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1. 发明申请

WO2013012880A1 MULTI-VANE THROTTLE VALVE 审中-公开
标题翻译：多功能节流阀
公开(公告)号：WO2013012880A1
公开(公告)日：2013-01-24
申请号：PCT/US2012/047102
申请日：2012-07-18
申请人： FERROTEC (USA) CORPORATION , SIN, Pheng
发明人： SIN, Pheng
IPC分类号： F16K3/04 , F16K17/24 , F16K51/02
CPC分类号： F16K51/02 , F16K1/222 , F16K1/223 , F16K49/007 , Y10T137/0318 , Y10T137/6416 , Y10T137/6579 , Y10T137/86936 , Y10T137/87475
摘要： A multi-vane throttling valve for a vacuum process chamber includes a throttle chamber body having an inside exposed to the vacuum process chamber and an outside exposed to atmospheric pressure, the chamber body defining a through-opening for controlling vacuum within the vacuum process chamber, a plurality of rotatable vanes mounted within the through-opening for controlling a flow of gases through the through-opening where each rotatable vane includes a cooling flow pathway in fluid communication with and disposed longitudinally along each rotatable vane, and a drive mechanism disposed on and connected to an outside of the throttle chamber body for rotating the plurality of rotatable vanes to vary the flow of process gases.
摘要翻译：用于真空处理室的多叶片节流阀包括具有暴露于真空处理室的内部和暴露于大气压力的外部的节流室主体，所述室主体限定用于控制真空处理室内的真空的通孔，安装在所述通孔内的多个可旋转叶片，用于控制通过所述通孔的气体流，其中每个可旋转叶片包括与每个可旋转叶片流体连通并纵向设置的冷却流动通道;以及驱动机构，连接到节流室主体的外部，用于旋转多个可旋转叶片以改变工艺气体的流动。

2. 发明申请

WO2016024971A1 MULTI-VANE THROTTLE VALVE 审中-公开
标题翻译：多功能节流阀
公开(公告)号：WO2016024971A1
公开(公告)日：2016-02-18
申请号：PCT/US2014/050986
申请日：2014-08-14
申请人： FERROTEC (USA) CORPORATION
发明人： SIN, Pheng
IPC分类号： F16K27/12 , F16K51/02
CPC分类号： F16K1/223 , F16K1/222 , F16K49/007 , F16K51/02 , H01J37/18 , H01J2237/186 , H01J2237/3132
摘要： A multi-vane throttling valve for a vacuum process chamber includes a reciprocal vane pivotally connected to and extending backwardly away from a back side of each of a plurality of rotatable vanes, and a stationary reciprocal vane angling assembly fixed in a predefined position and having an assembly pin extending transversely toward the reciprocal vane a predefined distance sufficient to support the reciprocal vane whereby the stationary angling assembly causes the reciprocal vane to pivot in a range between a substantially parallel position with the respective rotatable vane and a transverse position with the respective rotatable vane when the respective rotatable vane is rotated.
摘要翻译：用于真空处理室的多叶片节流阀包括枢转地连接到多个可旋转叶片中的每一个的后侧并向后延伸的往复叶片，以及固定在预定位置的固定的往复叶片钓鱼组件，组件销横向于往复叶片横向延伸预定的距离以足以支撑往复叶片，由此，静止的钓鱼组件使得往复叶片在与相应的可旋转叶片基本平行的位置与相应的可旋转叶片的横向位置之间的范围内枢转当相应的可旋转叶片旋转时。

3. 发明申请

WO2005113853A1 METHODS AND APPARATUSES FOR TRANSFERRING ARTICLES THROUGH A LOAD LOCK CHAMBER UNDER VACUUM 审中-公开
标题翻译：通过真空下的负载锁定箱传送文章的方法和装置
公开(公告)号：WO2005113853A1
公开(公告)日：2005-12-01
申请号：PCT/US2005/017041
申请日：2005-05-13
申请人： THE BOC GROUP, INC. , SAJJAD, Basha, S. , SIN, Pheng , SENGUPTA, Subhashish , EREZ, Shmuel , KRONEBERGER, Cris, Keith
发明人： SAJJAD, Basha, S. , SIN, Pheng , SENGUPTA, Subhashish , EREZ, Shmuel , KRONEBERGER, Cris, Keith
IPC分类号： C23C16/00
CPC分类号： H01L21/6719 , C23C14/566 , H01L21/67201 , H01L21/67706 , H01L21/67709 , H01L21/67754 , H01L21/68764 , H01L21/68771
摘要： Methods and apparatuses directed to vacuum-assisted processing of articles are disclosed whereby the articles are directed between staging chamber (15) and a processing chamber (11) with both chambers maintained at substantially equivalent low pressures to enhance system efficiency and product quality, and wherein magnetic coupled drive mechanisms (43) are used to locate the article before and after processing.
摘要翻译：公开了用于制品的真空辅助加工的方法和装置，其中制品被引导在分级室（15）和处理室（11）之间，两个室保持在基本相同的低压下，以提高系统效率和产品质量，其中磁耦合驱动机构（43）用于在处理之前和之后定位物品。

4. 发明申请

WO2016043758A1 INTEGRATED THERMOELECTRIC-POWERED FLUID HEAT EXCHANGER 审中-公开
标题翻译：集成热电流体热交换器
公开(公告)号：WO2016043758A1
公开(公告)日：2016-03-24
申请号：PCT/US2014/056353
申请日：2014-09-18
申请人： FERROTEC (USA) CORPORATION
发明人： OTEY, Robert , KAMINSKI, David A. , SIN, Pheng
IPC分类号： H05K7/20 , F28D9/02
CPC分类号： F25B21/02 , F28D1/024 , F28F5/00 , H01L35/30
摘要： A fluid heat exchanger has an impeller assembly with first and second impeller bodies mated together, each having a substantially circular shape and at least one opening therethrough. Impeller vanes extend axially from the first impeller body and away from the second impeller body. Impeller vanes extend axially from the second impeller body away from the first impeller body. A thermoelectric module is disposed between the first impeller body and the second impeller body. Heat sinks are connected to each side of the thermoelectric module and extend through at least one opening in the first and second impeller bodies, where the impeller vanes are configured to move a fluid through the heat sinks during rotation of the first and second impeller bodies. Electrically-conductive windings disposed in the impeller assembly are configured to deliver induced electric current to the thermoelectric module(s).
摘要翻译：流体热交换器具有叶轮组件，其具有配合在一起的第一和第二叶轮体，每个具有大致圆形形状和穿过其中的至少一个开口。叶轮叶片从第一叶轮体轴向延伸并远离第二叶轮体。叶轮叶片从第二叶轮体轴向延伸离开第一叶轮体。热电模块设置在第一叶轮体和第二叶轮体之间。散热器连接到热电模块的每一侧并且延伸穿过第一和第二叶轮体中的至少一个开口，其中叶轮叶片构造成在第一和第二叶轮体旋转期间使流体移动通过散热器。设置在叶轮组件中的导电绕组构造成将感应电流传递到热电模块。

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