电层（12）的材料，在施加第一导电层（12）上的脱模层（32a），其上沉积隔离层（32A）上的第二导电层，蚀刻第二导电层，以形成至少一个从第二导电层的材料，并施加于第二电极（22）的覆盖层（40）和由在第二电极上的覆盖层（40）中的一个的装置的第二电极（22）的弯曲的第二电极（22）（22）施加机械压应力。本发明还涉及一种相应的微机械静电调节器。

7. 发明申请

WO2009127274A2 MICROMECHANICAL COMPONENT, METHOD FOR THE OPERATION OF A MICROMECHANICAL COMPONENT, AND METHOD FOR THE PRODUCTION OF A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：微机械结构，用于操作机械的科技组件和方法微机械结构
公开(公告)号：WO2009127274A2
公开(公告)日：2009-10-22
申请号：PCT/EP2008066721
申请日：2008-12-03
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： B81B3/00
CPC分类号： B81B3/004 , B81B3/0037 , B81B2201/033 , B81B2201/037 , B81B2203/0181 , B81B2203/058 , G02B26/0841 , G02B26/085
摘要： The invention relates to a micromechanical component comprising a spring (20a, 20b), a lever element (22a, 22b) mounted on a first end of the spring (20a, 20b), a driving device that is designed to rotate the lever element (22a, 22b) about a first axis of rotation extending perpendicular to a longitudinal axis of the lever element (22a, 22b), and an adjusting element (10) which is mounted on a second end of the spring (20a, 20b) and is coupled to the level element (22a, 22b) by means of the spring (20a, 20b) in such a way that the adjusting element (10) is rotated about a second axis of rotation (18) when the lever element (22a, 22b) is rotated about the first axis of rotation by means of the driving the device. The invention additionally relates to a method for operating a micromechanical component as well as a method for producing a micromechanical component.
摘要翻译：本发明涉及一种微机械部件附接的弹簧（20A，20B）一个在所述弹簧的第一端部（20A，20B）杆构件（22A，22B），的驱动装置。其适于将所述杆部件（22A，22B）关于垂直于所述杆部件的纵向轴线的轴（22A，22B）旋转对准第一旋转轴线，并且在弹簧的第二端部（20A，20B）致动元件安装（10）通过弹簧，然后（20A，20B）到所述杆构件（22A，22B）被耦合，使得在杆部件（22A，22B）关于由驱动装置旋转的第一轴，所述致动元件（10）的旋转（围绕旋转18的第二轴）旋转。另外，本发明涉及一种用于操作的微机械部件的方法。此外，本发明涉及一种用于微机械部件的制造方法。

8. 发明申请

WO2009132719A3 PIEZORESISTIVE ELEMENT FOR USE IN A MICROMECHANICAL COMPONENT, METHOD FOR OPERATING THE MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING THE MICROMECHANICAL COMPONENT 审中-公开
标题翻译：压阻元件IN A微机械器件，方法用于操作COMPONENT AND METHOD FOR THE COMPONENT
公开(公告)号：WO2009132719A3
公开(公告)日：2010-05-27
申请号：PCT/EP2008066535
申请日：2008-12-01
申请人： BOSCH GMBH ROBERT , MUCHOW JOERG , FRITZ JOACHIM
发明人： MUCHOW JOERG , FRITZ JOACHIM
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B81B2201/042 , G02B26/0833
摘要： The invention relates to a micromechanical component comprising an adjusting element (10) which can be adjusted in relation to a fixture and which is connected to said fixture by at least one spring element (16), a first end of said spring element (16) being fastened to a first anchoring section which is a subsection of the fixture, and a second end of the spring element (16) being fastened to a second anchoring section (20) which is a subsection of the adjusting element (10). The micromechanical component further comprises at least one piezoresistive element (22) which is arranged on a surface and/or inside a volume of the first anchoring section and/or the second anchoring section (20) in such a manner that a deformation of the spring element (16) causes a change in the resistance of the piezoresistive element (22). The invention additionally relates to a method for operating a micromechanical component. The invention further relates to a method for producing a micromechanical component.
摘要翻译：本发明提供了一种具有相对于该由至少一个弹簧元件（16）的装置被连接到所述托架的支撑可调节设定构件（10），微机械部件，其中在一个第一锚定区域内的弹簧元件（16）的第一端部，所述支架的其中一个部分连接，并且在第二固定部的弹簧元件（16）的第二端（20），其是所述致动元件的一部分（10）安装; 和所述至少一个压阻元件，它被布置在一个表面和/或所述第一锚定部和/或第二锚定区域（20），一个体积内，用于弹簧元件（16）的变形（22）（一个压阻元件的电阻 22）是可变的。另外，本发明涉及一种用于操作的微机械部件的方法。此外，本发明涉及一种用于微机械部件的制造方法。

9. 发明申请

WO2010136356A3 MICROMECHANICAL COMPONENT, AND METHOD FOR THE PRODUCTION THEREOF 审中-公开
标题翻译：微机械结构和方法微机械结构
公开(公告)号：WO2010136356A3
公开(公告)日：2011-04-14
申请号：PCT/EP2010056806
申请日：2010-05-18
申请人： BOSCH GMBH ROBERT , NJIKAM NJIMONZIE FREDERIC , SCHOCK WOLFRAM , MUCHOW JOERG , LESTYAN ZOLTAN
发明人： NJIKAM NJIMONZIE FREDERIC , SCHOCK WOLFRAM , MUCHOW JOERG , LESTYAN ZOLTAN
IPC分类号： B81B3/00
CPC分类号： G02B26/0833 , H02N1/006
摘要： The invention relates to a micromechanical component comprising an adjustable element which is connected to a holder (16) at least by means of a spring (12), a first sensor device (22) that includes at least one first piezo-resistive sensor element (76b to 82b) and supplies a first sensor signal relating to a first mechanical stress, wherein the first piezo-resistive sensor element (76b to 82b) is arranged on or inside the spring (12) and/or within an anchoring zone of the spring (12), and a second sensor device (24) that includes at least one second piezo-resistive sensor element (96b to 102b) and supplies a second sensor signal relating to a second mechanical stress, wherein the second piezo-resistive sensor element (96b to 102b) is arranged on or inside the spring (12) and/or within an anchoring zone of the spring (12). The invention further relates to a method for producing a micromechanical component.
摘要翻译：本发明通过一个弹簧（12）被连接到托架（16），第一传感器装置（22）至少涉及具有可调节的元件的微机械部件具有至少一个第一压阻传感器元件（76B至82B），这是一个第一传感器信号相对于提供给第一机械功率，其中，第一压阻传感器元件（76B至82B）上或在所述弹簧（12）和/或弹簧的锚定部分（12）布置，和第二传感器装置（24）与至少一个第二压阻传感器元件（96B至102B），其提供一第二传感器信号相对于一个第二应变，其中，所述第二压电电阻传感器元件（96B至102B）上或在所述弹簧（12）和/或的一个锚定区域弹簧（12）被布置。此外，本发明涉及一种用于微机械部件的制造方法。

10. 发明申请

WO2010136358A3 MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：微机械结构和方法微机械结构
公开(公告)号：WO2010136358A3
公开(公告)日：2013-05-02
申请号：PCT/EP2010056813
申请日：2010-05-18
申请人： BOSCH GMBH ROBERT , NJIKAM NJIMONZIE FREDERIC , SCHOCK WOLFRAM , MUCHOW JOERG , LESTYAN ZOLTAN
发明人： NJIKAM NJIMONZIE FREDERIC , SCHOCK WOLFRAM , MUCHOW JOERG , LESTYAN ZOLTAN
IPC分类号： B81B3/00
CPC分类号： G02B26/0841 , B81B3/0021 , B81B2201/033 , B81B2201/042 , Y10T29/49002
摘要： The invention relates to a micromechanical component comprising an outer stator electrode component (28) and an outer actuator electrode component (24) connected to a holding element (55) by means of at least one outer spring (81). A mobile element (10) can be moved about a first rotational axis (12) by applying a first voltage between the outer actuator electrode component (24) and the outer stator electrode component (28). Said micromechanical component also comprises an inner stator electrode component (30) and an inner actuator electrode component (26) comprising a first web (50) provided with at least one electrode finger (26a,26b), the mobile element (10) being mobile about a second rotational axis (14) by applying a second voltage between the at least one electrode finger (26a, 26b) of the inner actuator electrode component (26) and the inner stator electrode component (30), the inner actuator electrode component (26) being connected to the outer actuator electrode component (24) by means of an intermediate spring (52) oriented in the direction of the second rotational axis (14). The invention also relates to a production method for a micromechanical component.
摘要翻译：本发明涉及一种具有外部定子电极组件（28）和外致动器电极组件（24），其经由至少一个外弹簧（81）配有一个支座（55），其特征在于，可调节的元件连接的微机械部件（10）的外执行器电极组件（24）和围绕旋转（12）的第一轴的外定子电极组件（28）之间施加第一电压是可调的，内部定子电极部件（30）和一个内执行器电极组件（26）与第一土地（50）具有至少一个布置的电极指（26A，26B），其中所述可调元件（10）将所述至少一个电极指之间的第二电压（26A，26B）内的致动器电极的组件（26）和围绕旋转的第二轴内部定子电极部件（30）（14）是可调节的，并且其中所述内部执行器电极组件（26）连接到外耳炎沿着所述弹簧（52）之间的旋转（14）的第二轴线对齐ßeren执行器电极组件（24）连接。此外，本发明涉及一种用于微机械部件的制造方法。

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